CN219457551U - Continuous loading and unloading system for wafer - Google Patents

Abstract

The utility model relates to a continuous wafer feeding and discharging system which comprises a plurality of linear driving modules and a manipulator, wherein the linear driving modules and the manipulator are arranged in a staggered manner along the conveying direction of materials, the moving ends of the linear driving modules are provided with feeding platforms, the manipulator comprises a lifting mechanism, a rotating mechanism arranged at the output end of the lifting mechanism, a shearing fork material taking arm arranged at the output end of the rotating mechanism, and a ceramic sucker arranged at the moving end of the shearing fork material taking arm, and the moving end of the ceramic sucker passes over the adjacent feeding platforms. According to the utility model, the mode of continuously feeding and discharging the workpiece by alternately operating the linear driving module and the manipulator can realize the automatic production of a single wafer manufacturing device and the organic combination among a plurality of wafer manufacturing devices, the durability of the optimized mechanical arm structure is greatly improved, the ceramic sucker and the workpiece can keep proper pre-pressure, and the automatic production is realized by continuously feeding and discharging the auxiliary wafer manufacturing device.

Description

Continuous loading and unloading system for wafer

Technical Field

The utility model relates to the technical field of semiconductor processing, in particular to a continuous wafer loading and unloading system.

Background

Wafers play a significant role in the semiconductor industry as a base material for manufacturing semiconductor devices and chips. The wafer manufacturing process comprises crystal bar manufacturing and wafer manufacturing, wherein the wafer manufacturing comprises the steps of crystal bar cutting and detecting, outer diameter grinding, slicing, round edge and grinding, etching, defect removing, cleaning, checking, packaging and the like.

The Chinese patent with the authorized bulletin number of CN217903098U discloses a loading and unloading transfer device on a wafer, which comprises a rotating mechanism, a first material taking arm and a second material taking arm, wherein the rotating mechanism comprises a rotating frame, and the rotating frame can rotate vertically; the first material taking arm and the second material taking arm are horizontally connected with the rotating frame in a sliding mode through the sliding assembly, the first material taking arm and the second material taking arm are in two states of extending and retracting, projections of the first material taking arm and the second material taking arm in the sliding direction in the vertical direction are collinear, and a gap larger than one wafer thickness is reserved between the second material taking arm and the first material taking arm.

The prior art solutions described above have the following drawbacks: 1) In order to ensure the surface cleanliness of the wafer, the current wafer manufacturing process is carried out in a hood, the ingot/wafer is transferred from a feed inlet to a processing point and from the processing point to a discharge outlet by using the wafer blanking transfer device, and the single manipulator is used for feeding and discharging, so that the transmission time is long, and the feeding and discharging efficiency of the workpiece is low; 2) When the thickness of the ingot/wafer to be processed is changed, proper adsorption pressure cannot be ensured between the first material taking arm of the wafer blanking transfer device and the ingot/wafer, the ingot/wafer is easily damaged in the conveying process, the production cost is improved, and the production efficiency is reduced; 3) The material taking arm II of the mechanical arm is complex in structure, large in deviation of the gravity center relative to the rotation axis of the rotating frame, and high in maintenance cost, and needs frequent maintenance after long-time use.

Disclosure of Invention

The utility model aims to solve the problems of low loading and unloading and processing efficiency and high production and maintenance cost of the conventional mechanical arm single machine auxiliary wafer manufacturing, and achieves the aim of realizing automatic production through continuous loading and unloading auxiliary.

The above object of the present utility model is achieved by the following technical solutions:

the utility model provides a continuous unloading system of going up of wafer, includes a plurality of linear drive module and the manipulator of following material direction of delivery staggered arrangement, the removal end of linear drive module is provided with the feeding platform, the manipulator include elevating system, set up in elevating system output rotary mechanism, set up in the fork of rotary mechanism output get the material arm and set up in the ceramic chuck that fork got the material arm removal end, the removal end of ceramic chuck passes through adjacent feeding platform top.

