CN219449853U - Optical filter carrier of coating vacuum chamber - Google Patents

Abstract

The utility model provides an optical filter carrier of a film coating vacuum chamber, and relates to the technical field of film coating of optical filters. The optical filter carrier of the coating vacuum chamber comprises a coating machine device, wherein the coating vacuum chamber is arranged in the coating machine device, a sealing plate is hinged to the outer side of the coating vacuum chamber, a rotating rod is arranged in the coating vacuum chamber and penetrates through the coating vacuum chamber and is rotationally connected with the sealing plate, a plurality of connecting plates are fixedly connected to the outer side of the rotating rod, a plurality of positioning frames are arranged on the outer sides of the connecting plates, a transmission gear is fixedly connected to the bottom of a rotating shaft, the transmission gear is meshed with an inner gear ring, and when the connecting plates rotate, the rotating shaft rotates through the meshing of the transmission gear and the inner gear ring, the positioning frames fixedly connected with the rotating shaft rotate, and further the optical filter substrate on the positioning frames is uniformly coated.

Description

Optical filter carrier of coating vacuum chamber

Technical Field

The utility model relates to an optical filter carrier, in particular to an optical filter carrier of a coating vacuum chamber, and belongs to the technical field of optical filter coating.

Background

For the film plating process of the optical filter, phase evaporation deposition film plating, magnetron sputtering film plating and ion plating are generally adopted, wherein the magnetron sputtering film plating process is widely adopted due to high film plating efficiency and high film plating particle adhesion strength. Magnetron sputtering belongs to the category of glow discharge, and film plating is carried out by utilizing a cathode sputtering principle, wherein film particles are derived from the cathode sputtering effect of argon ions on a cathode target material in glow discharge. The argon ions sputter target atoms off and deposit the target atoms on the surface of the element to form a required film layer.

The patent numbers are now disclosed: the coating device for producing the infrared cut-off filter comprises a coating box, wherein a motor is arranged at the top of the coating box, the output end of the motor is connected with an umbrella cover, and a plurality of filters are loaded on the surface of the umbrella cover; the inner wall of the film plating box below the umbrella cover is connected with an operation platform, and the surface of the operation platform is connected with a feeding mechanism which is matched with an evaporation mechanism below the operation platform. The device has solved prior art and has had the manual change membrane material of needs, needs to open the door repeatedly and causes dust removal and evacuation many times, and the lower problem of operating efficiency has the automatic membrane material of changing, avoids frequently opening the door, has effectively promoted the characteristics of operating efficiency.

The above solution has many benefits, but for the placement of the filter substrate directly laid on the umbrella cover, special filter and umbrella cover are needed to cooperate, when the filter substrate is different in size, the filter substrate cannot be adapted, and when the filter substrate is rotated, uniform rotation cannot be performed.

Disclosure of Invention

(one) solving the technical problems

The utility model aims to provide a filter carrier of a film coating vacuum chamber for solving the problems that in the prior art, a filter substrate is placed on an umbrella cover directly, a specific filter disc is matched with the umbrella cover, when the size of the filter substrate is different, the filter substrate cannot be matched, and when the filter substrate rotates, the filter substrate cannot be uniformly rotated.

(II) technical scheme

In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a light filter carrier of coating film vacuum chamber, includes the coating film machine device, coating film machine device internally mounted has the coating film vacuum chamber, the coating film vacuum chamber outside articulates there is the closing plate, the inside dwang that is equipped with of coating film vacuum chamber, the dwang runs through the coating film vacuum chamber and rotates with the closing plate to be connected, dwang outside fixedly connected with a plurality of connecting plates, a plurality of the connecting plate outside all is equipped with a plurality of locating frames, a plurality of the locating frame is inside all to be equipped with clamping assembly, a plurality of be equipped with drive assembly between locating frame all and the coating film vacuum chamber.

Preferably, the plurality of transmission components comprise a plurality of rotating shafts, the rotating shafts are respectively and fixedly connected to the bottoms of the plurality of positioning frames, and the rotating shafts penetrate through the connecting plates and are in meshed connection with the connecting plates.

Preferably, the transmission assembly further comprises a plurality of annular gears, a plurality of fixing plates are fixedly connected to the outer sides of the annular gears, the fixing plates are fixedly connected with the inner walls of the coating vacuum chambers, and a plurality of transmission gears on the outermost sides of the connecting plates are meshed with the annular gears.

Preferably, two transmission gears which are close to each other are meshed and connected with each other, and the close positioning frame rotates.

Preferably, the clamping assembly comprises a plurality of clamping plates, the clamping plates are annularly distributed inside the positioning frame around the positioning frame, and a plurality of telescopic rods are fixedly connected between the clamping plates and the positioning frame.

