CN219715520U - Full-automatic probe station - Google Patents

Abstract

The utility model provides a full-automatic probe station which comprises a rack, wherein a first working part and a second working part for testing materials are arranged on the rack. The first working part comprises a first probe detection part, a feeding bin, a receiving bin and a transmission part, and the second working part comprises at least one second probe detection part. The transmission part is used for respectively taking or placing materials from the first probe detection part, the second probe detection part, the feeding bin and the receiving bin. Along the first direction of frame, go up feed bin and receive the adjacent setting of feed bin, and go up feed bin and receive the feed bin and locate between first probe detection portion and the second probe detection portion. The transmission part is arranged between the feeding bin and the receiving bin. Along the second direction of frame, transmission portion sets up the junction of last feed bin and receiving feed bin side by side, and transmission portion sets up the operation side at full-automatic probe platform. The full-automatic probe station can fully utilize the working time of the transmission part, has no waiting time and improves the detection efficiency.

Description

Full-automatic probe station

Technical Field

The utility model relates to the technical field of silicon wafer testing, in particular to a full-automatic probe station.

Background

The wafer inspection equipment is divided into two main types, namely measurement equipment and defect detection equipment, wherein the measurement equipment is mainly used for measuring indexes such as transparent or opaque film thickness, doping concentration, critical dimension, alignment precision and the like, and the defect detection equipment is mainly used for detecting defects on the surface of a wafer. In recent years, in the background of rapid development of semiconductor industry in China, the wafer market scale is rapidly expanded, and the wafer inspection equipment industry is used as an important component of the wafer industry and is also continuously developed.

The high-precision probe station is a wafer test device specially designed for the semiconductor industry. And the test system is combined with the corresponding tester to realize various functional tests. The main body of the device mainly comprises: the system comprises a mechanical movement system, an electrical control system, a software system and a display system. The existing wafer detection equipment is mainly divided into three types, namely a manual probe station, a semi-automatic probe station and a full-automatic probe station. With the progress of technology, the degree of automation of probe stations is also increasing. The full-automatic probe station can reduce the intervention degree of personnel, and is also a future development direction.

In the detection process, three-axis moving probe arms are required to ensure that the X/Y/Z directions can be precisely shifted and adjusted in a vacuum environment. When in use, the device to be detected is fixed on a heating table, then the stroke of the probe support in the X/Y/Z direction is finely adjusted, and after the probe is aligned to the detection point through observation by a microscope, the detection is performed. The existing full-automatic probe station is easy to cause the bottom of detection efficiency due to long detection time and more adjustment steps. Moreover, due to the fact that the existing manipulator is long in idle time, beats of material feeding, material discharging and detection work cannot be effectively utilized, and accordingly enterprise output cannot be improved.

Disclosure of Invention

In view of the foregoing, the present utility model is directed to a fully automatic probe station, so as to improve the probing efficiency, shorten the waiting time, and further save the manufacturing cost.

In order to achieve the above purpose, the technical scheme of the utility model is realized as follows:

a full-automatic probe station, which comprises a frame, wherein a first working part and a second working part for testing materials are arranged on the frame,

the first working part comprises a first probe detection part, a feeding bin, a receiving bin and a transmission part;

the second working part comprises at least one second probe detection part;

the conveying part is used for respectively taking or placing the materials from the first probe detection part, the second probe detection part, the feeding bin and the receiving bin;

the feeding bin is arranged adjacent to the receiving bin along the first direction of the frame, and the feeding bin and the receiving bin are arranged between the first probe detection part and the second probe detection part; the transmission part is arranged between the feeding bin and the receiving bin;

along the second direction of frame, transmission portion juxtaposing sets up go up the feed bin with receive the junction of feed bin, just transmission portion sets up the operation side of full-automatic probe platform.

Further, the first probe detection part comprises a workbench and a detection unit arranged above the workbench;

the detection unit is fixedly connected to the frame, and the workbench can move along a first direction and a second direction of the frame so as to reach a preset detection position.

Further, the feeding bin comprises a feeding driving part, a transmission mechanism connected to the power output end of the feeding driving part, and a storage part connected to the transmission mechanism;

the storage part can move up and down along the height direction of the frame along with the driving of the feeding driving part.

