CN219347792U - Automatic detection alignment device - Google Patents

Abstract

The application relates to the technical field of automatic detection, in particular to an automatic detection alignment device, which comprises a carrying device, an adjusting component, a scanning identification component, a driving device and a control device; the control device is respectively and electrically connected with the adjusting component, the scanning identification component and the driving device; the driving device is respectively connected with the object carrying device and the adjusting component in a transmission way; the object carrying device is fixedly connected with the adjusting component; the scanning and identifying assembly is arranged above the carrying device, and in an initialized state, the focusing axis of the scanning and identifying assembly is coaxial with the axis of the carrying device; according to the automatic detection alignment device, the driving device is driven by the control device to drive the adjusting component to rotate, swing and/or translate, and further the adjustment of the spatial position of the piece to be detected is achieved, so that the levelness of the piece to be detected meets the preset levelness requirement, and the automation degree of the automatic detection alignment device and the detection efficiency of the automatic detection alignment device are improved.

Description

Automatic detection alignment device

Technical Field

The application relates to the technical field of detection, in particular to an automatic detection alignment device.

Background

In the detection device, the detection error is often caused by the mechanical assembly error and the processing error of the sample, so that the position of the sample needs to be adjusted to ensure the precision of the subsequent sample processing operation, and particularly in the microscopic field, the influence caused by the error is more remarkable. If the photolithography is performed in a photolithography scene when the sample is inclined, indexes such as minimum linewidth, uniformity of dimension and the like of the photolithography can be directly influenced, and the performance of a photolithography product can be influenced. Therefore, it is necessary to provide an automatic detection alignment device for precisely adjusting the pose of the sample, so as to solve the above-mentioned problems.

Disclosure of Invention

In order to solve the above prior art problems, the present application discloses an automatic detection alignment device, which comprises a carrying device, an adjusting component, a scanning identification component, a driving device and a control device; the control device is respectively and electrically connected with the adjusting component, the scanning identification component and the driving device; the driving device is respectively in transmission connection with the carrying device and the adjusting component; the object carrying device is fixedly connected with the adjusting component, the scanning identification component is arranged above the object carrying device, and in an initialized state, the focusing axis of the scanning identification component is coaxial with the axis of the object carrying device; under the drive action of the drive device, the adjustment assembly can drive the carrying device to perform preset movement, and the preset movement comprises at least one of rotation, swing and translation movement.

Further, the automatic detection alignment device further comprises a base table, and the adjusting assembly comprises a translation device, a swinging device and a rotation device; the object carrying device is fixedly connected with the rotating device, the rotating device is fixedly connected with the swinging device, and the swinging device is fixedly connected with the translation device; the translation device is movable relative to the base table, the swinging device is swingable relative to the base table, and the rotation device is rotatable relative to the base table.

Further, the carrying device comprises an objective table, a carrying base and a lifting driving device; the lifting driving device is in transmission connection with the objective table, the lifting driving device is fixedly connected with the object carrying base, and the lifting driving device is electrically connected with the control device; the lifting driving device can drive the objective table to reciprocate relative to the carrying base along the axis direction of the carrying device.

Further, the object carrying device further comprises a sucker device, the sucker device is fixedly connected with the object stage, a sample adsorption position is arranged on the object stage, and the adsorption end of the sucker device is arranged on the sample adsorption position.

Further, the rotating device comprises a rotary round table, a rotary base and a rotary driving device; the rotary driving device is in transmission connection with the rotary round table, the rotary driving device is fixedly connected with the rotary base, and the rotary driving device is electrically connected with the control device; the rotary round table can rotate relative to the rotary base under the drive of the rotary driving device.

Further, a limit matching part is arranged on the rotary round table, and a first limit part and a second limit part are arranged on the rotary base; the first limiting part and the second limiting part are respectively arranged along the motion track of the limiting matching part relative to the rotation base, and the first limiting part and the second limiting part can be respectively matched and limited with the limiting matching part.

Further, the swinging device comprises a first swinging component, a second swinging component, a swinging base and a swinging driving device; the swing driving device is respectively in transmission connection with the first swing assembly and the second swing assembly; the swing driving device is electrically connected with the control device; the first swing assembly is in sliding connection with the second swing assembly, and the second swing assembly is in sliding connection with the swing base; the swing driving device can drive the first swing assembly to move along a first swing direction relative to the second swing assembly; the swing driving device can also drive the second swing assembly to move along a second swing direction relative to the swing base; the second swinging direction is perpendicular to the first swinging direction, and the second swinging direction coincides with the swinging center of the first swinging direction.

Further, the first swing assembly comprises a first swing piece, a first swing guide rail and a first sliding piece which is in sliding connection with the first swing guide rail; the first swing guide rail is fixedly connected with the first swing piece, and the first sliding piece is fixedly connected with the second swing assembly.

Further, the second swinging assembly comprises a second swinging piece and a second sliding piece, wherein the second swinging piece is connected with the second swinging guide rail in a sliding way; the second swing guide rail is fixedly connected with the second swing piece, and the second sliding piece is fixedly connected with the swing base.

Further, the translation device comprises an X-axis moving assembly, a Y-axis moving assembly, a moving base and a moving driving device; the movement driving device is respectively in transmission connection with the X-axis movement assembly and the Y-axis movement assembly; the mobile driving device is electrically connected with the control device; the X-axis moving assembly is in sliding connection with the Y-axis moving assembly, and the Y-axis moving assembly is in sliding connection with the moving base; the movement driving device can drive the X-axis movement assembly to move along the X-axis direction relative to the Y-axis movement assembly; the movement driving device can also drive the Y-axis movement assembly to move along the Y-axis direction relative to the movement base.

