CN219497753U - Wafer picking and placing device - Google Patents
Wafer picking and placing device Download PDFInfo
- Publication number
- CN219497753U CN219497753U CN202320392594.XU CN202320392594U CN219497753U CN 219497753 U CN219497753 U CN 219497753U CN 202320392594 U CN202320392594 U CN 202320392594U CN 219497753 U CN219497753 U CN 219497753U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to the technical field of wafer processing equipment, in particular to a wafer taking and placing device, which comprises a righting and positioning mechanism, wherein a bearing frame is arranged at the upper part of the righting and positioning mechanism, a translation mechanism is arranged between the bearing frame and the righting and positioning mechanism, the top of the translation mechanism is fixedly connected with a clamping mechanism, the righting and positioning mechanism comprises a base, a mounting plate is fixedly connected in the middle of the top of the base, a first sliding plate and a second sliding plate are respectively arranged at two sides of the mounting plate, the first sliding plate and the second sliding plate are both in sliding connection with the base, one side of the top of the first sliding plate is fixedly connected with a first vertical framework, the top of the first vertical framework is fixedly connected with a second vertical framework, one side of the top of the second sliding plate is fixedly connected with a second support sliding rail, the bearing frame is in sliding connection between the first support sliding rail and the second support sliding rail, the top of the mounting plate is fixedly connected with the translation mechanism, and the problems of waste of space inside equipment and low utilization rate of space inside the equipment are solved.
Description
Technical Field
The utility model relates to the technical field of wafer processing equipment, in particular to a wafer picking and placing device.
Background
In the semiconductor industry, silicon materials take the position of absolute dominance in semiconductor materials, and are widely applied to products such as MEMS devices, chips, high-power devices and the like. The grain size of the silicon wafer is smaller and smaller, the thickness is thinner and thinner, the edge breakage of the traditional mechanical cutter wheel processing equipment is too large, the defects are obvious, the defects can be well overcome by the laser cutting technology, and the silicon wafer cutting device is widely applied to the field of semiconductor cutting.
As disclosed in the chinese patent document CN108161251a in the prior art, an automatic loading and unloading system is disclosed, in which a steel ring loaded with a wafer is clamped from a steel ring material box by a material taking unit and translated to a designated position, and then the steel ring is adsorbed by a rotary material transferring unit and then rotated onto a carrier unit; after processing is completed, the steel ring is adsorbed by the rotary material transferring unit and then is rotated and returned, and then the steel ring is clamped by the material taking unit and then is returned to the steel ring material box, so that automatic feeding and discharging of wafers during processing are realized.
Disclosure of Invention
(one) solving the technical problems
Aiming at the defects of the prior art, the utility model aims to provide a wafer taking and placing device, which solves the problems existing in the prior art, and solves the problems of waste of the internal space of equipment and low utilization rate of the internal space of equipment.
(II) technical scheme
In order to achieve the above purpose, the present utility model provides the following technical solutions: the wafer taking and placing device comprises a resetting positioning mechanism, wherein a bearing frame is arranged on the upper portion of the resetting positioning mechanism, a translation mechanism is arranged between the bearing frame and the resetting positioning mechanism, the top of the translation mechanism is fixedly connected with a clamping mechanism, the resetting positioning mechanism comprises a base, a mounting plate is fixedly connected to the middle of the top of the base, a first sliding plate and a second sliding plate are respectively arranged on two sides of the mounting plate, the first sliding plate and the second sliding plate are both in sliding connection with the base, a first vertical framework is fixedly connected to one side of the top of the first sliding plate, a first supporting sliding rail is fixedly connected to the top of the first vertical framework, a second vertical framework is fixedly connected to one side of the top of the second sliding plate, a second supporting sliding rail is fixedly connected to the top of the second vertical framework, the bearing frame is in sliding connection between the first supporting sliding rail and the second supporting sliding rail, and the top of the mounting plate is fixedly connected with the translation mechanism.
Preferably, the translation mechanism comprises a moving track, a screw rod rotatably connected in the middle of the moving track, a first motor fixedly connected at one end of the moving track and a moving block in threaded connection with the screw rod, and a connecting plate is fixedly connected to the top end of the moving block.
Preferably, the clamping mechanism comprises a fixed block and a clamping device fixedly connected to one side of the fixed block, and the height of the clamping device corresponds to the height of the bearing frame.
