CN219951203U - CVD growth sintering equipment - Google Patents
CVD growth sintering equipment Download PDFInfo
- Publication number
- CN219951203U CN219951203U CN202320871249.4U CN202320871249U CN219951203U CN 219951203 U CN219951203 U CN 219951203U CN 202320871249 U CN202320871249 U CN 202320871249U CN 219951203 U CN219951203 U CN 219951203U
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- Prior art keywords
- sintering
- plate
- pipe
- sintering furnace
- growth
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- 238000005245 sintering Methods 0.000 title claims abstract description 58
- 238000010438 heat treatment Methods 0.000 claims abstract description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 24
- 230000000149 penetrating effect Effects 0.000 claims abstract description 6
- 238000007789 sealing Methods 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 22
- 238000000034 method Methods 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 14
- 239000007769 metal material Substances 0.000 description 7
- 239000003575 carbonaceous material Substances 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model discloses CVD growth sintering equipment, which comprises a sintering furnace and at least one water pipe fixed on the side wall of the sintering furnace through a fixing plate, wherein the side walls at two ends of the sintering furnace are respectively provided with an air inlet pipe and an air outlet pipe in a penetrating way, the inner bottom of the sintering furnace is connected with a lower mounting plate through a supporting piece, the inner rear side wall of the sintering furnace is provided with a driving piece which abuts against the lower mounting plate to drive the lower mounting plate to swing, and the lower mounting plate is provided with a heating frame. The utility model has reasonable structural design, can shake the substrate in the heating frame in the substrate growth process, ensures that the substrate material is fully contacted with the heating frame for heating and is fully contacted with the growth gas, ensures the substrate growth quality, and can ensure that hot gas in the sintering furnace heats water in the water pipe through the annular heat-conducting pipe after the growth and sintering work are completed, thereby utilizing the heat and saving energy.
Description
Technical Field
The utility model relates to the technical field of sintering equipment, in particular to CVD growth sintering equipment.
Background
CVD refers to a gas phase reaction at a high temperature, and currently, in the growth of carbon materials, a mainstream method is a chemical vapor deposition method, generally, a growth gas is introduced into a specific cavity, a carbon material is grown in situ on a metal material at a certain temperature, and then the grown metal material is melted or sintered at a high temperature to form.
The application number is as follows: CN202220252866.1, application name: the application document of the CVD growth sintering device comprises an air inlet device, a vacuum cavity, a plasma generator, a heating device and a pressurizing device, wherein the vacuum cavity is used for placing a substrate to be grown and sintered.
Disclosure of Invention
The utility model aims to solve the problems in the prior art, and provides a CVD growth sintering device, which can shake a substrate in a heating frame in the substrate growth process, so that a substrate material is fully contacted with the heating frame for heating and is fully contacted with growth gas, the substrate growth quality is ensured, and after the growth and sintering work is finished, hot gas in a sintering furnace can heat water in a water pipe through an annular heat-conducting pipe, thereby utilizing the heat and saving energy.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the utility model provides a CVD grows sintering equipment, includes fritting furnace and at least one water pipe of fixing at fritting furnace lateral wall through the fixed plate, fritting furnace's both ends lateral wall runs through respectively and installs intake pipe and outlet duct, fritting furnace's interior back lateral wall is connected with down the mounting panel through support piece, install its wobbling driving piece of driving with lower mounting panel offset, install the heating frame on the mounting panel down, the upper end of mounting panel is connected with the mounting panel through two pneumatic cylinders down, the bottom fixedly connected with of mounting panel is relative with the heating frame clamp plate, the lateral wall cover of water pipe is equipped with the heating piece, the upper end sealed through-mounting of fritting furnace has the hose of giving vent to anger that is linked together with heating assembly.
Preferably, the air inlet pipe is sequentially provided with the air mixer and the plasma generator, and the air outlet pipe is sequentially provided with the control valve and the vacuumizing equipment.
Preferably, the support piece comprises a first support plate fixedly connected to the bottom in the sintering furnace, and a second support plate fixedly connected to the bottom of the lower mounting plate is rotatably connected to the first support plate.
Preferably, the driving piece comprises a first elliptic plate and a second elliptic plate which are rotatably connected to the inner rear side wall of the sintering furnace, a transmission belt is wound between rotating shafts of the first elliptic plate and the second elliptic plate, and the first elliptic plate is driven by a motor.
Preferably, the heating element comprises an annular heat conduction pipe sleeved on the side wall of the water pipe, a first air duct communicated with the annular heat conduction pipe is installed at the upper end of the annular heat conduction pipe in a sealing and penetrating mode, and a second air duct communicated with the annular heat conduction pipe is installed at the annular heat conduction pipe near the side wall of the bottom in a sealing and penetrating mode.
Preferably, an external threaded connector is fixedly connected to the end part of the first air guide pipe, an internal threaded connector is rotatably connected to the end part of the air outlet hose, and the internal threaded connector is in threaded connection with the external threaded connector.