The application provides an automatic detect aligning device has following beneficial effect at least:

1. according to the device, the object carrying device is fixedly connected with the adjusting component, and the adjusting component can drive the object carrying device to rotate, swing or/and move horizontally under the drive of the driving device, so that the relative position relation of the object carrying device relative to the scanning and identifying component is adjusted, the adjustment of the spatial position of the object to be detected is realized, the object to be detected meets the preset levelness requirement, namely the leveling treatment of the object to be detected can be realized through the adjusting component, and a positioning basis is provided for the subsequent processing of the object to be detected; the control device is respectively and electrically connected with the adjusting component, the scanning and identifying component and the driving device, and then the scanning and identifying component can send the collected image information of the to-be-detected piece to the control device, and the control device controls the driving device to drive the adjusting component to perform preset movement according to the received image information, so that the adjustment of the spatial position of the to-be-detected piece is realized, and the degree of automation of the automatic detection and alignment device and the detection efficiency of the automatic detection and alignment device are improved.

2. The device comprises a translation device, a swinging device and a rotating device, wherein the translation device can move relative to the base platform; the swinging device can swing relative to the base table; the rotating device can rotate relative to the base table, and further the adjustment assembly drives the to-be-detected piece to rotate, swing and translate relative to the base table, so that the to-be-detected piece meets the preset levelness requirement.

3. This application sets up spacing cooperation portion and sets up first spacing portion and second spacing portion on rotatory round platform and sets up spacing cooperation portion and second spacing portion on rotatory round platform, and at rotatory round platform for rotatory base pivoted in-process, spacing cooperation portion can with the spacing portion butt of second, and then restricted rotatory round platform for rotation angle on the direction of rotation of rotatory base, spacing cooperation portion can also with first spacing portion butt, and then restricted rotatory round platform for rotation angle of rotatory round platform in another direction of rotation, through restricting rotatory round platform for rotatory base pivoted rotation angle, show the adjustment efficiency that improves the detection zone bit place horizontal plane angle on the piece of waiting to detect.

4. According to the automatic detection alignment device, the lifting driving device is arranged, the objective table can reciprocate on the axis of the vertical direction of the object carrying device along the object carrying device relative to the object carrying base under the driving of the lifting driving device, then the object to be detected on the objective table is driven to move to the target focusing position of the scanning identification component, the target focusing position can be the focusing position of the scanning identification component, the acquisition view field of the scanning identification component accords with the definition requirement, the image information which is acquired by the scanning identification component and accords with the definition requirement is convenient to acquire, and the definition and the information expression accuracy of the image information are further improved, so that the detection accuracy and the high efficiency of the automatic detection alignment device are improved.

5. This application is through setting up sucking disc device, sucking disc device and objective table fixed connection to be equipped with the sample on the objective table and adsorb the position, with sucking disc device's adsorption end setting in the sample and adsorb the position, under the state of waiting to detect the piece and place on the objective table, be in the open state through controlling means control sucking disc device, will wait to detect the piece and adsorb on the objective table through adsorbing the end, realize waiting to detect the fixing of piece, thereby guaranteed automatic detection counterpoint device and treated the reliability and the stability of detecting the piece counterpoint adjustment.

6. According to the method, the first swing assembly is driven to move along the first swing direction relative to the second swing assembly through the first swing driving device, so that flatness adjustment of a plane of a detection zone bit on a piece to be detected along the first swing direction is realized; the second swinging assembly is driven to move along a second swinging direction relative to the swinging base through the second swinging driving device, so that flatness adjustment of a plane of the detection zone bit on the piece to be detected along the second swinging direction is realized through the swinging device; and the second swing direction is perpendicular to the first swing direction, and the second swing direction coincides with the swing center of the first swing direction, so that the adjustment precision of the inclination angle of the part to be detected by the swing device is improved, the levelness of the plane where the detection marker bit is located is further ensured, and the pose adjustment precision is ensured.

Drawings

In order to more clearly illustrate the technical solutions and advantages of embodiments of the present application or of the prior art, the following description will briefly introduce the drawings that are required to be used in the embodiments or the prior art descriptions, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1: the embodiment of the application provides an overall structure schematic diagram of an automatic detection alignment device;

fig. 2: the embodiment of the application provides a structural schematic diagram of a carrying device;

fig. 3: the embodiment of the application provides a structural schematic diagram of a rotating device;

fig. 4: the embodiment of the application provides a structural schematic diagram of a swinging device;

fig. 5: the embodiment of the application provides a structural schematic diagram of a translation device;

fig. 6: an explosion schematic diagram of the swinging device is provided;

fig. 7: an explosion schematic diagram of the translation device is provided;

wherein, the reference numerals in the figures correspond to:

1-carrying device, 2-adjusting component, 3-scanning identification component, 11-objective table, 12-carrying base, 21-translation device, 22-swinging device, 23-rotation device, 31-image acquisition device, 32-light source device, 33-first lens module, 34-second lens module, 35-beam splitter, 36-objective lens, 111-sample adsorption position, 121-mounting position, 211-X axis moving component, 212-Y axis moving component, 213-moving base, 221-first swinging component, 222-second swinging component, 223-swinging base, 224-first swinging table, 225-first swinging guide rail, 226-first sliding piece, 227-second swinging piece, 228-second swinging guide rail, 229-second sliding piece, 231-rotating round table, 232-rotating base, 233-limit matching part, 234-first limit part, 235-second limit part and 236-rotation driving device.

Detailed Description

The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present application based on the embodiments herein.

It should be noted that the terms "first," "second," and the like in the description and claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the present application described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, apparatus, article, or device that comprises a list of steps or elements is not necessarily limited to those elements but may include other steps or elements not expressly listed or inherent to such process, method, article, or device.

Embodiments are described below with reference to the accompanying drawings, which do not limit the application content of the claims.

Referring to fig. 1-7, an embodiment of the present application provides an automatic detection alignment device, which includes a carrying device 1, an adjusting component 2, a scanning identification component 3, a driving device and a control device; the control device is respectively and electrically connected with the adjusting component 2, the scanning identification component 3 and the driving device; the driving device is respectively connected with the carrying device 1 and the adjusting component 2 in a transmission way; the carrying device 1 is fixedly connected with the adjusting component 2; the scanning and identifying assembly 3 is arranged above the carrying device 1, and in an initialized state, the focusing axis of the scanning and identifying assembly 3 is coaxial with the axis of the carrying device 1; under the drive of the driving device, the adjusting component 2 can drive the carrying device 1 to perform preset motion, and the preset motion comprises at least one of rotation, swing and translation motion.

