CN112853474A - Automatic thermal field dismantling equipment for Czochralski single crystal silicon furnace - Google Patents
Automatic thermal field dismantling equipment for Czochralski single crystal silicon furnace Download PDFInfo
- Publication number
- CN112853474A CN112853474A CN202110217149.5A CN202110217149A CN112853474A CN 112853474 A CN112853474 A CN 112853474A CN 202110217149 A CN202110217149 A CN 202110217149A CN 112853474 A CN112853474 A CN 112853474A
- Authority
- CN
- China
- Prior art keywords
- manipulator
- gear
- rotary
- parallel
- servo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 20
- 239000003638 chemical reducing agent Substances 0.000 claims description 45
- 230000007246 mechanism Effects 0.000 claims description 24
- 230000005540 biological transmission Effects 0.000 claims description 13
- 230000001681 protective effect Effects 0.000 claims description 12
- 238000010073 coating (rubber) Methods 0.000 claims description 11
- 230000002669 organ and tissue protective effect Effects 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 229920001971 elastomer Polymers 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 229920002379 silicone rubber Polymers 0.000 claims description 2
- 238000001816 cooling Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 20
- 229910002804 graphite Inorganic materials 0.000 description 20
- 239000010439 graphite Substances 0.000 description 20
- 230000009471 action Effects 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 230000000007 visual effect Effects 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010705 motor oil Substances 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Manipulator (AREA)
Abstract
The invention belongs to the technical field of photovoltaic and semiconductor, and discloses automatic dismantling equipment for a thermal field of a czochralski method monocrystalline silicon furnace. The manipulator lifting device comprises parallel manipulators, rotating manipulators, manipulator lifting devices and a horizontal servo moving manipulator, wherein the manipulator lifting devices are respectively arranged on two sides of the horizontal servo moving manipulator, the parallel manipulators are arranged at the bottom of one manipulator lifting device, and the rotating manipulators are arranged at the bottom of the other manipulator lifting device; the horizontal servo mobile mechanical arm is provided with a lifting device, and the bottom of the lifting device is connected with a servo slewing device; the whole equipment is arranged on the traveling AGV, and the whole equipment is also externally provided with a material trolley. The automatic dismantling equipment for the thermal field of the single crystal silicon furnace provided by the invention realizes the automatic dismantling of the thermal field of the single crystal silicon furnace under the high-temperature condition by applying an industrial automation technology and a high-temperature resistant material, can effectively shorten the cooling waiting time, and improves the service efficiency of the single crystal silicon furnace.
Description
Technical Field
The invention belongs to the technical field of photovoltaic and semiconductor, and relates to automatic dismantling equipment for a thermal field of a Czochralski method monocrystalline silicon furnace. In particular to an automatic dismantling device for main components of a thermal field of a czochralski method single crystal silicon furnace.
Background
The monocrystalline silicon wafer is a main raw material in photovoltaic and semiconductor industries. The Czochralski method is also called Cz method, which is the main preparation method of the existing monocrystalline silicon round crystal, and the monocrystalline silicon round crystal prepared by the Czochralski method accounts for more than 80 percent of the total production energy. With the development of the semiconductor and photovoltaic industries, wafers with large sizes of 182mm and 210mm become the industry trend. The automatic thermal field dismantling equipment of the single crystal silicon furnace provided by the invention is just for the single crystal silicon furnace used for producing the large-size round crystal.
At present, a Czochralski method is adopted to produce monocrystalline silicon round crystals, and a furnace body and a thermal field in the furnace need to be removed for cleaning and maintenance after crystal pulling is finished each time. The crystal pulling production period is about 40 hours generally, and the temperature in the furnace can reach 400 ℃ at most after the furnace body is automatically opened. At present, the dismantling work of the thermal field element is completely completed manually, the furnace body needs to be naturally cooled for about 4-6 hours after being opened, and the thermal field dismantling work can be carried out until the temperature is reduced to below 60 ℃. The time waiting for cooling wastes about 10% of the capacity of the single crystal silicon furnace.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides the automatic dismantling equipment for the thermal field of the monocrystalline silicon furnace by the czochralski method.
The above purpose of the invention is realized by the following technical scheme:
the automatic dismantling equipment for the thermal field of the czochralski method single crystal silicon furnace comprises parallel manipulators, rotary manipulators, manipulator lifting devices and horizontal servo moving mechanical arms, wherein the manipulator lifting devices are respectively arranged on two sides of each horizontal servo moving mechanical arm, the parallel manipulators are arranged at the bottom of one manipulator lifting device, and the rotary manipulators are arranged at the bottom of the other manipulator lifting device; the horizontal servo mobile mechanical arm is provided with a lifting device, and the bottom of the lifting device is connected with a servo slewing device; the whole equipment is arranged on the traveling AGV, and the whole equipment is also externally provided with a material trolley.
The parallel manipulator comprises a parallel manipulator servo driving device, a parallel manipulator guiding device, a parallel manipulator clamping jaw and a parallel manipulator frame; parallel manipulator servo drive is connected with parallel manipulator guider, parallel manipulator guider bottom sets up parallel manipulator clamping jaw, parallel manipulator frame mount parallel manipulator guider is terminal, connects two adjacent parallel manipulator guider through parallel manipulator frame, improves whole rigidity.
The parallel manipulator servo driving device comprises a servo motor A, the servo motor A is connected with a speed reducer, a driving bevel gear is fixedly mounted on an output shaft of the speed reducer, the driving bevel gear is arranged in a gear box, four symmetrical driven bevel gears are further arranged in the gear box, the four driven bevel gears are respectively connected with the driving bevel gears, and the driven bevel gears are further connected with a bearing A; the top of the parallel manipulator servo driving device is also provided with a connecting support, and the parallel manipulator servo driving device is connected with the manipulator lifting device through the connecting support.
