CN117388274B - Multi-freedom-degree camera detection carrier - Google Patents

Multi-freedom-degree camera detection carrier Download PDF

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Publication number
CN117388274B
CN117388274B CN202311387082.5A CN202311387082A CN117388274B CN 117388274 B CN117388274 B CN 117388274B CN 202311387082 A CN202311387082 A CN 202311387082A CN 117388274 B CN117388274 B CN 117388274B
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China
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plate
carrier
light source
lifting
camera
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CN202311387082.5A
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CN117388274A (en
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朱磊
张弛
侯晓峰
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Shanghai Gantu Network Technology Co Ltd
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Shanghai Gantu Network Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The application discloses a multi-degree-of-freedom camera detection carrier, which relates to the detection field and comprises a carrier lifting module, a line scanning camera module, a carrier beam splitting module and a carrier driving frame; the lifting mechanism of the carrier lifting module is arranged on the lifting bracket, and the lifting plate slides along the inclined plane through the lifting mechanism; the line scanning camera module is arranged on the lifting plate, and the camera adjusting component is sleeved and fixed with the camera equipment; the carrier light splitting module comprises a plurality of light source assemblies and a light source adjusting frame, wherein the light source assemblies are arranged on the light source adjusting frame, and the light source irradiation angle is adjusted according to the material to be detected; the carrier driving frame comprises a carrier bracket and a linear module, and controls the horizontal linear displacement of the carrier. The carrier driving frame of the detection platform realizes overall horizontal displacement control; the carrier lifting module realizes rotation displacement control, swing angle control and front-back displacement control of the camera in the horizontal and vertical directions; the carrier beam splitting module realizes the accurate control of the light path, improves the image scanning quality of the line scanning camera and ensures the definition of the scanned image.

Description

Multi-freedom-degree camera detection carrier
Technical Field
The embodiment of the application relates to the technical field of circuit board detection, in particular to a multi-degree-of-freedom camera detection carrier.
Background
Automated optical inspection AOI (Automated Optical Inspection) is based on optical principles to capture images and image inspection. And automatically scanning the PCB to be scanned through the camera module to obtain a scanning image, and then carrying out defect detection on the scanning image to identify defect points in the scanning image, so as to realize quality detection of the PCB.
The camera detects the optical detection equipment that the microscope carrier is exclusively used in the PCB board, the detection microscope carrier in the correlation technique is more to the restriction of the degree of freedom of camera module, because the line sweeps the function and all is very high to the sequential nature of scanning, light, distance, angle and stability requirement, traditional microscope carrier only can finely tune on the level and the perpendicular distance of camera module, when the whole adjustability to angle, position and light of microscope carrier is very low, the scanning image resolution ratio of results in gathering and the reliability of discernment all can not reach the settlement requirement, influence final testing result.
Disclosure of Invention
The embodiment of the application provides a multi-degree-of-freedom camera detection carrier, which solves the problem of accuracy of the camera detection carrier on image detection. The multi-degree-of-freedom camera detection carrier comprises;
the carrier lifting module comprises a lifting bracket, a lifting mechanism and a lifting plate; the lifting support comprises an inclined supporting surface, and the lifting mechanism is arranged on the lifting support and is parallel to the inclined supporting surface; the lifting plate is connected with the lifting mechanism and slides along the inclined supporting surface through the lifting mechanism;
The line scanning camera module is arranged on the lifting plate and comprises a camera adjusting assembly and camera equipment, wherein the camera adjusting assembly is fixedly arranged on the lifting plate and comprises a plurality of clamping rings which are distributed in a laminated mode, and the camera equipment is sleeved and fixed;
The carrier light splitting module is arranged at the bottom of the lifting plate and comprises a plurality of light source assemblies and a light source adjusting frame; the light source adjusting frame is fixedly arranged on the lifting plate and positioned below the line scanning camera module, and the light source assembly is arranged on the light source adjusting frame and used for adjusting the light source irradiation angle according to the material to be detected;
The carrier driving frame comprises a carrier support and a linear module arranged on the carrier support, wherein the carrier lifting module is arranged on the linear module and controls the horizontal linear displacement of the carrier.
Specifically, the lifting bracket comprises a supporting bottom plate, a triangular supporting plate and a fixed carrier plate; the triangular support plate is fixed on the support bottom plate, and the fixed carrier plate is obliquely arranged on the triangular support plate to form an inclined support surface.