So, this application is through setting up adjustment subassembly 2, will carry thing device 1 and adjustment subassembly 2 fixed connection, under drive arrangement's drive, adjustment subassembly 2 can drive and carry thing device 1 and do rotation, swing and translational motion, and then adjusted the relative positional relationship that carries thing device 1 for scanning identification component 3, thereby realized treating the adjustment of detecting element spatial position, make treat detecting element and satisfy the levelness requirement of predetermineeing, can realize treating detecting element promptly through adjustment subassembly 2 and carry out leveling treatment, also provide the location basis for the processing of follow-up treating detecting element simultaneously. The control device is respectively and electrically connected with the adjusting component 2, the scanning and identifying component 3 and the driving device, and then the scanning and identifying component 3 can send the collected image information of the to-be-detected piece to the control device, and the control device controls the driving device to drive the adjusting component 2 to perform preset movement according to the received image information, so that the adjustment of the spatial position of the to-be-detected piece is realized, and the degree of automation of the automatic detection and alignment device and the detection efficiency of the automatic detection and alignment device are improved.

In one embodiment, three detection zone bits are respectively an A detection zone bit, a B detection zone bit and a C detection zone bit, and the connection line of the A detection zone bit and the B detection zone bit is perpendicular to the connection line of the A detection zone bit and the C detection zone bit.

Specifically, the scanning recognition assembly 3 includes an image pickup device 31, a light source device 32, a first lens module 33, a second lens module 34, a spectroscopic plate 35, and an objective lens 36. Specifically, the image pickup device 31 may be a CCD camera.

As shown in fig. 1, specifically, along the focusing axis of the image pickup device 31, a first lens module 33, a spectroscopic plate 35, and an objective lens 36 are provided in this order from top to bottom.

In the embodiment, the objective lens 36 is arranged to realize the image amplification effect on the to-be-detected piece on the carrying device 1, so that the image acquisition device 31 is convenient for acquiring the image of the detection zone bit region; the first lens module 33 and the second lens module 34 can make the light beam emitted by the light source device 32 smoother and higher in luminosity.

In some embodiments, the light source device 32 may be disposed at a side of the image capturing device 31.

Specifically, the optical path of the light beam emitted by the light source device 32 may be perpendicular to the focusing axis of the image capturing device 31, and the second lens module 34 is disposed on the optical path of the light beam emitted by the light source device 32, where the second lens module 34 is disposed between the light source device 32 and the light splitting sheet 35, and the second lens module 34 and the light splitting sheet 35 are disposed coaxially.

In this embodiment, the beam splitter 35 is disposed between the objective lens 36 and the first lens module 33, so that the light beam is projected onto the to-be-detected piece after passing through the beam splitter 35 and the objective lens 36, then the light beam with the sample characteristic information is projected onto the first lens module 33 through the objective lens 36 and the beam splitter 35, and then the light beam with the sample characteristic information is focused onto the image acquisition device 31 through the first lens module 33, so that the brightness of the acquired field of view of the image acquisition device 31 is improved, the accuracy of the detection result of the sample characteristic information of the to-be-detected piece by the image acquisition device 31 is improved, the reflected light beam can be projected onto the to-be-detected piece of the object carrying device 1 through the objective lens 36, and the observation clarity of the objective lens 36 on the to-be-detected piece is improved.

Specifically, the image pickup device 31 is electrically connected to the control device.

Specifically, the image acquisition device 31 can send the acquired image information of the to-be-detected piece to the control device, and the control device performs image recognition processing on the received image information of the to-be-detected piece to obtain the position information of the detection zone bit on the to-be-detected piece and the image definition information corresponding to the to-be-detected piece.

Specifically, the image pickup device 31 is disposed above the carrier device 1, and in the initialized state, the focusing axis of the image pickup device 31 is coaxial with the axis of the carrier device 1. In particular, the focal axis of the image acquisition device 31 may coincide with an axis in the vertical direction of the carrier device 1.

In one embodiment, referring to fig. 1, in the initialized state, the image capturing device 31 is disposed above the carrying device 1, and the focusing axis of the image capturing device 31 is coaxial with the axis of the carrying device 1, so that the image capturing device 31 is beneficial to determining the target detection position of the automatic detection alignment device. And according to the determined target detection position, the subsequent control device is convenient to determine the position information of the detection mark bit relative to the target detection position.

In some embodiments, the automatic detection alignment device further comprises a base table, and the adjustment assembly 2 comprises a translation device 21, a swing device 22 and a rotation device 23; the carrying device 1 is fixedly connected with the rotating device 23, the rotating device 23 is fixedly connected with the swinging device 22, the swinging device 22 is fixedly connected with the translation device 21, and the translation device 21 can move relative to the base platform; the swinging device 22 can swing relative to the base table; the rotating device 23 can rotate relative to the base table, so that the adjustment assembly 2 drives the to-be-detected piece to rotate, swing and translate relative to the base table, and the pose of the to-be-detected piece is adjusted to meet the preset levelness requirement.

Specifically, the driving device includes a lifting driving device for driving the carrying device 1 to move, a moving driving device for driving the translation device 21 to move, a swinging driving device for driving the swinging device 22 to move, and a rotating driving device 236 for driving the rotating device 23 to move.

Specifically, a positioning mounting hole may be provided on the base table, and at least one of the translation device 21, the swing device 22, and the rotation device 23 may be connected to the base table by a fixed connection, such as a bolt connection.

In one embodiment, as shown in fig. 1, the translation device 21 may be disposed on the base table and bolted to the base table; the swinging device 22 is arranged above the translation device 21, and the swinging device 22 and the translation device 21 can be connected through bolts; the rotation device 23 is arranged above the swinging device 22, and the rotation device 23 and the swinging device 22 can be connected through bolts.

In one embodiment, the detachable connection among the swinging device 22, the translation device 21 and the base platform and the detachable connection among the rotating device 23 and the swinging device 22 are realized in a bolt connection mode, so that the installation positions among the translation device 21, the swinging device 22 and the rotating device 23 can be adjusted according to specific operation requirements, and the assembly flexibility is improved.

