CN211552437U - Swing type vacuum tube furnace - Google Patents
Swing type vacuum tube furnace Download PDFInfo
- Publication number
- CN211552437U CN211552437U CN202020076647.3U CN202020076647U CN211552437U CN 211552437 U CN211552437 U CN 211552437U CN 202020076647 U CN202020076647 U CN 202020076647U CN 211552437 U CN211552437 U CN 211552437U
- Authority
- CN
- China
- Prior art keywords
- furnace
- box body
- vacuum tube
- tube
- heating box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The utility model discloses a swinging vacuum tube furnace, which comprises a heating box body and a furnace tube arranged in the heating box body, wherein the heating box body comprises an upper box body and a lower box body which are hinged together, furnace linings with resistance wires are arranged inside the upper box body and the lower box body, and semicircular grooves are arranged on the two side panels of the heating box body and in the middle of the furnace linings; when the upper box body and the lower box body are closed, the semi-circular grooves are closed to form furnace holes for installing the furnace tubes; the swinging type vacuum tube furnace device also comprises a base and a driver, wherein a U-shaped bracket is arranged on the base, a rotating shaft is arranged on the U-shaped bracket, and the middle part of the heating box body is arranged on the rotating shaft; the driver drives the heating box body to swing up and down along the rotating shaft through a crank connecting rod mechanism. The utility model discloses a formula vacuum tube furnace sways can adjust the inclination of boiler tube wantonly in certain extent.
Description
Technical Field
The utility model relates to a sintering equipment technical field, concretely relates to formula vacuum tube furnace sways.
Background
The vacuum tube furnace is one of the most common devices for preparing nano materials by physical vapor deposition and chemical vapor deposition, and can be suitable for the development of carbon nanotubes, the coating of a crystalline silicon substrate, the controllable growth of nano ZnO, the atmosphere sintering of a ceramic capacitor (MLCC), the diffusion welding of metal materials and other CVD processes.
In the actual working process of the vacuum tube furnace, based on the requirements of improving the reaction efficiency of materials, carrying out reasonable position adjustment and the like, the furnace body can be controlled to incline at a certain angle while reaction gas (including flowing gas or closed gas) is introduced or vacuumized. For example using NH3As a reaction gas, H is generated in the reaction process2One end of the air outlet of the furnace body can be properly adjusted to be at a higher position, so that H is ensured2The furnace body is discharged from the air outlet as soon as possible, which is beneficial to improving the working efficiency of the equipment. At present, furnace tubes of most vacuum tube furnaces are horizontally arranged, and the inclination angle of the tube furnace cannot be adjusted. Although a small part of vacuum tube furnaces have the adjusting function, most of the vacuum tube furnaces have the problem of inconvenient adjustment.
Chinese patent publication No. CN204251647U discloses a rotary heat treatment furnace, which comprises a heating furnace, a furnace tube, and a driving device for driving the furnace tube to rotate, wherein an acute angle is formed between the rotation axis of the furnace tube and the horizontal plane, so that the furnace tube can rotate obliquely. However, the heat treatment furnace can only adjust the position of one end of the furnace tube, and the screw rod cannot be used for realizing quick adjustment.
Chinese patent publication No. cn201610891666.x discloses a test tube rotatable tube furnace with a plasma enhancement function, wherein one end of the bottom of the furnace body is hinged to a support frame, and the other end of the bottom of the furnace body is connected to the support frame through an electric push rod, so that the tilt adjustment is convenient. However, this tube furnace also allows only one end of the furnace tube to be adjusted.
Chinese patent publication No. CN209570015U discloses a novel openable multi-station rotary vacuum tube furnace, which comprises an upper box, a lower box, a rotary bracket and a fixed bracket; the lower end of the rotating bracket is fixed at the rear side of the lower box, and a plurality of communicated inclined hanging grooves are formed in the rotating bracket; the fixed bolster includes the clamp plate of being connected with apron rear side down, and the clamp plate rear side is equipped with the screw that passes the hanging groove, is equipped with fastening nut on the screw. However, the inclination angle of the vacuum tube furnace cannot be continuously adjusted, and the inclination angle of the vacuum tube furnace needs to be manually adjusted, so that the vacuum tube furnace is very inconvenient.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a formula vacuum tube furnace sways, this vacuum tube furnace can be in the inclination of certain limit arbitrary regulation boiler tube.