Specifically, the lifting mechanism is fixed on the back of the fixed carrier plate and comprises a motor, a screw rod, a connecting block and a screw rod nut;
the motor is connected with the screw rod, a rectangular adjusting hole is formed in the fixed carrier plate corresponding to the screw rod, and the screw rod is arranged in parallel along the direction of the adjusting hole;
The screw rod nut is sleeved on the screw rod, the connecting block is installed on the screw rod nut, penetrates through the rectangular adjusting hole and extends to the front face of the fixed carrier plate, and the lifting plate is fixedly installed on the connecting block and moves parallel to the inclined supporting surface through the connecting block.
Specifically, the front surface of the fixed carrier plate is also provided with a sliding rail and a plurality of sliding blocks arranged on the sliding rail; the sliding rails are arranged on two sides of the rectangular adjusting hole and are parallel to the screw rod; the lifting plate is fixed on the sliding block.
Specifically, the camera adjusting assembly is arranged at the upper part of the lifting plate, the light source adjusting frame is arranged at the lower part and symmetrically distributed at two side edges of the lifting plate, and the light source assembly is arranged on the light source adjusting frame;
The light source adjusting frame comprises a light source fixing frame and a light source scale plate; the light source fixing frame is L-shaped, the side angle corresponds to the inclined supporting surface and is fixed in a fitting way, the bottom edge is horizontally arranged, a plurality of groups of mounting holes are formed in the bottom edge, and the light source scale plate is horizontally mounted through the mounting holes.
Specifically, the light source scale plate is provided with a linear chute and a mounting hole which are matched with the light source fixing frame, and the linear chute and the bottom of the light source adjusting frame are mounted and the horizontal position is adjusted.
Specifically, a plurality of arc scale grooves are formed in the light source scale plate, and the light source assembly is installed through the arc scale grooves and is adjusted to be in the groove according to the material to be detected.
Specifically, different arc scale grooves correspond to the same circle center but have different radiuses; the center position of the arc-shaped scale groove is aligned with the camera equipment to scan.
Specifically, the camera adjusting assembly comprises a rotating adjusting clamping ring, a fixing clamping ring, an auxiliary clamping ring and a clamping ring connecting mechanism which are arranged in a stacked mode;
The fixed collar is fixedly arranged on the collar connecting mechanism; arc mounting holes are formed in the rotary adjusting clamping ring, and the fixing clamping ring is connected with the rotary adjusting clamping ring through the arc mounting holes.
Specifically, the collar connecting mechanism comprises a fixed bottom plate, a rotating adjusting plate, a pair of angle adjusting plates and a connecting plate;
The fixed bottom plate is fixedly arranged on the lifting plate, and the rotary adjusting plate is arranged on the fixed bottom plate through a plurality of arc-shaped mounting holes;
The connecting plates are vertically arranged below the fixing clamping rings and symmetrically distributed on two sides of the rotating adjusting plate, and the angle adjusting plates are arranged outside the connecting plates;
One end of the angle adjusting plate is fixed with the connecting plate through a rotating shaft, the other end of the angle adjusting plate is fixedly connected with the rotating adjusting plate, an arc-shaped angle adjusting hole is formed in the middle of the angle adjusting plate, the connecting plate is connected with the angle adjusting plate through the angle adjusting hole, and angular displacement is generated through the rotating shaft arranged at one end of the connecting plate.
The technical scheme provided by the embodiment of the application has the beneficial effects that at least: according to the multi-degree-of-freedom camera detection carrier, the displacement of the whole body in the horizontal direction is realized through the carrier driving frame at the bottom; the carrier lifting module connected with the carrier driving frame realizes the distance and position control of the line scanning camera module on the inclination angle through the lifting bracket, the lifting mechanism and the lifting plate which are obliquely arranged; the camera module arranged on the lifting plate is fixed by the clamping ring and the clamping ring connecting mechanism which are arranged in a stacked manner, so that rotary displacement control in the horizontal direction and the vertical direction of the camera equipment, swing angle control of the camera equipment, front-back displacement control of the camera and the like can be realized, multi-degree-of-freedom adjustment is truly realized, and the scanning efficiency and the scanning precision of the camera are improved.
In addition, the setting of carrier beam split module can assist the line of camera equipment to sweep the acquisition process, and each light source subassembly can be according to actual need adjusts the irradiation position on the light source alignment jig, realizes accurate regulation through arc scale groove, ensures that light distribution is even, improves the image scanning quality that the camera was swept to the line, guarantees that the scanning image is clear.