As shown in fig. 2, in some embodiments, the carrier device 1 includes a stage 11, a carrier base 12, and a lift drive; the lifting driving device is fixedly connected with the object carrying base 12, is in transmission connection with the object carrying table 11 and is electrically connected with the control device; the lifting driving device can drive the object stage 11 to do lifting motion along the axis direction of the object carrying device 1 relative to the object carrying base 12.

Specifically, the lifting driving device may be a lifting cylinder device, and the carrying base 12 may be fixedly connected with the rotating device 23.

Specifically, the carrying base 12 is provided with a mounting position 121, and the carrying base 12 and the rotating device 23 can be connected by bolts.

Specifically, the mounting locations 121 may be load bed mounting holes.

Specifically, the lifting driving device and the scanning identification component 3 are respectively and electrically connected with the control device, and the scanning identification component 3 can acquire image information of a piece to be detected in real time; the scanning recognition component 3 sends the image information of the part to be detected to the control device, the control device carries out image recognition processing on the image information to obtain an image recognition result, and based on the image recognition result, the lifting driving device is controlled to drive the object stage 11 to reciprocate up and down relative to the object carrying base 12 until the image information received by the control device meets the preset definition requirement, and the lifting driving device is controlled to stop driving the object stage 11.

In one embodiment, under the driving of the jacking cylinder device, the objective table 11 can reciprocate along the axis of the vertical direction of the carrying device 1 relative to the carrying base 12, so as to drive the to-be-detected piece on the objective table 11 to move to the target focusing position of the scanning and identifying assembly 3, wherein the target focusing position is the focusing position meeting the preset definition requirement of the scanning and identifying assembly 3, thereby ensuring that the image information meets the definition requirement, and improving the detection accuracy and the efficiency of the automatic detection alignment device.

As shown in fig. 2, in some embodiments, the carrying device 1 further includes a suction cup device, where the suction cup device is fixedly connected to the stage 11, and a sample suction position 111 is provided on the stage 11; the suction end of the suction cup device is arranged on the sample suction position 111.

Specifically, a plurality of sample adsorption sites 111 are symmetrically arranged on the object stage 11, the sample adsorption sites 111 can be provided with adsorption holes, and the adsorption ends of the sucker devices can be accommodated in the adsorption holes.

Specifically, an external vacuum suction device may be connected to the suction cup device to perform a vacuum suction process on the suction cup device.

Through setting up sucking disc device, sucking disc device and objective table 11 fixed connection are equipped with sample adsorption site 111 on objective table 11, with sucking disc device's adsorption end setting on sample adsorption site 111, under the state of waiting to detect the piece and place on objective table 11, will wait to detect the piece and adsorb on objective table 11 through the adsorption end, realize waiting to detect the fixed of piece to guaranteed automatic detection counterpoint device and treated the reliability and the stability of detecting the piece counterpoint adjustment.

As shown in fig. 3, in some embodiments, the rotation device 23 includes a rotary table 231, a rotary base 232, and a rotary drive device 236; the rotary driving device 236 is in transmission connection with the rotary round table 231, the rotary driving device 236 is fixedly connected with the rotary base 232, and the rotary driving device 236 is electrically connected with the control device; the rotary table 231 is rotatable relative to the rotary base 232 by the rotation driving device 236.

Specifically, the rotary table 231 is provided with a connection position that mates with the mounting position 121 provided on the load base 12.

In this embodiment, the control device is electrically connected to the rotation driving device 236, and the control device performs positioning of the to-be-detected piece based on the received image information of the to-be-detected piece, and controls the rotation driving device 236 to drive the rotation round table 231 to rotate relative to the rotation base 232, so as to align the detection zone bit on the to-be-detected piece, and achieve position adjustment of the to-be-detected piece.

As shown in fig. 3, in some embodiments, a limit engaging portion 233 is provided on the rotary table 231, and a first limit portion 234 and a second limit portion 235 are provided on the rotary base 232; the first limiting portion 234 and the second limiting portion 235 are disposed along a motion track of the limiting engagement portion 233 rotating relative to the rotating base 232, and the first limiting portion 234 and the second limiting portion 235 can be engaged with and limited by the limiting engagement portion 233 respectively.

Specifically, the limit engaging portion 233 is disposed on the circular truncated cone edge of the rotary circular truncated cone 231.

Specifically, the limit engaging portion 233 is disposed between the first limit portion 234 and the second limit portion 235. Optionally, the limit engaging portion 233 is a bump.

Specifically, an included angle between the first and second stopper portions 234 and 235 and a connection line of the rotation center of the rotary table 231 may be 60 °.

Under the drive of the rotation driving device 236, the rotary round table 231 can rotate relative to the rotary base 232, the limit matching part 233 is arranged on the rotary round table 231, the first limit part 234 and the second limit part 235 are arranged on the rotary base 232, the limit matching part 233 can be abutted with the second limit part 235 in the process of rotating the rotary round table 231 relative to the rotary base 232, the rotation angle of the rotary round table relative to one rotation direction of the rotary base is further limited, the limit matching part can be abutted with the first limit part 234, the rotation angle of the rotary round table 231 relative to the rotary base 232 in the other rotation direction is further limited, and the adjustment efficiency of the horizontal plane angle of the detection marker position on the to-be-detected piece is remarkably improved by limiting the rotation angle of the rotary round table 231 relative to the rotary base 232.

As shown in fig. 4, in some embodiments, the swing device 22 includes a first swing assembly 221, a second swing assembly 222, a swing base 223, and a swing drive device; the swing driving device is respectively connected with the first swing component 221 and the second swing component 222 in a transmission way; the swing driving device is electrically connected with the control device; the first swing assembly 221 is slidably connected with the second swing assembly 222, and the second swing assembly 222 is slidably connected with the swing base 223; the swing driving device can drive the first swing assembly 221 to move along the first swing direction relative to the second swing assembly 222; the swing driving device can also drive the second swing assembly 222 to move along the second swing direction relative to the swing base 223; the second swing direction is perpendicular to the first swing direction, and the second swing direction coincides with the swing center of the first swing direction.