Further, the storage part comprises a containing part for containing the materials;

along the height direction of the frame, a plurality of accommodating parts are arranged in parallel.

Further, the accommodating part comprises a left support plate and a right support plate which are oppositely arranged;

the left support plate and the right support plate are respectively provided with an arc-shaped groove, and the material is arranged between the two opposite arc-shaped grooves.

Further, the transmission part comprises a first driving part, the first driving part is used for driving the rotating arm to rotate, a second driving part is connected to the rotating arm, and a power output end of the second driving part is connected with the feeding part; the second driving part drives the feeding part to rotate;

the feeding part comprises a feeding mechanism and a grabbing end connected to the feeding mechanism;

the grabbing end is driven to feed to a preset feeding position of the storage part along a straight line.

Further, the feeding mechanism adopts a belt transmission mode or a ball screw transmission mode.

Further, a partition plate is arranged between the first working part and the second working part, an opening through which the transmission part can pass is formed in the partition plate, and the grabbing end can be driven to be fed to a preset detection position of the second working part.

Further, the feeding mechanism passes through the opening, and the second working part is driven to move to a preset detection position along the second direction.

Further, the device also comprises a control unit arranged on the frame, wherein the control unit is electrically connected with the transmission part, and the control unit controls the transmission part to convey the materials according to preset steps.

Compared with the prior art, the utility model has the following advantages:

according to the full-automatic probe station, the first working part and the second working part are arranged on the frame, and the first working part is provided with the first probe detection part, the feeding bin, the receiving bin and the transmission part which can independently finish detection work. By providing the second probe detecting portion on the first working portion side, the material on the second working portion can be detected while the first working portion is detecting.

And, along first direction, go up feed bin and receive the feed bin and locate between first working portion and the first working portion, along the second direction, the junction of going up feed bin and receiving the feed bin is located to the transmission portion, so arrange, shorten the transmission route when can making transmission portion convey the material, improve the detection efficiency of this full-automatic probe platform.

In addition, through setting up drive division and drive mechanism at last feed bin, can make the material in the storage portion move to predetermined position one by one, improve the degree of automation of this full-automatic probe platform. And through setting up the holding portion that has the arc wall and be used for bearing each layer of material, the transport portion of being convenient for takes the material.

In addition, through setting up first drive portion drive rocking arm rotation at transmission portion, set up the rotation of second drive portion drive feed portion to set up the grabbing end that can feed to western security at the feed portion, thereby realize the multistage direction adjustment of this transmission portion, the transmission route of shortening transmission portion of being convenient for more improves the detection efficiency of this full-automatic probe platform.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model. In the drawings:

FIG. 1 is a schematic perspective view of a fully automated probe station according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a front view of a fully automatic probe station according to an embodiment of the present utility model;

FIG. 3 is a schematic top view of a fully automatic probe station according to an embodiment of the present utility model;

FIG. 4 is a schematic perspective view of a first working portion of a fully automated probe station according to an embodiment of the utility model, excluding a shroud;

FIG. 5 is a schematic perspective view of a first view of a fully automatic probe station according to an embodiment of the present utility model, wherein neither the first working portion nor the second working portion includes a shield;

FIG. 6 is a schematic perspective view of a second view of a fully automated probe station according to an embodiment of the utility model, wherein neither the first nor the second working portion includes a shield;

fig. 7 is a schematic top view of a transmission part located at a first working part according to an embodiment of the present utility model;

fig. 8 is a schematic top view of a transmission part located at a second working part according to an embodiment of the present utility model;

FIG. 9 is a schematic perspective view of a loading bin and a receiving bin according to an embodiment of the utility model;

FIG. 10 is a schematic perspective view of a loading bin according to an embodiment of the utility model;

FIG. 11 is a schematic left-hand view of a loading bin according to an embodiment of the utility model;

fig. 12 is a schematic perspective view of a transmission part according to an embodiment of the utility model;

fig. 13 is a schematic diagram of a transmission portion with a third driving portion according to an embodiment of the utility model.