Drawings
Fig. 1 is a schematic structural diagram of a multi-degree-of-freedom camera detection stage according to an embodiment of the present application;
FIG. 2 is a schematic diagram showing the connection structure of the stage lift module and the line scan camera module;
FIG. 3 is a schematic diagram of a connection structure of a stage spectroscopic module and a stage lifting module;
FIG. 4 is a schematic diagram of a detailed structure of the stage lift module;
FIG. 5 is a detailed view of a stationary carrier plate according to an embodiment of the present application;
FIG. 6 is an enlarged view of a portion of the Hall sensor and connection block of FIG. 4;
FIG. 7 is a schematic view of a connection structure of a lifting bracket according to another embodiment;
FIG. 8 is a schematic diagram of a connection structure of a stage beam splitting module;
FIG. 9 is an enlarged view of a portion of the light source scale plate at A in FIG. 8;
FIG. 10 is a schematic diagram of a camera module;
FIG. 11 is a schematic view of the connection structure of each collar to the camera device;
FIG. 12 is a schematic diagram of a connection structure of the spin-tuning mechanism;
FIG. 13 is a schematic illustration of the connection structure of each stacked collar to collar connection mechanism;
FIG. 14 is a schematic view of the connection structure of each lamination collar to the tone plate;
Fig. 15 is a detailed view of the displacement adjustment assembly.
Reference numerals: the system comprises a carrier lifting module 100, a lifting support 110, a supporting bottom plate 111, a triangular supporting plate 112, a fixed carrier plate 113, a sliding rail 114, a sliding block 115, a front carrier plate 116, a rectangular adjusting hole 117, a lifting mechanism 120, a motor 121, a screw rod 122, a connecting block 123, a screw rod nut 124, a coupler 125, a sliding chute 126, a Hall sensor 127, a detection spring plate 128, a lifting plate 130, a line scanning camera module 200, a camera adjusting assembly 210, a rotating adjusting collar 211, an arc-shaped mounting hole 2111, a fixed collar 212, an auxiliary collar 213, a camera device 220, a collar connecting mechanism 230, an angle adjusting plate 231, a connecting plate 232, a rotating adjusting plate 233, a fixed bottom plate 234, a displacement adjusting plate 235, a displacement adjusting assembly 236, a rotating adjusting screw rod 2361, a first adjusting block 2362, a second adjusting block 2363, a rotating adjusting mechanism 240, a first fixing block 241, a second fixing block 242, a carrier light splitting module 300, a light source assembly 310, a supporting plate 320, a light source support plate 320, a linear bracket 3221-400, a linear bracket 322, a linear bracket 400-linear bracket, a linear bracket and a linear bracket.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present application more apparent, the embodiments of the present application will be described in further detail with reference to the accompanying drawings.
References herein to "a plurality" means two or more. "and/or", describes an association relationship of an association object, and indicates that there may be three relationships, for example, a and/or B, and may indicate: a exists alone, A and B exist together, and B exists alone. The character "/" generally indicates that the context-dependent object is an "or" relationship.
Fig. 1 is a schematic structural diagram of a multi-degree-of-freedom camera detection stage according to an embodiment of the present application, where the detection stage integrally includes a stage lifting module 100, a line scanning camera module 200, a stage spectroscopic module 300, and a stage driving frame 400. Fig. 2 shows a schematic diagram of a connection structure of a stage lift module and a line camera module, and the stage lift module 100 includes a lift bracket 110, a lift mechanism 120, and a lift plate 130. The bearing surface of the lifting support 110 is an inclined surface, preferably a 45 ° inclined support surface. The lifting mechanism 120 is mounted on the lifting bracket 110 and is disposed parallel to the inclined support surface. The lifting plate 130 is connected to the lifting mechanism 120, is driven by the lifting mechanism 120, and is controlled to slide along the inclined support surface.
The line scan camera module 200 is mounted on the lift plate 130, and specifically includes a camera adjustment assembly 210 and a camera device 220. The camera adjustment assembly 210 is fixedly mounted on the lifter plate 130, and specifically comprises a plurality of stacked collars, each of which holds the camera device 220 in place. Each collar also has the function of integral fine adjustment of the camera, and details are shown in the following.
As shown in fig. 3, the stage beam splitting module 300 is disposed at the bottom of the lifting plate 130, and includes a plurality of light source assemblies 310 and a light source adjusting frame 320. The purpose of the beam-splitting module 300 is to improve the scanning effect of the line scanning camera (camera device), and the scattered light source components 310 together provide scattered light to avoid the formation of light spots or image chromatic aberration due to the focusing of the light path on the image. The light source adjusting frame 320 is fixedly mounted to the elevation plate 130 and is positioned below the line scanning camera module 200. The light source assembly 310 is mounted on the light source adjusting frame 320, and adjusts the light source irradiation angle according to the material to be inspected.