By adopting the technical scheme, for multi-process continuous processing, the arrangement form of a linear driving module, a manipulator … … linear driving module, a manipulator and a wafer rack can be set, and for single-process automatic production, the arrangement form of the linear driving module, the manipulator or the wafer rack can be set, wherein a tool clamp can be selectively installed on a feeding platform on the linear driving module so as to clamp a workpiece; after the processing is finished, the shearing fork material taking arm firstly stretches and drives the ceramic sucker to be transferred to the upper part of a workpiece of the feeding platform, the lifting mechanism drives the ceramic sucker to descend and be adsorbed on the workpiece according to a preset adsorption pressure, then the rotating mechanism drives the ceramic sucker to rotate towards the wafer frame or a linear driving module of the next procedure, the shearing fork material taking arm can be selectively controlled to retract in order to avoid interference between the ceramic sucker and a hood space during the process, and then the workpiece is transferred to the feeding platform of the wafer frame or the next procedure under the common driving of the lifting mechanism and the shearing fork material taking arm; meanwhile, after the workpiece is separated from the feeding platform, the linear driving module is used for leading the feeding platform to move away from the processing point so as to receive the workpiece transferred by the scissor material taking arm, and then the workpiece is moved to the processing point to continue processing; through adopting above-mentioned structure, the mode that linear drive module and manipulator alternate running carried out work piece continuous feeding and discharging can realize the automated production of single wafer manufacture equipment and the organic combination between many wafer manufacture equipment, and the durability of the mechanical arm structure after optimizing obtains promoting by a wide margin, can make ceramic sucker and work piece keep suitable precompression, solved the problem that current mechanical arm unit is supplementary to carry out feeding and discharging and machining efficiency low, production and maintenance cost are high that the wafer manufacturing exists, reached the purpose that realizes automated production through continuous feeding and discharging is supplementary.

The utility model is further provided with: the linear driving module comprises a base, a driving motor and a plurality of first sliding rails which are arranged on the base, a first belt transmission pair arranged between the base and an output shaft of the driving motor, and a driving block arranged on a conveying section parallel to one of the first sliding rails and the first belt transmission pair, wherein the feeding platform is slidably connected to the first sliding rails and is arranged on the driving block.

Through adopting above-mentioned technical scheme, during the material loading, driving motor drives first belt drive pair action to drive the drive piece along the direction action parallel with first slide rail, and then drive feeding platform along first slide rail slip, thereby realize the reciprocating motion of feeding platform between processing point and material loading point.

The utility model is further provided with: the first belt transmission pair comprises a first driving wheel arranged on an output shaft of the driving motor, at least two first driven wheels rotatably connected to the base, and a first transmission belt sleeved on the first driving wheel and the first driven wheels, and the driving block is arranged on the first transmission belt.

By adopting the technical scheme, the belt transmission has the advantages of stable operation, low noise and shock absorption and buffering, and can realize stable transmission of the feeding platform.

The utility model is further provided with: the linear driving module further comprises a plurality of groups of positioning seats, clamping cylinders and positioning holes, wherein the groups of positioning seats and the clamping cylinders are arranged on the base, the positioning holes are formed in the positioning seats, locking holes are formed in the feeding platform, and piston rods of the clamping cylinders penetrate through the positioning holes and can be inserted into the locking holes.

Through adopting above-mentioned technical scheme, the centre gripping cylinder can be arranged near the processing point/material loading point to after the feeding platform reaches the preset position, through the cooperation of centre gripping cylinder piston rod and locking hole, spacing feeding platform, can guarantee feeding platform and the work piece processing on it/the uniformity of material loading position, and then can improve the parallel machining precision of work piece.

The utility model is further provided with: the lifting mechanism comprises a first supporting plate, a third supporting plate, a lifting motor arranged on the first supporting plate, a first sliding shaft arranged between the first supporting plate and the third supporting plate, a second supporting plate which is connected to the first sliding shaft in a sliding mode, a second sliding shaft arranged on the second supporting plate and connected to the third supporting plate in a sliding mode, a screw shaft connected to the first supporting plate and the third supporting plate in a rotating mode, a transmission nut arranged on the second supporting plate and connected to the screw shaft in a threaded mode, and a second belt transmission pair arranged between an output shaft of the lifting motor and the screw shaft.