Compared with the prior art, the utility model has the beneficial effects that:
1. in the CVD growth sintering equipment, in the substrate growth process, the first elliptic plate and the second elliptic plate synchronously rotate, so that the lower mounting plate horizontally reciprocates and slowly swings, a substrate in the heating frame can be rocked, the substrate material is fully contacted with the heating frame for heating, and is fully contacted with growth gas, and the substrate growth quality is ensured.
2. In this CVD growth sintering equipment, after growth and sintering work are accomplished, make the steam in the fritting furnace get into in the annular heat pipe and discharge through the second air duct through first air duct, can heat the water in the water pipe, and then can utilize the heat, the energy saving.
Drawings
FIG. 1 is a schematic cross-sectional view of a CVD growth sintering apparatus according to the present utility model;
FIG. 2 is an enlarged view of the structure of FIG. 1 at A;
fig. 3 is a schematic view showing the external structure of a CVD growth sintering apparatus according to the present utility model.
In the figure: 1. a sintering furnace; 2. an air inlet pipe; 3. an air outlet pipe; 4. a first support plate; 5. a second support plate; 6. a lower mounting plate; 7. a first elliptical plate; 8. a second elliptical plate; 9. a transmission belt; 10. a heating frame; 11. a hydraulic cylinder; 12. an upper mounting plate; 13. a pressing plate; 14. a water pipe; 15. an annular heat conduction pipe; 16. a first air duct; 17. a second air duct; 18. an air outlet hose; 19. and a fixing plate.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
Referring to fig. 1 to 3, a CVD growth sintering apparatus comprises a sintering furnace 1 and at least one water pipe 14 fixed to a side wall of the sintering furnace 1 through a fixing plate 19, wherein a sealing door is installed on a front side wall of the sintering furnace 1, internal parts of the sintering furnace 1 are made of high temperature resistant hard metal materials, two end side walls of the sintering furnace 1 are respectively provided with an air inlet pipe 2 and an air outlet pipe 3 in a penetrating manner, a gas mixer and a plasma generator are sequentially installed on the air inlet pipe 2, a control valve and a vacuum pumping apparatus are sequentially installed on the air outlet pipe 3, wherein the air inlet pipe 2 is used for inputting various growth gases, preferably mixed gases of hydrogen and methane, the growth gases are mixed through the gas mixer and enter the sintering furnace 1 after being ionized through the plasma generator, and the vacuum pumping apparatus is a vacuum pump;
the inner bottom of the sintering furnace 1 is connected with a lower mounting plate 6 through a supporting piece, the supporting piece comprises a first supporting plate 4 fixedly connected to the inner bottom of the sintering furnace 1, a second supporting plate 5 fixedly connected with the bottom of the lower mounting plate 6 is rotatably connected to the first supporting plate 4, and the second supporting plate 5 is connected with the middle of the bottom of the lower mounting plate 6, so that the second supporting plate 5 can drive the lower mounting plate 6 to deflect left and right in the sintering furnace 1;
the inner rear side wall of the sintering furnace 1 is provided with a driving piece which is abutted against the lower mounting plate 6 to drive the sintering furnace 1 to swing, the driving piece comprises a first elliptic plate 7 and a second elliptic plate 8 which are rotatably connected to the inner rear side wall of the sintering furnace 1, the first elliptic plate 7 is in a horizontal state, the second elliptic plate 8 is in a vertical state and is abutted against the bottom of the lower mounting plate 6, the lower mounting plate 6 is in an inclined state, a transmission belt 9 is wound between rotating shafts of the first elliptic plate 7 and the second elliptic plate 8, the first elliptic plate 7 and the second elliptic plate 8 can synchronously rotate, and the first elliptic plate 7 is driven by a motor;
the lower mounting plate 6 is provided with a heating frame 10, the heating frame 10 is heated by resistance wires to provide the temperature required by growth gas on a substrate and the temperature required by sintering, a mixture of a powder-shaped carbon material and a metal material is placed in the heating frame 10 as a substrate material for growth and sintering, the upper end of the lower mounting plate 6 is connected with an upper mounting plate 12 by two hydraulic cylinders 11, the bottom of the upper mounting plate 12 is fixedly connected with a pressing plate 13 opposite to the heating frame 10, and the pressing plate is used for applying pressure to the substrate during sintering;
the side wall cover of water pipe 14 is equipped with the heating element, the upper end seal of fritting furnace 1 runs through and installs the hose 18 of giving vent to anger that is linked together with heating element, the hose 18 of giving vent to anger is flexible pipe, can stretch, the heating element is including the cover to establish the annular heat pipe 15 at water pipe 14 lateral wall, the upper end seal of annular heat pipe 15 runs through and installs the first air duct 16 rather than being linked together, the annular heat pipe 15 is close to the bottom lateral wall seal and runs through and install the second air duct 17 rather than being linked together, the steam after accomplishing the growth sintering work gets into in the annular heat pipe 15 through first air duct 16, circulate in annular heat pipe 15 and heat the water in the water pipe 14 and discharge through second air duct 17, when the quantity of water pipe 14 is two or more, alright be according to the cooling rate of fritting furnace 1 internal gas, the water heating to different temperatures in the water pipe 14, be convenient for utilize respectively, the tip fixedly connected with external screw thread joint of first air duct 16, the tip rotation of hose 18 is connected with internal thread joint, internal thread joint and external thread joint threaded connection, be convenient for carry out the connection with the hose 18 and first air duct 16.