Preferably, the clamping assembly further comprises a plurality of springs, the springs are sleeved on the outer sides of the telescopic rods, two ends of each spring are fixedly connected with the clamping plate and the locating frame respectively, and the clamping plate is pushed by the springs to clamp and fix the filter substrate.

Preferably, a plurality of component taking grooves are formed in the top edge of the positioning frame, so that the filter substrate can be taken out conveniently.

Preferably, a servo motor is fixedly connected to the top of the coating vacuum chamber, and the output end of the servo motor is fixedly connected with the rotating rod.

The utility model provides an optical filter carrier of a coating vacuum chamber, which has the following beneficial effects:

1. this coating film vacuum chamber's light filter carrier, place on the inside locating frame of coating film vacuum chamber, owing to the inside clamping assembly that is provided with of locating frame, through the spring between a plurality of grip blocks and the locating frame, make the spring promote the grip block, make the grip block to light filter substrate centre gripping, make it keep stable, and a plurality of grooves of getting are offered at locating frame top edge, when later stage personnel got, can take out the light filter substrate from the locating frame through getting a groove, the placing of light filter substrate of being convenient for gets a piece.

2. The optical filter carrier of the coating vacuum chamber is fixedly connected with a transmission gear at the bottom of a rotating shaft, and is meshed with an inner gear ring through the transmission gear, so that when a connecting plate rotates, the rotating shaft rotates through the meshing of the transmission gear and the inner gear ring, a positioning frame fixedly connected with the rotating shaft rotates, and further, the optical filter substrate on the positioning frame is uniformly coated.

Drawings

FIG. 1 is a schematic diagram of the overall structure of the present utility model;

FIG. 2 is a schematic view of a coating vacuum chamber according to the present utility model;

FIG. 3 is a schematic view of a structure of a connecting plate according to the present utility model;

fig. 4 is a schematic structural view of a clamping assembly according to the present utility model.

In the figure: 1. a film plating machine device; 2. a film plating vacuum chamber; 3. a sealing plate; 4. a rotating lever; 5. a connecting plate; 6. a positioning frame; 7. a rotating shaft; 8. a transmission gear; 9. a spring; 10. a telescopic rod; 11. a clamping plate; 12. an inner gear ring; 13. a fixing plate; 14. a piece taking groove; 15. a servo motor.

Detailed Description

The embodiment of the utility model provides an optical filter carrier of a coating vacuum chamber.

Please refer to fig. 1, fig. 2, fig. 3 and fig. 4, including coating machine device 1, coating machine device 1 internally mounted has coating film vacuum chamber 2, and coating film vacuum chamber 2 outside articulates there is closing plate 3, and coating film vacuum chamber 2 inside is equipped with dwang 4, and dwang 4 runs through coating film vacuum chamber 2 and rotates with closing plate 3 to be connected, and dwang 4 outside fixedly connected with a plurality of connecting plates 5, a plurality of locating frames 6 all are equipped with in a plurality of connecting plates 5 outsides, all are equipped with clamping assembly in a plurality of locating frames 6, are equipped with drive assembly between a plurality of locating frames 6 and coating film vacuum chamber 2.

The clamping assembly comprises a plurality of clamping plates 11, the clamping plates 11 are annularly distributed inside the positioning frame 6 around the positioning frame 6, telescopic rods 10 are fixedly connected between the clamping plates 11 and the positioning frame 6, the clamping assembly further comprises a plurality of springs 9, the springs 9 are sleeved outside the telescopic rods 10, two ends of each spring 9 are fixedly connected with the clamping plates 11 and the positioning frame 6 respectively, and the clamping plates 11 are pushed by the springs 9 to clamp and fix the filter substrate.

The top edge of the positioning frame 6 is provided with a plurality of component taking grooves 14, which are beneficial to taking out the filter substrate.

Specifically, firstly, the filter substrate is cleaned by using clean cloth and an organic solvent, the sealing plate 3 is opened, an operator then places the filter substrate on the positioning frame 6 in the coating vacuum chamber 2, as the clamping assembly is arranged in the positioning frame 6, the spring 9 pushes the clamping plate 11 through the springs 9 between the clamping plates 11 and the positioning frame 6, the clamping plate 11 clamps the filter substrate to keep stable, a plurality of piece taking grooves 14 are formed in the edge of the top of the positioning frame 6, and when a later person takes pieces, the filter substrate can be taken out of the positioning frame 6 through the piece taking grooves 14, so that the filter substrate is convenient to place and take pieces.