Through adopting above-mentioned technical scheme, screw transmission has that the starting torque is little, auto-lock is good advantage, can realize the accurate adjustment of fixed point to ceramic chuck position height, not only can be to the position adjustment of different thickness work pieces for ceramic chuck can keep suitable precompression with the work piece between, in the ceramic chuck transfer work piece in-process, take place the broken phenomenon of dropping of work piece, can also adapt to the position adjustment to the feeding platform position between the adjacent process, or between feeding platform and the wafer frame, in order to guarantee the steady transfer of work piece, realize the unloading on the serialization.

The utility model is further provided with: the second belt transmission pair comprises a second driving wheel arranged on the lifting motor, a second driven wheel arranged on the screw shaft and a second transmission belt sleeved on the second driving wheel and the second driven wheel.

By adopting the technical scheme, the belt transmission has the advantages of stable operation, low noise and shock absorption and buffering, and can realize stable transmission of the ceramic sucker.

The utility model is further provided with: the rotary mechanism comprises a fourth supporting plate arranged at the output end of the lifting mechanism, a rotary motor arranged on the fourth supporting plate, a driving gear arranged on an output shaft of the rotary motor, and a driven gear rotationally connected to the fourth supporting plate and meshed with the driving gear, and the shearing fork material taking arm is arranged on the driven gear.

By adopting the technical scheme, the gear transmission has the advantages of compact structure, high transmission precision and high transmission efficiency, and can realize the stable movement of the ceramic sucker between the processing point and the blanking point.

The utility model is further provided with: the shearing fork material taking arm comprises a fifth supporting plate arranged at the output end of the rotating mechanism, a sixth supporting plate connected to the fifth supporting plate in a sliding mode, a telescopic motor arranged on the sixth supporting plate, a third belt transmission pair arranged between the sixth supporting plate and an output shaft of the telescopic motor, a pair of adjusting blocks arranged on the belt transmission pair, and a shearing fork support arranged between the pair of adjusting blocks and the ceramic sucker, wherein the moving directions of the pair of adjusting blocks are opposite.

By adopting the technical scheme, during blanking, the telescopic motor drives the third belt transmission pair to act firstly, so that the pair of adjusting blocks are driven to be close to each other, the scissor bracket is driven to extend to the outside of the third supporting plate, so that the ceramic sucker absorbs a workpiece, and then the telescopic motor turns over, so that the inspection bracket can be driven to retract; in the process, the scissor bracket has a simple structure and is less in deviation of the gravity center relative to the rotation axis of the sixth supporting plate in the telescoping process due to the number of parts, so that the durability is greatly improved, the service life is prolonged, and the maintenance is more convenient.

The utility model is further provided with: the shearing fork support comprises a plurality of pairs of first shearing fork arms which are hinged in a crossed mode, a mounting seat arranged on the ceramic sucker, a pair of transmission gears which are connected to the mounting seat in a rotating mode, and a second shearing fork arm with one end arranged on the transmission gears, wherein two adjacent pairs of end parts of the first shearing fork arms are hinged to each other, and the end parts of the two pairs of first shearing fork arms at the outermost side are hinged to the adjusting block and the second shearing fork arm respectively.

Through adopting above-mentioned technical scheme, in the motion process that the regulating block is close to each other or keeps away from, can drive the contained angle of the X type structure of first fork arm and change, and then drive the contained angle of V type structure between the second fork arm and change, finally make the whole length of fork support change to drive ceramic sucker and remove.

The utility model is further provided with: the third belt transmission pair comprises a third driving wheel arranged on the output shaft of the telescopic motor, a third driven wheel rotationally connected to the sixth supporting plate and a third transmission belt sleeved on the third driving wheel and the third driven wheel, and the pair of adjusting blocks are respectively arranged on two conveying sections of the third transmission belt between the third driving wheel and the third driven wheel.

By adopting the technical scheme, the belt transmission has the advantages of stable operation, low noise and shock absorption and buffering, and can realize stable transmission of the ceramic sucker.

The utility model is further provided with: the output end of the lifting mechanism is provided with a fifth supporting plate, the sixth supporting plate is slidably connected to the fifth supporting plate in a direction parallel to the extending direction of the scissor bracket, and the sliding position of the sixth supporting plate on the fifth supporting plate is adjustable.

