CN105088194B - A kind of chemical vapor depsotition equipment of microwave heating - Google Patents
A kind of chemical vapor depsotition equipment of microwave heating Download PDFInfo
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- CN105088194B CN105088194B CN201510535620.XA CN201510535620A CN105088194B CN 105088194 B CN105088194 B CN 105088194B CN 201510535620 A CN201510535620 A CN 201510535620A CN 105088194 B CN105088194 B CN 105088194B
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- cavity
- chemical vapor
- microwave heating
- waveguide
- vapor depsotition
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Abstract
The present invention relates to a kind of chemical vapor depsotition equipment of microwave heating, including：Cavity, disc hanger is provided with the cavity, main shaft is provided with above the disc hanger, the upper end connecting power device of the main shaft, rotating shaft is provided with below the disc hanger, the rotating shaft is connected by travelling gear with main shaft, the lower end connecting cylinder shape matrix of the rotating shaft, the cavity inner wall is provided with heat-insulation layer, inlet duct is connected with the bottom of the cavity, the inlet duct outer wall is provided with water-cooling sandwich, inside is provided with one or more equally distributed baffle plates, and the side wall of the cavity is connected with horn-like waveguide.Microwave heating power is adjusted using microwave generator in the present invention, and then adjusts firing rate and temperature, not only efficiency of heating surface height, it is ensured that coating film thickness it is accurate, the film thickness that is plated is uniform, surface is smooth.
Description
Technical field
The invention belongs to chemical vapor deposition（CVD）Technical field, more particularly to a kind of chemical vapor deposition of microwave heating
Product equipment.
Background technology
Chemical vapor deposition（English：Chemical Vapor Deposition, abbreviation CVD）It is that one kind is used for producing height
The chemical technology of purity, high-performance solid-state material.Semiconductor industry produces thin-film material using this technology mostly, traditional
CVD manufacturing process is that matrix is placed in equipment cavity, and then cavity is vacuumized and is heated to reaction temperature and keeps,
Again to being passed through reacting gas in cavity, make its reactive deposition on matrix.React the tail gas of generation and not sufficiently reactive gas
Then it is processed by vacuum pumped.But it is using conventional graphite heating body heating chamber mostly in existing CVD equipment
Body, the gas that then cavity is inputted by infra-red radiation reach reaction temperature.Equipment also is directly added using microwave
Thermal response gas, reactive deposition is brought it about on matrix.The shortcomings that these mode of heatings suffer from high energy consumption, efficiency is low.
The content of the invention
For above-mentioned prior art deficiency, the present invention provides a kind of chemical vapor depsotition equipment of microwave heating.
The present invention is achieved by the following technical solutions：
A kind of chemical vapor depsotition equipment of microwave heating, it is characterised in that the equipment includes：Cavity, in the chamber
Disc hanger is provided with vivo, main shaft, the upper end connecting power device of the main shaft, institute are provided with above the disc hanger
State and rotating shaft is provided with below disc hanger, the rotating shaft is connected by travelling gear with main shaft, the lower end connection of the rotating shaft
Cylindrical base, the cavity inner wall are provided with heat-insulation layer, and inlet duct, the inlet duct are connected with the bottom of the cavity
Outer wall be provided with water-cooling sandwich, it is internal be provided with one or more equally distributed baffle plates, the side wall of the cavity is connected with horn-like
Waveguide.
According to above-mentioned equipment, it is characterised in that the cavity upper end is provided with and is provided with the upper cover plate of gas outlet, lower end is provided with
It is provided with the lower cover of air inlet.
According to above-mentioned equipment, it is characterised in that quartz socket tube is covered with outside the disc hanger, in the quartz
Sleeve bottom is provided with even gas distribution plate, and the even gas distribution plate is wire netting.
According to above-mentioned equipment, it is characterised in that the power set include：The motor being arranged on above the cavity,
And the belt pulley with the motor connection.
According to above-mentioned equipment, it is characterised in that the horn-like waveguide is connected with microwave generator.
According to above-mentioned equipment, it is characterised in that be provided with diaphragm seal in the horn-like waveguide.
According to above-mentioned equipment, it is characterised in that the horn-like waveguide includes the waveguide that two sections are connected with each other
Section, it is provided with woven wire shield gasket pad at the two sections waveguide pipeline section adpting flange.
According to above-mentioned equipment, it is characterised in that the tubaeform angular range of the horn-like waveguide 45 °~
Between 65 °.
According to above-mentioned equipment, it is characterised in that the insulation material that the heat-insulation layer uses is glass fibre.
According to above-mentioned equipment, it is characterised in that the baffle plate is three.