The stage driving frame 400 is a structure for controlling the overall displacement of the stage apparatus, and for example, when the conveyor belt or the object to be inspected is deviated, the horizontal displacement including the stage driving frame 400 can be adjusted to correct. Specifically, the device comprises a carrier bracket 410 and a linear module 420 arranged on the carrier bracket 410. The linear module 420 includes a slider, and the carrier lifting module 100 is mounted on the slider on the linear module 420 to control the horizontal linear displacement of the carrier.
Fig. 4 is a detailed schematic diagram of a carrier lifting module, in which the lifting bracket 110 includes a supporting base 111, a triangular supporting plate 112 and a fixed carrier 113. The triangle support plate 112 is fixed on the support base plate 111, the support base plate 111 is horizontally installed on the slider of the linear module 420, and the fixed carrier plate 113 is obliquely arranged on the triangle support plate 112 to form an inclined support surface. The elevating mechanism 120 is fixed to the back surface of the fixed carrier plate 113, i.e., the bottom surface portion of the slope. The elevating mechanism 120 includes a motor 121, a screw 122, a connection block 123, a screw nut 124, and the like. The motor 121 and the screw rod 122 are connected through a coupler 125, and the motor 121 and the screw rod 122 are correspondingly inclined and are parallel to the fixed carrier plate 113 for installation and fixation.
Fig. 5 is a detailed view of the fixed carrier plate, wherein the fixed carrier plate 113 corresponding to the screw rod 122 is provided with a rectangular adjusting hole 117, and the screw rod 122 is arranged in parallel along the direction of the adjusting hole 117. A screw nut 124 is sleeved on the screw 122, and a connection block 123 is mounted on the screw nut 124. The connection block 123 extends through the rectangular adjustment hole 117 and protrudes to the front of the elevation plate 130. The lifting plate 130 is fixedly arranged on the connecting block 123, and the motor drives the screw nut to move so as to indirectly drive the connecting block 123 to move in parallel along the inclined supporting surface.
Because the line scan camera module 200 is mounted obliquely, the single connection block 123 cannot maintain the gravity stability, the present application provides a pair of slide rails 114 and a plurality of sliders 115 mounted on the slide rails on the front surface of the elevation plate 130. The sliding rails 114 are symmetrically arranged at two sides of the rectangular adjusting hole 117 and parallel to the screw rod 122, and the lifting plate 130 is mounted on the sliding block 115 and moves in cooperation with the connecting block 123.
Fig. 6 is a partial enlarged view of fig. 4, and a chute 126 and hall sensors 127 mounted on the chute are further provided on the back surface of the lifting plate 130, the number of which is set according to actual needs. The spout 126 parallel arrangement is at the side of rectangle regulation hole 117, installs on connecting block 123 and detects shell fragment 128, detects the detection zone that shell fragment 128 passed hall sensor 127 along the direction of motion of connecting block 123, every time the shell fragment passed through the detection zone, will trigger the signal of telecommunication, and this design can accurate location, adjusts the travel distance of camera. The sensor can also be at any adjustment position on the slide rail, and the channel of the slide groove supports position adjustment, so that the compatibility of equipment is improved.
In addition, in order to secure the mounting stability of the camera module, a protruding edge of the vertical chassis may be further provided at the bottom of the triangular support plate 112, and referring specifically to fig. 4 and 7, the fixing support plate 113 is abutted against the protruding edge. In addition, in some embodiments, to ensure stability of the two triangular support plates 112, a front carrier plate 116 is disposed at the vertical protruding edge, and the front carrier plate 116 is fixedly mounted with the bottom plate 111 and the two triangular support plates 112, so as to improve stability of the support frame.
In order to improve the compatibility of camera displacement, a plurality of mounting holes are formed on the lifting plate 130 and the front carrier plate 116, and the line scanning camera module 200 can arbitrarily select the mounting holes as mounting positions, and default to be that the height of the camera module is not adjustable when the line scanning camera module is mounted on the front carrier plate 116.
This structure sets up a slope microscope carrier support frame with traditional camera module to set up motor drive mechanism on the inclined plane is ordered down, through seting up the regulation hole on the lifter plate face, the connecting block that installs on screw-nut can adjust from top to bottom, the connecting block passes through the regulation hole and takes lifter plate motion, realizes camera module's distance adjustment. And the cooperation of slide rail and slider is used can improve camera bearing capacity and stability, wholly improves the defect detection efficiency of microscope carrier.
