CN212796979U

CN212796979U - Novel annealing stove convenient to operation

Info

Publication number: CN212796979U
Application number: CN202021589982.XU
Authority: CN
Inventors: 高银银; 李申; 罗泓辉
Original assignee: Guangzhou Concord Testing Services Co ltd
Current assignee: RADIATION PROTECTION ASSOCIATION OF GUANGDONG PROVINCE
Priority date: 2020-08-04
Filing date: 2020-08-04
Publication date: 2021-03-26
Anticipated expiration: 2030-08-04

Abstract

The utility model discloses a novel annealing furnace which is easy to operate, comprising a furnace box, a transport frame and a special transport vehicle. Electric heating devices are fixedly installed on the upper and lower end faces of the inner wall of the furnace box. A high temperature resistant lead screw is installed on both sides through a bearing, one end of the high temperature resistant lead screw is fixedly installed with a stepper motor located on the surface of the furnace box, and the inner side of the two high temperature resistant lead screws is fixedly connected with a high temperature resistant lead screw sleeve. A lateral transport plate, the bottom surface of the top of the lateral transport plate is provided with a limit hanging groove, both sides of the limit hanging groove are provided with hook rod movable grooves, and the interior of the hook rod movable groove is connected with a hook through a short shaft A rod, both sides of the top of the transport frame are provided with limit hook grooves, and the top of the transport frame is snapped into the inner side of the limit hang groove. The utility model is easy to operate, convenient to mount the workpiece on the workbench of the annealing furnace, and has high work efficiency.

Description

Novel annealing stove convenient to operation

Technical Field

The utility model relates to an annealing furnace technical field specifically is a novel annealing furnace of being convenient for operation.

Background

Annealing furnaces, a process used in semiconductor device manufacturing that involves heating a plurality of semiconductor wafers to affect their electrical properties, are widely used. The heat treatment is designed for different effects. The wafer may be heated to activate the dopants, convert the thin film into a thin film or convert the thin film into a wafer substrate interface, densify the deposited thin film, change the state of the grown thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from the thin film into the wafer substrate, the annealing furnace may be integrated into other furnace processing steps, such as oxidation, or may be self-processing. The annealing furnace is completed by an apparatus specifically designed for heating semiconductor wafers.

However, the existing annealing furnace is not simple and convenient to operate because the workpieces are transported and carried to a workbench of the furnace before working; therefore, the existing requirements are not met, and a novel annealing furnace convenient to operate is provided for the requirements.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a novel annealing stove convenient to operation to on all will transporting and carrying the work piece to the workstation of stove before solving the annealing stove work that proposes in the above-mentioned background art, operate not enough simple and convenient scheduling problem.

In order to achieve the above object, the utility model provides a following technical scheme: a novel annealing furnace convenient to operate comprises a furnace box, a transportation frame and a special transportation vehicle, wherein an electric heating device is fixedly installed on the upper end surface and the lower end surface of the inner wall of the furnace box, high-temperature-resistant screws are installed on the two sides of the inner wall of the furnace box through bearings, a stepping motor located on the surface of the furnace box is fixedly installed at one end of each high-temperature-resistant screw, the inner sides of the two high-temperature-resistant screws are fixedly connected with a transverse transportation plate through high-temperature-resistant screw sleeves, a limiting hanging groove is formed in the bottom surface of the top end of the transverse transportation plate, hook rod moving grooves are formed in the two sides of the limiting hanging groove, and hook rods are connected inside the hook rod moving grooves through short;

the two sides of the top end of the transportation frame are respectively provided with a limiting hook groove, the top end of the transportation frame is clamped into the inner side of the limiting hook groove, and the bottom ends of the two hook rods are clamped into the inner side of the limiting hook groove;

the special transport vehicle comprises a trolley bottom plate, an upper supporting plate is installed above the trolley bottom plate, two strip-shaped limiting grooves are symmetrically arranged on the bottom surface of the upper supporting plate, connecting blocks are connected to the inner sides of the strip-shaped limiting grooves in a sliding mode, two fixing blocks are symmetrically and fixedly installed on the position, close to one side edge, of the trolley bottom plate, a lever-type push rod is installed on the inner sides of the two fixing blocks, the positions, close to the middle, of the two sides of the lever-type push rod are connected with the top ends of the fixing blocks through rotating shafts, and the two bottom ends of the lever-type.

Preferably, the hook rod is connected with the short shaft through a torsion spring, and the upper side edge of the bottom end of the hook rod is provided with a circular arc surface.

Preferably, the electric heating wire is arranged in the electric heating device, the outer side edge of the upper end face of the conveying frame is provided with an arc surface, and supporting legs are fixedly mounted at four end corners of the bottom face of the oven box.

Preferably, four end corners of the bottom surface of the bottom plate of the trolley are fixedly provided with rollers.

Preferably, an electrical box is fixedly mounted on the upper end face of the oven box, and the electrical box, the stepping motor and the electric heating device are electrically connected.

Preferably, sixteen compression springs are uniformly and fixedly connected between the bottom surface of the upper supporting plate and the upper end surface of the trolley bottom plate.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses a special transport vechicle transports transportation frame, the inside of transportation frame is placed and is waited to process the work piece, use special transport vechicle to transport, when special transport vechicle transports the transportation frame under the spacing hanging groove of the horizontal transport plate bottom surface of state of stretching out, only need press the top of lever push rod, utilize lever principle, lift on the lever push rod bottom, the connecting block is along the sideslip of bar spacing groove, and the upper plate shifts up, make the transportation frame shift up, the top of transportation frame inserts spacing hanging groove, the transportation frame shifts up because of the cambered surface molding of transportation frame upper edge and hanging hook rod bottom surface, can extrude two hanging rod and move outward, make the bottom card of two hanging rod go into spacing hanging groove again, make the transportation frame hang in the below of horizontal transport plate, the whole transportation operation is simple, need not carry the work piece to the processing bench of stove;

2. the utility model discloses the initial height that the upper plate pushed out because of compression spring is for being hung the bottom surface highly uniform of state transportation frame, through processing completion back, stretches out horizontal transport plate, waits to cool off the top of two couple poles of internal pushing for the bottom of couple pole breaks away from spacing couple groove and removes spacingly, holds in the palm through the compression spring of special transport vechicle and upper plate and removes spacing transportation frame, whole easy operation.

Drawings

Fig. 1 is a schematic overall structure diagram of the present invention;

fig. 2 is a schematic diagram of the internal structure of the electrical box of the present invention;

fig. 3 is a schematic view of the internal structure of the transverse transport plate of the present invention;

fig. 4 is a side view of the inside of the transverse transport plate according to the present invention;

fig. 5 is the structure schematic diagram of the special transport vehicle of the present invention in the state of not carrying springs.

In the figure: 1. an electric box; 2. a stepping motor; 3. a furnace box; 4. supporting legs; 5. a transverse transport plate; 6. a limiting hook groove; 7. a transport frame; 8. a special transport vehicle; 9. an electric heating device; 10. a high temperature resistant lead screw; 11. a high temperature resistant lead screw sleeve; 12. an upper supporting plate; 13. connecting blocks; 14. a lever-type push rod; 15. a compression spring; 16. a trolley bottom plate; 17. a roller; 18. a limiting hanging groove; 19. a hook rod; 20. a minor axis; 21. a hook rod movable groove; 22. a strip-shaped limiting groove; 23. and (5) fixing blocks.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1 to 5, the present invention provides an embodiment: a novel annealing furnace convenient to operate comprises a furnace box 3, a transportation frame 7 and a special transportation vehicle 8, wherein electric heating devices 9 are fixedly installed on the upper end surface and the lower end surface of the inner wall of the furnace box 3, high-temperature-resistant lead screws 10 are installed on the two sides of the inner wall of the furnace box 3 through bearings, a stepping motor 2 located on the surface of the furnace box 3 is fixedly installed at one end of each high-temperature-resistant lead screw 10, the inner sides of the two high-temperature-resistant lead screws 10 are fixedly connected with a transverse transportation plate 5 through high-temperature-resistant lead screw sleeves 11, a limiting hanging groove 18 is formed in the bottom surface of the top end of the transverse transportation plate 5, hook rod movable grooves 21 are formed in the two sides of each limiting hanging groove 18, and hook rods 19 are connected;