Reference numerals illustrate:

1. a frame; 2. a first working section; 3. a second working section;

101. a partition plate;

201. a first probe detection unit; 202. feeding a bin; 203. a material receiving bin; 204. a transmission section;

301. a second probe detection unit;

1011. an opening;

2011. a work table;

2021. a feeding driving part; 2022. a transmission mechanism; 2023. a storage part; 2024. a fixing plate; 2025. a transmission screw; 2026. a ball nut; 2027. a support base;

2041. a first driving section; 2042. a rotating arm; 2043. a second driving section; 2044. a feeding mechanism; 2045. a grabbing end; 2046. a mounting base; 2048. a third driving section;

20231. a left support plate; 20232. a right support plate; 20233. an arc-shaped groove.

Detailed Description

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.

In the description of the present utility model, it should be noted that the azimuth or positional relationship indicated by the terms "upper", "lower", "inner", "back", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or element referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present utility model. In addition, the terms "first," "second," are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, in the description of the present utility model, the terms "mounted," "connected," and "connected," are to be construed broadly, unless otherwise specifically defined. For example, the connection can be fixed connection, detachable connection or integrated connection; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in combination with specific cases.

The utility model will be described in detail below with reference to the drawings in connection with embodiments.

The embodiment relates to a full-automatic probe station, which comprises a frame 1, wherein a first working part 2 and a second working part 3 for material testing are arranged on the frame 1. The first working part 2 includes a first probe detecting part 201, an upper bin 202, a receiving bin 203, and a transmission part 204, and the second working part 3 includes at least one second probe detecting part 301. The conveying part 204 is used for respectively taking or placing materials from the first probe detection part 201, the second probe detection part 301, the feeding bin 202 and the receiving bin 203.

Along a first direction of the frame 1, the upper bin 202 is disposed adjacent to the receiving bin 203, and the upper bin 202 and the receiving bin 203 are disposed between the first probe detecting portion 201 and the second probe detecting portion 301. The transfer part 204 is provided between the upper bin 202 and the receiving bin 203. Along the second direction of the frame 1, the conveying parts 204 are arranged in parallel at the connection part of the upper bin 202 and the receiving bin 203, and the conveying parts 204 are arranged at the operation side of the full-automatic probe station.

The full-automatic probe station of this embodiment, through setting up first working portion 2 and second working portion 3, when first probe monitoring portion detects, can carry the material to the second probe detection portion 301 through transmission portion 204 and detect, make full use of the latency of first working portion 2, improved detection efficiency.

Furthermore, the upper bin 202 and the receiving bin 203 are disposed adjacent to each other and between the first probe detecting portion 201 and the second probe detecting portion 301 in the first direction of the rack 1. Along the second direction, the transmission part 204 is arranged at the joint of the upper bin 202 and the receiving bin 203, so that the transmission route of the transmission part 204 can be shortened, the working efficiency of the full-automatic probe station is further improved, and the manufacturing cost is reduced.

Based on the above overall description, as shown in fig. 1 to 3, the frame 1 of the present embodiment is formed by welding a plurality of rectangular pipes, and the frame 1 includes the first frame 1 located at the first working portion 2 and the second frame 1 located at the second working portion 3. The first chassis 1 and the second chassis 1 are respectively provided with shields covering the first probe detecting section 201 and the second probe detecting section 301. The protective cover is provided with keys for operation.

The first probe detection unit 201 and the second probe detection unit 301 of this embodiment have the same structure. The first probe detection unit 201 will be described as an example. As a preferred embodiment, the first probe detecting unit 201 includes a table 2011, and a detecting unit provided above the table 2011. The detection unit is fixedly connected to the frame 1, and the workbench 2011 can move along a first direction and a second direction of the frame 1 so as to reach a preset detection position.

In a specific structure, as shown in fig. 4 to 6, the first probe detecting unit 201 further includes a motor and a screw that drive the first direction and the second direction of the frame 1 of the table 2011 to move. For specific construction reference is made to the manner of driving of the machine tool, for example. Based on the state of fig. 3, the first direction is the X-direction in the figure, and the second direction is the Y-direction in the figure.