According to above-mentioned equipment, it is characterised in that the inlet duct bottom is provided with three air inlets, respectively with air inlet pipe
Connection.
According to above-mentioned equipment, it is characterised in that escape pipe is connected with the gas outlet on the cavity upper cover plate, it is described
Escape pipe is connected with metal fillings tail gas absorption bucket, and spray scrubber is connected with metal fillings tail gas absorption bucket.
The present invention advantageous effects, the invention provides a kind of microwave heating chemical vapor depsotition equipment, not only
The efficiency of heating surface is high, it is ensured that coating film thickness it is accurate, the film thickness that is plated is uniform, surface is smooth.Heating rate of the present invention is high, plating
Membrane efficiency is high, and surface deposition efficiency is high, and heating-up temperature is easily controllable, and manufacturing cost is cheap.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation of waveguide of the present invention.
Embodiment
As shown in figure 1, a kind of chemical vapor depsotition equipment of microwave heating, including：Cavity 1, disk is provided with cavity
Shape hanger 2, is provided with main shaft above disc hanger, the upper end connecting power device of main shaft, and junction is mechanical using vacuum
Seal ensures sealing, is provided with rotating shaft below disc hanger, rotating shaft is connected by travelling gear with main shaft, the lower end of rotating shaft
Each various sizes of cylindrical base 3 is connected, wherein, power set include：The motor 4, Yi Jiyu being arranged on above cavity
The belt pulley 5 of motor connection, power set can realize that disc hanger and cylindrical base are rotated, make the anti-of entrance
Gas is answered to be uniformly deposited on matrix, rotary rpm is adjustable, in 1 ~ 200r/min scopes；Cavity inner wall is used provided with heat-insulation layer 6
In insulation, the insulation material that heat-insulation layer uses is glass fibre；Inlet duct, inlet duct outer wall are connected with the bottom of cavity
One or more equally distributed stainless steel shoes 8, preferably three, baffle plate, inlet duct bottom are provided with provided with water-cooling sandwich 7, inside
Portion is connected provided with air inlet 19 with air inlet pipe, and preferably air inlet is three；Water-cooling sandwich with prevent in cavity heat radiation cause into
For gas port interface because overheat is revealed, baffle plate serves the effect of mixing to input gas, while also may leakage to inside cavity point
Microwave out is reflected, and further prevents microwave from leakage；Cavity wall is connected with horn-like waveguide 9, and its position exists
In the altitude range of matrix suspension, horn-like waveguide expands the area of microwave radiation, it is preferable that tubaeform angular range exists
Between 45 °~65 °, diaphragm seal 10 is provided with horn-like waveguide, the diaphragm seal is by dielectric loss is small, wave transparent performance is good
The polytetrafluoroethylene (PTFE) that good, highest is resistant to 260 DEG C of temperature is made, will while ensureing that cavity can be evacuated to certain vacuum
The loss that microwave is tried one's best few is sent into cavity, and horn-like waveguide is connected with microwave generator 11；Cavity upper end is provided with and is provided with
The upper cover plate 12 of gas outlet, lower end are provided with the lower cover 13 for being provided with air inlet, and cavity and its upper and lower cover plate can by stainless steel etc.
Microwave reflection material is made, and escape pipe 14, escape pipe and metal fillings tail gas absorption are connected with the gas outlet on cavity upper cover plate
Bucket connection, spray scrubber is connected with metal fillings tail gas absorption bucket, to handle tail gas, is absorbed bucket and is used to fill loose metal
Bits（Mainly iron filings）, spray scrubber be divided into two-stage absorption, absorbing liquid be 0.1 ~ 5M of concentration NaOH solution；Hung in disc
Quartz socket tube 15 is covered with outside frame, for the reaction chamber deposited as gas reaction, even gas distribution is provided with quartz socket tube bottom
Plate 16, it is preferable that even gas distribution plate is wire netting, will prevent microwave from leakage in cavity while inputting even gas distribution；It is preferred that
Loudspeaker corrugated waveguide includes the waveguide pipeline section 17,17 ' that two sections are connected with each other, and wire is provided with two section waveguide pipeline section adpting flanges
Screen covers sealing gasket 18, to prevent microwave leakage.
In use, start microwave generator carries out microwave heating to the matrix in cavity, by inlet duct into cavity
Reacting gas is passed through, carries out deposition reaction, deposition reaction terminates, and generates thin-film material, and tail gas passes through metal fillings tail gas absorption bucket
And spray scrubber is handled.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
Any modification, equivalent substitution or improvement made within refreshing and principle etc., should be included in the scope of the protection.