In order to solve the technical problem, the utility model provides a swing type vacuum tube furnace, which comprises a heating box body and a furnace tube arranged in the heating box body, wherein the heating box body comprises an upper box body and a lower box body which are hinged together, furnace linings with resistance wires are arranged in the upper box body and the lower box body, and semicircular grooves are arranged on the two side panels of the heating box body and in the middle of the furnace linings; when the upper box body and the lower box body are closed, the semi-circular grooves are closed to form furnace holes for installing the furnace tubes;
the swinging type vacuum tube furnace device also comprises a base and a driver, wherein a U-shaped bracket is arranged on the base, a rotating shaft is arranged on the U-shaped bracket, and the middle part of the heating box body is arranged on the rotating shaft; the driver drives the heating box body to swing up and down along the rotating shaft through a crank connecting rod mechanism.
Further, the driver is a servo motor. Further, the servo motor is installed on the base.
Furthermore, a support frame is respectively arranged on two sides of the furnace lining in the lower box body, wherein a pair of driving gears is arranged on the side surface of one support frame, and a pair of rotating guide rails is arranged on the side surface of the other support frame; and one end of the furnace tube is correspondingly provided with a driven gear meshed with the driving gear, and the other end of the furnace tube is correspondingly provided with a guide wheel matched with the rotary guide rail.
Further, the top end of the support frame is provided with a semicircular groove for placing a furnace tube.
Furthermore, the inlet end and the outlet end of the furnace tube are provided with a sealing flange, a valve and a pressure gauge.
Furthermore, the gas inlet end is also provided with a multi-channel gas mass flow meter and a gas mixing device.
Further, the furnace tube is a ceramic tube.
Furthermore, a plurality of grid holes are formed in the furnace lining.
The utility model has the advantages that:
the utility model discloses a swing type vacuum tube furnace drives the heating box body through driver and crank link mechanism, can realize adjusting the inclination angle of boiler tube wantonly in certain extent, and adjust fast conveniently, has satisfied the needs such as reaction efficiency that improves the material, carries out reasonable position adjustment; meanwhile, the tube furnace has the function of continuous swinging and oscillation.
Drawings
Fig. 1 is a schematic structural view of a rocking vacuum tube furnace according to an embodiment of the present invention;
FIG. 2 is a schematic view of the internal structure of the lower case;
FIG. 3 is a schematic view of a furnace tube;
wherein: 110. an upper box body; 120. a lower box body; 130. a furnace lining; 131. a grid hole; 140. a semicircular groove; 150. a support frame; 160. a drive gear; 170. rotating the guide rail; 200. a base; 210. a U-shaped bracket; 220. a rotating shaft; 230. a servo motor; 240. a crank link mechanism; 300. a furnace tube; 310. sealing the flange; 320. a valve; 330. a pressure gauge; 340. a driven gear; 350. and (4) a guide wheel.
Detailed Description
The present invention is further described with reference to the following drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.
As described in the background art, in the actual reaction process, based on the needs of improving the reaction efficiency of the material, performing reasonable position adjustment, and the like, the furnace body can be controlled to incline at a certain angle while vacuum or introducing reaction gas (including flowing gas or closed gas). For example using NH3As a reaction gas, H is generated in the reaction process2One end of the air outlet of the furnace body can be properly adjusted to be at a higher position, so that H is ensured2The furnace body is discharged from the air outlet as soon as possible, which is beneficial to improving the working efficiency of the equipment. At present, most furnace tubes 300 of vacuum tube furnaces are horizontally arranged, and the inclination angle of the tube furnace cannot be adjusted. Although a small part of vacuum tube furnaces have the adjusting function, most of the vacuum tube furnaces have the problem of inconvenient adjustment.
To solve the technical problem, the utility model provides a formula vacuum tube furnace sways, including heating box and locating the interior boiler tube 300 of heating box.