As shown in fig. 4 to 6, the table 2011 has a circular structure, and a specific structure thereof can be referred to as a structure of a wafer mounting plate and a wafer fixing frame used in the prior art. The material in this embodiment is the wafer to be inspected. The wafer fixing frame is detachably arranged on the wafer mounting plate, and can be used for placing and fixedly mounting a wafer to be tested.

Further, the detection unit of the present embodiment employs a first probe assembly disposed above the stage 2011, and a second probe assembly disposed below the stage 2011. So that the probes of the two probe assemblies are respectively positioned at two sides of the piece to be tested, and synchronously test the upper surface and the lower surface of the wafer piece to be tested.

As a preferred embodiment, the loading bin 202 of the present embodiment includes a loading driving portion 2021, a transmission mechanism 2022 connected to a power output end of the loading driving portion 2021, and a storage portion 2023 connected to the transmission mechanism 2022; the stock portion 2023 can move up and down in the height direction of the frame 1 with the drive of the loading drive portion 2021.

As shown in fig. 9 to 11, the feeding bin 202 is fixedly connected to the frame 1 through a fixing plate 2024, and a feeding driving portion 2021 is fixedly connected to the fixing plate 2024, and the feeding driving portion 2021 in this embodiment is driven by a motor. As shown in fig. 11, the power output end of the feeding driving portion 2021 is connected with a driving pulley, the driving pulley is connected with a driven pulley by a belt transmission, and the belt of the present embodiment adopts a T-shaped belt.

As shown in fig. 10 to 11, the inner bore of the driven pulley is fitted over the drive screw 2025, the screw is fitted with a ball nut 2026, and the ball nut 2026 is connected to a support housing 2027 for supporting the stock portion 2023. The feed driving unit 2021 drives the screw 2025 to rotate, and drives the storage unit 2023 to move up and down along the axial direction of the screw 2025.

Wherein, in order to realize automatic feeding, and reduce the loading time, the storage portion 2023 of this embodiment includes a holding portion that holds the material. Along the height direction of the frame 1, several receiving portions are arranged side by side. Further, the accommodating portion includes a left support plate 20231 and a right support plate 20232 which are oppositely disposed; the left support plate 20231 and the right support plate 20232 are respectively provided with an arc-shaped groove 20233, and the material is arranged between the two opposite arc-shaped grooves 20233.

In a specific structure, as shown in fig. 9 and 10, a left support plate 20231 and a right support plate 20232 are respectively and oppositely arranged on a support base 2027, and arc-shaped grooves 20233 are formed on the left support plate 20231 and the right support plate 20232 in an oppositely arranged manner, and the thickness of the arc-shaped grooves 20233 is set according to the thickness of a wafer part to be tested. As shown in the state of fig. 10, the arc-shaped grooves 20233 of the plural layers are arranged at intervals in the height direction of the frame 1, that is, in the Z-direction, and the arc-shaped grooves 20233 on the left support plate 20231 and the right support plate 20232 of each layer are in one-to-one correspondence.

As shown in fig. 9, the upper bin 202 and the lower bin in this embodiment have the same structure, and since the height of the wafer to be tested is unchanged by the conveying part 204, the materials in the upper bin 202 are driven upward layer by layer until the lowest layer of materials is picked up. The material in the material receiving bin 203 is also driven upward layer by layer until the lowest material is placed.

In order to improve the transmission effect of the transmission portion 204, the transmission portion 204 of the present embodiment includes a first driving portion 2041, a rotating arm 2042 disposed at a power output end of the first driving portion 2041, a second driving portion 2043 connected to the rotating arm 2042, and a feeding portion connected to a power output end of the second driving portion 2043. The feed section includes a feed mechanism 2044 and a gripping end 2045 attached to the feed mechanism 2044; the gripping end 2045 is driven to feed in a straight line to a preset loading position of the stock portion 2023.