Fig. 8 is a schematic structural diagram of a stage spectroscopic module, in which the camera adjusting assembly 210 is mounted on the upper portion of the lifting plate 130, the light source adjusting frames 320 are mounted on the lower portion and symmetrically distributed on both sides of the lifting plate 130, and the light source assemblies 310 are mounted between the symmetrically arranged light source adjusting frames 320. The light source adjusting frame 320 specifically includes a light source fixing frame 321 and a light source scale plate 322. The support plate 311 is disposed between the light source scale plates 322 to improve stability of the light source scale plates 322. The light source fixing frame 321 is L-shaped, the side angle corresponds to the inclined supporting surface and is fixed in a fitting way, the bottom edge is horizontally arranged, a plurality of groups of mounting holes are formed in the bottom edge, and the light source scale plate 322 is horizontally mounted.
In addition, in order to realize the front-back displacement of the light source, a linear chute 3221 and a mounting hole are formed on the light source scale plate 322, see fig. 9, fig. 9 is an enlarged view of the position a in fig. 8, a corresponding mounting hole and a protruding extension are also formed on the light source fixing frame 321, the extension is engaged with the linear chute 3221, and the adjustment of the horizontal position of the light source scale plate 322 is realized through the linear chute 3221. A plurality of arc scale grooves 3222 are formed in the light source scale plate 322, and the light source assembly 310 is installed and adjusted through the arc scale grooves 3222, and the positions of the light source assembly in the grooves are adjusted according to materials to be detected.
In most embodiments, different arcuate scale slots 3222 correspond to the same center of a circle, but different radii, i.e., ra sizes, the camera device 220 scans in alignment with the center position of the arcuate scale slot 3222. The structure can set a plurality of light sources at different angles, the light sources can be overlapped due to different radian radiuses, and a plurality of light intensity modes are integrally realized, so that the scanning image is ensured to be clear.
The application also improves the camera module on the basis of the freedom degree adjustment of the carrier driving frame, the carrier beam splitting module and the carrier lifting module, so that the linear scanning camera has the multi-degree-of-freedom adjustment.
Fig. 10 is a schematic structural view of a camera module, camera adjustment assembly 210 including a stacked arrangement of a rotation adjustment collar 211, a fixed collar 212, an auxiliary collar 213, and a collar attachment mechanism 230. Referring to fig. 11, a fixed collar 212 is fixedly mounted to a collar attachment mechanism 230, which collar attachment mechanism 230 is in turn fixedly mounted to the lifter plate 130. The rotating and adjusting clamp ring 211 is provided with an arc-shaped mounting hole 2111, and the fixing clamp ring 212 is connected with the rotating and adjusting clamp ring 211 through the arc-shaped mounting hole 2111. The arc-shaped mounting holes 2111 are uniformly formed around the rotation collar 211, and the collar 212 and the rotation collar 2111 are fixed by bolts or screws.
Optionally, a pair of first mounting handles 2121 extend horizontally outwardly from the outer wall of the retaining collar 212, and a second mounting handle 2112 extends horizontally outwardly from the outer wall of the adjustment collar 211. The second mounting handles 2112 are vertically offset from each other between the two first mounting handles 2121. The two mounting handles 2121 are connected via a pitch mechanism 240 and control the displacement of the pitch collar 2111.
The pitch mechanism 240 is mounted on the outer wall of the fixed collar 212 and is connected to the pitch collar 211 to fix the fixed collar 212 and the pitch collar 211. When adjustment is required, the arc-shaped mounting hole 2111 is loosened, and then the rotation adjustment collar 211 is rotated by the rotation adjustment mechanism 240 to generate relative rotation with the fixing collar 212.
Fig. 12 is a schematic structural view of a rotation adjusting mechanism, including a rotation adjusting screw 241, a first fixing block 242, and a second fixing block 243. The screw 241 is horizontally installed on the first installation handle 2121, and the two fixing blocks are positioned in the gap between the first installation handles 2121 and are sleeved on the screw 241. The second fixing block 243 is sleeved in the first fixing block 242, and both fixing blocks are provided with mounting holes and simultaneously penetrate through the rotating adjusting screw 241. In addition, the second fixing block 243 and the second mounting handle 2112 are provided with mounting holes, and are fixedly connected by bolts. When the camera angle is required to be rotated, the arc-shaped mounting hole 2111 is loosened, and the rotation adjustment screw 241 on the first mounting handle 2121 is rotated to drive the rotation adjustment clamping ring 211 to generate rotation displacement. In order to ensure stability when the camera is sleeved in each clamping ring, two fastening strips 2113 are symmetrically arranged on the rotating adjustment clamping ring 211, and the fastening strips 2113 are respectively connected with the rotating adjustment clamping ring 211 and the line scanning camera through bolts, so that a fastening effect and displacement control are realized.