Specifically, the swing driving device includes a first swing driving device and a second swing driving device, the first swing driving device is in transmission connection with the first swing assembly 221, and the second swing driving device is in transmission connection with the second swing assembly 222.

In this embodiment, the first swing driving device can drive the first swing assembly 221 to move along the first swing direction relative to the second swing assembly 222, and the second swing driving device can drive the second swing assembly 222 to move along the second swing direction relative to the swing base 223, where the second swing direction is perpendicular to the first swing direction, and the second swing direction coincides with the swing center of the first swing direction, so that the adjustment precision of the inclination angle of the to-be-detected piece by the swing device 22 is improved, and the flatness of the plane where the detection marker bit on the to-be-detected piece is located is ensured to meet the preset levelness requirement.

As shown in fig. 6, in some embodiments, the first swing assembly 221 includes a first swing member 224, a first swing rail 225, and a first slider 226 slidably coupled to the first swing rail 225; the first swing guide 225 is fixedly connected to the first swing member 224, and the first slider 226 is fixedly connected to the second swing assembly 222.

In this embodiment, by fixedly connecting the first swing rail 225 with the first swing member 224 and fixedly connecting the first slider 226 with the second swing assembly 222, the first swing member 224 moves along the first swing direction relative to the second swing assembly 222, and further, the flatness adjustment of the flatness of the plane of the detection marker bit on the part to be detected along the first swing direction is achieved.

In some embodiments, second swing assembly 222 includes a second swing member 227, a second swing rail 228, and a second slider 229 in sliding connection with second swing rail 228; the second swing guide 228 is fixedly connected to the second swing member 227, and the second slider 229 is fixedly connected to the swing base 223.

Through the fixed connection of the second swing guide rail 228 and the second swing piece 227, the second slide piece 229 is fixedly connected with the swing base 223, so that the second swing piece 227 moves along the second swing direction relative to the swing base 223, and further, the plane adjustment of the flatness of the detection marker bit on the piece to be detected along the second swing direction is realized. Wherein the first swing direction is perpendicular to the second swing direction.

As shown in fig. 5, in some embodiments, the translation device 21 includes an X-axis movement assembly 211, a Y-axis movement assembly 212, a movement base 213, and a movement drive; the movement driving device is respectively connected with the X-axis movement assembly 211 and the Y-axis movement assembly 212 in a transmission way; the mobile driving device is electrically connected with the control device; the X-axis moving assembly 211 is in sliding connection with the Y-axis moving assembly 212, and the Y-axis moving assembly 212 is in sliding connection with the moving base 213; the movement driving device can drive the X-axis movement assembly 211 to move along the X-axis direction relative to the Y-axis movement assembly 212; the movement driving device can also drive the Y-axis movement assembly 212 to move along the Y-axis direction relative to the movement base 213.

Specifically, as shown in fig. 7, the X-axis moving assembly 211 includes an X-axis moving table, an X-axis moving rail, and an X-axis moving member slidably connected to the X-axis moving rail, the X-axis moving rail is fixedly connected to the X-axis moving table, and the X-axis moving member is fixedly connected to the Y-axis moving assembly 212.

Specifically, the Y-axis moving assembly 212 includes a Y-axis moving table, a Y-axis moving rail, and a Y-axis moving member slidably connected to the Y-axis moving rail, wherein the Y-axis moving rail is fixedly connected to the Y-axis moving table, and the Y-axis moving member is fixedly connected to the moving base 213.

Specifically, the X-axis moving member is fixedly connected with the Y-axis moving stage.

Specifically, the movement driving device includes an X-axis driving device and a Y-axis driving device, the X-axis driving device is in driving connection with the X-axis moving assembly 211, and the Y-axis driving device is in driving connection with the Y-axis moving assembly 212.

In this embodiment, the X-axis moving assembly 211 and the Y-axis moving assembly 212 realize the two-axis motion of the translation device 21 in coordination with the to-be-detected piece, so as to realize the moving centering of the to-be-detected flag bit and the detection flag bit on the to-be-detected piece, so that the scanning recognition assembly 3 can realize accurate positioning recognition, and realize the translation adjustment of the to-be-detected piece.

The application provides an automatic detect aligning device has following beneficial effect at least:

1. According to the automatic detection alignment device, the adjustment assembly 2 is arranged, the object carrying device 1 is fixedly connected with the adjustment assembly 2, the adjustment assembly 2 can drive the object carrying device 1 to rotate, swing and move horizontally under the driving of the driving device, and then the relative position relation of the object carrying device 1 relative to the scanning recognition assembly 3 is adjusted, so that the adjustment of the spatial position of the object to be detected is realized, the object to be detected meets the preset levelness requirement, namely the leveling treatment of the object to be detected can be realized through the adjustment assembly 2, the positioning basis is provided for the subsequent processing of the object to be detected, the control device is respectively electrically connected with the adjustment assembly 2, the scanning recognition assembly 3 and the driving device, the scanning recognition assembly 3 can send the acquired image information of the object to be detected to the control device, the control device controls the driving device to drive the adjustment assembly 2 to perform preset movement according to the received image information, the adjustment of the spatial position of the object to be detected is realized, and the degree of automation of the automatic detection alignment device and the detection efficiency of the automatic detection alignment device are improved.

2. The application is characterized in that a translation device 21, a swinging device 22 and a rotating device 23 are arranged, and the translation device 21 can move relative to the base platform; the swinging device 22 can swing relative to the base table, and the rotating device 23 can rotate relative to the base table; and further, the adjustment component 2 drives the to-be-detected piece to rotate, swing and translate relative to the base table, so that the to-be-detected piece meets the preset levelness requirement.