Referring to fig. 1, 2, 3 and 4 again, the plurality of transmission assemblies include a plurality of rotation shafts 7, the plurality of rotation shafts 7 are respectively fixedly connected to bottoms of the plurality of positioning frames 6, the plurality of rotation shafts 7 penetrate through the connecting plate 5 and are in meshed connection with the connecting plate 5, the transmission assemblies further include a plurality of annular gears 12, fixing plates 13 are fixedly connected to the outer sides of the plurality of annular gears 12, the fixing plates 13 are fixedly connected with the inner wall of the coating vacuum chamber 2, and a plurality of transmission gears 8 at the outermost sides of the connecting plate 5 are in meshed connection with the annular gears 12. Two transmission gears 8 which are mutually close are mutually meshed and connected, and the close positioning frame 6 rotates. The top of the coating vacuum chamber 2 is fixedly connected with a servo motor 15, and the output end of the servo motor 15 is fixedly connected with a rotating rod 4.

Specifically, the existing coating operation process comprises the following steps: and (3) after the film coating vacuum chamber 2 is deflated, cleaning the inside of the film coating vacuum chamber 2 by adopting an existing dust collector, filling film materials to be evaporated in the film coating vacuum chamber 2, and recording the film material names of all the boats. And vacuumizing the coating vacuum chamber 2. And after the vacuum degree reaches 3710Pa-' the boat is premelted in sequence to remove the gas in the film material.

When the vacuum degree reaches the requirement, the plating is carried out by adopting a method of controlling the optical thickness by adopting a 4/1 extremum method, any one of the two film systems can be selected for plating, and the control wavelength is set at 632.8nm or other wavelengths.

After half an hour, the vacuum chamber 2 may be inflated to remove the interference filter. And then vacuumizing the coating machine according to the operation rules to keep clean, and finally stopping the machine.

On the basis, when the film plating is carried out, the servo motor 15 is started to drive the rotating rod 4 to rotate when the film plating is carried out, and when the rotating rod 4 rotates to drive a plurality of connecting plates 5 which are sequentially arranged from top to bottom to rotate, as the outer sides of the connecting plates 5 are all rotationally connected with the rotating shaft 7, the bottom of the rotating shaft 7 is fixedly connected with the transmission gear 8, the transmission gear 8 is meshed with the annular gear 12, and when the connecting plates 5 rotate, the rotating shaft 7 rotates through the meshing of the transmission gear 8 and the annular gear 12, the positioning frame 6 fixedly connected with the rotating shaft 7 rotates, and further the film plating of the optical filter substrate on the positioning frame 6 is uniform.

The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims (8)

1. The utility model provides a light filter carrier of coating film vacuum chamber, includes coating film machine device (1), coating film machine device (1) internally mounted has coating film vacuum chamber (2), coating film vacuum chamber (2) outside articulates there is closing plate (3), its characterized in that: the coating vacuum chamber (2) is inside to be equipped with dwang (4), dwang (4) run through coating vacuum chamber (2) and rotate with closing plate (3) and be connected, dwang (4) outside fixedly connected with a plurality of connecting plates (5), a plurality of connecting plate (5) outside all is equipped with a plurality of locating frame (6), a plurality of locating frame (6) are inside all to be equipped with clamping assembly, a plurality of locating frame (6) all are equipped with drive assembly with between coating vacuum chamber (2).

2. The filter carrier of a coating vacuum chamber of claim 1, wherein: the transmission components comprise a plurality of rotating shafts (7), the rotating shafts (7) are respectively and fixedly connected to the bottoms of the positioning frames (6), and the rotating shafts (7) penetrate through the connecting plates (5) and are meshed with the connecting plates (5).

3. The filter carrier of a coating vacuum chamber of claim 2, wherein: the transmission assembly further comprises a plurality of annular gears (12), a plurality of fixing plates (13) are fixedly connected to the outer sides of the annular gears (12), the fixing plates (13) are fixedly connected with the inner wall of the coating vacuum chamber (2), and a plurality of transmission gears (8) on the outermost sides of the connecting plates (5) are meshed with the annular gears (12).

4. A filter carrier for a coated vacuum chamber according to claim 3, wherein: two transmission gears (8) which are close to each other are meshed with each other.

5. The filter carrier of a coating vacuum chamber of claim 1, wherein: the clamping assembly comprises a plurality of clamping plates (11), the clamping plates (11) are annularly distributed inside the positioning frame (6) around the positioning frame (6), and telescopic rods (10) are fixedly connected between the clamping plates (11) and the positioning frame (6).

6. The filter carrier of claim 5, wherein: the clamping assembly further comprises a plurality of springs (9), the springs (9) are sleeved on the outer sides of the telescopic rods (10), and two ends of each spring (9) are fixedly connected with the clamping plate (11) and the locating frame (6) respectively.

7. The filter carrier for a coated vacuum chamber of claim 6, wherein: a plurality of fetching grooves (14) are formed in the top edge of the positioning frame (6).

8. The filter carrier of a coating vacuum chamber of claim 1, wherein: the top of the film coating vacuum chamber (2) is fixedly connected with a servo motor (15), and the output end of the servo motor (15) is fixedly connected with a rotating rod (4).