Preferably, one side of the bottom of the base is fixedly connected with a second motor, an output shaft of the second motor is fixedly connected with a driving wheel, the other side of the bottom of the base corresponding to the driving wheel is provided with a driven wheel, a synchronous belt is meshed between the driven wheel and the driving wheel, one end of the synchronous belt, which is close to the driven wheel, is fixedly connected with a first clamping block, the top of the first clamping block is fixedly connected with a first sliding plate, one end of the synchronous belt, which is close to the driving wheel, is fixedly connected with a second clamping block, and the top of the second clamping block is fixedly connected with the second sliding plate.
Preferably, the base is provided with slide rails on the top surfaces of the two sides of the two ends of the mounting plate.
Preferably, the clamp comprises a clamp frame, the clamp frame is hollow, the inner wall of the clamp frame is fixedly connected with a telescopic device, one side of the telescopic device is slidably connected with a lifting block, one end of the bottom of the lifting block is fixed with one end of a telescopic rod of the telescopic device, one side of the lifting block, which is far away from the telescopic device, is fixedly connected with a connecting block, the bottom of the connecting block is fixedly connected with a lower pressing block, and the outer side of the clamp frame is fixedly connected with an upper pressing block.
Preferably, the side wall of the telescopic device is provided with a lifting guide rail, and one side of the lifting block is provided with a guide rail groove.
Preferably, the upper pressing block comprises an upper pressing block connecting side plate, an upper pressing plate fixedly connected to the bottom of one side of the upper pressing block connecting side plate and check blocks symmetrically and fixedly connected to two sides of the bottom of the upper pressing plate, and an opening and closing groove is formed between the check blocks.
Preferably, the lower pressing block comprises a lower pressing block connecting side plate and a lower pressing plate fixedly connected to one side of the lower pressing block connecting side plate, and the width of the lower pressing block connecting side plate is smaller than that of the lower pressing plate.
Preferably, the upper platen and the lower platen have the same width.
(III) beneficial effects
1. The utility model provides a wafer taking and placing device, which is characterized in that a translation mechanism is fixed on a mounting plate, so that the translation mechanism is positioned between a bearing frame and a base, the translation mechanism does not occupy the space on the upper part and the two sides of a righting and positioning mechanism, the utilization rate of the space in equipment can be improved, and the waste of the space in the equipment is avoided.
2. The utility model provides a wafer taking and placing device, wherein the bottom of a lower pressing block connecting side plate moves up and down in an opening and closing groove, so that an upper pressing plate and a lower pressing plate are clamped and loosened, a stop block can stop the edge of a bearing frame when the upper pressing plate and the lower pressing plate clamp the bearing frame, and the structure enables the clamping position of a clamping device on the bearing frame to be more accurate, thereby playing a role in positioning the bearing frame.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the present utility model.
Fig. 2 is a schematic structural view of the translation mechanism of the present utility model.
Fig. 3 is a schematic structural view of the clamping mechanism of the present utility model.
Fig. 4 is a schematic view of the structure of the inside of the clamping mechanism of the present utility model.
Fig. 5 is a schematic structural view of the telescopic device of the present utility model.
Fig. 6 is a schematic structural diagram of the lifting block of the present utility model.
FIG. 7 is a schematic view of the structure of the upper press block of the present utility model.
Fig. 8 is a schematic structural view of the press block of the present utility model.
Fig. 9 is a schematic structural view of the aligning and positioning mechanism of the present utility model.
Fig. 10 is a schematic structural view of another view angle of the aligning and positioning mechanism of the present utility model.
In the figure: the clamping mechanism comprises a 1-clamping mechanism, a 2-translation mechanism, a 3-righting positioning mechanism, a 4-bearing frame, a 5-motor I, a 6-moving track, a 7-screw, an 8-moving block, a 9-connecting plate, a 10-fixing block, a 11-clamping device, a 12-clamping device frame, a 13-telescopic device, a 14-lifting block, a 15-connecting block, a 16-upper pressing block, a 17-lower pressing block, a 18-lifting guide rail, a 19-guide rail groove, a 20-upper pressing block connecting side plate, a 21-upper pressing plate, a 22-opening and closing groove, a 23-stop block, a 24-lower pressing block connecting side plate, a 25-lower pressing plate, a 27-motor II, a 28-driving wheel, a 29-driven wheel, a 30-base, a 31-synchronous belt, a 32-first clamping block, a 33-second clamping block, a 34-mounting plate, a 35-sliding plate I, a 36-sliding plate II, a 37-vertical framework I, a 38-vertical framework II, a 39-supporting slide II, a 40-supporting slide II and a 41-right-angle reinforcing member.