The parallel manipulator guide devices are arranged in 4 groups and are symmetrically arranged on four side surfaces of the gear box respectively, and each group of parallel manipulator guide devices comprises a coupler, a ball screw A and a guide shaft A; the ball screw A is connected with the driven bevel gear through a coupler, and a nut of the ball screw A is fixedly connected with a clamping jaw of the parallel manipulator; each group of parallel manipulator guide devices is provided with two guide shafts A, the front ends of the two guide shafts A are provided with connecting blocks, and the rear ends of the two guide shafts A are provided with connecting plates A; a rigid frame is formed to support the ball screw A; screw rod fixing and supporting units are respectively arranged on the four side surfaces of the gear box; the lead screw fixing and supporting unit provides a slewing bearing for the ball lead screw A;
the parallel manipulator clamping jaws are provided with 4 groups and are respectively correspondingly connected with 4 groups of parallel manipulator guiding devices, and each group of parallel manipulator clamping jaws are connected with a ball screw A nut of each group of parallel manipulator guiding devices; the bottom of each group of parallel manipulator clamping jaws is provided with a guide connecting seat, a linear bearing A is arranged on the guide connecting seat, the lower end of the guide connecting seat is connected with an upper connecting plate, and the lower end of the upper connecting plate is provided with two rubber coating shafts; the bottom of the rubber coating shaft is connected with a limiting plate; the two rubber coating shafts, the upper connecting plate and the limiting plate form a quadrilateral frame for clamping the thermal field element; a supporting shaft A is arranged in the quadrilateral frame and used for stabilizing the parallelogram frame structure.
The rubber-coated shaft is made of steel rib silicon-coated rubber, and the limiting plate is made of PTFE material and used for supporting the bottom of a part of thermal field elements during grabbing.
The servo driving device of the parallel manipulator is powered by a servo motor A through a speed reducer. The driving bevel gear is fixedly arranged on an output shaft of the speed reducer, drives four symmetrically-arranged driven bevel gears, and evenly distributes the power of the motor to four parallel manipulator guiding devices; bearing a provides rotational support for the driven bevel gear. The servo motor A drives and controls the parallel manipulator clamping jaws to reciprocate through the speed reducer, the driving bevel gear, the driven bevel gear, the coupler and the ball screw A, and the displacement and the clamping force of the parallel manipulator clamping jaws are accurately controlled through controlling the servo motor A. The linear bearing A is matched with the guide shaft A to provide guidance and support for the parallel manipulator clamping jaws.
The rotary manipulator comprises a rotary manipulator driving mechanism and a rotary manipulator clamping jaw; the rotary manipulator driving mechanism is arranged at the upper end of the rotary manipulator, and the rotary manipulator clamping jaw is arranged at the lower end of the rotary manipulator; the rotary manipulator driving mechanism comprises a servo motor B, a speed reducer A, a driving gear, a sun gear, a planet carrier, a gear shaft and a bearing seat A; the servo motor B is connected with the speed reducer A, and the driving gear is fixedly connected with an output shaft of the speed reducer A; the driving gear is meshed with a large-end gear of a sun gear, and a small-end gear of the sun gear is meshed with planet gears of three groups of rotary manipulator clamping jaws which are uniformly distributed on the circumference; the rotary manipulator clamping jaw and the gear shaft are arranged on the planet carrier; the gear shaft is connected with a torque retainer arranged on the bearing seat A; the bearing plate is connected with the planet carrier through the bearing plate bracket; a rotary encoder is further arranged at the torque retainer;
a rolling bearing is arranged in the bearing plate and provides a rotary support for a transmission shaft of the clamping jaw of the rotary manipulator; the bearing seat A is also provided with a bearing B, the top of the rotary manipulator driving mechanism is provided with an organ protective cover, the outside of the rotary manipulator driving mechanism is provided with a protective cover, and heat insulation and dust prevention protection are provided through the organ protective cover and the protective cover; the rotary manipulator driving mechanism is also provided with an upper mounting plate and a lower mounting plate. And a supporting shaft B is arranged between the upper mounting plate and the lower mounting plate, and the rotary manipulator driving mechanism is connected with the manipulator lifting device through the upper mounting plate, the lower mounting plate and the supporting shaft B.
The rotary manipulator clamping jaws are provided with 3 groups, and each group of rotary manipulator clamping jaws comprises a bearing seat B, a planet wheel, a transmission shaft and a spring; the planet gear is connected with the sun gear, the planet gear is arranged on the planet carrier through a bearing seat B, the planet gear is fixedly connected with a transmission shaft, the tail end of the bottom of the transmission shaft is provided with a crank, the crank is connected with the fingers of the clamping jaw, and the outer part of the bottom of the fingers of the clamping jaw is provided with a protective sleeve; the upper end of the clamping jaw finger is provided with a connecting plate B, a sliding shaft is arranged between the clamping jaw finger and the crank, and the clamping jaw finger forms a parallelogram frame through the connecting plate B and the sliding shaft, so that the radial bearing capacity of the clamping jaw finger is improved; the spring and the sliding shaft are coaxially arranged, and the spring is compressed when the fingers of the clamping jaw slide upwards to provide reset spring force for the fingers of the clamping jaw.
The fingers of the clamping jaws provided with the protective sleeves are in sliding fit with the crank, and when the thermal field element bolt is unscrewed, the thermal field element bolt can ascend along with the continuous unscrewing of the thermal field element and is provided with restoring force by the spring.
During operation, the rotary manipulator driving mechanism uses a servo motor B and a speed reducer A as power sources, and the servo motor B transmits power to the planet wheel through the speed reducer A, the driving gear and the sun gear to drive the clamping jaw of the rotary manipulator to rotate. Along with the rotation of the clamping jaw of the rotary manipulator, the clamping jaw fingers connected with the crank swing from outside to inside to clamp a workpiece. The torque retainer can provide fixed friction torque, and the planet wheel can not revolve before the clamping jaw fingers reach certain torque for clamping the workpiece. When the clamping torque exceeds the upper limit of the torque retainer, the additional rotating torque drives the planet wheel to start revolution, and the workpiece clamped by the fingers of the clamping jaw rotates along with the additional rotating torque to achieve the purpose of loosening. When the planetary gear starts revolution, the gear shaft rotates together with the carrier, and the rotation angle of the gear shaft is detected by the rotary encoder, thereby indirectly detecting the rotation angle of the unscrewing.
The manipulator lifting device comprises a servo motor C, a ball screw B, a guide shaft B and a linear bearing B; the servo motor C is connected with a speed reducer B, the speed reducer B is arranged on the mounting seat, an output shaft of the speed reducer B is fixedly connected with a driving gear A, the driving gear A is meshed with a driven gear A, and a lead screw nut of the ball screw B is arranged on the driven gear A; an upper fixing plate is arranged at the upper end of the ball screw B, a lower fixing plate is arranged at the bottom end of the ball screw B, and three guide shafts B are arranged between the upper fixing plate and the lower fixing plate; the three guide shafts B are parallel to the ball screw B; linear bearing B fixed mounting provides the lift direction for guiding axle B on the mount pad.
