CN219861479U - Annealing furnace - Google Patents

Abstract

The utility model discloses an annealing furnace, which belongs to the technical field of annealing furnaces and comprises a support plate, wherein a processing table is arranged on the support plate, a processing mechanism and a clamping mechanism are arranged on the processing table, the processing mechanism comprises a cooler, the cooler is arranged on the processing table, a pipeline and a heater are arranged on the cooler, and the heater is sleeved on the cooler and the pipeline. The annealing furnace is convenient for conveying the steel pipes through the cooperation of the conveying belt and the clamping mechanisms.

Description

Annealing furnace

Technical Field

The utility model relates to the technical field of annealing furnaces, in particular to an annealing furnace.

Background

An annealing furnace is a process used in the manufacture of semiconductor devices that includes heating a plurality of semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the film to a film or to a wafer substrate interface, densify the deposited film, change the state of the grown film, repair the implanted damage, move the dopants or transfer dopants from one film to another film or from film into the wafer substrate, the lehr may be integrated into other furnace processing steps, such as oxidation, or may be self-processing. Annealing furnaces are accomplished by equipment specifically designed for heating semiconductor wafers. The annealing furnace is an energy-saving periodic operation furnace, has an ultra-energy-saving structure, adopts a fiber structure and saves electricity by 60 percent.

At present, when the annealing furnace is used for processing steel pipes, the steel pipes are required to be led into the pipeline, a plurality of steel pipe pipelines are pushed in manually, as the steel pipes are longer, the steel pipes are more troublesome in pushing, a part of the annealing furnace can adopt a mechanical conveying device, a plurality of rollers are selected in conveying, the steel pipes are driven to be conveyed through the rotation of a plurality of rollers, the rollers are equivalent to conveying the steel pipes through the friction force of contact between the rollers and the steel pipes when conveying the steel pipes, and after the steel pipes enter the pipeline, the surfaces of the steel pipes are also contacted with the pipeline, a certain friction force exists between the rollers along with the increase of the length of the steel pipes, the rollers are contacted with the steel pipes less and less (the surfaces of the steel pipes entering the pipeline are not contacted with the rollers), the conveying effect is worse, the rollers are continuously rubbed with the steel pipes when being used for a long time, the surface abrasion is more and more serious, and the service life of the rollers is lower.

Disclosure of Invention

The utility model aims to provide an annealing furnace for solving the problems in the background art.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the annealing furnace comprises a support plate, wherein a processing table is arranged on the support plate, and a processing mechanism and a clamping mechanism are arranged on the processing table.

Further, the processing mechanism comprises a cooler, the cooler is arranged on the processing table, a pipeline and a heater are arranged on the cooler, and the heater is sleeved on the cooler and the pipeline.

Further, the processing bench is provided with a mounting groove, a conveying belt is arranged in the mounting groove, a fixed block is arranged on the conveying belt, and the clamping mechanism is arranged on the fixed block.

Further, fixture includes drive assembly and auxiliary assembly, drive assembly includes the diaphragm, the diaphragm is installed on the fixed block, install electric telescopic handle on the diaphragm, electric telescopic handle's extension end is connected with the drive plate, the one end of drive plate is connected with the actuating lever, the one end of actuating lever with the fixed block is connected, the surface cover of actuating lever is equipped with first half gear, be connected with first splint on the first half gear.

Further, the auxiliary assembly comprises a connecting rod, one end of the connecting rod is connected with the fixed block, a second half gear is sleeved on the surface of the connecting rod, the second half gear is connected with the first half gear, and a second clamping plate is connected to the second half gear.

Further, rubber pads are arranged on the first clamping plate and the second clamping plate.

Further, an arc-shaped groove is formed in the top of the fixed block.

Compared with the prior art, the utility model has the beneficial effects that:

through opening electric telescopic handle, electric telescopic handle extends, and electric telescopic handle drives the drive plate and rotates, and the drive plate drives the drive lever clockwise rotation, and the drive lever drives first half gear clockwise rotation, and first half gear drives first splint clockwise rotation, simultaneously, and first half gear drives second half gear anticlockwise rotation, and second half gear drives second splint anticlockwise rotation for first splint and second splint are close to each other, carry out the centre gripping to the steel pipe, along with the transmission of conveyer belt, send into the steel pipe inside or take out from the pipeline inside, be convenient for carry to the steel pipe.