Detailed Description
The technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to fig. 1 to 10 of the embodiments of the present utility model, and it is obvious that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The utility model provides a technical scheme that: the wafer taking and placing device comprises a restoring and positioning mechanism 3, wherein a bearing frame 4 is arranged at the upper part of the restoring and positioning mechanism 3, a translation mechanism 2 is arranged between the bearing frame 4 and the restoring and positioning mechanism 3, the top of the translation mechanism 2 is fixedly connected with a clamping mechanism 1, the restoring and positioning mechanism 3 comprises a base 30, a mounting plate 34 is fixedly connected in the middle of the top of the base 30, two sides of the mounting plate 34 are respectively provided with a first slide plate 35 and a second slide plate 36, the first slide plate 35 and the second slide plate 36 are both in sliding connection with the base 30, one side of the top of the first slide plate 35 is fixedly connected with a first vertical framework 37, the top of the first vertical framework 37 is fixedly connected with a first support slide rail 39, one side of the top of the second slide plate 36 is fixedly connected with a second vertical framework 38, the top of the second vertical framework 38 is fixedly connected with a second support slide rail 40, the bearing frame 4 is in sliding connection between the first support slide rail 39 and the second support slide rail 40, the top of the mounting plate 34 is fixedly connected with the translation mechanism 2, a motor II 27 is fixedly connected to one side of the bottom of the base 30, a driving wheel 28 is fixedly connected to an output shaft at the top of the motor II 27, a driven wheel 29 is arranged at the other side of the bottom of the base 30 corresponding to the driving wheel 28, a synchronous belt 31 is meshed between the driven wheel 29 and the driving wheel 28, one end of the synchronous belt 31, which is close to the driven wheel 29, is fixedly connected with a first clamping block 32, the top of the first clamping block 32 is fixedly connected with a first slide plate 35, one end of the synchronous belt 31, which is close to the driving wheel 28, is fixedly connected with a second clamping block 33, the top of the second clamping block 33 is fixedly connected with a second slide plate 36, slide rails are arranged on the top surfaces of the two sides of the base 30, which are positioned at two ends of the mounting plate 34, when the motor II 27 is started, the driving wheel 28 is driven to rotate, the synchronous belt 31 is driven between the driving wheel 28 and the driven wheel 29, the first clamping block 32 and the second clamping block 33 are driven to move synchronously, the first slide plate 35 and the second slide plate 36 are driven to be close to or far away, the first vertical framework 37 and the second vertical framework 38 are driven to approach or depart, the first support slide rail 39 and the second support slide rail 40 are driven to approach or depart, and when the first support slide rail 39 and the second support slide rail 40 approach, the bearing frame 4 placed between the first support slide rail 39 and the second support slide rail 40 can be positioned; when the first support slide rail 39 and the second support slide rail 40 are far away, the bearing frame 4 can be prevented from contacting with the first support slide rail 39 and the second support slide rail 40 during translation, the translation mechanism 2 is fixed on the mounting plate 34, and the translation mechanism 2 is positioned between the bearing frame 4 and the base 30, so that the translation mechanism 2 does not occupy the space on the upper part and the two sides of the righting and positioning mechanism 3, the utilization rate of the internal space of equipment can be improved, and the waste of the space of the equipment is avoided.
The translation mechanism 2 comprises a moving track 6, a screw rod 7 rotationally connected in the middle of the moving track 6, a motor I5 fixedly connected to one end of the moving track 6 and a moving block 8 in threaded connection with the screw rod 7, wherein a connecting plate 9 is fixedly connected to the top end of the moving block 8, and when the translation mechanism is used, the motor I5 rotates to drive the screw rod 7 to rotate to drive the moving block 8 to move and drive the connecting plate 9 to move, so that the clamping mechanism 1 can move back and forth.