The servo motor C drives a screw nut of the ball screw B to rotate through the speed reducer B, the driving gear A and the driven gear A, so that a screw of the ball screw B makes linear motion along the axial direction. Three guide shafts B parallel to the ball screw B, an upper fixing plate and a lower fixing plate fixed at two ends form a rigid frame, and the rigid frame slides in the linear bearing B to provide guidance for lifting. The lifting stroke is 1000 mm.
The horizontal servo mobile mechanical arm comprises a servo motor D, a fixed support and a ball screw C; the servo motor C is arranged on the fixed support through a speed reducer D, an output shaft of the speed reducer C is fixedly connected with a driving gear B, the driving gear B is meshed with a driven gear B, and a lead screw nut of a ball screw C is arranged on the driven gear; the ball screw C is arranged on a cross beam, two ends of the cross beam are respectively connected with a manipulator lifting device, and the lower end of the cross beam is provided with a linear guide rail; and the tail end of the horizontal servo moving mechanical arm is provided with an industrial CCD camera for automatically positioning the thermal field element.
The servo motor D drives a screw nut of the ball screw C to rotate through the speed reducer C, the driving gear B and the driven gear B, so that a screw of the ball screw C performs linear motion in the horizontal direction. And the linear guide rail arranged below the cross beam provides motion guide for the horizontal servo mobile mechanical arm.
The industrial CCD camera, the servo motor A, the servo motor B, the servo motor C, the servo motor D, the servo slewing device and the rotary encoder are respectively connected with the PLC system; the whole equipment adopts a PLC control system to perform action control. The industrial CCD camera collects image information for visual positioning, and the PLC system controls each servo motor to drive the execution part to complete preset actions according to preset system programs according to the visual positioning information.
Furthermore, the lifting device adopts a general servo lifting structure with a stroke of 1000 mm; the lifting device is used for lifting the whole equipment.
Further, the servo slewing device adopts a servo slewing table;
further, the traveling AGV adopts an AGV;
further, the material trolley is a material trolley;
the automatic dismantling equipment for the thermal field of the czochralski method monocrystalline silicon furnace provided by the invention has the following capabilities: 1. the high temperature is resisted, and the temperature of a thermal field device can work under the condition of 200 ℃; 2. the cleaning is clean and pollution-free, and no engine oil, metal powder and the like enter a thermal field element to cause pollution in the working process; 3. the large working stroke can be used for grabbing parts with different sizes and the outer diameter of 1400-80 mm; 4. the screw thread connecting piece has the capability of being unscrewed in a rotating way, and can be taken out; 5. the output force and the stroke of the clamping jaw are controllable, so that the workpiece is prevented from being damaged; 6. the contact point of the clamping jaw and the workpiece is made of elastic material, so that the workpiece is prevented from being scratched.
Compared with the prior art, the invention has the beneficial effects that:
compared with the existing artificial single crystal furnace thermal field dismantling mode, the automatic dismantling equipment provided by the invention can effectively reduce the idle time of a single crystal silicon furnace and the like. After the demolition temperature is increased from 60 ℃ to 200 ℃, the waiting cooling time is shortened from 5 hours to 2 hours. For safety reasons, the automatic dismantling equipment has a slow action speed, 45 minutes are needed for completing one dismantling operation, and only 20 minutes are needed for manual dismantling. Compared with the automatic thermal field dismantling mode (2 hours and 45 minutes) provided by the invention and the existing manual dismantling mode (5 hours and 20 minutes), the maintenance time can be saved by 2 hours and 35 minutes, and the maintenance time is 2.5 hours. The single crystal silicon furnace works for 40 hours in a production period, the maintenance is carried out for 5 hours, and the total time is 45 hours, so the use efficiency of the equipment can be improved by about 5.5 percent by adopting the automatic thermal field dismantling mode provided by the invention. For a 30GW scale plant, capacity is improved by about 1.6GW.
Drawings
FIG. 1 is a structural diagram of an automatic dismantling device of a thermal field of a single crystal silicon furnace.
Fig. 2 is a diagram of a parallel robot according to the present invention.
Figure 3 is a cross-sectional view of a parallel robot of the present invention.
Fig. 4 is a structural view of a rotary robot according to the present invention.
Fig. 5 is a sectional view of the rotary robot of the present invention.
Fig. 6 is a structural view of the robot lifting device of the present invention.
Fig. 7 is a structural view of the horizontal servo moving robot of the present invention.
FIG. 8 is a schematic view of the working state of the automatic dismantling device of the thermal field of the single crystal silicon furnace of the invention.
In the figure: 1. parallel manipulators, 2 rotary manipulators, 3 manipulator lifting devices, 4 horizontal servo mobile mechanical arms, 5 lifting devices, 6 servo slewing devices, 7 walking AGV cars, 8 material trolleys, 101 parallel manipulator servo driving devices, 102 parallel manipulator guiding devices, 103 parallel manipulator clamping jaws, 104 parallel manipulator frames, 1101 connecting supports, 1102 servo motors A, 1103 speed reducers, 1104 gear boxes, 1105 driving bevel gears, 1106 driven bevel gears, 1107 bearings A, 1201 shaft couplings, 1202 connecting blocks, 1203 lead screw fixing and supporting units, 1204 ball lead screws A, 1205 guiding shafts A, 1206 connecting plates A, 1301 linear bearings A, 1302 guiding connecting seats, 1303 upper connecting plates, 1304 supporting shafts A, 1305 rubber coating shafts, 1306 limiting plates, 201 rotary manipulator driving mechanisms, 202. rotating manipulator clamping jaws, 2101, organ protection covers, 2102, upper mounting plates, 2103, supporting shafts B, 2104, servo motors B, 2105, speed reducers A, 2106, lower mounting plates, 2107, driving gears, 2108, bearing plates, 2109, protection covers, 2110, bearing plate supports, 2111, planet carriers, 2112 sun gears, 2113, bearings B, 2114, bearing seats A, 2115, gear shafts, 2116, torque retainers, 2117, rotary encoders, 2201, planet gears, 2202, bearing seats B, 2203, transmission shafts, 2204, cranks, 2205, connecting plates 220B, 2206, sliding shafts, 2207 springs, 2208 clamping jaw fingers, 2209 protection covers, 301, mounting seats, 302, speed reducers B, 303, servo motors C, 304, guide shafts B, 305, ball screws B, 306, upper fixing plates, driving gears A, 308, linear bearings B, 309, driven gears A, 310, 401. an industrial CCD camera comprises 402 a beam, 403 a linear guide rail, 404 a fixed support, 405 a speed reducer C, 406 a servo motor D, 407 a ball screw C, 408 a driving gear B, 409 a driven gear B.