The utility model can explain its functional principle by the following modes of operation:
in the utility model, in the using process of the CVD growth sintering equipment, a mixture of a powdery carbon material and a metal material is taken as a substrate and placed in a heating frame 10, the sintering furnace 1 is vacuumized, ionized hydrogen and methane mixed gas is introduced into the sintering furnace 1 through an air inlet pipe 2 and is taken as growth gas, the heating frame 10 is started to heat the substrate, so that the carbon material grows in situ on the metal material (graphene is formed by cracking and growing a carbon source containing carbon, the cracking needs to be catalyzed by the metal material, and the catalyzed carbon atoms are dissociated on the metal surface and undergo nucleation and growth processes until the growth reaches a required degree, such as the situation that the metal surface is fully distributed), and in the substrate growth process, a first elliptic plate 7 is started, and under the connecting action of a driving belt 9, the first elliptic plate 7 and a second elliptic plate 8 synchronously rotate, so that a lower mounting plate 6 can swing slowly and leftwards in a reciprocating manner, and the substrate can shake, so that the substrate material is fully contacted with the heating frame 10 and fully contacted with the growth gas, and the growth quality is ensured;
after the sintering is completed, the air outlet hose 18 is opened to enable hot air in the sintering furnace 1 to enter the annular heat-conducting tube 15 through the first air duct 16 and be discharged through the second air duct 17, water in the water tube 14 is heated, heat is utilized, energy is saved, in the process, air is introduced into the sintering furnace 1 through the air inlet tube 2 to balance the internal air pressure, and after the inside of the sintering furnace 1 is gradually cooled, the substrate after the sintering is completed is taken out.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (6)
1. The utility model provides a CVD grows sintering equipment, includes fritting furnace (1) and at least one water pipe (14) of fixing at fritting furnace (1) lateral wall through fixed plate (19), its characterized in that, the both ends lateral wall of fritting furnace (1) runs through respectively and installs intake pipe (2) and outlet duct (3), the interior bottom of fritting furnace (1) is connected with down mounting panel (6) through support piece, install its wobbling driving piece with lower mounting panel (6) offset of interior back lateral wall of fritting furnace (1), install heating frame (10) on mounting panel (6) down, the upper end of mounting panel (6) is connected with mounting panel (12) through two pneumatic cylinders (11), the bottom fixedly connected with of mounting panel (12) is relative clamp plate (13) with heating frame (10), the lateral wall cover of water pipe (14) is equipped with the heating piece, the upper end of fritting furnace (1) is sealed runs through and is installed and is linked together with heating assembly's hose (18) of giving vent to anger.
2. CVD growth sintering equipment according to claim 1, wherein the gas inlet pipe (2) is provided with a gas mixer and a plasma generator in sequence, and the gas outlet pipe (3) is provided with a control valve and a vacuum pumping equipment in sequence.
3. CVD growth sintering plant according to claim 1, characterized in that the support comprises a first support plate (4) fixedly connected to the bottom inside the sintering furnace (1), on which first support plate (4) a second support plate (5) is rotatably connected fixedly connected to the bottom of the lower mounting plate (6).
4. CVD growth sintering apparatus according to claim 1, wherein the driving member comprises a first elliptical plate (7) and a second elliptical plate (8) rotatably connected to the inner rear side wall of the sintering furnace (1), a driving belt (9) being wound between the rotational shafts of the first elliptical plate (7) and the second elliptical plate (8), the first elliptical plate (7) being driven by a motor.
5. A CVD growth sintering apparatus according to claim 1, wherein the heating element comprises an annular heat pipe (15) arranged around the side wall of the water pipe (14), a first air duct (16) communicating with the annular heat pipe (15) is installed at the upper end of the annular heat pipe (15) in a sealing and penetrating manner, and a second air duct (17) communicating with the annular heat pipe (15) is installed near the bottom side wall in a sealing and penetrating manner.
6. CVD growth sintering equipment according to claim 5, wherein the end of the first gas duct (16) is fixedly connected with an external screw thread joint, and the end of the gas outlet hose (18) is rotatably connected with an internal screw thread joint, which is screwed with the external screw thread joint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320871249.4U CN219951203U (en) | 2023-04-18 | 2023-04-18 | CVD growth sintering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320871249.4U CN219951203U (en) | 2023-04-18 | 2023-04-18 | CVD growth sintering equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219951203U true CN219951203U (en) | 2023-11-03 |
Family
ID=88550324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320871249.4U Active CN219951203U (en) | 2023-04-18 | 2023-04-18 | CVD growth sintering equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219951203U (en) |
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2023
- 2023-04-18 CN CN202320871249.4U patent/CN219951203U/en active Active
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