Drawings

FIG. 1 is a schematic diagram of the overall structure of the present utility model;

fig. 2 is a schematic structural diagram of the whole clamping mechanism of the present utility model.

In the figure: 1. a support plate; 2. a processing table; 3. a cooler; 4. a pipe; 5. a heater; 6. a conveyor belt; 7. a fixed block; 8. a cross plate; 9. an electric telescopic rod; 10. a driving plate; 11. a driving rod; 12. a first half gear; 13. a first clamping plate; 14. a connecting rod; 15. a second half gear; 16. and a second clamping plate.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1-2, the present utility model provides a technical solution: an annealing furnace comprises two support plates 1, a processing table 2 is arranged at the top of the two support plates 1, a processing mechanism and a plurality of clamping mechanisms are arranged at the top of the processing table 2, and the processing mechanism and the clamping mechanisms are respectively located at two ends of the processing table 2, which are far away from each other.

As shown in fig. 1-2, the processing mechanism comprises a plurality of cooling devices 3, the plurality of cooling devices 3 are all installed at the top of the processing table 2, the pipeline 4 is arranged on the plurality of cooling devices 3, a heater 5 is arranged on each cooling device 3, the heater 5 is sleeved on the cooling devices 3 and the pipeline 4, after a steel pipe is led into the pipeline, the steel pipe is heated through the plurality of heaters 5, and then cooled through the plurality of cooling devices 3, wherein the working principles of the cooling devices 3 and the heaters 5 belong to common general knowledge and are very mature prior art.

As shown in fig. 1-2, a mounting groove is formed on the processing table 2, a conveyer belt 6 is mounted in the mounting groove, a plurality of fixing blocks 7 are fixedly mounted on the conveyer belt 6 (the joint of the fixing blocks 7 and the conveyer belt 6 can be slightly deformed, the situation that the fixing blocks 7 are difficult to move when moving the arc of the conveyer belt 6 is avoided), the fixing blocks 7 are equidistantly distributed on the conveyer belt 6, clamping mechanisms are mounted on the fixing blocks 7, each clamping mechanism comprises a driving component and an auxiliary component, each driving component comprises a transverse plate 8, the transverse plates 8 are horizontally mounted on one side of the fixing blocks 7, an electric telescopic rod 9 is mounted on the top of each transverse plate 8 through a rotating shaft, a driving plate 10 is connected to the extending end of each electric telescopic rod 9 through the rotating shaft, one end of each driving plate 10 far away from the electric telescopic rod 9 is connected with a driving rod 11, one end of each driving rod 11 is connected with one side of each fixing block 7 through the rotating shaft, the surface of the driving rod 11 is fixedly sleeved with a first half gear 12, a first clamping plate 13 is fixedly connected to the first half gear 12, the auxiliary component comprises a horizontal connecting rod 14, the connecting rod 14 is parallel to the driving rod 11, one end of the connecting rod 14 is connected with one side of the fixed block 7, which is close to the driving rod 11, through a rotating shaft, a second half gear 15 is fixedly sleeved on the surface of the connecting rod 14, the second half gear 15 is meshed with the first half gear 12, a second clamping plate 16 is fixedly connected to the second half gear 15, the electric telescopic rod 9 stretches through opening the electric telescopic rod 9, the electric telescopic rod 9 drives the driving plate 10 to rotate, the driving plate 10 drives the driving rod 11 to rotate clockwise, the driving rod 11 drives the first half gear 12 to rotate clockwise, the first half gear 12 drives the first clamping plate 13 to rotate clockwise, meanwhile, the first half gear 12 drives the second half gear 15 to rotate anticlockwise, the second half gear 15 drives the second clamping plate 16 to rotate anticlockwise, so that the first clamping plate 13 and the second clamping plate 16 are close to each other, the steel pipe is clamped, the steel pipe is conveyed into the pipeline 4 or is taken out of the pipeline 4 along with the transmission of the conveying belt 6, and the steel pipe is convenient to convey (because the traction force of the steel pipe is always the driving force of the conveying belt when conveying, and the steel pipe is clamped by the steel pipe, the movement of the steel pipe is more stable, and the friction force generated when the steel pipe moves is reduced).