Detailed Description
The invention is described in more detail below with reference to specific examples, without limiting the scope of the invention. Unless otherwise specified, the experimental methods adopted by the invention are all conventional methods, and experimental equipment, materials, reagents and the like used in the experimental method can be obtained from commercial sources. In this embodiment, the industrial CCD camera, the servo motor a, the servo motor B, the servo motor C, the servo motor D, the servo slewing device, and the rotary encoder, which are connected to the PLC system, do not limit specific models, and it is sufficient to realize the working process thereof.
Example 1
An automatic dismantling device for a thermal field of a Czochralski single crystal silicon furnace is shown in figures 1-8; the manipulator lifting device comprises parallel manipulators 1, rotary manipulators 2, manipulator lifting devices 3 and a horizontal servo moving manipulator 4, wherein the manipulator lifting devices 3 are respectively arranged on two sides of the horizontal servo moving manipulator 4, the parallel manipulator 1 is arranged at the bottom of one manipulator lifting device 3, and the rotary manipulator 2 is arranged at the bottom of the other manipulator lifting device 3; the horizontal servo mobile mechanical arm 4 is provided with a lifting device 5, and the bottom of the lifting device 5 is connected with a servo slewing device 6; the whole equipment is arranged on a walking AGV (automatic guided vehicle) 7, and the whole equipment is also externally provided with a material trolley 8.
The parallel manipulator 1 comprises a parallel manipulator servo drive device 101, a parallel manipulator guide device 102, a parallel manipulator clamping jaw 103 and a parallel manipulator frame 104; the parallel manipulator servo driving device 101 is connected with a parallel manipulator guide device 102, parallel manipulator clamping jaws 103 are arranged at the bottom of the parallel manipulator guide device 102, the parallel manipulator frame 104 is installed at the tail end of the parallel manipulator guide device 102, and the two adjacent parallel manipulator guide devices 102 are connected through the parallel manipulator frame 104, so that the overall rigidity is improved.
The parallel manipulator servo driving device 101 comprises a servo motor A1102, wherein the servo motor A1102 is connected with a speed reducer 1103, an output shaft of the speed reducer 1103 is fixedly provided with a driving bevel gear 1105, the driving bevel gear 1105 is arranged in a gear box 1104, four symmetrical driven bevel gears 1106 are further arranged in the gear box 1104, the four driven bevel gears 1106 are respectively connected with the driving bevel gear 1105, and the driven bevel gears 1106 are further connected with a bearing A1107; the top of the parallel manipulator servo driving device 101 is further provided with a connecting support 1101, and the parallel manipulator servo driving device 101 is connected with the manipulator lifting device 3 through the connecting support 1101.
The parallel manipulator guide devices 102 are arranged in 4 groups and symmetrically arranged on four side surfaces of the gear box 1104 respectively, and each group of parallel manipulator guide devices 102 comprises a coupler 1201, a ball screw A1204 and a guide shaft A1205; the ball screw A1204 is connected with a driven bevel gear 1106 through a coupler 1201, and the nut of the ball screw A1204 is fixedly connected with the parallel manipulator clamping jaws 103; each group of parallel manipulator guide devices 102 is provided with two guide shafts A1205, the front ends of the two guide shafts A1205 are respectively provided with a connecting block 1202, and the rear ends of the two guide shafts A1205 are respectively provided with a connecting plate A1206; a rigid frame is formed to support the ball screw a 1204; screw rod fixing and supporting units 1203 are respectively arranged on four sides of the gear box 1104; the screw fixing and supporting unit 1203 provides a slewing bearing for the ball screw a 1204;
the parallel manipulator clamping jaws 103 are provided with 4 groups and are respectively correspondingly connected with 4 groups of parallel manipulator guiding devices 102, and each group of parallel manipulator clamping jaws 103 is connected with a ball screw A1204 of each group of parallel manipulator guiding devices 102 through a nut; the bottom of each group of parallel manipulator clamping jaws 103 is provided with a guide connecting seat 1302, a linear bearing A1301 is arranged on the guide connecting seat 1302, the lower end of the guide connecting seat 1302 is connected with an upper connecting plate 1303, and the lower end of the upper connecting plate 1303 is provided with two rubber coating shafts 1305; the bottom of the rubber coating shaft 1305 is connected with a limit plate 1306; the two rubber coating shafts 1305, the upper connecting plate 1303 and the limiting plate 1306 form a quadrilateral frame for clamping the thermal field element; a supporting shaft A1304 is arranged in the quadrilateral frame and used for stabilizing the parallelogram frame structure.
The rubber coating shaft 1305 is made of steel-coated silicon rubber, and the limiting plate 1306 is made of PTFE material and used for supporting the bottom of a part of the thermal field element during grabbing.
The parallel robot servo drive device 102 is powered by a servo motor a 1102 through a reduction gear 1103. The driving bevel gear 1105 is fixedly arranged on the output shaft of the reducer 1103, and drives four symmetrically arranged driven bevel gears 1106 to equally distribute the power of the motor to the four parallel manipulator guiding devices 102; bearing a 1107 provides rotational support for the driven bevel gear 1106. The servo motor a 1102 drives and controls the parallel manipulator jaws 103 to reciprocate through a speed reducer 1103, a driving bevel gear 1105, a driven bevel gear 1106, a coupling 1201 and a ball screw a 1204, and the displacement and the clamping force of the parallel manipulator jaws 103 are precisely controlled by controlling the servo motor a 1102. Linear bearings a 1301 cooperate with the guide axis a 1205 to provide guidance and support for the parallel robot jaws 103.