3. This application sets up spacing cooperation portion 233 and sets up first spacing portion 234 and second spacing portion 235 on rotatory round platform 231 and sets up first spacing portion 234 and second spacing portion 234 on rotatory base 232, at rotatory round platform 231 for rotatory base 232 pivoted in-process, spacing cooperation portion 233 can with the spacing portion 235 butt of second, and then it is rotatable round platform 231 for the ascending rotation angle of rotatory base 232 to have restricted, spacing cooperation portion 233 can also with first spacing portion 234 butt, and then it is rotatable round platform 231 for rotatory base 232 in another rotation angle of rotation direction, through restricting rotatory round platform 231 for rotatory base 232 pivoted rotation angle, show improvement wait to detect the alignment efficiency of the horizontal plane angle that the position of mark lies in on the piece.

4. According to the automatic detection alignment device, the lifting driving device is arranged, the object stage 11 can reciprocate on the axis of the vertical direction of the object carrying device 1 along the object carrying base 12 relatively under the driving of the lifting driving device, then the object to be detected on the object stage 11 is driven to move to the target focusing position of the scanning identification component 3, the target focusing position can be the focusing position of the scanning identification component 3, the acquisition visual field accords with the definition requirement, the image information of the scanning identification component 3 acquired and meeting the definition requirement is conveniently ensured, the definition of the image information and the information expression accuracy are further improved, and accordingly the detection accuracy and the high efficiency of the automatic detection alignment device are improved.

5. This application is through setting up sucking disc device, sucking disc device and objective table 11 fixed connection to be equipped with sample adsorption site 111 on objective table 11, set up sucking disc device's adsorption end on sample adsorption site 111, under the state of waiting to detect the piece and place on objective table 11, will wait to detect the piece and adsorb on objective table 11 through the adsorption end, realize waiting to detect the fixed of piece, thereby guaranteed automatic detection counterpoint device and treated reliability and stability that detects the piece counterpoint adjustment.

6. According to the method, the first swing driving device drives the first swing assembly 221 to move along the first swing direction relative to the second swing assembly 222, so that the flatness adjustment of the plane of the detection zone bit on the piece to be detected along the first swing direction of the swing device 22 is realized; the second swing driving device drives the second swing assembly 222 to move along the second swing direction relative to the swing base 223, so that the flatness adjustment of the plane of the detection marker bit on the piece to be detected along the second swing direction of the swing device 22 is realized; the second swinging direction is perpendicular to the first swinging direction, and the second swinging direction coincides with the swinging center of the first swinging direction; thereby improving the adjustment precision of the inclination angle of the to-be-detected piece by the swinging device 22, further ensuring the levelness of the plane of the detection zone bit on the to-be-detected piece and ensuring the pose adjustment precision.

Example 1

In this embodiment, an example is described in which an a detection flag bit, a B detection flag bit, and a C detection flag bit are provided on a piece to be detected, and a connection line of the a detection flag bit and the B detection flag bit is perpendicular to a connection line of the a detection flag bit and the C detection flag bit.

Referring to fig. 1-7, an embodiment of the present application provides an automatic detection alignment device, which includes a carrying device 1, an adjusting component 2, a scanning identification component 3, a driving device and a control device; the control device is respectively and electrically connected with the adjusting component 2, the scanning identification component 3 and the driving device; the driving device is respectively connected with the carrying device 1 and the adjusting component 2 in a transmission way; the object carrying device 1 is fixedly connected with the adjusting component 2, and the driving device is in transmission connection with the adjusting component 2; the scanning and identifying assembly 3 is arranged above the carrying device 1, and in an initialized state, the focusing axis of the scanning and identifying assembly 3 is coaxial with the axis of the carrying device 1; under the drive of the driving device, the adjusting component 2 can drive the carrying device 1 to rotate, swing and translate.

As shown in fig. 1, the automatic detection alignment device further includes a base table, the scanning recognition assembly 3 is fixedly connected with the base table, the scanning recognition assembly 3 includes an image acquisition device 31, a light source device 32, a first lens module 33, a second lens module 34, a beam splitter 35 and an objective lens 36, and the image acquisition device 31 is electrically connected with the control device.

Specifically, on the focal axis of the image capturing device 31, a first lens module 33, a beam splitter 35 and an objective lens 36 are sequentially disposed from top to bottom, the light source device 32 is disposed on the side surface of the image capturing device 31 and is disposed corresponding to the beam splitter 35, a second lens module 34 is disposed on the light path of the light beam emitted by the light source device 32, the second lens module 34 is disposed between the light source device 32 and the beam splitter 35, and the second lens module 34 and the beam splitter 35 are disposed coaxially.

The image acquisition device 31 can acquire image information of the to-be-detected piece in real time, and sends the image information of the to-be-detected piece acquired in real time to the control device, the control device performs image recognition processing on the image information of the to-be-detected piece at different moments, and the driving device performs rotation, swing and translation motion based on the image recognition result.

As shown in fig. 1, in the initialized state, the image capturing device 31 is disposed above the carrying device 1, and the focusing axis of the image capturing device 31 coincides with the axis of the carrying device 1 in the vertical direction, under which state the control device determines the target detection position of the automatic detection alignment device, so that the subsequent control device determines the coordinate information of the detection flag bit on the object to be detected with respect to the target detection position based on the target detection position.

The adjusting assembly 2 comprises a translation device 21, a swinging device 22 and a rotating device 23, wherein the translation device 21 is fixed right above the base table, the swinging device 22 is fixed right above the translation device 21, the rotating device 23 is fixed right above the swinging device 22, and the carrying device 1 is fixed right above the rotating device 23.

As shown in fig. 2, the carrying device 1 includes a carrying table 11, a carrying base 12, a lifting driving device and a sucker device, the lifting driving device is fixedly connected with the carrying base 12, the lifting driving device is in transmission connection with the carrying table 11, four sample adsorption positions 111 are symmetrically arranged on the carrying table 11, and the adsorption end of the sucker device can be accommodated in the sample adsorption positions 111. The object to be detected is placed on the object stage 11, and the sucking end of the sucking disc device sucks the object to be detected on the object stage 11.

Under the drive of the lifting driving device, the object stage 11 can reciprocate on the axis vertical to the object carrying device of the object carrying base 12 relative to the object carrying base 12 until the object to be detected on the object stage 11 is driven to move to the target focusing position where the acquisition view field of the image acquisition device 31 meets the definition requirement, so that the scanning and identifying assembly is convenient to acquire the image information meeting the definition requirement, the definition of the image information and the accuracy of information expression are further improved, and the detection accuracy and the efficiency of the automatic detection alignment device are further improved.