Through adopting above-mentioned technical scheme, can be according to the interval of the relative processing point of arm, unloading point, the position of selective adjustment fifth layer board to guarantee that ceramic chuck can accomplish the material of getting of work piece and unloading.

In summary, the beneficial technical effects of the utility model are as follows: the mode that the linear driving module and the mechanical arm alternately operate to continuously feed and discharge the workpiece can realize the automatic production of single wafer manufacturing equipment and the organic combination among a plurality of wafer manufacturing equipment, the durability of the optimized mechanical arm structure is greatly improved, the ceramic sucker and the workpiece can keep proper precompression, the problems of low feeding and discharging and processing efficiency and high production and maintenance cost existing in the process of assisting in manufacturing the wafer by the existing mechanical arm single machine are solved, and the aim of realizing automatic production by assisting in continuous feeding and discharging is fulfilled.

Drawings

Fig. 1 is a schematic structural diagram of a continuous wafer loading and unloading system in embodiment 1 of the present utility model.

Fig. 2 is a schematic structural diagram of a continuous wafer loading and unloading system in embodiment 2 of the present utility model.

Fig. 3 is a schematic diagram of a connection relationship between a linear driving module and a feeding platform according to embodiment 3 of the present utility model.

Fig. 4 is a schematic diagram of a linear driving module in a left-view direction according to embodiment 3 of the present utility model.

Fig. 5 is a schematic structural view of a manipulator according to embodiment 4 of the present utility model.

Fig. 6 is a schematic view of the structure of the manipulator of embodiment 4 of the present utility model in the left-hand direction.

In the figure, 101, a linear driving module; 102. a manipulator; 103. a feeding platform; 2. a lifting mechanism; 21. a first pallet; 22. a second pallet; 23. a third pallet; 24. a lifting motor; 25. a first slide shaft; 26. a second slide shaft; 27. a screw shaft; 28. a drive nut; 29. a second belt drive pair; 291. a second driving wheel; 292. a second driven wheel; 293. a second belt; 3. a rotation mechanism; 31. a fourth pallet; 32. a rotating electric machine; 33. a drive gear; 34. a driven gear; 4. a scissors picking arm; 41. a fifth pallet; 42. a sixth pallet; 43. a telescopic motor; 44. a third belt drive pair; 441. a third driving wheel; 442. a third driven wheel; 442. a third belt; 45. an adjusting block; 46. a scissors support; 461. a first scissor arm; 462. a mounting base; 463. a transmission gear; 464. a second scissor arm; 47. a second slide rail; 5. a ceramic suction cup; 6. a base; 7. a driving motor; 8. a first slide rail; 9. a first belt drive pair; 91. a first drive wheel; 92. a first driven wheel; 93. a first belt; 10. a driving block; 11. a positioning seat; 12. a clamping cylinder; 13. positioning holes; 14. locking holes.

Detailed Description

The utility model will be further described with reference to the drawings and detailed description in order to make the technical means, the creation characteristics, the achievement of the objects and the functions of the utility model more clear and easy to understand.

Example 1: referring to fig. 1, a continuous wafer loading and unloading system disclosed by the utility model is used for single-process automatic production, and comprises a linear driving module 101 and a manipulator 102 which are arranged along a material conveying direction, namely, the linear driving module 101, the manipulator 102 and a wafer frame are arranged. The movable end of the linear driving module 101 is provided with a feeding platform 103, and a tool clamp can be selectively installed on the feeding platform 103 so as to clamp a workpiece.

Example 2: referring to fig. 2, a wafer continuous loading and unloading system disclosed in the present utility model is different from embodiment 1 in that the system is used for multi-process continuous processing, and includes a plurality of linear driving modules 101 and a plurality of manipulators 102 arranged along a material conveying direction, that is, the arrangement forms of "linear driving modules 101, manipulators 102 … … linear driving modules 101, manipulators 102, and wafer shelves" are provided.