The clamping mechanism 1 comprises a fixed block 10 and a clamping device 11 fixedly connected to one side of the fixed block 10, the height of the clamping device 11 corresponds to the height of the bearing frame 4, and the clamping device 11 can clamp and unclamp the bearing frame 4.
The clamping device 11 comprises a clamping device frame 12, the clamping device frame 12 is hollow, the inner wall of the middle of the clamping device frame 12 is fixedly connected with a telescopic device 13, one side of the telescopic device 13 is slidably connected with a lifting block 14, one end of the bottom of the lifting block 14 is fixed with one end of a telescopic rod of the telescopic device 13, one side of the lifting block 14 away from the telescopic device 13 is fixedly connected with a connecting block 15, the bottom of the connecting block 15 is fixedly connected with a lower pressing block 17, the outer side of the clamping device frame 12 is fixedly connected with an upper pressing block 16, the side wall of the telescopic device 13 is provided with a lifting guide rail 18, one side of the lifting block 14 is provided with a guide rail groove 19, the upper pressing block 16 comprises an upper pressing block connecting side plate 20, an upper pressing plate 21 fixedly connected with the bottom of one side of the upper pressing block connecting side plate 20 and stop blocks 23 symmetrically and fixedly connected with two sides of the bottom of the upper pressing plate 21, the dog 23 forms the open-close groove 22 between, lower briquetting 17 includes lower briquetting connection curb plate 24 and fixed connection at the holding down plate 25 of holding down plate 24 one side, the width of lower briquetting connection curb plate 24 is less than the width of holding down plate 25, upper plate 21 is the same with the width of holding down plate 25, during the use, telescopic link of telescoping device 13 stretches out and draws back, drive elevating block 14 elevating movement, drive connecting block 15 elevating movement, drive lower briquetting 17 elevating movement, the bottom of holding down plate 24 reciprocates in open-close groove 22 for upper plate 21 presss from both sides tightly with holding down plate 25 and loosens, dog 23 can block the border of holding down frame 4 when upper plate 21 and holding down plate 25 clamp get the holding down frame 4, play the locate function.
Working principle: when a wafer is taken out, the first motor 5 is started, the first motor 5 rotates to drive the screw rod 7 to rotate, the movable block 8 is driven to move, the connecting plate 9 is driven to move, the fixed block 10 is driven to move, the clamping device 11 is driven to move to the position of the carrier 4 carrying the wafer, when the stop block 23 contacts the edge of the carrier 4, the telescopic rod of the telescopic device 13 stretches out and draws back, the lifting block 14 is driven to move up and down, the connecting block 15 is driven to move up and down, the lower pressing block 17 is driven to move up and down in the opening and closing groove 22, the upper pressing plate 21 is clamped with the lower pressing plate 25, the first motor 5 is started again to clamp the carrier 4, the clamping device 11 clamped with the carrier 4 is moved to a specified position, then the telescopic rod of the telescopic device 13 acts to enable the upper pressing plate 21 to be released from the lower pressing plate 25, the first motor 5 is started again to move the clamping device 11, then the upper cutting device rotates the conveying mechanism to transfer the wafer to the processing position, after the processing is finished, the wafer is returned to the original position, the first motor 5 is started, the clamping device 11 is moved to the position of the carrier 4 to clamp the wafer, the first clamping device is clamped by the first motor 5, the wafer is driven to the next time, and the wafer is placed in the carrier 4 after the cassette is clamped by the clamping device is carried by the first clamping device, and the wafer is placed after the wafer is placed in the next carrier 4.
Claims (10)
1. The utility model provides a wafer is got and is put device, includes righting positioning mechanism (3), righting positioning mechanism (3) upper portion is equipped with bears frame (4), bear frame (4) and righting positioning mechanism (3) intermediate be equipped with translation mechanism (2), translation mechanism (2) top fixedly connected with fixture (1), its characterized in that: the utility model provides a positioning mechanism (3) returns to normal, including base (30), fixedly connected with mounting panel (34) in the middle of base (30) top, mounting panel (34) both sides are equipped with slide one (35) and slide two (36) respectively, slide one (35) and slide two (36) all with base (30) sliding connection, slide one (35) top one side fixedly connected with vertical framework one (37), vertical framework one (37) top fixedly connected with supports slide rail one (39), slide two (36) top one side fixedly connected with vertical framework two (38), vertical framework two (38) top fixedly connected with supports slide rail two (40), bear frame (4) sliding connection between support slide rail one (39) and support slide rail two (40), mounting panel (34) top and translation mechanism (2) fixed connection.