Fig. 13 and 14 are schematic structural views of each stacked collar and collar attachment mechanism, and collar attachment mechanism 230 includes an angle adjustment plate 231, a connection plate 232, a rotation adjustment plate 233, a fixed base plate 234, a displacement adjustment plate 235, and a displacement adjustment assembly 236. The fixing base 234 is an intermediate structure connecting the lifting plate 130 and the camera device, and is fixedly installed in a corresponding installation hole on the lifting plate 130, and the installation height is selected according to actual requirements. The spin plate 233 is mounted to the fixed base plate 234 through a plurality of arc-shaped mounting holes 2111. The arcuate mounting hole is similar to that on the spin collar 211, except that the horizontal direction is changed to the vertical direction.
The top of the fixed bottom plate 234 is provided with an extension mounting handle which is the same as the fixed collar; the top of the spin plate 233 is also provided with an extension mounting handle identical to the spin collar. The function here is similar to two stacked collars, except that it is changed to provide a mounting handle in the vertical direction. The mounting handle on the rotating adjustment plate 233 is also provided with a rotating adjustment mechanism 240 and an arc-shaped mounting hole, so that the rotating displacement between the rotating adjustment plate 233 and the fixed bottom plate 234 is realized.
The connecting plate 232 is vertically installed below the fixing collar 212 and symmetrically distributed on two sides of the rotation adjusting plate 233, and the angle adjusting plate 231 is installed outside the connecting plate 232, that is, the angle adjusting plate 231 is overlapped outside the connecting plate 232. One end of the angle adjusting plate 231 is fixed to the connecting plate 232 through a rotation shaft, and the other end is fixedly connected to the rotation adjusting plate 233. In addition, an arc-shaped angle adjusting hole is further formed in the angle adjusting plate 231, and the connecting plate 232 is connected with the angle adjusting plate 231 through the angle adjusting hole and generates angular displacement through a rotating shaft arranged at one end. The camera collar is fixed to the rotation adjusting plate 233 through the angle adjusting plate 231 and the connecting plate 232, and the rotation adjusting plate 233 is connected to the fixed bottom plate 234, so that the camera angle can be controlled.
Based on the above, when the angle of the camera needs to be adjusted in a rotating manner, the arc-shaped mounting holes on the rotating adjustment plate can be loosened, then the rotating displacement of the whole camera part is controlled by the rotating adjustment screw rod of the rotating adjustment mechanism, and the camera part is fixed with the fixed bottom plate after the position is determined. When the swing angle needs to be adjusted, the swing angle can be manually set through the angle adjusting hole. Referring to fig. 13, the angle adjusting hole is specifically set according to actual requirements, and because the clamping ring and the rotating adjusting plate are not fixedly connected, the angle adjustment of the camera head (comprising the fixed clamping ring and the rotating adjusting clamping ring) can be controlled.
In some embodiments, angular adjustment can only effect oblique scanning, and if fine adjustment in the vertical scanning direction is desired, it is also necessary to connect the displacement adjustment plate 235 to the fixed collar 212 and the auxiliary collar 213. The displacement adjusting plate 235 is respectively connected with two clamping rings up and down and is fixedly connected with the connecting plate 232, so that the stability is improved, and the linear scanning camera can be controlled to move in the vertical direction, namely, move forwards and backwards through the displacement adjusting plate 235.
As shown in fig. 14, a connection relationship diagram between the rotation adjusting plate and each collar is shown, the displacement adjusting plate 235 is arranged parallel to the rotation adjusting plate 233, a gap is left between the two plates, and a displacement adjusting assembly 236 is arranged. Fig. 15 is a detailed view of the displacement adjustment assembly, including a first adjustment block 2361, a second adjustment block 2362, and an adjustment rod 2362. The first adjusting block 2361 and the displacement adjusting plate 233 are fixedly installed, and a linear displacement hole is formed thereon. The second adjusting block 2362 is fixedly installed with the rotating adjusting plate 233, and the adjusting rod 2363 penetrates through the first adjusting block 2361 and the second adjusting block 2362 up and down, and drives the displacement adjusting plate 233 and the line scanning camera to generate linear displacement through the linear displacement hole. Specifically, when the front-back displacement is required, the whole camera is pushed in sequence by rotating the adjusting rod 2363. It should be noted that the length of the linear displacement bore needs to be matched to the angular adjustment bore of the angular adjustment plate 231. When the adjusting lever 2363 is rotated, the angle adjusting plate 231 is fixed, but the displacement adjusting plate 235 is driven to displace along the arc-shaped angle adjusting hole in the front-back and up-down directions.