Example 3: referring to fig. 3 and 4, a continuous wafer loading and unloading system disclosed in the present utility model is different from embodiment 1 in that the linear driving module 101 includes a base 6, a driving motor 7 and a pair of first sliding rails 8 disposed on the base 6, a first belt transmission pair 9 disposed between the base 6 and an output shaft of the driving motor 7, a driving block 10 disposed on a feeding platform 103, four sets of positioning seats 11 and clamping cylinders 12 disposed on the base 6, and positioning holes 13 disposed on the positioning seats 11, and the feeding platform 103 is slidably connected to the first sliding rails 8. The first belt transmission pair 9 includes a first driving wheel 91 disposed on an output shaft of the driving motor 7, at least two first driven wheels 92 rotatably connected to the base 6, and a first transmission belt 93 sleeved on the first driving wheel 91 and the first driven wheels 92, where the driving block 10 is disposed on a conveying section parallel to one of the first sliding rails 8 and the first transmission belt 93. In addition, four locking holes 14 are formed in two side walls of the feeding platform 103, which are close to the first sliding rail 8, and a piston rod of the clamping cylinder 12 penetrates through the positioning hole 13 and can be inserted into the locking holes 14.

During feeding, the driving motor 7 drives the first belt transmission pair 9 to act and drives the driving block 10 to act along the direction parallel to the first sliding rail 8, so as to drive the feeding platform 103 to slide along the first sliding rail 8, and further realize reciprocating motion of the feeding platform 103 between a processing point and a feeding point. The clamping cylinder 12 can be arranged near the processing point, so that after the feeding platform 103 reaches a preset position, the feeding platform 103 is limited by the cooperation of the piston rod of the clamping cylinder 12 and the locking hole 14, and the consistency of the processing position of the feeding platform 103 and the workpiece on the feeding platform can be ensured, so that the parallel processing precision of the workpiece can be improved.

Example 4: referring to fig. 5 and 6, in order to disclose a continuous wafer loading and unloading system according to the present utility model, the difference between the continuous wafer loading and unloading system and embodiment 1 is that the manipulator 102 includes a lifting mechanism 2, a rotating mechanism 3 disposed at an output end of the lifting mechanism 2, a fork material taking arm 4 disposed at an output end of the rotating mechanism 3, and a ceramic suction cup 5 disposed at a moving end of the fork material taking arm 4, where the moving end of the ceramic suction cup 5 passes over an adjacent feeding platform 103.

The lifting mechanism 2 includes a first pallet 21, a third pallet 23, a lifting motor 24 provided on the first pallet 21, four first slide shafts 25 provided between the first pallet 21 and the third pallet 23, a second pallet 22 slidably connected to these first slide shafts 25, four second slide shafts 26 provided on the second pallet 22 and slidably connected to the third pallet 23, a screw shaft 27 rotatably connected to the first pallet 21 and the third pallet 23, a drive nut 28 provided on the second pallet 22 and screwed to the screw shaft 27, and a second belt transmission pair 29. The second belt transmission pair 29 includes a second driving wheel 291 provided on the lifting motor 24, a second driven wheel 292 provided on the screw shaft 27, and a second transmission belt 293 provided on the second driving wheel 291 and the second driven wheel 292.

The screw rod transmission has the advantages of small starting moment and good self-locking, can realize the fixed-point accurate adjustment of the position height of the ceramic sucker 5, can not only adjust the position of workpieces with different thicknesses, so that the ceramic sucker 5 can keep proper pre-pressure with the workpieces, so that the phenomena of workpiece breakage and falling in the process of transferring the workpieces by the ceramic sucker 5 can be avoided, the position adjustment of the feeding platform 103 between adjacent working procedures or the position adjustment between the feeding platform 103 and a wafer frame can be adapted, the stable transfer of the workpieces can be ensured, and continuous feeding and discharging can be realized.

The rotation mechanism 3 includes a fourth carrier 31 provided on the second slide shafts 26, a rotation motor 32 provided on the fourth carrier 31, a driving gear 33 provided on an output shaft of the rotation motor 32, and a driven gear 34 rotatably connected to the fourth carrier 31 and engaged with the driving gear 33. The gear transmission has the advantages of compact structure, high transmission precision and high transmission efficiency, and can realize the stable movement of the ceramic sucker 5 between the processing point and the blanking point.