As shown in fig. 5 and 7, the translation device 21 includes an X-axis moving stage, an X-axis moving rail, an X-axis moving member slidably connected to the X-axis moving rail, a Y-axis moving stage, a Y-axis moving rail, a Y-axis moving member slidably connected to the Y-axis moving rail, a moving base 213, an X-axis driving device, and a Y-axis driving device.

The Y-axis moving guide rail is fixedly connected with the Y-axis moving table, and the Y-axis moving piece is fixedly connected with the moving base 213; the X-axis moving guide rail is fixedly connected with the X-axis moving table, the X-axis moving piece is fixedly connected with the Y-axis moving table, the X-axis driving device and the Y-axis driving device are respectively and fixedly connected with the moving base 213, the X-axis driving device and the Y-axis driving device are respectively and electrically connected with the control device, the X-axis driving device is in transmission connection with the X-axis moving table, and the Y-axis driving device is in transmission connection with the Y-axis moving table.

Meanwhile, the control device determines the position information of the detection zone bit of the to-be-detected piece through the image recognition result of the image information, and controls the translation device 21 to move so as to drive the to-be-detected piece to move. Specifically, the X-axis driving device drives the X-axis moving table to move along the X-axis direction relative to the Y-axis moving table, and controls the X-axis driving device to drive the Y-axis moving table to move along the Y-axis direction relative to the moving base 213, so as to drive the a detection flag bit on the object to be detected to move to the target detection position of the automatic detection alignment device, the scanning recognition component 3 collects updated image information and sends the updated image information to the control device, and the control device can determine updated coordinate information of the a detection flag bit according to the updated image information; based on similar operation procedures, the control device may also determine the updated coordinate information of the B detection flag bit and the updated coordinate information of the C detection flag bit.

As shown in fig. 3, the rotating device 23 includes a rotary round table 231, a rotary base 232, and a rotary driving device 236, and the rotary driving device 236 is fixedly connected with the rotary base 232.

The control device controls the rotating device 23 to move according to the acquired updated coordinate information of the A detection zone bit and the B detection zone bit, and the rotary round table 231 rotates relative to the rotary base 232 under the drive of the rotary driving device 236 until a connecting line AB of the central position of the A detection zone bit and the central position of the B detection zone bit is parallel to the X axis direction, so that the alignment of the A detection zone bit and the B detection zone bit is realized.

As shown in fig. 4 and 6, the swinging device 22 includes a first swinging member 224, a first swinging guide rail 225, a first slider 226 slidably connected to the first swinging guide rail 225, a second swinging member 227, a second swinging guide rail 228, a second slider 229 slidably connected to the second swinging guide rail 228, a swinging base 223, a first swinging drive device, and a second swinging drive device.

The first swing guide rail 225 is fixedly connected with the first swing member 224, the first sliding member 226 is fixedly connected with the second swing assembly 222, the second swing guide rail 228 is fixedly connected with the second swing member 227, the second sliding member 229 is fixedly connected with the swing base 223, the first swing driving device is in transmission connection with the first swing member 224, and the second swing driving device is in transmission connection with the second swing member 227.

The control device controls the first swing driving device to drive the first swing piece 224 to move along the first swing direction according to the acquired updated coordinate information of the A detection zone bit and the B detection zone bit until the connection line AB of the A detection zone bit and the B detection zone bit is parallel to the preset target horizontal plane, namely, the included angle between the AB and the preset target horizontal plane is 0 degrees.

The control device controls the second swing driving device to drive the second swing piece 224 to move along the second swing direction according to the updated coordinate information of the A detection zone bit and the C detection zone bit until the connection line AC of the A detection zone bit and the C detection zone bit is parallel to a preset target horizontal plane, namely, the included angle between the AC and the preset target horizontal plane is 0 degrees, so that the levelness adjustment of the piece to be detected is realized.

The specific operation process of the automatic detection alignment device provided by the application is as follows:

in the first step, in the initialized state, the part to be detected is placed on the objective table 11, and the part to be detected is fixed on the objective table 11 through the sucker device, the scanning and identifying assembly 3 starts to collect the image information of the part to be detected, and the image information of the part to be detected is collected and sent to the control device.

The second step, based on the obtained image information of the to-be-detected piece, the control device can prompt the lifting driving device to start, under the driving of the lifting driving device, the object stage 11 can reciprocate along the axis of the vertical direction of the object carrying device 1 relative to the object carrying base 12, and then the to-be-detected piece on the object stage 11 is driven to move to the target focusing position of the scanning identification component 3, and under the state that the to-be-detected piece moves to the target focusing position of the scanning identification component 3, the control device can prompt the lifting driving device to stop driving, so that the image information of the to-be-detected piece collected by the scanning identification component 3 meets the preset definition requirement.

Third, in a state that the image information of the to-be-detected piece meets the preset definition requirement, the scanning and identifying assembly 3 sends the acquired updated image information to the control device, the control device acquires the position information of each detection zone bit of the to-be-detected piece, and then the translation device 21 is driven to move, namely under the driving of the moving driving device, the translation device 21 drives the central position of the A detection zone bit on the to-be-detected piece to move to the target detection zone bit, the scanning and identifying assembly 3 acquires the image information again, the control device determines the updated coordinate information of the detection zone bit based on the updated image information, then the translation device 21 drives the central position of the B detection zone bit on the to-be-detected piece to move to the target detection zone bit, and the control device further determines the updated coordinate information of the B detection zone bit.

Fourth, based on the updated coordinate information of the a detection zone bit and the updated coordinate information of the B detection zone bit, the control device may cause the rotation device 23 to rotate, that is, the rotary round table 231 rotates relative to the rotary base 232 under the drive of the rotary driving device 236, so that the connection line AB between the central positions of the a detection zone bit and the B detection zone bit is parallel to the X axis direction, and alignment of the a detection zone bit and the B detection zone bit is achieved.