Referring to fig. 1, the heating box body includes an upper box body 110 and a lower box body 120 hinged together, and a matched latch is provided on the front panels of the upper box body 110 and the lower box body 120. Furnace linings 130 with resistance wires are arranged inside the upper box body 110 and the lower box body 120, and semicircular grooves 140 are arranged on the two side panels of the heating box body and in the middle of the furnace linings 130; when the upper and lower cases 120 are closed, the semi-circular grooves 140 are closed to form furnace holes for installing the furnace tubes 300. Preferably, the furnace lining 130 is provided with a plurality of grid holes 131.
The swing type vacuum tube furnace device further comprises a base 200 and a driver, wherein a U-shaped support 210 is arranged on the base 200, a rotating shaft 220 is arranged on the U-shaped support 210, and the middle part of the heating box body is arranged on the rotating shaft 220 and can rotate around the rotating shaft 220. The driver is fixed on the base 200, in this embodiment, a servo motor 230, which drives the heating box to swing up and down along the rotating shaft 220 through a crank-link mechanism 240. Preferably, a controller is further included for controlling the rotation of the servo motor 230, thereby adjusting the tilting angle of the tube furnace. Compared with the prior art, this embodiment adopts servo motor 230 to drive crank link mechanism 240 and adjusts the inclination of tubular furnace, and is both quick convenient, has satisfied the reaction efficiency who improves the material, has carried out needs such as reasonable position adjustment, still can realize rocking of tubular furnace and vibrate.
When using a tube furnace for heat treatment, it is often desirable to move the material being treated in order to improve the uniformity of the heat treatment of the material. The existing rotary heating tube furnace usually utilizes a motor to directly drive the furnace tube 300 to rotate so as to realize material rotation. The rotary device in the rotary tube furnace is often integrated on the furnace body and cannot be disassembled, and once the rotary tube furnace is damaged, a user needs to additionally purchase the tube furnace with the rotary heating function instead of purchasing the rotary device separately, so that the use cost of the user is increased sharply. Referring to fig. 2-3, in the present embodiment, a support frame 150 is respectively disposed in the lower box 120 at two sides of the furnace lining 130, and a semicircular groove 140 for placing the furnace tube 300 is disposed at the top end of the support frame 150. One of the support frames 150 is provided with a pair of driving gears 160 on the side surface, and the other support frame 150 is provided with a pair of rotating guide rails 170 on the side surface; a driven gear 340 engaged with the driving gear 160 is correspondingly installed at one end of the furnace tube 300, and a guide wheel 350 matched with the rotary guide rail 170 is correspondingly installed at the other end. When the furnace tube 300 is used, the furnace tube 300 is placed on the pair of driving gears 160 and the rotating guide rails 170, and the driving gears 160 are driven by the motor to rotate, so that the furnace tube 300 is driven to rotate.
The inlet end and the outlet end of the furnace tube 300 extend out of the heating box body, and sealing flanges 310 are arranged between the inlet end and the heating box body, so that the sealing performance is improved. The gas inlet end and the gas outlet end are both provided with a valve 320 and a pressure gauge 330 to control the on-off and pressure of gas inlet and gas outlet and ensure the safety of the tubular furnace in the reaction process. In addition, the gas inlet end is also provided with a multi-channel gas mass flow meter and a gas mixing device.
The traditional vacuum tube furnace generally adopts a quartz tube, and the semiconductor material in the furnace is reduced into metal by reducing gas generated in the reaction process and is attached to the surface of the quartz tube to corrode the quartz tube; the purity of the reaction material is partially destroyed by acidic or basic corrosive gases generated during the reaction. In the utility model, the furnace tube 300 is a ceramic tube, thereby avoiding the corrosion to the furnace tube 300 and not destroying the purity of the material.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.
Claims (8)
1. A swinging type vacuum tube furnace is characterized by comprising a heating box body and a furnace tube arranged in the heating box body, wherein the heating box body comprises an upper box body and a lower box body which are hinged together, furnace linings with resistance wires are arranged inside the upper box body and the lower box body, and semicircular grooves are formed in the two side panels of the heating box body and in the middle of the furnace linings; when the upper box body and the lower box body are closed, the semi-circular grooves are closed to form furnace holes for installing the furnace tubes;
the swinging type vacuum tube furnace device also comprises a base and a driver, wherein a U-shaped bracket is arranged on the base, a rotating shaft is arranged on the U-shaped bracket, and the middle part of the heating box body is arranged on the rotating shaft; the driver drives the heating box body to swing up and down along the rotating shaft through a crank connecting rod mechanism.