As shown in fig. 12, the first drive section 2041 and the second drive section 2043 are both gear motors, wherein the first drive section 2041 is connected to the frame 1 near the operation side. Wherein one end of the swivel arm 2042 is connected to the power output end of the first drive section 2041 and the other end is connected to the power output end of the second drive section 2043. By this arrangement, only the feeding portion can be driven to move when transferring between the upper bin 202 and the lower bin. When the transmission part 204 extends from the first probe detection part 201 to the second probe detection part 301, the transmission part is convenient to walk along a fixed track, and repeated walking routes are reduced.

In addition, the feeding mechanism 2044 of the present embodiment adopts a belt transmission system or a ball screw transmission system, thereby facilitating the manufacturing implementation of the feeding mechanism 2044 and reducing the cost. In a specific structure, as shown in fig. 12, a mounting seat 2046 fixedly connected above the power output end of the second driving portion 2043 is provided on the feeding portion, a feeding motor is provided on the mounting seat 2046, and the power output end of the feeding motor is connected with the belt pulley or the screw rod, so as to drive the gripping end 2045 to feed along the length direction of the mounting seat 2046.

In addition, the transmission portion 204 of the present embodiment may further include a third driving portion 2048 disposed on the mounting base 2046, where a power output end of the third driving portion 2048 is connected to the gripping end 2045 to drive the gripping end 2045 to rotate. Thereby facilitating the grasping or placement of the grasping end 2045 in a predetermined position. The gripping end 2045 of the present embodiment adopts a U-shaped opening 1011 structure, and the prior art can be referred to specifically.

In order to facilitate the independent implementation of the first working part 2, the present implementation is provided with a partition plate 101 between the first working part 2 and the second working part 3, the partition plate 101 is provided with an opening 1011 for the transmission part 204 to pass through, and the gripping end 2045 can be driven to feed to a preset detection position of the second working part 3.

As shown in fig. 4 to 8, since the first working portion 2 has each component for probe detection that works independently, it can be used alone as one independent device, and in this embodiment, the first bracket and the second bracket can also be connected or separated. Furthermore, it should be noted that the second working portion 3 may also be a plurality of second working portions surrounding the transmission portion 204, so as to further increase the auxiliary detecting area for detecting the wafer to be detected.

Further, in order to facilitate feeding of the feeding mechanism 2044 to drive the gripping end 2045 to grip the wafer workpiece, an opening 1011 is provided in the partition 101 which enables the gripping end 2045 and the feeding mechanism 2044 to pass through. The feeding mechanism 2044 passes through the opening 1011, and the second working portion 3 is drivingly moved in the second direction to the preset detection position.

Specifically, as shown in fig. 4 to 8, when the conveying portion 204 is required to be moved to the second working portion 3, the feeding mechanism 2044 and the gripping end 2045 are disposed parallel to the first direction by the driving of the second driving portion 2043, and the rotating arm 2042 is driven to rotate by the first driving portion 2041, so that the feeding mechanism 2044 and the gripping end 2045 can be located at the opening 1011. To facilitate grasping and placement of the grasping end 2045

In addition, as shown in fig. 8, when the feeding mechanism 2044 of the present embodiment is led to the second working portion 3, when a certain distance is provided between the gripping end 2045 and the working table 2011 along the second direction of the frame 1, the above-mentioned working table 2011 can be driven to move by its own screw rod, so as to reach the position of the gripping end 2045, thereby reducing the movement route of the transmission portion 204.

In addition, the full-automatic probe station of the embodiment further comprises a control unit arranged on the frame 1, the control unit is electrically connected with the transmission part 204, and the control unit controls the transmission part 204 to convey materials according to preset steps.

The working steps of the full-automatic probe station in this embodiment are as follows:

step one: the wafer to-be-detected piece is conveyed to a preset position through the feeding bin 202, the conveying part 204 is used for grabbing the wafer to-be-detected piece and conveying the wafer to a workbench 2011 in the first working part 2, and the first probe detection part 201 is used for detecting the wafer to-be-detected piece;

step two: the transmission part 204 clamps a second wafer to-be-detected piece to the upper bin 202, and transmits the second wafer to-be-detected piece to a workbench 2011 in the second working part 3, and the second probe detection part 301 detects the wafer to-be-detected piece;

step three: the transmission part 204 directly moves from the second working part 3 to the workbench 2011 of the first working part 2, picks up the detected wafer, conveys the wafer to the receiving bin 203, and clamps a third wafer to-be-detected piece of the upper bin 202 to convey the third wafer to the first working part 2;

step four: the transmission part 204 moves to the first working part 2 to take the detected wafer, then the wafer is conveyed to the receiving bin 203, and a fourth wafer to-be-detected piece clamped in the upper bin 202 is conveyed to the second working part 3;

step five: and (3) circulating the steps four to five until the materials of the feeding bin 202 are used up, and circulating the steps one to four again after feeding.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.

Claims (10)

1. A full-automatic probe station, characterized in that: comprises a frame (1), a first working part (2) and a second working part (3) for testing materials are arranged on the frame (1),

the first working part (2) comprises a first probe detection part (201), an upper bin (202), a receiving bin (203) and a transmission part (204);

the second working part (3) comprises at least one second probe detection part (301);

the conveying part (204) is used for respectively taking or placing the materials from the first probe detection part (201), the second probe detection part (301), the feeding bin (202) and the receiving bin (203);

along a first direction of the frame (1), the feeding bin (202) is arranged adjacent to the receiving bin (203), and the feeding bin (202) and the receiving bin (203) are arranged between the first probe detection part (201) and the second probe detection part (301); the transmission part (204) is arranged between the feeding bin (202) and the receiving bin (203);

along the second direction of the frame (1), the transmission part (204) is arranged at the joint of the upper bin (202) and the receiving bin (203) in parallel, and the transmission part (204) is arranged at the operation side of the full-automatic probe station.

2. The fully automated probe station of claim 1, wherein:

the first probe detection part (201) comprises a workbench (2011), and a detection unit arranged above the workbench;

the detection unit is fixedly connected to the frame (1), and the workbench (2011) can move along the first direction and the second direction of the frame (1) so as to reach a preset detection position.

3. The fully automated probe station of claim 2, wherein:

the feeding bin (202) comprises a feeding driving part (2021), a transmission mechanism (2022) connected to the power output end of the feeding driving part (2021), and a storage part (2023) connected to the transmission mechanism (2022);

the material storage part (2023) can move up and down along the height direction of the frame (1) along with the driving of the material feeding driving part (2021).

4. A fully automated probe station according to claim 3, wherein:

the storage portion (2023) includes a receiving portion that receives the material;

along the height direction of the frame (1), a plurality of accommodating parts are arranged in parallel.

5. The fully automated probe station of claim 4, wherein:

the accommodating part comprises a left support plate (20231) and a right support plate (20232) which are oppositely arranged;

arc grooves (20233) are formed in the left support plate (20231) and the right support plate (20232), and the material is arranged between the two opposite arc grooves (20233).

6. A fully automated probe station according to claim 3, wherein:

the transmission part (204) comprises a first driving part (2041), the first driving part (2041) is used for driving the rotating arm (2042) to rotate, a second driving part (2043) is connected to the rotating arm (2042), and a power output end of the second driving part (2043) is connected with a feeding part; the second driving part (2043) drives the feeding part to rotate;

the feed portion comprises a feed mechanism (2044) and a gripping end (2045) connected to the feed mechanism (2044);

the gripping end (2045) is driven to feed in a straight line to a preset loading position of the stock portion (2023).

7. The fully automated probe station of claim 6, wherein:

the feeding mechanism (2044) adopts a belt transmission mode or a ball screw transmission mode.

8. The fully automated probe station of claim 6, wherein:

a partition board (101) is arranged between the first working part (2) and the second working part (3), an opening (1011) through which the transmission part (204) can pass is formed in the partition board (101), and the grabbing end (2045) can be driven to be fed to a preset detection position of the second working part (3).

9. The fully automated probe station of claim 8, wherein:

the feeding mechanism (2044) is driven to move to a preset detection position along the second direction through the opening (1011).

10. The fully automated probe station of claim 1, wherein:

the device also comprises a control unit arranged on the frame (1), wherein the control unit is electrically connected with the transmission part (204), and the control unit controls the transmission part (204) to convey the materials according to preset steps.