In summary, according to the multi-degree-of-freedom camera detection carrier, the displacement of the whole body in the horizontal direction is realized through the carrier driving frame at the bottom; the carrier lifting module connected with the carrier driving frame realizes the distance and position control of the line scanning camera module on the inclination angle through the lifting bracket, the lifting mechanism and the lifting plate which are obliquely arranged; the camera module arranged on the lifting plate is fixed by the clamping ring and the clamping ring connecting mechanism which are arranged in a stacked manner, so that rotary displacement control in the horizontal direction and the vertical direction of the camera equipment, swing angle control of the camera equipment, front-back displacement control of the camera and the like can be realized, multi-degree-of-freedom adjustment is truly realized, and the scanning efficiency and the scanning precision of the camera are improved.
In addition, the setting of carrier beam split module can assist the line of camera equipment to sweep the acquisition process, and each light source subassembly can be according to actual need adjusts the irradiation position on the light source alignment jig, realizes accurate regulation through arc scale groove, ensures that light distribution is even, improves the image scanning quality that the camera was swept to the line, guarantees that the scanning image is clear.
The foregoing describes preferred embodiments of the present invention; it is to be understood that the invention is not limited to the specific embodiments described above, wherein devices and structures not described in detail are to be understood as being implemented in a manner common in the art; any person skilled in the art will make many possible variations and modifications, or adaptations to equivalent embodiments without departing from the technical solution of the present invention, which do not affect the essential content of the present invention; therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present invention still fall within the scope of the technical solution of the present invention.

Claims (7)

1. The multi-degree-of-freedom camera detection carrier is characterized by comprising the following components;
the carrier lifting module (100) comprises a lifting bracket (110), a lifting mechanism (120) and a lifting plate (130); the lifting support (110) comprises an inclined supporting surface, and the lifting mechanism (120) is arranged on the lifting support (110) and is parallel to the inclined supporting surface; the lifting plate (130) is connected with the lifting mechanism (120) and slides along the inclined supporting surface through the lifting mechanism (120);
The line scanning camera module (200), the line scanning camera module (200) is installed on the lifting plate (130) and comprises a camera adjusting component (210) and camera equipment (220), the camera adjusting component (210) is fixedly installed on the lifting plate (130), the camera adjusting component (210) comprises a plurality of clamping rings which are distributed in a laminated mode, and the camera equipment (220) is sleeved and fixed;
The carrier light splitting module (300), the carrier light splitting module (300) is arranged at the bottom of the lifting plate (130) and comprises a plurality of light source assemblies (310) and a light source adjusting frame (320); the light source adjusting frame (320) is fixedly arranged on the lifting plate (130) and is positioned below the line scanning camera module (200), the light source assembly (310) is arranged on the light source adjusting frame (320), and the light source irradiation angle is adjusted according to the material to be detected;
The carrier driving frame (400) comprises a carrier bracket (410) and a linear module (420) arranged on the carrier bracket (410), wherein the carrier lifting module (100) is arranged on the linear module (420) and controls the horizontal linear displacement of the carrier;
The camera adjusting assembly (210) is arranged at the upper part of the lifting plate (130), the light source adjusting frames (320) are arranged at the lower part and symmetrically distributed at two side edges of the lifting plate (130), and the light source assembly (310) is arranged on the light source adjusting frames (320);
The light source adjusting frame (320) comprises a light source fixing frame (321) and a light source scale plate (322); the light source fixing frame (321) is L-shaped, the side angle corresponds to the inclined supporting surface and is adhered and fixed, the bottom edge is horizontally arranged, a plurality of groups of mounting holes are formed in the bottom edge, and the light source scale plate (322) is horizontally mounted through the mounting holes;
The camera adjustment assembly (210) includes a stacked arrangement of a rotational adjustment collar (211), a stationary collar (212), an auxiliary collar (213), and a collar attachment mechanism (230);
-the securing collar (212) is fixedly mounted on the collar attachment means (230); an arc-shaped mounting hole (2111) is formed in the rotating adjustment clamping ring (211), and the fixed clamping ring (212) is connected with the rotating adjustment clamping ring (211) through the arc-shaped mounting hole (2111);
The collar connecting mechanism (230) comprises a fixed bottom plate (234), a rotating adjusting plate (233), a pair of angle adjusting plates (231) and a connecting plate (232);
the fixed bottom plate (234) is fixedly arranged on the lifting plate (130), and the rotary adjusting plate (233) is arranged on the fixed bottom plate (234) through a plurality of arc-shaped mounting holes;
The connecting plates (232) are vertically arranged below the fixed clamping rings (212) and symmetrically distributed on two side edges of the rotating adjusting plates (233), and the angle adjusting plates (231) are arranged outside the connecting plates (232);
One end of the angle adjusting plate (231) is fixed with the connecting plate (232) through a rotating shaft, the other end of the angle adjusting plate is fixedly connected with the rotating adjusting plate (233), an arc-shaped angle adjusting hole is formed in the middle of the angle adjusting plate, and the connecting plate (232) is connected with the angle adjusting plate (231) through the angle adjusting hole and generates angular displacement through the rotating shaft arranged at one end of the connecting plate.
2. The multi-degree of freedom camera detection stage according to claim 1, wherein the lifting bracket (110) comprises a support base plate (111), a triangular support plate (112) and a fixed support plate (113); the triangular support plate (112) is fixed on the support bottom plate (111), and the fixed carrier plate (113) is obliquely arranged on the triangular support plate (112) to form an inclined support surface.
3. The multi-degree-of-freedom camera detection stage according to claim 2, wherein the lifting mechanism (120) is fixed on the back surface of the fixed carrier plate (113), and comprises a motor (121), a screw rod (122), a connecting block (123) and a screw rod nut (124);
The motor (121) is connected with the screw rod (122), a rectangular adjusting hole (131) is formed in the fixed carrier plate (113) corresponding to the screw rod (122), and the screw rod (122) is arranged in parallel along the direction of the adjusting hole (131);
The screw rod nut (124) is sleeved on the screw rod (122), the connecting block (123) is installed on the screw rod nut (124), penetrates through the rectangular adjusting hole (131) and extends to the front surface of the fixed carrier plate (113), and the lifting plate (130) is fixedly installed on the connecting block (123) and moves parallel to the inclined supporting surface through the connecting block (123).
4. A multi-degree of freedom camera detection stage according to claim 3, characterized in that the front face of the fixed carrier plate (113) is further provided with a sliding rail (114) and a plurality of sliding blocks (115) mounted on the sliding rail; the sliding rails (114) are arranged on two sides of the rectangular adjusting hole (131) and are parallel to the screw rod (122); the lifting plate (130) is fixed on the sliding block (115).
5. The multi-degree-of-freedom camera detection carrier according to claim 1, wherein the light source scale plate (322) is provided with a linear chute (3221) and a mounting hole which are matched with the light source fixing frame (321), and the light source scale plate (322) and the light source fixing frame (321) are subjected to horizontal position adjustment through the linear chute (3221).
6. The multi-degree-of-freedom camera detection carrier of claim 5 wherein the light source scale plate (322) is provided with a plurality of arc scale grooves (3222), and the light source assembly (310) is mounted through the arc scale grooves (3222) and adjusts the position in the grooves according to the material to be detected.
7. The multiple degree of freedom camera detection stage of claim 6 wherein different ones of the arcuate scale grooves (3222) correspond to the same center of a circle but different radii; the camera device (220) is scanned in alignment with the center position of the arcuate scale groove (3222).
CN202311387082.5A 2023-10-24 2023-10-24 Multi-freedom-degree camera detection carrier Active CN117388274B (en)

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CN113607755A (en) * 2021-08-26 2021-11-05 厦门柯尔自动化设备有限公司 Automatic detection device for wafer
CN214668687U (en) * 2020-12-24 2021-11-09 皓星智能装备(东莞)有限公司 Multiplex camera detection mechanism
CN216385482U (en) * 2021-11-01 2022-04-26 苏州小孔成像光电科技有限公司 Visual detection equipment based on double-line scanning camera
CN217155285U (en) * 2021-11-11 2022-08-09 迈德威视科技江苏有限公司 Camera test platform is swept to line

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Publication number Priority date Publication date Assignee Title
US9864173B2 (en) * 2015-04-21 2018-01-09 Kla-Tencor Corporation Systems and methods for run-time alignment of a spot scanning wafer inspection system

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
CN214668687U (en) * 2020-12-24 2021-11-09 皓星智能装备(东莞)有限公司 Multiplex camera detection mechanism
CN113607755A (en) * 2021-08-26 2021-11-05 厦门柯尔自动化设备有限公司 Automatic detection device for wafer
CN216385482U (en) * 2021-11-01 2022-04-26 苏州小孔成像光电科技有限公司 Visual detection equipment based on double-line scanning camera
CN217155285U (en) * 2021-11-11 2022-08-09 迈德威视科技江苏有限公司 Camera test platform is swept to line

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Denomination of invention: Multi degree of freedom camera detection stage

Granted publication date: 20240524

Pledgee: Industrial Bank Co.,Ltd. Shanghai Shangnan Sub branch

Pledgor: Shanghai Gantu Network Technology Co.,Ltd.

Registration number: Y2024310000600