2. The wafer pick-and-place apparatus of claim 1, wherein: the translation mechanism (2) comprises a moving track (6), a screw rod (7) rotationally connected in the middle of the moving track (6), a motor I (5) fixedly connected with one end of the moving track (6) and a moving block (8) in threaded connection with the screw rod (7), and a connecting plate (9) is fixedly connected to the top end of the moving block (8).
3. The wafer pick-and-place apparatus of claim 1, wherein: the clamping mechanism (1) comprises a fixed block (10) and a clamping device (11) fixedly connected to one side of the fixed block (10), and the height of the clamping device (11) corresponds to the height of the bearing frame (4).
4. The wafer pick-and-place apparatus of claim 1, wherein: the novel electric bicycle is characterized in that a motor II (27) is fixedly connected to one side of the bottom of the base (30), a driving wheel (28) is fixedly connected to an output shaft at the top of the motor II (27), a driven wheel (29) is arranged at the bottom of the base (30) and corresponds to the other side of the driving wheel (28), a synchronous belt (31) is meshed between the driven wheel (29) and the driving wheel (28), a first clamping block (32) is fixedly connected to one end, close to the driven wheel (29), of the synchronous belt (31), a first clamping block (32) is fixedly connected to the top of the first clamping block (32) and a first sliding plate (35), a second clamping block (33) is fixedly connected to one end, close to the driving wheel (28), of the synchronous belt (31), and the top of the second clamping block (33) is fixedly connected to the second sliding plate II (36).
5. The wafer pick-and-place apparatus of claim 4, wherein: the top surfaces of the two sides of the base (30) positioned at the two ends of the mounting plate (34) are provided with sliding rails.
6. The wafer pick-and-place apparatus of claim 3, wherein: the clamping device comprises a clamping device frame (12), wherein the clamping device frame (12) is hollow, a telescopic device (13) is fixedly connected to the inner wall of the middle of the clamping device frame (12), a lifting block (14) is slidably connected to one side of the telescopic device (13), one end of the bottom of the lifting block (14) is fixed to one end of a telescopic rod of the telescopic device (13), a connecting block (15) is fixedly connected to one side, away from the telescopic device (13), of the lifting block (14), a pressing block (17) is fixedly connected to the bottom of the connecting block (15), and an upper pressing block (16) is fixedly connected to the outer side of the clamping device frame (12).
7. The wafer pick-and-place apparatus of claim 6, wherein: the side wall of the telescopic device (13) is provided with a lifting guide rail (18), and one side of the lifting block (14) is provided with a guide rail groove (19).
8. The wafer pick-and-place apparatus of claim 7, wherein: the upper pressing block (16) comprises an upper pressing block connecting side plate (20), an upper pressing plate (21) fixedly connected to the bottom of one side of the upper pressing block connecting side plate (20) and stop blocks (23) symmetrically and fixedly connected to two sides of the bottom of the upper pressing plate (21), and an opening and closing groove (22) is formed between the stop blocks (23).
9. The wafer pick-and-place apparatus of claim 8, wherein: the lower pressing block (17) comprises a lower pressing block connecting side plate (24) and a lower pressing plate (25) fixedly connected to one side of the lower pressing block connecting side plate (24), and the width of the lower pressing block connecting side plate (24) is smaller than that of the lower pressing plate (25).
10. The wafer pick-and-place apparatus of claim 9, wherein: the width of the upper pressing plate (21) is the same as that of the lower pressing plate (25).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320392594.XU CN219497753U (en) | 2023-03-06 | 2023-03-06 | Wafer picking and placing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320392594.XU CN219497753U (en) | 2023-03-06 | 2023-03-06 | Wafer picking and placing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219497753U true CN219497753U (en) | 2023-08-08 |
Family
ID=87476690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320392594.XU Active CN219497753U (en) | 2023-03-06 | 2023-03-06 | Wafer picking and placing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219497753U (en) |
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2023
- 2023-03-06 CN CN202320392594.XU patent/CN219497753U/en active Active
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