the two sides of the top end of the transport frame 7 are respectively provided with a limiting hook groove 6, the top end of the transport frame 7 is clamped into the inner side of the limiting hook groove 18, and the bottom ends of the two hook rods 19 are clamped into the inner side of the limiting hook grooves 6;

the special transport vehicle 8 comprises a trolley bottom plate 16, an upper supporting plate 12 is installed above the trolley bottom plate 16, two strip-shaped limiting grooves 22 are symmetrically arranged on the bottom surface of the upper supporting plate 12, connecting blocks 13 are slidably connected to the inner sides of the strip-shaped limiting grooves 22, two fixing blocks 23 are symmetrically and fixedly installed at positions, close to one side edge, of the trolley bottom plate 16, a lever-type push rod 14 is installed on the inner sides of the two fixing blocks 23, positions, close to the middle, of the two sides of the lever-type push rod 14 are connected with the top ends of the fixing blocks 23 through rotating shafts, and the two bottom ends of.

Further, the hook rod 19 is connected with the short shaft 20 through a torsion spring, and the upper side edge of the bottom end of the hook rod 19 is provided with an arc surface.

Furthermore, the electric heating wire is arranged in the electric heating device 9, the outer side edge of the upper end surface of the transportation frame 7 is provided with an arc surface, and the four end corners of the bottom surface of the furnace box 3 are fixedly provided with supporting legs 4.

Further, four end corners of the bottom surface of the trolley bottom plate 16 are fixedly provided with rollers 17.

Further, an electrical box 1 is fixedly mounted on the upper end face of the oven box 3, and the electrical box 1, the stepping motor 2 and the electric heating device 9 are electrically connected.

Furthermore, sixteen compression springs 15 are uniformly and fixedly connected between the bottom surface of the upper supporting plate 12 and the upper end surface of the trolley bottom plate 16, and the initial height of the upper supporting plate 12 pushed by the compression springs 15 is consistent with the height of the bottom surface of the transport frame 7 in the hung state.

The working principle is as follows: when the device is used, a power supply is switched on, a workpiece to be processed is placed on the inner side of the transport frame 7, the transport frame 7 is placed on the upper end face of the upper supporting plate 12 of the special transport vehicle 8, the transport frame 7 is transported through the special transport vehicle 8, the workpiece to be processed is placed inside the transport frame 7, the special transport vehicle 8 is used for transportation, when the transport frame 7 is transported to be under the limiting hanging groove 18 on the bottom face of the extended transverse transport plate 5 by the special transport vehicle 8, only the top end of the lever type push rod 14 needs to be pressed, the bottom end of the lever type push rod 14 is lifted up by utilizing the lever principle, the connecting block 13 transversely moves along the bar type limiting groove 22, the upper supporting plate 12 moves upwards, the transport frame 7 moves upwards, the top end of the transport frame 7 is inserted into the limiting hanging groove 18, the transport frame 7 moves upwards, two hanging rods 19 are extruded to move outwards due to the cambered surface shape of the upper edge of the transport frame 7 and the bottom faces of the hanging rods 19, the conveying frame 7 is hung below the transverse conveying plate 5, the stepping motor 2 is turned on again, the high-temperature-resistant lead screw 10 is driven to rotate, the transverse conveying plate 5 is retracted into the device, the furnace box 3 is closed, the electric heating device 9 is turned on to perform heating work, after the heating is completed, the transverse conveying plate 5 is pushed out again, the upper supporting plate 12 is consistent with the height of the bottom surface of the conveying frame 7 in a hung state due to the initial height pushed by the compression spring 15, after the processing is completed, the transverse conveying plate 5 is stretched out, the top ends of the two hook rods 19 are pushed in after the cooling is completed, the bottom ends of the hook rods 19 are separated from the limiting hook grooves 6 to relieve the limitation, the conveying frame 7 with the limitation is released by being supported by the compression spring 15 and the upper supporting plate 12 of the special conveying vehicle 8, and the processed workpiece is pushed away by the special conveying vehicle.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. a novel easy-to-operate annealing furnace, comprising a furnace box (3), a transport frame (7) and a special transport vehicle (8), characterized in that: the upper and lower end faces of the inner wall of the furnace box (3) are fixed An electric heating device (9) is installed, both sides of the inner wall of the furnace box (3) are installed with a high temperature resistant lead screw (10) through bearings, and one end of the high temperature resistant lead screw (10) is fixedly installed with a high temperature resistant lead screw (10) located in the furnace box. (3) The stepping motor (2) on the surface, the inner side of the two high temperature resistant lead screws (10) is fixedly connected with a lateral transport plate (5) through the high temperature resistant lead screw sleeve (11), the lateral transport plate (5) The bottom surface of the top is provided with a limit hanging groove (18), and both sides of the limit hanging groove (18) are provided with hook rod movable grooves (21), and the inside of the hook rod movable groove (21) passes through The short shaft (20) is connected with a hook rod (19);

Limiting hook grooves (6) are provided on both sides of the top of the transport frame (7), the top of the transport frame (7) is snapped into the inner side of the limit hanging groove (18), and the two hook bars The bottom ends of (19) are all snapped into the inner side of the limit hook groove (6);

The special transport vehicle (8) comprises a trolley bottom plate (16), an upper support plate (12) is installed above the trolley bottom plate (16), and the bottom surface of the upper support plate (12) is symmetrically provided with two strips A limit groove (22), a connecting block (13) is slidably connected to the inner side of the strip limit groove (22), and two fixed blocks ( 23), a lever-type push rod (14) is installed on the inner side of the two fixing blocks (23), and the position near the middle on both sides of the lever-type push rod (14) and the top of the fixing block (23) pass through the rotating shaft The two bottom ends of the lever-type push rod (14) are connected with the bottom end of the connecting block (13) through a rotating shaft.

2. A new type of annealing furnace that is easy to operate according to claim 1, characterized in that: the hook rod (19) and the short shaft (20) are connected by a torsion spring, and the bottom of the hook rod (19) is connected by a torsion spring. The upper side of the end is provided with a circular arc surface.

3. A new type of annealing furnace that is easy to operate according to claim 1, characterized in that: the inside of the electric heating device (9) is provided with an electric heating wire, and the outer edge of the upper end face of the transport frame (7) A circular arc surface is provided, and supporting feet (4) are fixedly installed on the four end corners of the bottom surface of the furnace box (3).

4. A new type of annealing furnace that is easy to operate according to claim 1, characterized in that: the four end corners of the bottom surface of the trolley bottom plate (16) are fixedly installed with rollers (17).

5. A new type of annealing furnace that is easy to operate according to claim 1, characterized in that: an electrical box (1) is fixedly installed on the upper end face of the furnace box (3), and the electrical box (1), the step The inlet motor (2) is electrically connected with the electric heating device (9).

6. A new type of annealing furnace that is easy to operate according to claim 1, characterized in that sixteen annealing furnaces are uniformly and fixedly connected between the bottom surface of the upper support plate (12) and the upper end surface of the trolley bottom plate (16). Compression spring (15).