One side that first splint 13 and second splint 16 are close to each other all is provided with the rubber pad, through setting up the rubber pad, has increased the centre gripping effect of first splint 13 and second splint 16 to the steel pipe.

As shown in fig. 2, an arc-shaped groove is formed in the top of the fixing block 7, and the arc-shaped groove is arranged, so that the steel pipe can be placed conveniently.

Working principle: when the device is used, the steel pipe to be processed is placed at the tops of the fixing blocks 7, the electric telescopic rods 9 are opened, the electric telescopic rods 9 stretch, the electric telescopic rods 9 drive the driving plates 10 to rotate, the driving plates 10 drive the driving rods 11 to rotate clockwise, the driving rods 11 drive the first half gears 12 to rotate clockwise, the first half gears 12 drive the first clamping plates 13 to rotate clockwise, simultaneously, the first half gears 12 drive the second half gears 15 to rotate anticlockwise, the second half gears 15 drive the second clamping plates 16 to rotate anticlockwise, the first clamping plates 13 and the second clamping plates 16 are close to each other, the steel pipe is clamped, the conveying belt 6 is opened, after the steel pipe is conveyed into the pipeline 4 by the conveying belt 6, the steel pipe is heated by the plurality of heaters 5, and cooled by the plurality of coolers 3, after the steel pipe is cooled, the steel pipe is conveyed out along with the transmission of the conveying belt 6, when the steel pipe to be processed is overlong, the transmission of the conveying belt 6, when the fixing blocks 7 move to the pipeline 6 (namely, the cambered surface is positioned), the electric clamping blocks 7 are adjusted to be close to the pipeline 6, the clamping mechanisms are adjusted, and the clamping mechanisms are further clamped to the steel pipe 7 are moved away from the fixing blocks 7, namely the clamping mechanisms are clamped to the fixing blocks 7.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. An annealing furnace, comprising a support plate (1), characterized in that: a processing table (2) is arranged on the support plate (1), and a processing mechanism and a clamping mechanism are arranged on the processing table (2);

the processing mechanism comprises a cooler (3), the cooler (3) is arranged on the processing table (2), a pipeline (4) and a heater (5) are arranged on the cooler (3), and the heater (5) is sleeved on the cooler (3) and the pipeline (4).

2. An annealing furnace according to claim 1, wherein: the machining table (2) is provided with a mounting groove, a conveying belt (6) is mounted in the mounting groove, a fixing block (7) is arranged on the conveying belt (6), and the clamping mechanism is arranged on the fixing block (7).

3. An annealing furnace according to claim 2, wherein: the clamping mechanism comprises a driving assembly and an auxiliary assembly, the driving assembly comprises a transverse plate (8), the transverse plate (8) is installed on the fixed block (7), an electric telescopic rod (9) is installed on the transverse plate (8), a driving plate (10) is connected to the extension end of the electric telescopic rod (9), a driving rod (11) is connected to one end of the driving plate (10), one end of the driving rod (11) is connected with the fixed block (7), a first half gear (12) is sleeved on the surface of the driving rod (11), and a first clamping plate (13) is connected to the first half gear (12).

4. An annealing furnace according to claim 3, wherein: the auxiliary assembly comprises a connecting rod (14), one end of the connecting rod (14) is connected with the fixed block (7), a second half gear (15) is sleeved on the surface of the connecting rod (14), the second half gear (15) is connected with the first half gear (12), and a second clamping plate (16) is connected to the second half gear (15).

5. An annealing furnace according to claim 4, wherein: rubber pads are arranged on the first clamping plate (13) and the second clamping plate (16).

6. An annealing furnace according to claim 4, wherein: an arc-shaped groove is formed in the top of the fixed block (7).