The rotary manipulator 2 comprises a rotary manipulator driving mechanism 201 and a rotary manipulator clamping jaw 202; the rotary manipulator driving mechanism 201 is arranged at the upper end of the rotary manipulator 2, and the rotary manipulator clamping jaw 202 is arranged at the lower end of the rotary manipulator 2; the rotary manipulator driving mechanism 201 comprises a servo motor B2104, a speed reducer A2105, a driving gear 2107, a sun gear 2112, a planet carrier 2111, a gear shaft 2115 and a bearing seat A2114; the servo motor B2104 is connected with a speed reducer A2105, and a driving gear 2107 is fixedly connected with an output shaft of the speed reducer A2105; the driving gear 2107 is meshed with a large-end gear of the sun gear 2112, and a small-end gear of the sun gear 2112 is meshed with planet gears of three groups of rotary manipulator clamping jaws 202 uniformly distributed on the circumference; the rotary manipulator jaw 202 and the gear shaft 2115 are mounted on the planet carrier 2111; the gear shaft 2115 is connected to a torque retainer 2116 mounted on the bearing seat a 2114; the bearing plate 2108 is connected to the planet carrier 2111 via a bearing plate bracket 2110; a rotary encoder 2117 is further arranged at the torque retainer 2116;
a rolling bearing is arranged in the bearing plate 2108 and provides a rotary support for a transmission shaft 2203 of the rotary manipulator clamping jaw 202; a bearing B2113 is further arranged at the bearing seat A2114, an organ protective cover 2101 is arranged at the top of the rotary manipulator driving mechanism 201, a protective cover 2109 is arranged outside the rotary manipulator driving mechanism, and heat insulation and dust prevention protection is provided through the organ protective cover 2101 and the protective cover 2109; the rotary manipulator driving mechanism 201 is also provided with an upper mounting plate 2102 and a lower mounting plate 2106. A supporting shaft B2103 is provided between the upper mounting plate 2102 and the lower mounting plate 2106, and the rotary manipulator driving mechanism 201 is connected to the manipulator lifting device 3 through the upper mounting plate 2102, the lower mounting plate 2106, and the supporting shaft B2103.
The rotary manipulator clamping jaws 202 are arranged in 3 groups, and each group of rotary manipulator clamping jaws 202 comprises a bearing seat B2202, a planet gear 2201, a transmission shaft 2203 and a spring 2207; the planet wheel 2201 is connected with a sun wheel 2112, the planet wheel 2201 is arranged on a planet carrier 2111 through a bearing seat B2202, the planet wheel 2201 is fixedly connected with a transmission shaft 2203, the tail end of the bottom of the transmission shaft 2203 is provided with a crank 2204, the crank 2204 is connected with a clamping jaw finger 2208, and the outside of the bottom of the clamping jaw finger 2208 is provided with a protective sleeve 2209; a connecting plate B2205 is arranged at the upper end of the clamping jaw finger 2208, a sliding shaft 2206 is arranged between the clamping jaw finger 2208 and a crank 2204, and the clamping jaw finger 2208 forms a parallelogram frame through the connecting plate B2205 and the sliding shaft 2206, so that the radial bearing capacity of the clamping jaw finger 2208 is improved; spring 2207 is mounted coaxially with slide shaft 2206, and spring 2207 is compressed as jaw finger 2208 slides upward, providing a return spring 2207 force to jaw finger 2208.
The fingers 2208 of the jaws, fitted with a protective sleeve 2209, slidably engage the crank 2204 to allow the thermal field element pins to be unscrewed while being raised with continued unscrewing of the thermal field element, and are spring-loaded 2207 to provide the return force. The protective sleeve 2209 is made of high-temperature-resistant rubber.
In operation, the rotary manipulator driving mechanism 201 uses the servo motor B2104 and the speed reducer a 2105 as power sources, and the servo motor B2104 transmits power to the planetary gear 2201 through the speed reducer a 2105, the drive gear 2107, and the sun gear 2112, thereby driving the rotary manipulator jaw 202 to rotate. As the rotary robot jaw 202 rotates, the jaw fingers 2208 attached to the crank 2204 swing from outside to inside, gripping the workpiece. Torque retainer 2116 can provide a fixed friction torque, with the planet 2201 not revolving before the jaw fingers 2208 reach a certain clamping torque on the workpiece. When the clamping torque exceeds the upper limit of the torque retainer 2116, the additional rotating torque drives the planet wheel 2201 to revolve, and the workpiece clamped by the clamping jaw fingers 2208 rotates along with the rotation to achieve the purpose of loosening. When the planetary gear 2201 starts its revolution, the gear shaft 2115 rotates together with the carrier 2111, and the rotational angle of the gear shaft 2115 is detected by the rotary encoder 2117, whereby the rotation angle of the unscrewing is indirectly detected.
The manipulator lifting device 3 comprises a servo motor C303, a ball screw B305, a guide shaft B304 and a linear bearing B308; the servo motor C303 is connected with a speed reducer B302, the speed reducer B302 is arranged on a mounting seat, an output shaft of the speed reducer B302 is fixedly connected with a driving gear A307, the driving gear A307 is meshed with a driven gear A309, and a screw nut of the ball screw B305 is mounted on the driven gear A309; an upper fixing plate 306 is arranged at the upper end of the ball screw B305, a lower fixing plate 310 is arranged at the bottom end of the ball screw B, and three guide shafts B304 are arranged between the upper fixing plate 306 and the lower fixing plate 310; the three guide shafts B304 are parallel to the ball screw B305; the linear bearing B308 is fixedly mounted on the mounting base 301 to provide lifting guidance for the guide shaft B304.
The servo motor C303 drives the screw nut of the ball screw B305 to rotate through the reduction gear B302, the drive gear a 307, and the driven gear a 309, and linearly moves the screw of the ball screw B305 in the axial direction. Three guide shafts B304 parallel to the ball screw B305, and an upper fixing plate 306 and a lower fixing plate 310 fixed to both ends constitute a rigid frame, slide in a linear bearing B308, and provide a guide for the elevating operation. The lifting stroke is 1000 mm.
The horizontal servo moving mechanical arm 4 comprises a servo motor D406, a fixed bracket 404 and a ball screw C407; the servo motor D406 is arranged on the fixed support 404 through a speed reducer C405, an output shaft of the speed reducer C405 is fixedly connected with a driving gear B408, the driving gear B408 is meshed with a driven gear B409, and a screw nut of a ball screw C407 is arranged on the driven gear 409; the two ends of the ball screw C407 are respectively provided with a cross beam 402, the ball screw C407 is arranged on the cross beam 402, the two ends of the cross beam 402 are respectively connected with a manipulator lifting device 3, and the lower end of the cross beam 402 is provided with a linear guide rail 403; an industrial CCD camera 401 is arranged at the tail end of the horizontal servo mobile mechanical arm 4 and used for automatically positioning the thermal field element.
The servo motor D406 drives the screw nut of the ball screw C407 to rotate through the reduction gear C405, the drive gear B408, and the driven gear B409, and linearly moves the screw of the ball screw C407 in the horizontal direction. Linear guides 403 mounted below the cross beam 402 provide motion guidance for the horizontal servo-motion robot arm 4.
The industrial CCD camera 401, the servo motor A1102, the servo motor B2104, the servo motor C303, the servo motor D406, the servo slewing device 6 and the rotary encoder 2117 are respectively connected with a PLC system; the whole equipment adopts a PLC control system to perform action control. The industrial CCD camera 401 collects image information for visual positioning, and the PLC system controls each servo motor to drive the execution part to complete preset actions according to preset system program according to the visual positioning information.
Further, the lifting device 5 adopts a general servo lifting structure with a stroke of 1000 mm; the lifting device 5 is used for lifting the whole equipment.
Further, the servo slewing device 6 adopts a servo slewing table;
further, the traveling AGV 7 is an AGV;
further, the material trolley 8 is a material trolley;
the working process of the automatic dismantling equipment of the thermal field of the czochralski method single crystal silicon furnace comprises the following steps:
under the guidance of an operator, the traveling AGV 7 drives into a dismounting station, the lifting device 5 and the manipulator lifting device 3 rise to the highest point, the servo slewing device 6 rotates, one end, provided with the industrial CCD camera 401, of the horizontal servo moving manipulator 4 moves to the position above the thermal field, visual positioning is carried out on the thermal field element, and the coordinate position of the thermal field element is calculated by taking the thermal field automatic dismounting equipment as the origin of coordinates. After positioning, the servo slewing device 6 cooperates with the horizontal servo mobile robot arm 4 to move the parallel robot 1 above the thermal field and align with the center of the thermal field. The manipulator lifting device 3 descends to enable the parallel manipulator 1 to reach the grabbing height, the upper graphite fiber heat-insulating layer of the thermal field is grabbed, the manipulator lifting device 3 ascends, and the servo slewing device 6 and the horizontal servo mobile manipulator arm 4 are matched to move to carry the upper graphite fiber heat-insulating layer to the material trolley 8. Repeating the above actions, grabbing and carrying the graphite crucible and the middle-layer graphite fiber heat-insulating layer to the material trolley 8. The filled material trolley 8 is manually pushed away and replaced by an empty material trolley 8.
The servo slewing device 6 and the horizontal servo mobile mechanical arm 4 act in a matched mode, the center of the rotary mechanical arm 2 is aligned with one of four graphite bolts, the lifting device 5 and the mechanical arm lifting device 3 descend simultaneously, the rotary mechanical arm 2 reaches the height for grabbing the graphite bolt cover, the rotary mechanical arm 2 clamps the graphite bolt cover tightly, the thermal field automatic dismantling equipment of the single crystal silicon furnace acts in a matched mode, the graphite bolt cover is taken out, and the material trolley 8 is placed into the graphite bolt cover. And repeating the above actions, and taking out all four graphite bolt covers and the graphite bolts below the graphite bolt covers. When the graphite bolt is taken, the rotary manipulator 2 needs to perform unscrewing action after clamping the workpiece.
The servo slewing device 6 and the horizontal servo mobile mechanical arm 4 act in a matched mode to enable the parallel mechanical arm 1 to reach the position above a thermal field and align with the center of the thermal field, the parallel mechanical arm clamping jaw 103 moves inwards and contracts to a size smaller than the inner diameter of an upper graphite heater, the lifting device 5 and the mechanical arm lifting device 3 descend in a matched mode to enable the parallel mechanical arm 1 to reach the height for grabbing the upper graphite heater, then the parallel mechanical arm clamping jaw 103 moves outwards and opens, the outer side of the parallel mechanical arm clamping jaw 103 is close to the inner wall of the upper graphite heater, and the limiting plate 1306 clamps the lower edge of the inner hole of the upper graphite heater to take out the upper graphite heater and place the upper graphite heater into; and repeating the above steps to take out the lower-layer graphite heater.
The filled material trolley 8 is manually pushed away and replaced by an empty material trolley 8. So far, the main heat source elements in the thermal field of the monocrystalline silicon furnace have been completely removed. According to different thermal field structure designs, the automatic dismantling equipment of the thermal field of the monocrystalline silicon furnace can be selected to use the parallel manipulator 1 and the rotary manipulator 2 to take away the rest elements in the thermal field or wait for the natural cooling of the rest elements.
The embodiments described above are merely preferred embodiments of the invention, rather than all possible embodiments of the invention. Any obvious modifications to the above would be obvious to those of ordinary skill in the art, but would not bring the invention so modified beyond the spirit and scope of the present invention.
Claims (9)
1. The automatic dismantling equipment for the thermal field of the czochralski method single crystal silicon furnace is characterized by comprising parallel mechanical arms (1), rotary mechanical arms (2), mechanical arm lifting devices (3) and horizontal servo moving mechanical arms (4), wherein the mechanical arm lifting devices (3) are respectively arranged on two sides of each horizontal servo moving mechanical arm (4), the parallel mechanical arms (1) are arranged at the bottom of one mechanical arm lifting device (3), and the rotary mechanical arms (2) are arranged at the bottom of the other mechanical arm lifting device (3); a lifting device (5) is arranged on the horizontal servo moving mechanical arm (4), and the bottom of the lifting device (5) is connected with a servo rotating device (6); the whole equipment is arranged on a traveling AGV (7), and a material trolley (8) is also matched with the whole equipment;
the parallel manipulator (1) comprises a parallel manipulator servo driving device (101), a parallel manipulator guiding device (102), a parallel manipulator clamping jaw (103) and a parallel manipulator frame (104); the parallel manipulator servo driving device (101) is connected with a parallel manipulator guide device (102), a parallel manipulator clamping jaw (103) is arranged at the bottom of the parallel manipulator guide device (102), the tail end of the parallel manipulator guide device (102) is installed on a parallel manipulator frame (104), and two adjacent parallel manipulator guide devices (102) are connected through the parallel manipulator frame (104).
2. The automatic dismantling device for the thermal field of the czochralski method single crystal silicon furnace according to claim 1 is characterized in that the parallel manipulator servo driving device (101) comprises a servo motor A (1102), the servo motor A (1102) is connected with a speed reducer (1103), an output shaft of the speed reducer (1103) is fixedly provided with a driving bevel gear (1105), the driving bevel gear (1105) is arranged in a gear box (1104), four symmetrical driven bevel gears (1106) are further arranged in the gear box (1104), the four driven bevel gears (1106) are respectively connected with the driving bevel gear (1105), and the driven bevel gear (1106) is further connected with a bearing A (1107); the top of the parallel manipulator servo driving device (101) is also provided with a connecting support (1101), and the parallel manipulator servo driving device (101) is connected with the manipulator lifting device (3) through the connecting support (1101).
3. The automatic dismantling device for the thermal field of the czochralski method single crystal silicon furnace is characterized in that 4 groups of parallel manipulator guiding devices (102) are arranged and symmetrically arranged on four sides of a gear box (1104), and each group of parallel manipulator guiding devices (102) comprises a coupling (1201), a ball screw A (1204) and a guide shaft A (1205); the ball screw A (1204) is connected with a driven bevel gear (1106) through a coupling (1201), and a nut of the ball screw A (1204) is fixedly connected with a parallel manipulator clamping jaw (103); each group of parallel manipulator guide devices (102) is provided with two guide shafts A (1205), the front ends of the two guide shafts A (1205) are respectively provided with a connecting block (1202), and the rear ends of the two guide shafts A (1205) are respectively provided with a connecting plate A (1206); a rigid frame for supporting the ball screw A (1204); screw rod fixing and supporting units (1203) are respectively arranged on four side surfaces of the gear box (1104); the lead screw fixing and supporting unit (1203) provides a rotary support for the ball lead screw A (1204);
the parallel manipulator clamping jaws (103) are provided with 4 groups and are respectively correspondingly connected with 4 groups of parallel manipulator guiding devices (102), and each group of parallel manipulator clamping jaws (103) is in nut connection with a ball screw A (1204) of each group of parallel manipulator guiding devices (102); the bottom of each group of parallel manipulator clamping jaws (103) is provided with a guide connecting seat (1302), the guide connecting seat (1302) is provided with a linear bearing A (1301), the lower end of the guide connecting seat (1302) is connected with an upper connecting plate (1303), and the lower end of the upper connecting plate (1303) is provided with two rubber coating shafts (1305); the bottom of the rubber coating shaft (1305) is connected with a limit plate (1306); the two rubber coating shafts (1305), the upper connecting plate (1303) and the limiting plate (1306) form a quadrilateral frame, and a supporting shaft A (1304) is arranged in the quadrilateral frame; the rubber-coated shaft (1305) is made of steel rib-coated silicon rubber, and the limiting plate (1306) is made of PTFE material.
4. The automatic dismantling device for the thermal field of the czochralski single crystal silicon furnace according to claim 3, wherein the rotary manipulator (2) comprises a rotary manipulator driving mechanism (201), a rotary manipulator clamping jaw (202); the rotary manipulator driving mechanism (201) is arranged at the upper end of the rotary manipulator (2), and the rotary manipulator clamping jaw (202) is arranged at the lower end of the rotary manipulator (2); the rotary manipulator driving mechanism (201) comprises a servo motor B (2104), a speed reducer A (2105), a driving gear (2107), a sun gear (2112), a planet carrier (2111), a gear shaft (2115) and a bearing seat A (2114); the servo motor B (2104) is connected with the speed reducer A (2105), and the driving gear (2107) is fixedly connected with an output shaft of the speed reducer A (2105); the driving gear (2107) is meshed with a large-end gear of the sun gear (2112), and a small-end gear of the sun gear (2112) is meshed with planet gears of three groups of rotary manipulator clamping jaws (202) which are uniformly distributed on the circumference; a rotary manipulator clamping jaw (202) and a gear shaft (2115) are arranged on the planet carrier (2111); the gear shaft (2115) is connected with a torque retainer (2116) mounted on a bearing seat A (2114); the bearing plate (2108) is connected with the planet carrier (2111) through a bearing plate bracket (2110); a rotary encoder (2117) is also provided at the torque keeper (2116).
5. The automatic dismantling device for the thermal field of the czochralski single crystal silicon furnace according to claim 4, wherein a rolling bearing is provided in said bearing plate (2108) for providing a rotary support for a transmission shaft (2203) of the gripper (202) of the rotary robot; a bearing B (2113) is further arranged at the bearing seat A (2114), an organ protective cover (2101) is arranged at the top of the rotary manipulator driving mechanism (201), a protective cover (2109) is arranged outside the rotary manipulator driving mechanism, and heat insulation and dust prevention protection is provided through the organ protective cover (2101) and the protective cover (2109); the rotary manipulator driving mechanism (201) is also provided with an upper mounting plate (2102) and a lower mounting plate (2106); and a supporting shaft B (2103) is arranged between the upper mounting plate (2102) and the lower mounting plate (2106), and the rotary manipulator driving mechanism (201) is connected with the manipulator lifting device (3) through the upper mounting plate (2102), the lower mounting plate (2106) and the supporting shaft B (2103).
6. The automatic dismantling equipment for the thermal field of the czochralski method single crystal silicon furnace is characterized in that 3 groups of rotating mechanical arm clamping jaws (202) are arranged, and each group of rotating mechanical arm clamping jaws (202) comprises a bearing seat B (2202), a planet wheel (2201), a transmission shaft (2203) and a spring (2207); the planet wheel (2201) is connected with a sun wheel (2112), the planet wheel (2201) is arranged on a planet carrier (2111) through a bearing seat B (2202), the planet wheel (2201) is fixedly connected with a transmission shaft (2203), the tail end of the bottom of the transmission shaft (2203) is provided with a crank (2204), the crank (2204) is connected with a clamping jaw finger (2208), and the outer part of the bottom of the clamping jaw finger (2208) is provided with a protective sleeve (2209); the clamping jaw is characterized in that a connecting plate B (2205) is arranged at the upper end of the clamping jaw finger (2208), a sliding shaft (2206) is arranged between the clamping jaw finger (2208) and the crank (2204), the clamping jaw finger (2208) forms a parallelogram frame through the connecting plate B (2205) and the sliding shaft (2206), and the spring (2207) and the sliding shaft (2206) are coaxially installed.
7. The automatic dismantling equipment for the thermal field of the czochralski method single crystal silicon furnace according to claim 6 is characterized in that the manipulator lifting device (3) comprises a servo motor C (303), a ball screw B (305), a guide shaft B (304) and a linear bearing B (308); the servo motor C (303) is connected with a speed reducer B (302), the speed reducer B (302) is arranged on a mounting seat, an output shaft of the speed reducer B (302) is fixedly connected with a driving gear A (307), the driving gear A (307) is meshed with a driven gear A (309), and a screw nut of the ball screw B (305) is mounted on the driven gear A (309); an upper fixing plate (306) is arranged at the upper end of the ball screw B (305), a lower fixing plate (310) is arranged at the bottom end of the ball screw B (305), and three guide shafts B (304) are arranged between the upper fixing plate (306) and the lower fixing plate (310); the three guide shafts B (304) are parallel to the ball screw B (305); the linear bearing B (308) is fixedly arranged on the mounting seat (301).