And fifthly, based on the position information of the C detection zone bit, the control device can promote the translation device 21 to move, namely, under the drive of the mobile driving device, the translation device 21 drives the center position of the C detection zone bit on the piece to be detected to move to the target detection position of the automatic detection alignment device, and the control device determines the updated coordinate information of the C detection zone bit based on the updated image information acquired by the scanning identification component 3.

Sixth, based on the updated coordinate information of the a detection flag bit and the B detection flag bit, the control device may cause the swing device 22 to move, that is, the first swing assembly 221 moves in the first swing direction relative to the second swing assembly 222 under the action of the swing driving device; the second swinging component 222 moves along the second swinging direction relative to the swinging base 223, so that the inclination angle of the workpiece to be detected in the first swinging direction and the second swinging direction is adjusted, the levelness of the workpiece to be detected meets the preset levelness requirement, and the pose of the workpiece to be detected is accurately adjusted.

All embodiments in the application are described in a progressive manner, and identical and similar parts of all embodiments are mutually referred, so that each embodiment mainly describes differences from other embodiments.

The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims (10)

1. The automatic detection alignment device is characterized by comprising a carrying device (1), an adjusting component (2), a scanning identification component (3), a driving device and a control device;

the control device is respectively and electrically connected with the adjusting component (2), the scanning identification component (3) and the driving device;

the driving device is respectively in transmission connection with the carrying device (1) and the adjusting component (2); the carrying device (1) is fixedly connected with the adjusting component (2); the scanning and identifying assembly (3) is arranged above the carrying device (1), and in an initialized state, the focusing axis of the scanning and identifying assembly (3) is coaxial with the axis of the carrying device (1);

under the driving action of the driving device, the adjusting component (2) can drive the carrying device (1) to do preset motion, and the preset motion comprises at least one of rotation, swing and translation motion.

2. An automatic detection and alignment device according to claim 1, characterized in that it further comprises a base table, said adjustment assembly (2) comprising translation means (21), oscillation means (22) and rotation means (23);

The carrying device (1) is fixedly connected with the rotating device (23), the rotating device (23) is fixedly connected with the swinging device (22), and the swinging device (22) is fixedly connected with the translation device (21);

the translation device (21) is movable relative to the base table, the swinging device (22) is swingable relative to the base table, and the rotation device (23) is rotatable relative to the base table.

3. An automatic detection and alignment device according to any of claims 1-2, characterized in that the carrier device (1) comprises a stage (11), a carrier base (12) and a lifting drive;

the lifting driving device is in transmission connection with the objective table (11), is fixedly connected with the object carrying base (12), and is electrically connected with the control device;

the lifting driving device can drive the object stage (11) to reciprocate relative to the object carrying base (12) along the axis direction of the object carrying device (1).

4. An automatic detection and alignment device according to claim 3, characterized in that the carrying device (1) further comprises a suction cup device, which is fixedly connected with the stage (11); the object stage (11) is provided with a sample adsorption position (111), and the adsorption end of the sucker device is arranged on the sample adsorption position (111).

5. An automatic detection and alignment device according to claim 2, characterized in that the rotation device (23) comprises a rotary table (231), a rotary base (232) and a rotary drive device (236);

the rotary driving device (236) is in transmission connection with the rotary round table (231), the rotary driving device (236) is fixedly connected with the rotary base (232), and the rotary driving device (236) is electrically connected with the control device;

the rotary table (231) is rotatable relative to the rotary base (232) by the rotary drive device (236).

6. The automatic detection alignment device according to claim 5, wherein a limit matching portion (233) is provided on the rotary table (231), and a first limit portion (234) and a second limit portion (235) are provided on the rotary base (232);

the first limiting part (234) and the second limiting part (235) are respectively arranged along the movement track of the limiting matching part (233) relative to the rotation of the rotation base (232), and the first limiting part (234) and the second limiting part (235) can be respectively matched and limited with the limiting matching part (233).

7. An automatic detection and alignment device according to claim 2, wherein the swinging device (22) comprises a first swinging assembly (221), a second swinging assembly (222), a swinging base (223) and a swinging driving device;

The swing driving device is respectively connected with the first swing assembly (221) and the second swing assembly (222) in a transmission way; the swing driving device is electrically connected with the control device;

the first swing assembly (221) is in sliding connection with the second swing assembly (222), and the second swing assembly (222) is in sliding connection with the swing base (223);

the swing driving device can drive the first swing assembly (221) to move along a first swing direction relative to the second swing assembly (222); the swing driving device can also drive the second swing assembly (222) to move along a second swing direction relative to the swing base (223);

the second swinging direction is perpendicular to the first swinging direction, and the second swinging direction coincides with the swinging center of the first swinging direction.

8. An automatic detection and alignment device according to claim 7, characterized in that said first swing assembly (221) comprises a first swing member (224), a first swing rail (225) and a first slider (226) slidingly connected to said first swing rail (225);

the first swing guide rail (225) is fixedly connected with the first swing piece (224), and the first sliding piece (226) is fixedly connected with the second swing assembly (222).

9. The automatic inspection alignment device of claim 7 wherein the second swing assembly (222) comprises a second swing member (227), a second swing rail (228), and a second slide member (229) slidably coupled to the second swing rail (228);

the second swing guide rail (228) is fixedly connected with the second swing piece (227), and the second sliding piece (229) is fixedly connected with the swing base (223).

10. An automatic detection and alignment device according to claim 2, characterized in that the translation device (21) comprises an X-axis movement assembly (211), a Y-axis movement assembly (212), a movement base (213) and movement driving means;

the movement driving device is respectively in transmission connection with the X-axis movement assembly (211) and the Y-axis movement assembly (212); the mobile driving device is electrically connected with the control device;

the X-axis moving assembly (211) is in sliding connection with the Y-axis moving assembly (212), and the Y-axis moving assembly (212) is in sliding connection with the moving base (213);

the movement driving device can drive the X-axis movement assembly (211) to move along the X-axis direction relative to the Y-axis movement assembly (212); the movement driving device can also drive the Y-axis movement assembly (212) to move along the Y-axis direction relative to the movement base (213).

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