The scissors material taking arm 4 includes a fifth pallet 41 provided on the driven gear 34, a sixth pallet 42 slidingly moved by a fastener and locked on the fifth pallet 41, a telescopic motor 43 and a second slide rail 47 provided on the sixth pallet 42, a third belt transmission pair 44 provided between the sixth pallet 42 and an output shaft of the telescopic motor 43, a pair of adjustment blocks 45 provided on the belt transmission pair and slidingly connected to the second slide rail 47, and a scissors bracket 46 provided between the pair of adjustment blocks 45 and the ceramic suction cup 5, the movement directions of the adjustment blocks 45 are opposite, the sixth pallet 42 is slidingly connected on the fifth pallet 41 in a direction parallel to the telescopic direction of the scissors bracket 46, and the sliding position of the sixth pallet 42 on the fifth pallet 41 is adjustable. The scissor bracket 46 includes a plurality of pairs of first scissor arms 461 which are hinged in a cross manner, a mounting seat 462 arranged on the ceramic sucker 5, a pair of transmission gears 463 which are rotatably connected to the mounting seat 462, and a second scissor arm 464 which is arranged on the transmission gears 463 at one end, wherein the end parts of two adjacent pairs of first scissor arms 461 are hinged with each other, and the end parts of two outermost pairs of first scissor arms 461 are respectively hinged with the adjusting block 45 and the second scissor arm 464. In addition, the third belt transmission pair 44 includes a third driving wheel 441 disposed on the output shaft of the telescopic motor 43, a third driven wheel 442 rotatably connected to the sixth support plate 42, and a third transmission belt 442 sleeved on the third driving wheel 441 and the third driven wheel 442, and the pair of adjusting blocks 45 are disposed on two conveying sections of the third transmission belt 442 between the third driving wheel 441 and the third driven wheel 442, respectively.

During blanking, the telescopic motor 43 is first driven to enable the third belt transmission pair 44 to act, so that the pair of adjusting blocks 45 are driven to be close to each other, the scissor bracket 46 is driven to extend to the outside of the third supporting plate 23, the ceramic sucker 5 is used for sucking a workpiece, and then the telescopic motor 43 is turned over, so that the inspection bracket can be driven to retract. In the moving process of the adjusting block 45 approaching or separating from each other, the included angle of the X-shaped structure of the first shearing arm 461 can be driven to change, so as to drive the included angle of the V-shaped structure between the second shearing arms 464 to change, and finally the overall length of the shearing support 46 is changed, so as to drive the ceramic sucker 5 to move. Because the scissors support 46 has a simple structure and a small number of parts, the center of gravity of the scissors support is less deviated from the axis of rotation of the sixth supporting plate 42 in the telescoping process, the durability is greatly improved, the service life is prolonged, and the scissors support is more convenient to maintain.

Finally, it is noted that the above embodiments are only for illustrating the technical solution of the present utility model and not for limiting the same, and although the present utility model has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made thereto without departing from the spirit and scope of the technical solution of the present utility model, which is intended to be covered by the scope of the claims of the present utility model.

Claims (10)

1. The utility model provides a continuous unloading system of going up of wafer which characterized in that: including a plurality of linear drive module (101) and manipulator (102) that arrange along material direction of delivery is crisscross, the removal end of linear drive module (101) is provided with feeding platform (103), manipulator (102) including elevating system (2), set up in rotary mechanism (3) of elevating system (2) output, set up in cut fork material taking arm (4) of rotary mechanism (3) output, and set up in cut fork material taking arm (4) remove ceramic suction cup (5) of end, the removal end of ceramic suction cup (5) is through adjacent feeding platform (103) top.

2. The continuous wafer loading and unloading system of claim 1, wherein: the linear driving module (101) comprises a base (6), a driving motor (7) and a plurality of first sliding rails (8) which are arranged on the base (6), a first belt transmission pair (9) which is arranged between the base (6) and an output shaft of the driving motor (7), and a driving block (10) which is arranged on a conveying section of the first belt transmission pair (9) parallel to one of the first sliding rails (8), wherein the feeding platform (103) is connected to the first sliding rails (8) in a sliding manner and is arranged on the driving block (10).

3. A continuous wafer loading and unloading system as defined in claim 2, wherein: the first belt transmission pair (9) comprises a first driving wheel (91) arranged on an output shaft of the driving motor (7), at least two first driven wheels (92) rotatably connected to the base (6), and a first transmission belt (93) sleeved on the first driving wheel (91) and the first driven wheels (92), and the driving block (10) is arranged on the first transmission belt (93).

4. A continuous wafer loading and unloading system as defined in claim 2, wherein: the linear driving module (101) further comprises a plurality of groups of positioning seats (11) and clamping cylinders (12) arranged on the base (6), and positioning holes (13) formed in the positioning seats (11), the feeding platform (103) is provided with locking holes (14), and a piston rod of each clamping cylinder (12) penetrates through each positioning hole (13) and can be inserted into each locking hole (14).

5. The continuous wafer loading and unloading system of claim 1, wherein: the lifting mechanism (2) comprises a first supporting plate (21), a third supporting plate (23), a lifting motor (24) arranged on the first supporting plate (21), a first sliding shaft (25) arranged between the first supporting plate (21) and the third supporting plate (23), a second supporting plate (22) connected with the first sliding shaft (25) in a sliding mode, a second sliding shaft (26) arranged on the second supporting plate (22) and connected with the third supporting plate (23) in a sliding mode, a screw shaft (27) connected with the first supporting plate (21) and the third supporting plate (23) in a rotating mode, a transmission nut (28) arranged on the second supporting plate (22) and connected with the screw shaft (27) in a threaded mode, and a second belt transmission pair (29) arranged between an output shaft of the lifting motor (24) and the screw shaft (27), and the rotating mechanism (3) is arranged on the second sliding shaft (26).

6. The continuous wafer loading and unloading system of claim 5, wherein: the second belt transmission pair (29) comprises a second driving wheel (291) arranged on the lifting motor (24), a second driven wheel (292) arranged on the screw shaft (27), and a second transmission belt (293) sleeved on the second driving wheel (291) and the second driven wheel (292).

7. The continuous wafer loading and unloading system of claim 1, wherein: the rotary mechanism (3) comprises a fourth supporting plate (31) arranged at the output end of the lifting mechanism (2), a rotary motor (32) arranged on the fourth supporting plate (31), a driving gear (33) arranged on the output shaft of the rotary motor (32), and a driven gear (34) rotationally connected to the fourth supporting plate (31) and meshed with the driving gear (33), and the shearing fork material taking arm (4) is arranged on the driven gear (34).

8. The continuous wafer loading and unloading system of claim 1, wherein: the shearing fork material taking arm (4) comprises a sixth supporting plate (42) arranged at the output end of the rotating mechanism (3), a telescopic motor (43) arranged on the sixth supporting plate (42), a third belt transmission pair (44) arranged between the sixth supporting plate (42) and an output shaft of the telescopic motor (43), a pair of adjusting blocks (45) arranged on the belt transmission pair and slidingly connected to a second sliding rail (47), and a shearing fork support (46) arranged between the pair of adjusting blocks (45) and the ceramic sucker (5), wherein the moving directions of the pair of adjusting blocks (45) are opposite.

9. The continuous wafer loading and unloading system of claim 8, wherein: the shearing fork support (46) comprises a plurality of pairs of first shearing fork arms (461) which are hinged in a cross mode, a mounting seat (462) arranged on the ceramic sucker (5), a pair of transmission gears (463) which are connected to the mounting seat (462) in a rotating mode, and second shearing fork arms (464) with one ends arranged on the transmission gears (463), wherein two adjacent pairs of ends of the first shearing fork arms (461) are hinged to each other, and the ends of two pairs of first shearing fork arms (461) at the outermost side are hinged to the adjusting block (45) and the second shearing fork arms (464) respectively.

10. The continuous wafer loading and unloading system of claim 8, wherein: the output end of the lifting mechanism (2) is provided with a fifth supporting plate (41), the sixth supporting plate (42) is slidably connected to the fifth supporting plate (41) according to the direction parallel to the extending and contracting direction of the scissor bracket (46), and the sliding position of the sixth supporting plate (42) on the fifth supporting plate (41) is adjustable.