8. The automatic dismantling device for the thermal field of the czochralski method single crystal silicon furnace according to claim 7 is characterized in that the horizontal servo mobile robot arm (4) comprises a servo motor D (406), a fixed bracket (404) and a ball screw C (407); the servo motor D (406) is arranged on the fixed support (404) through a speed reducer C (405), an output shaft of the speed reducer C (405) is fixedly connected with a driving gear B (408), the driving gear B (408) is meshed with a driven gear B (409), and a lead screw nut of a ball screw C (407) is arranged on the driven gear (409); the ball screw C (407) is arranged on a cross beam (402), two ends of the cross beam (402) are respectively connected with a manipulator lifting device (3), and the lower end of the cross beam (402) is provided with a linear guide rail (403); the tail end of the horizontal servo moving mechanical arm (4) is provided with an industrial CCD camera (401).
9. The automatic dismantling device for the thermal field of the czochralski single crystal silicon furnace according to claim 8, wherein the industrial CCD camera (401), the servo motor A (1102), the servo motor B (2104), the servo motor C (303), the servo motor D (406), the servo slewing device (6) and the rotary encoder (2117) are respectively connected with a PLC system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110217149.5A CN112853474B (en) | 2021-02-26 | 2021-02-26 | Automatic dismantling equipment for thermal field of Czochralski single crystal silicon furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110217149.5A CN112853474B (en) | 2021-02-26 | 2021-02-26 | Automatic dismantling equipment for thermal field of Czochralski single crystal silicon furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112853474A true CN112853474A (en) | 2021-05-28 |
| CN112853474B CN112853474B (en) | 2024-08-16 |
Family
ID=75990249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110217149.5A Active CN112853474B (en) | 2021-02-26 | 2021-02-26 | Automatic dismantling equipment for thermal field of Czochralski single crystal silicon furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112853474B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113981527A (en) * | 2021-10-22 | 2022-01-28 | 北京北方华创微电子装备有限公司 | Thermal field loading equipment and semiconductor process system |
| CN118407119A (en) * | 2024-05-28 | 2024-07-30 | 曲靖阳光新能源股份有限公司 | High temperature heater device of taking |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009170909A (en) * | 2008-01-10 | 2009-07-30 | Viatron Technologies Inc | Heat treatment system for semiconductor device |
| CN107253179A (en) * | 2017-08-10 | 2017-10-17 | 安徽理工大学 | The removable heavily loaded foundry robot of series-parallel connection truss-like |
| CN108161889A (en) * | 2018-02-08 | 2018-06-15 | 北京华航唯实机器人科技股份有限公司 | A kind of industrial robot based on AGV |
| CN211805778U (en) * | 2020-02-08 | 2020-10-30 | 宇泽半导体(云南)有限公司 | Special dismouting device of thermal field |
| CN216514246U (en) * | 2021-02-26 | 2022-05-13 | 连智(大连)智能科技有限公司 | Automatic thermal field dismantling equipment for Czochralski method monocrystalline silicon furnace |
-
2021
- 2021-02-26 CN CN202110217149.5A patent/CN112853474B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009170909A (en) * | 2008-01-10 | 2009-07-30 | Viatron Technologies Inc | Heat treatment system for semiconductor device |
| CN107253179A (en) * | 2017-08-10 | 2017-10-17 | 安徽理工大学 | The removable heavily loaded foundry robot of series-parallel connection truss-like |
| CN108161889A (en) * | 2018-02-08 | 2018-06-15 | 北京华航唯实机器人科技股份有限公司 | A kind of industrial robot based on AGV |
| CN211805778U (en) * | 2020-02-08 | 2020-10-30 | 宇泽半导体(云南)有限公司 | Special dismouting device of thermal field |
| CN216514246U (en) * | 2021-02-26 | 2022-05-13 | 连智(大连)智能科技有限公司 | Automatic thermal field dismantling equipment for Czochralski method monocrystalline silicon furnace |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113981527A (en) * | 2021-10-22 | 2022-01-28 | 北京北方华创微电子装备有限公司 | Thermal field loading equipment and semiconductor process system |
| CN118407119A (en) * | 2024-05-28 | 2024-07-30 | 曲靖阳光新能源股份有限公司 | High temperature heater device of taking |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112853474B (en) | 2024-08-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105666478B (en) | Joint Manipulator fast assembling-disassembling system and assembly and disassembly methods under nuclear radiation environment | |
| CN112853474B (en) | Automatic dismantling equipment for thermal field of Czochralski single crystal silicon furnace | |
| CN203471507U (en) | Automatic aluminum row loading and unloading manipulator for crystal polishing and grinding system | |
| CN101770970B (en) | Automatic transmission device for reshipping quartz boat | |
| CN109968703B (en) | Automatic assembling and disassembling device suitable for vulcanizing tires of different specifications | |
| CN102601120A (en) | Automatic roll changing and adjusting device of rolling mill and operation method of automatic roll changing and adjusting device | |
| CN216514246U (en) | Automatic thermal field dismantling equipment for Czochralski method monocrystalline silicon furnace | |
| CN207373169U (en) | A kind of four axis robot devices suitable for high temperature with high dust environment | |
| CN108357928A (en) | A kind of robot manipulator structure of numerically-controlled machine tool | |
| CN208994642U (en) | Loading and unloading shipping line | |
| CN113910020A (en) | Intelligent pipeline polishing device and control method thereof | |
| CN108863030B (en) | Full-automatic glass cup cap opening cutting machine and method | |
| CN208614783U (en) | A kind of multi-functional carrying robot device | |
| CN104988501A (en) | General type robot automatic enamelling system for mixed loading and production of water heater inner containers | |
| CN115180378B (en) | Automatic overturning method for round part | |
| CN117060656A (en) | High-power servo motor assembly line and assembly method | |
| CN219018647U (en) | Motor stator coil shaping device | |
| CN114769171A (en) | Silicon rod system is cleaned in supplementary manual work | |
| CN207104218U (en) | A kind of Dual-Arm Coordination rod class part attaching/detaching apparatus | |
| CN109110496A (en) | A kind of glass handling machine people | |
| CN114178705A (en) | Planetary gear mechanism detects and beats mark device | |
| CN209174768U (en) | A kind of press machine loading and unloading manipulator | |
| CN217393066U (en) | Silicon rod system is cleaned to supplementary manual work | |
| CN207108238U (en) | A kind of mobile counterweight suspension bracket | |
| CN203159708U (en) | Graphite boat automatic running system adapting to multi-pipe PECVD (Plasma Enhanced Chemical Vapor Deposition) device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |