CN213278048U - Workpiece discharging device for annealing furnace - Google Patents
Workpiece discharging device for annealing furnace Download PDFInfo
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- CN213278048U CN213278048U CN202022782500.9U CN202022782500U CN213278048U CN 213278048 U CN213278048 U CN 213278048U CN 202022782500 U CN202022782500 U CN 202022782500U CN 213278048 U CN213278048 U CN 213278048U
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Abstract
The utility model discloses a work piece discharge apparatus for annealing furnace, including base, revolution mechanic, swivel mount, first motor, first pivot, translation structure, second motor, second pivot, gear, rack, translation frame, elevation structure, crane, clamping structure, fourth motor, lead screw, splint, cooling structure. The utility model has the advantages that: be equipped with cooling structure on the base, it is connected with the swivel mount to rotate on the base, set up the translation structure on the swivel mount, connect elevation structure in the translation frame, it is close to the annealing stove gradually to drive the translation frame through drive second motor when using, after splint get into the annealing stove in drive fourth motor makes splint centre gripping work piece, drive second motor reversal makes the translation frame keep away from the annealing stove, with work piece centre gripping out annealing stove after, through elevation structure's reduction, place the work piece and cool off in cooling structure, the back is through elevation structure's rise, the rotation of swivel mount, unload the work piece out, the cooling time of work piece has been shortened.
Description
Technical Field
The utility model relates to an unloading device, in particular to a workpiece unloading device for an annealing furnace, which belongs to the field of machining of mechanical workpieces.
Background
An annealing furnace is a process used in semiconductor device manufacturing that includes heating a plurality of semiconductor wafers to affect their electrical properties, with the heat treatment being designed for different effects. The wafer can be heated to activate the dopants, convert the film to a film or convert the film to a wafer substrate interface, to densify the deposited film, to change the state of the grown film, to repair implanted damage, to move dopants or to transfer dopants from one film to another or from a film into the wafer substrate, the annealing furnace can be integrated into other furnace processing steps, such as oxidation, or can be self-processing, the annealing furnace is completed by equipment specifically designed for heating semiconductor wafers, the annealing furnace is an energy-saving periodic work furnace, a super-energy-saving structure, employs a fiber structure, and saves 60% of the electricity.
After a mechanical workpiece is subjected to heat treatment in an annealing furnace, the machined workpiece needs to be clamped out for next machining, however, the traditional workpiece unloading device has a single function, and the workpiece subjected to heat treatment is often subjected to overhigh surface temperature and needs to be naturally cooled for a long time.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a work piece discharge apparatus for annealing furnace just lies in for solving above-mentioned problem, can come out the work piece centre gripping after annealing furnace processing and carry out the centre gripping after cooling and unload.
The utility model realizes the above purpose by the following technical proposal, a workpiece unloading device for an annealing furnace comprises a base and a rotating structure connected with the base, the rotating structure comprises a rotating frame, a first motor and a first rotating shaft, the rotating frame is rotationally connected with the base, one end of the rotating frame is fixedly connected with the first rotating shaft, the first rotating shaft is fixedly connected with the first motor, the first motor is fixedly connected with the inner wall of the base, the rotating frame is internally connected with a translation structure, the translation structure comprises a second motor, a second rotating shaft, a gear, a rack and a translation frame, the second motor is fixedly connected with the inner wall of the rotating frame, the second rotating shaft is fixedly connected with the second rotating shaft, the second rotating shaft is rotationally connected with the inner wall of the rotating frame, and the gear is fixedly connected with the second rotating shaft, the meshing has on the gear the rack, the one end sliding connection of rack in the inner wall of swivel mount, the one end fixed connection of translation frame in the rack, the both sides of translation frame with swivel mount sliding connection, be connected with elevation structure on the translation frame, elevation structure includes the crane, crane sliding connection in the inner wall of translation frame, the one end of crane is connected with clamping structure, clamping structure includes fourth motor, lead screw and splint, fourth motor fixed connection in the inner wall of crane, lead screw fixed connection in the fourth motor, the lead screw rotate connect in the inner wall of crane, splint are equipped with two, two the equal threaded connection of splint in the lead screw, be equipped with cooling structure on the base.
Preferably, in order to achieve the clamping function of the two clamping plates, the thread directions of the two ends of the screw rod are opposite, and the two clamping plates approach to and depart from each other when the screw rod rotates.
Preferably, in order to drive the lifting structure to lift, the lifting structure further comprises a third motor and a third rotating shaft, the third motor is fixedly connected to the inner wall of the translation frame, the third motor is fixedly connected to the third rotating shaft, and the third rotating shaft is rotatably connected to the inner wall of the translation frame.
Preferably, in order to make elevation structure reciprocating motion from top to bottom under the third motor drive, elevation structure still includes fixed strip, cam, removes frame and spout, the one end fixed connection of fixed strip in the third pivot, the other end fixedly connected with of fixed strip the cam, remove frame sliding connection in the inner wall of crane, the spout is seted up in one side of crane.
Preferably, in order to accelerate cooling of the workpiece, the cooling structure comprises a cooling pool and a water outlet, the cooling pool is arranged on the base, and the water outlet is arranged on one side of the cooling pool.
Preferably, in order to replace the liquid in the cooling pool, the cooling structure further comprises a connecting line and a piston, the connecting line is fixedly connected to one side of the cooling pool, and the piston is fixedly connected to the connecting line.
The utility model has the advantages that: through be equipped with cooling structure on the base, it is connected with the swivel mount to rotate on the base, set up the translation structure on the swivel mount, connect elevation structure in the translation frame, it is rotatory to make to drive the second pivot through driving the second motor when using, drive gear and rack toothing promptly, because translation frame fixed connection is in the rack, make the translation frame be close to the annealing stove gradually, when splint get into the annealing stove, after driving the fourth motor and making splint centre gripping work piece, drive the second motor reversal and make the translation frame keep away from the annealing stove, with work piece centre gripping annealing stove back, through the decline of elevation structure, place the work piece and cool off in cooling structure, later through the rise of elevation structure, it is rotatory to drive first motor drive first pivot, the rotation of drive swivel mount, unload the work piece, the cooling process of work piece has been shortened.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a connection structure between the translation structure and the rotation structure shown in FIG. 1;
FIG. 3 is a schematic view of a connection structure between the translation structure and the rotation plate shown in FIG. 1;
FIG. 4 is a schematic structural view of the lifting structure shown in FIG. 1;
FIG. 5 is a schematic view of a connection structure between the lifting structure and the clamping structure shown in FIG. 1;
fig. 6 is an enlarged view of the portion a shown in fig. 2.
In the figure: 1. the base, 2, revolution mechanic, 21, the swivel mount, 22, first motor, 23, first pivot, 3, translation structure, 31, second motor, 32, second pivot, 33, the gear, 34, the rack, 35, translation frame, 4, elevation structure, 41, the third motor, 42, the third pivot, 43, the crane, 44, the fixed strip, 45, the cam, 46, remove the frame, 47, the spout, 5, the clamping structure, 51, the fourth motor, 52, the lead screw, 53, splint, 6, cooling structure, 61, the cooling tank, 62, the delivery port, 63, the connecting wire, 64, the piston.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1 to 6, a workpiece unloading device for an annealing furnace comprises a base 1 and a rotating structure 2 connected to the base 1, wherein the rotating structure 2 comprises a rotating frame 21, a first motor 22 and a first rotating shaft 23, the rotating frame 21 is rotatably connected to the base 1, one end of the rotating frame 21 is fixedly connected with the first rotating shaft 23, the first motor 22 is fixedly connected to the inner wall of the base 1, a translation structure 3 is connected inside the rotating frame 21, the translation structure 3 comprises a second motor 31, a second rotating shaft 32, a gear 33, a rack 34 and a translation frame 35, the second motor 31 is fixedly connected to the inner wall of the rotating frame 21, the second rotating shaft 32 is fixedly connected to the second motor 31, and the second rotating shaft 32 is rotatably connected to the inner wall of the rotating frame 21, the gear 33 is fixedly connected to the second rotating shaft 32, the gear 33 is engaged with the rack 34, one end of the rack 34 is slidably connected to the inner wall of the rotating frame 21, one end of the translation frame 35 is fixedly connected to the rack 34, two sides of the translation frame 35 are slidably connected to the rotating frame 21, the translation frame 35 is connected with a lifting structure 4, the lifting structure 4 comprises a lifting frame 43, the lifting frame 43 is slidably connected to the inner wall of the translation frame 35, one end of the lifting frame 43 is connected with a clamping structure 5, the clamping structure 5 comprises a fourth motor 51, a screw rod 52 and a clamping plate 53, the fourth motor 51 is fixedly connected to the inner wall of the lifting frame 43, the screw rod 52 is fixedly connected to the fourth motor 51, the screw rod 52 is rotatably connected to the inner wall of the lifting frame 43, and the clamping plate 53 is provided with two, the two clamping plates 53 are in threaded connection with the screw rod 52, and the base 1 is provided with a cooling structure 6.
As a technical optimization scheme of the utility model, the screw thread opposite direction at the both ends of lead screw 52, two splint 53 are in lead screw 52 is close to each other and deviates from each other when rotating.
As a technical optimization scheme of the utility model, elevation structure 4 still includes third motor 41 and third pivot 42, third motor 41 fixed connection in the inner wall of translation frame 35, fixedly connected with on the third motor 41 third pivot 42, third pivot 42 rotate connect in the inner wall of translation frame 35.
As a technical optimization scheme of the utility model, elevation structure 4 still includes fixed strip 44, cam 45, removes frame 46 and spout 47, the one end fixed connection of fixed strip 44 in third pivot 42, the other end fixedly connected with of fixed strip 44 cam 45, remove frame 46 sliding connection in the inner wall of crane 43, spout 47 sets up in one side of crane 43.
As a technical optimization scheme of the utility model, cooling structure 6 includes cooling bath 61, delivery port 62, cooling bath 61 is located base 1, delivery port 62 is seted up in one side of cooling bath 61.
As a technical optimization scheme of the utility model, cooling structure 6 still includes connecting wire 63 and piston 64, one side fixedly connected with of cooling bath 61 connecting wire 63, fixedly connected with on the connecting wire 63 piston 64.
When the utility model is used, the first motor 22, the second motor 31, the third motor 41 and the fourth motor 51 are electrically connected with an external power supply, the first motor 22, the second motor 31, the third motor 41 and the fourth motor 51 are electrically connected with an external control system, the second rotating shaft 32 is driven to rotate by driving the second motor 31, the gear 33 fixedly connected with the second rotating shaft 32 is meshed with the rack 34 slidably connected with the inner wall of the rotating frame 21, the rack 34 is made to slide on the inner wall of the rotating frame 21, the translation frame 35 is further driven to move close to the annealing furnace, when the two clamping plates 53 successfully enter the annealing furnace, the fourth motor 51 is driven to drive the screw 52 to rotate, the two clamping plates 53 are made to mutually close, thereby clamping a workpiece, then the second motor 31 reverses, the translation frame 35 is driven to be far away from the annealing furnace, when the rack 34 is abutted to the inner wall of the rotating frame 21, the second motor 31 is stopped to be driven, the third motor 41 is driven to drive the third rotating shaft 42 to rotate, the fixing strip 44 fixedly connected to the third rotating shaft 42 is further driven to rotate, the cam 45 is driven to rotate along with the fixing strip 44, the movable frame 46 is driven to move up and down, the lifting frame 43 also moves down when the movable frame 46 moves down, the workpiece clamped by the clamping plates 53 is made to contact with liquid in the cooling pool 61, at the moment, the third motor 41 stops driving, after the workpiece is cooled, the third motor 41 drives again, the lifting frame 43 rises upwards, when the bottom end of the workpiece is higher than the top end of the base 1, the third motor 41 stops driving again, the first motor 22 drives the first rotating shaft 23 to rotate, the rotating frame 21 is driven to rotate for a certain angle, the first motor 22 stops driving, the fourth motor 51 is driven, the two clamping plates 53 are made to be far away from each other, and unloading of the workpiece is achieved.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. The utility model provides a work piece discharge apparatus for annealing furnace, includes base (1) and connects in revolution mechanic (2) of base (1), its characterized in that: the rotating structure (2) comprises a rotating frame (21), a first motor (22) and a first rotating shaft (23), the rotating frame (21) is rotatably connected to the base (1), one end of the rotating frame (21) is fixedly connected with the first rotating shaft (23), the first rotating shaft (23) is fixedly connected with the first motor (22), the first motor (22) is fixedly connected to the inner wall of the base (1), the rotating frame (21) is internally connected with a translation structure (3), the translation structure (3) comprises a second motor (31), a second rotating shaft (32), a gear (33), a rack (34) and a translation frame (35), the second motor (31) is fixedly connected to the inner wall of the rotating frame (21), the second rotating shaft (32) is rotatably connected to the inner wall of the rotating frame (21), the utility model discloses a gear, including gear (33), rack (34), lifting structure (4), elevating system (43), gear (33), rack (34), gear (33) go up the meshing have the rack (34), the one end sliding connection of rack (34) in the inner wall of swivel mount (21), the one end fixed connection of translation frame (35) in rack (34), the both sides of translation frame (35) with swivel mount (21) sliding connection, be connected with elevation structure (4) on translation frame (35), elevation structure (4) include crane (43), crane (43) sliding connection in the inner wall of translation frame (35), the one end of crane (43) is connected with clamping structure (5), clamping structure (5) include fourth motor (51), lead screw (52) and splint (53), fourth motor (51) fixed connection in the inner wall of crane (43), lead screw (52) fixed connection in fourth motor (51), lead screw (52) rotate connect in the inner wall of crane (43), splint (53) are equipped with two, two equal threaded connection of splint (53) in lead screw (52), be equipped with cooling structure (6) on base (1).
2. The workpiece discharge device for the annealing furnace according to claim 1, wherein: the thread directions of the two ends of the screw rod (52) are opposite, and the two clamping plates (53) approach to each other and depart from each other when the screw rod (52) rotates.
3. The workpiece discharge device for the annealing furnace according to claim 1, wherein: elevation structure (4) still include third motor (41) and third pivot (42), third motor (41) fixed connection in the inner wall of translation frame (35), fixedly connected with on third motor (41) third pivot (42), third pivot (42) rotate connect in the inner wall of translation frame (35).
4. The workpiece discharge device for the annealing furnace according to claim 3, wherein: elevation structure (4) still include fixed strip (44), cam (45), remove frame (46) and spout (47), the one end fixed connection of fixed strip (44) in third pivot (42), the other end fixedly connected with of fixed strip (44) cam (45), remove frame (46) sliding connection in the inner wall of crane (43), spout (47) are seted up in one side of crane (43).
5. The workpiece discharge device for the annealing furnace according to claim 1, wherein: the cooling structure (6) comprises a cooling pool (61) and a water outlet (62), wherein the cooling pool (61) is arranged on the base (1), and the water outlet (62) is arranged on one side of the cooling pool (61).
6. The workpiece discharge device for the annealing furnace according to claim 5, wherein: the cooling structure (6) further comprises a connecting line (63) and a piston (64), one side of the cooling pool (61) is fixedly connected with the connecting line (63), and the piston (64) is fixedly connected to the connecting line (63).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022782500.9U CN213278048U (en) | 2020-11-26 | 2020-11-26 | Workpiece discharging device for annealing furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022782500.9U CN213278048U (en) | 2020-11-26 | 2020-11-26 | Workpiece discharging device for annealing furnace |
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| Publication Number | Publication Date |
|---|---|
| CN213278048U true CN213278048U (en) | 2021-05-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202022782500.9U Active CN213278048U (en) | 2020-11-26 | 2020-11-26 | Workpiece discharging device for annealing furnace |
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| CN (1) | CN213278048U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116252314A (en) * | 2023-04-25 | 2023-06-13 | 扬州澳洋顺昌金属材料有限公司 | Cooling treatment equipment after surface treatment processing |
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2020
- 2020-11-26 CN CN202022782500.9U patent/CN213278048U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116252314A (en) * | 2023-04-25 | 2023-06-13 | 扬州澳洋顺昌金属材料有限公司 | Cooling treatment equipment after surface treatment processing |
| CN116252314B (en) * | 2023-04-25 | 2023-12-15 | 扬州澳洋顺昌金属材料有限公司 | Cooling treatment equipment after surface treatment processing |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Workpiece unloading device for annealing furnace Effective date of registration: 20220929 Granted publication date: 20210525 Pledgee: Laiwu branch of China Postal Savings Bank Co.,Ltd. Pledgor: Shandong Hongchang Ferroalloy Co.,Ltd. Registration number: Y2022980016720 |