Claims (8)
1. a kind of chemical vapor depsotition equipment of microwave heating, it is characterised in that the equipment includes：Cavity, in the cavity
It is interior to be provided with disc hanger, quartz socket tube is covered with outside the disc hanger, gas is provided with the quartz socket tube bottom
Uniform board, the even gas distribution plate are wire netting, and main shaft, the upper end connection of the main shaft are provided with above the disc hanger
Power set, rotating shaft are provided with below the disc hanger, the rotating shaft is connected by travelling gear with main shaft, the rotating shaft
Lower end connecting cylinder shape matrix, the cavity inner wall is provided with heat-insulation layer, is connected with inlet duct in the bottom of the cavity, institute
State inlet duct outer wall and be provided with one or more equally distributed baffle plates provided with water-cooling sandwich, inside, the side wall of the cavity connects
Horn-like waveguide is connected to, the horn-like waveguide is connected with microwave generator, the loudspeaker of the horn-like waveguide
The angular range of shape is between 45 °~65 °.
2. the chemical vapor depsotition equipment of a kind of microwave heating according to claim 1, it is characterised in that on the cavity
End is provided with the upper cover plate for being provided with gas outlet, lower end is provided with the lower cover for being provided with air inlet.
A kind of 3. chemical vapor depsotition equipment of microwave heating according to claim 1, it is characterised in that the power dress
Put including：The motor being arranged on above the cavity, and the belt pulley with the motor connection.
4. the chemical vapor depsotition equipment of a kind of microwave heating according to claim 1, it is characterised in that in the loudspeaker
Diaphragm seal is provided with the waveguide of shape.
5. the chemical vapor depsotition equipment of a kind of microwave heating according to claim 1, it is characterised in that described horn-like
Waveguide includes the waveguide pipeline section that two sections are connected with each other, and is shielded at the two sections waveguide pipeline section adpting flange provided with woven wire close
Packing.
6. the chemical vapor depsotition equipment of a kind of microwave heating according to claim 1, it is characterised in that the baffle plate is
Three.
A kind of 7. chemical vapor depsotition equipment of microwave heating according to claim 1, it is characterised in that the air inlet dress
Bottom set portion is provided with three air inlets, is connected respectively with air inlet pipe.
8. the chemical vapor depsotition equipment of a kind of microwave heating according to claim 1, it is characterised in that with the cavity
Gas outlet on upper cover plate is connected with escape pipe, and the escape pipe is connected with metal fillings tail gas absorption bucket, is inhaled with metal fillings tail gas
Receive bucket and be connected with spray scrubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510535620.XA CN105088194B (en) | 2015-08-28 | 2015-08-28 | A kind of chemical vapor depsotition equipment of microwave heating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510535620.XA CN105088194B (en) | 2015-08-28 | 2015-08-28 | A kind of chemical vapor depsotition equipment of microwave heating |
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| Publication Number | Publication Date |
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| CN105088194A CN105088194A (en) | 2015-11-25 |
| CN105088194B true CN105088194B (en) | 2018-01-09 |
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| CN201510535620.XA Active CN105088194B (en) | 2015-08-28 | 2015-08-28 | A kind of chemical vapor depsotition equipment of microwave heating |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109309035A (en) * | 2018-11-08 | 2019-02-05 | 德淮半导体有限公司 | Semiconductor processing chamber and forming method thereof, semiconductor technology device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2782708Y (en) * | 2005-03-28 | 2006-05-24 | 应用材料公司 | Mixer for mixing technological gas |
| CN202490566U (en) * | 2012-01-13 | 2012-10-17 | 苏州纺织机械有限公司 | Tail gas absorbing and treating device of tank |
| CN103074613A (en) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | Microwave excitation CVD coating equipment |
| CN103718644A (en) * | 2011-08-04 | 2014-04-09 | 松下电器产业株式会社 | Microwave heating device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2787148B2 (en) * | 1988-11-15 | 1998-08-13 | キヤノン株式会社 | Method and apparatus for forming deposited film by microwave plasma CVD |
| CN104726850B (en) * | 2013-12-23 | 2017-08-25 | 朱雨 | A kind of microwave plasma CVD equipment |
-
2015
- 2015-08-28 CN CN201510535620.XA patent/CN105088194B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2782708Y (en) * | 2005-03-28 | 2006-05-24 | 应用材料公司 | Mixer for mixing technological gas |
| CN103718644A (en) * | 2011-08-04 | 2014-04-09 | 松下电器产业株式会社 | Microwave heating device |
| CN202490566U (en) * | 2012-01-13 | 2012-10-17 | 苏州纺织机械有限公司 | Tail gas absorbing and treating device of tank |
| CN103074613A (en) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | Microwave excitation CVD coating equipment |
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| CN105088194A (en) | 2015-11-25 |
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