2. A rocking vacuum tube furnace as claimed in claim 1, wherein the drive is a servo motor.
3. A rocking vacuum tube furnace as claimed in claim 1 wherein a support is provided in the lower box on each side of the furnace lining, one support having a pair of drive gears mounted on its side and the other support having a pair of rotary guide rails mounted on its side; and one end of the furnace tube is correspondingly provided with a driven gear meshed with the driving gear, and the other end of the furnace tube is correspondingly provided with a guide wheel matched with the rotary guide rail.
4. A rocking vacuum tube furnace as claimed in claim 3 wherein the top of the support frame is provided with a semi-circular slot for receiving a tube of furnace.
5. A rocking vacuum tube furnace as claimed in claim 1 wherein the gas inlet and outlet ends of the furnace tube are fitted with sealing flanges, valves and pressure gauges.
6. A rocking vacuum tube furnace as claimed in claim 5 wherein the furnace tube inlet end is further fitted with a multi-channel gas mass flow meter and gas mixing means.
7. A rocking vacuum tube furnace as claimed in claim 1 wherein the furnace tubes are ceramic tubes.
8. A rocking vacuum tube furnace as claimed in claim 1 wherein the lining is provided with a plurality of grid holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020076647.3U CN211552437U (en) | 2020-01-14 | 2020-01-14 | Swing type vacuum tube furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020076647.3U CN211552437U (en) | 2020-01-14 | 2020-01-14 | Swing type vacuum tube furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211552437U true CN211552437U (en) | 2020-09-22 |
Family
ID=72491921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020076647.3U Active CN211552437U (en) | 2020-01-14 | 2020-01-14 | Swing type vacuum tube furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211552437U (en) |
-
2020
- 2020-01-14 CN CN202020076647.3U patent/CN211552437U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106736196B (en) | A kind of small articles tool for welding fixture | |
| CN110331378B (en) | HFCVD equipment for continuous preparation of diamond film and film plating method thereof | |
| CN211552437U (en) | Swing type vacuum tube furnace | |
| CN111499164A (en) | Device is fired with glass pipe heating to borosilicate glass container manufacturing | |
| CN207193352U (en) | A kind of axletree class tubing member weld seam destressing device | |
| JP4735813B2 (en) | Combined heat treatment equipment and vapor deposition equipment | |
| CN103343331A (en) | Chemical vapor deposition reaction device | |
| CN109355706B (en) | Silicon carbide single crystal growth device | |
| JP2003100643A (en) | High temperature cvd system | |
| CN110173977A (en) | A kind of high-purity metal chromium vacuum outgas sintering furnace | |
| CN107698134A (en) | A kind of continuous multistation glass feeding bottle song body forming machine | |
| CN209508335U (en) | A kind of annealing and cooling device that can longitudinally rotate | |
| CN108620008B (en) | Photo-thermal is rapidly heated reactor | |
| CN216062084U (en) | Trimethyl aluminum purification and distillation equipment | |
| CN115433817A (en) | Heat treatment device for steel pipe | |
| CN2386048Y (en) | Out-layer auxiliary heat controllable cooling ion bombardment heat treatment furnace | |
| CN210346302U (en) | Rotary sintering furnace for preparing high-temperature-resistant silicon-based aerogel | |
| CN220665417U (en) | Continuous working vacuum carburizing furnace | |
| CN219951203U (en) | CVD growth sintering equipment | |
| CN112090229A (en) | Electric control adjusting mechanism for organic waste gas treatment system | |
| CN208150972U (en) | A kind of chemical gas phase reaction precipitation equipment suitable for preparing graphene in batches | |
| CN220366690U (en) | Nitriding alloy vacuum nitriding furnace | |
| CN219637267U (en) | High-temperature electric furnace for metal heat treatment | |
| CN219972452U (en) | Deposition furnace with airflow guiding function | |
| CN208604196U (en) | A kind of Pvd equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |