CN219342270U - Rotating mechanism and vacuum coating equipment - Google Patents
Rotating mechanism and vacuum coating equipment Download PDFInfo
- Publication number
- CN219342270U CN219342270U CN202223480152.5U CN202223480152U CN219342270U CN 219342270 U CN219342270 U CN 219342270U CN 202223480152 U CN202223480152 U CN 202223480152U CN 219342270 U CN219342270 U CN 219342270U
- Authority
- CN
- China
- Prior art keywords
- rotating
- unit
- transmission
- driven wheel
- material heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model provides a rotating mechanism and vacuum coating equipment, wherein the rotating mechanism comprises a power source, a driven component, a first transmission piece and a second transmission piece, the power source is in transmission connection with the driven component, the first transmission piece is in transmission connection with the driven component, and the first transmission piece is in transmission connection with the second transmission piece. The vacuum coating equipment comprises a rotating mechanism, an evaporation material heating component, a rotating bracket and a vacuum cavity. The rotating mechanism can realize 360-degree rotation, the vacuum coating equipment is suitable for coating parts with complex structures, each surface can finish coating at the same time, and the coating parts taken out from the vacuum cavity do not need subsequent treatment.
Description
Technical Field
The utility model relates to the technical field of vacuum coating, in particular to a rotating mechanism and vacuum coating equipment.
Background
The existing easy-to-clean nano coating technology mainly comprises two main types, namely an atmospheric pressure spraying technology and a PVD vacuum coating technology. The former sprays the easy-to-clean material on the base material through the spraying equipment under normal pressure, the prepared film has limited wear resistance and scratch resistance, and the film performance can not reach the film performance of the PVD vacuum coating equipment; the latter PVD vacuum coating technology can obtain excellent film performance, but has lower production efficiency and higher use cost, and meanwhile, the easy-to-clean material has serious pollution to the vacuum cavity in the production process, so that higher maintenance cost is caused. In addition, these two techniques are difficult to apply to parts of complex structures, and it is difficult for 3D structural substrates to meet the uniformity and consistency of simultaneous coating and film layers on each side thereof.
Disclosure of Invention
In view of the above drawbacks of the prior art, an object of the present utility model is to provide a rotation mechanism and a vacuum coating apparatus, so as to solve the problems in the prior art.
To achieve the above and other related objects, a first aspect of the present utility model provides a rotary mechanism, including a power source, a driven assembly, a first transmission member and a second transmission member, where the power source is in driving connection with the driven assembly, the first transmission member is in driving connection with the driven assembly, and the first transmission member is in driving connection with the second transmission member.
Preferably, the power source is a motor;
and/or the driving connection of the power source and the driven component is flexible hinge connection;
and/or, the rotating mechanism further comprises a supporting piece, and the driven assembly, the first transmission piece and the second transmission piece are arranged on the supporting piece.
More preferably, the power source is in driving connection with the first driven wheel through a flexible hinge;
preferably, the driven component comprises a first driven wheel and a second driven wheel which are sequentially connected in a meshed mode, the power source is in transmission connection with the first driven wheel and used for driving the first driven wheel to rotate, and the first transmission piece is coaxially connected with the second driven wheel.
More preferably, the driven assembly further comprises a third driven wheel, and the first driven wheel, the third driven wheel and the second driven wheel are sequentially meshed and connected.
The utility model provides vacuum coating equipment, which comprises the rotating mechanism, an evaporation material heating component, a rotating support and a vacuum cavity, wherein the evaporation material heating component and the rotating support are arranged in the vacuum cavity, the rotating support comprises a rotating piece and a substrate rotating support piece, the rotating mechanism is in transmission connection with the rotating piece, and the substrate rotating support piece is arranged on the rotating piece.
Preferably, the second transmission member is in transmission connection with the rotating member;
and/or the support piece is fixed on the inner wall of the vacuum cavity;
and/or the rotating member comprises a first rotating unit and a second rotating unit; the rotating mechanism is in transmission connection with the first rotating unit, and the second rotating unit is connected with the first rotating unit and is used for supporting the rotation of the first rotating unit;
and/or the substrate rotating support is provided with more than one layer of substrate placing units, and the substrate placing units among the layers are connected through more than one connecting rod;
and/or, in a use state, the evaporation material heating component is arranged above the rotary bracket;
and/or the evaporation material heating component comprises a heating support frame and more than one evaporation material heating units, wherein the heating support frame is fixed on the inner wall of the vacuum cavity, and each evaporation material heating unit is arranged on the heating support frame and provided with an evaporation material placing groove;
and/or the vacuum cavity is cylindrical, and the central axis of the cylindrical cavity is in the horizontal direction;
and/or, the vacuum coating equipment further comprises a fixed horizontal control rod, and the fixed horizontal control rod is connected with the rotating piece.
More preferably, the drive connection of the second transmission member to the rotation member or the first rotation unit is a friction drive connection;
and/or the support piece is fixedly connected with the second rotating unit;
and/or, the first rotating unit is in a ring shape;
and/or, the second rotating unit is in a ring shape;
and/or the rotating member further comprises more than one connecting unit, each connecting unit comprises a connecting shaft and a rotating connecting member, one side of the connecting shaft is fixedly connected with the second rotating unit, the rotating connecting member is sleeved outside the other side of the connecting shaft, the rotating connecting member is provided with a groove, the groove is matched with the first rotating unit, and the first rotating unit can rotate in the groove;
and/or each substrate placing unit is provided with more than one through hole;
and/or the evaporation material heating component further comprises more than one temperature sensor, wherein the temperature sensor is connected with the evaporation material heating unit and is used for acquiring a temperature signal of the evaporation material heating unit;
and/or, the fixed horizontal control rod is telescopic;
and/or the fixed horizontal control rod is connected with the second rotating unit.
Preferably, the vacuum coating apparatus further comprises a control unit connected to at least one selected from the group consisting of a vapor deposition material heating member and the rotating mechanism.
More preferably, the vacuum coating apparatus further comprises a control panel connected with the control unit;
and/or the control unit is connected with at least one of the evaporation material heating unit and the temperature sensor.
The technical scheme has at least one of the following beneficial effects:
1) The rotating mechanism can realize 360-degree rotation, can be applied to vacuum coating equipment, and can realize 360-degree rotation of the rotating bracket in the horizontal direction in the vacuum cavity;
2) The vacuum coating equipment is suitable for coating parts with complex structures, each surface can finish coating at the same time, and the coating parts taken out from the vacuum cavity do not need subsequent treatment.
Drawings
Fig. 1 is a schematic view of a rotary mechanism and a rotary bracket according to a first embodiment of the present utility model.
Fig. 2 is a detailed structural schematic diagram of the rotating mechanism and the rotating bracket according to the first embodiment of the present utility model.
Fig. 3 is a schematic structural view of a vacuum coating apparatus according to a first embodiment of the present utility model.
Fig. 4 is a schematic view showing the structure of a heating member for vapor deposition material in a vacuum coating apparatus according to a first embodiment of the present utility model.
Reference numerals
1. Rotary mechanism
11. Power source
12. Driven assembly
121. First driven wheel
122. Second driven wheel
123. Third driven wheel
13. First transmission member
14. Second transmission member
15. Support member
2. Vapor deposition material heating member
21. Heating support frame
22. Evaporation material heating unit
3. Rotary bracket
31. Rotary member
311. First rotary unit
312. Second rotary unit
313. Connection unit
3131. Connecting shaft
3132. Rotary connecting piece
3133. Groove
32. Rotary support frame
321. Substrate placing unit
4. Vacuum cavity
5. Fixed horizontal control rod
Detailed Description
In the description of the present utility model, it should be noted that, the structures, proportions, sizes, etc. shown in the drawings attached to the present utility model are merely used in conjunction with the disclosure of the present utility model, and are not intended to limit the applicable limitations of the present utility model, so that any modification of the structures, variation of the proportions, or adjustment of the sizes, without affecting the efficacy and achievement of the present utility model, should fall within the scope of the disclosure of the present utility model. Also, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not denote or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
Furthermore, in the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
A rotary mechanism, as shown in figures 1 and 2, comprises a power source 11, a driven assembly 12, a first transmission member 13 and a second transmission member 14, wherein the power source 11 is in transmission connection with the driven assembly 12, the first transmission member 13 is in transmission connection with the driven assembly 12, and the first transmission member 13 is in transmission connection with the second transmission member 14. The power source 11 supplies rotational power to the driven assembly 12, and the driven assembly 12 rotates such that the first transmission member 13 rotates, and the rotation of the first transmission member 13 drives the rotation of the second transmission member 14 through a transmission such as a friction transmission. Specifically, the power source 11 may be an electric motor.
As a specific embodiment, the drive connection of the power source 11 and the driven assembly 12 is a flexible hinge connection. Specifically, the power source 11 is in transmission connection with the first driven wheel 121 through a flexible hinge. The flexible hinge connection may be a flexible hinge connection such as a spring coupling in the related art, which may protect the power source 11 and other components, without specific limitation.
As a specific embodiment, the driven component 12 includes a first driven wheel 121 and a second driven wheel 122 sequentially engaged and connected, the power source 11 is in transmission connection with the first driven wheel 121, and is used for driving the first driven wheel 121 to rotate, and the first transmission member 13 is coaxially connected with the second driven wheel 122. The power source 11 achieves rotation of the second driven wheel 122 through a transmission relationship of the first driven wheel 121 and the second driven wheel 122, and the first transmission member 13 is provided on the second driven wheel 122 so that the first transmission member 13 also rotates. Further preferably, as shown in fig. 2, the driven assembly 12 further includes a third driven wheel 123, and the first driven wheel 121, the third driven wheel 123, and the second driven wheel 122 are sequentially engaged. The power source 11 realizes the rotation of the second driven wheel 122 through the transmission relation of the first driven wheel 121, the third driven wheel 123 and the second driven wheel 122, and the first transmission member 13 is coaxially linked with the second driven wheel 122, so that the first transmission member 13 also rotates. Driven assembly 12 more preferably includes a first driven wheel 121, a third driven wheel 123, and a second driven wheel 122 for easier installation and adjustment of the speed ratio.
As a specific embodiment, the rotation mechanism further includes a support member 15, and the driven assembly 12, the first transmission member 13, and the second transmission member 14 are disposed on the support member 15. The support 15 is used to support the driven assembly 12, the first transmission member 13 and the second transmission member 14, but does not affect the transmission thereof, as shown in fig. 2.
The vacuum coating equipment comprises the rotating mechanism 1, the vapor deposition material heating component 2, the rotating support 3 and the vacuum cavity 4, wherein the vapor deposition material heating component 2 and the rotating support 3 are arranged in the vacuum cavity 4, the rotating support 3 comprises a rotating piece 31 and a substrate rotating support piece 32, the rotating mechanism 1 is in transmission connection with the rotating piece 31, and the substrate rotating support piece 32 is arranged on the rotating piece 31. The rotating mechanism 1 drives the rotating piece 31 and the rotating support frame 32 to rotate in the vacuum cavity, the rotating direction is 360 degrees in the horizontal direction, the uniformity of coating is improved, and the base material can be fixed on the rotating support plate 321 according to specific conditions.
The rotary bracket 3 is used for placing a coating component, namely a substrate, and rotates during coating, and vapor deposition materials are attached to each surface of the substrate. The substrate can be fixed on the bracket, then the substrate is placed on the rotary bracket 3, coating is completed in the vacuum cavity 4, and the bracket can fix the substrate on the bracket in the existing mode without shadow and interference as much as possible, such as in a plug-in mode.
The vapor deposition material heating member 2 is for heating the vapor deposition material.
The vacuum coating equipment is used for densely attaching the vapor deposition material on the surface of the substrate, is suitable for the substrate with a complex structure, can simultaneously coat films on different surfaces of the substrate, can be widely used on glass substrates, metal substrates, plastic substrates and the like, and is suitable for lenses, touch display screens, precise optical lenses, ornaments and the like.
In a specific embodiment, the second transmission member 14 is in driving connection with the rotation member 31. Specifically, the driving connection of the second driving member 14 to the rotating member 31 or the first rotating unit 311 is a friction driving connection. The rotation of the second transmission member 14 drives the rotation of the first rotation unit 311 by friction transmission.
In a specific embodiment, the support 15 is fixed to the inner wall of the vacuum chamber 1.
In a specific embodiment, as shown in fig. 2, the rotating member 31 includes a first rotating unit 311 and a second rotating unit 312; the rotation mechanism 1 is in transmission connection with the first rotation unit 311, and the second rotation unit 312 is connected with the first rotation unit 311 for supporting rotation of the first rotation unit 311. Specifically, as shown in fig. 2, the first rotating unit 311 is in a ring shape; the second rotating unit 312 has a circular ring shape.
In a specific embodiment, the support 15 is fixedly connected with the second rotating unit 312.
In a specific embodiment, as shown in fig. 2, the rotating member 31 further includes one or more connection units 313, each connection unit 313 includes a connection shaft 3131 and a rotating connection member 3132, one side of the connection shaft 3131 is fixedly connected with the second rotating unit 312, the rotating connection member 3132 is sleeved on the other side, the rotating connection member 3132 is provided with a groove 3133, the groove 3133 is matched with the first rotating unit 311, and the first rotating unit 311 can rotate in the groove 3131. The rotating mechanism 1 drives the first rotating unit 311 to rotate, the first rotating unit 311 is matched with the groove 3133, the rotation of the first rotating unit is not influenced, the second rotating unit 312 does not rotate, and the connection of the first rotating unit 311 and the second rotating unit 312 and the position fixation of the first rotating unit 311 are realized through the connecting unit 313.
In a specific embodiment, as shown in fig. 1, the substrate rotating support 32 is provided with one or more layers of substrate placing units 321, and the substrate placing units 321 between the layers are connected by one or more connecting rods. Preferably, as shown in fig. 1, each substrate placement unit 321 is provided with one or more through holes.
In a preferred embodiment, as shown in fig. 4, in the use state, the vapor deposition material heating member 2 is provided above the rotating bracket 3. The vaporized vapor deposition material diffuses from top to bottom, which is beneficial to the uniform distribution of the vaporized vapor deposition material in the vacuum cavity.
In a specific embodiment, as shown in fig. 4, the vapor deposition material heating component 2 includes a heating support 21 and one or more vapor deposition material heating units 22, the heating support 21 is fixed on the inner wall of the vacuum chamber 4, and each vapor deposition material heating unit 22 is provided on the heating support 21 and provided with a vapor deposition material placement groove. The vapor deposition material is placed in the vapor deposition material placement groove, and heated by the vapor deposition material heating unit 22, thereby vaporizing the vapor deposition material.
In a specific embodiment, the vapor deposition material heating component 2 further includes one or more temperature sensors, and the temperature sensors are connected to the vapor deposition material heating unit 22, and the temperature sensors are used for acquiring a temperature signal of the vapor deposition material heating unit.
In a specific embodiment, the vacuum chamber 4 has a cylindrical shape, and the central axis of the cylindrical shape is horizontal. The design is favorable for distributing vaporized evaporation material uniformly in the vacuum chamber.
In a specific embodiment, the vacuum coating apparatus further comprises a fixed horizontal control rod 5, and the fixed horizontal control rod 5 is connected to the rotating member 31. The fixed horizontal control rod 5 can abut against the inner wall of the vacuum chamber 4, thereby supporting the rotary member 31 to a horizontal state. Specifically, the fixed horizontal control lever 5 is connected to the second rotation unit 312. The fixed horizontal control rod 5 is telescopic.
In a specific embodiment, the vacuum coating apparatus further includes a control unit 18, and the control unit 18 is connected to at least one selected from the vapor deposition material heating part 2 and a rotating mechanism. The control unit 18 is for controlling the operation of the vapor deposition material heating member 2 and the rotation mechanism, and controlling the operation of the heating member based on the temperature signal, thereby controlling the temperature from the orifice.
In a specific embodiment, the vacuum coating apparatus further comprises a control panel 19, and the control panel 19 is connected to the control unit 18.
In a specific embodiment, the control unit 18 is connected to at least one of the vapor deposition material heating unit 22 and the temperature sensor. The control unit is used for controlling the operation of the vapor deposition material heating unit 22 and the temperature sensor, and controlling the operation of the vapor deposition material heating unit 22 to control the temperature, etc.
When the vacuum coating device is used, a bracket with a base material is placed on the rotating bracket 3 in the vacuum cavity 4, the vapor deposition material heating component 2 heats the vapor deposition material, the vapor deposition material is gasified, the gasified vapor deposition material is uniformly distributed in the vacuum cavity, the rotating mechanism 1 drives the rotating bracket 3 to rotate during coating, and the vapor deposition material is attached to each surface of the base material. And taking out the evaporated base material after the evaporation is completed.
In conclusion, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present utility model and its effectiveness, and are not intended to limit the utility model. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the utility model. Accordingly, it is intended that all equivalent modifications and variations of the utility model be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (10)
1. The rotary mechanism is characterized by comprising a power source (11), a driven assembly (12), a first transmission piece (13) and a second transmission piece (14), wherein the power source (11) is in transmission connection with the driven assembly (12), the first transmission piece (13) is in transmission connection with the driven assembly (12), and the first transmission piece (13) is in transmission connection with the second transmission piece (14).
2. A rotating mechanism according to claim 1, characterized in that the power source (11) is an electric motor;
and/or the transmission connection of the power source (11) and the driven component (12) is flexible hinge connection;
and/or the rotating mechanism further comprises a supporting piece (15), and the driven assembly (12), the first transmission piece (13) and the second transmission piece (14) are arranged on the supporting piece (15).
3. The rotary mechanism as claimed in claim 1, wherein the driven assembly (12) comprises a first driven wheel (121) and a second driven wheel (122) which are sequentially connected in a meshed manner, the power source (11) is in transmission connection with the first driven wheel (121) and is used for driving the first driven wheel (121) to rotate, and the first transmission member (13) is coaxially connected with the second driven wheel (122).
4. A rotary mechanism according to claim 3, wherein the power source (11) is in driving connection with the first driven wheel (121) as a flexible hinge connection.
5. A rotary mechanism as claimed in claim 3, wherein the driven assembly (12) further comprises a third driven wheel (123), the first driven wheel (121), the third driven wheel (123) and the second driven wheel (122) being in meshed connection in sequence.
6. Vacuum coating equipment, characterized in that, including rotary mechanism (1) according to any one of claims 1 to 5, evaporation coating material heating element (2), runing rest (3) and vacuum cavity (4), evaporation coating material heating element (2) with runing rest (3) are located in vacuum cavity (4), runing rest (3) include rotating member (31) and substrate rotation support piece (32), rotary mechanism (1) with rotating member (31) transmission connection, substrate rotation support piece (32) are located on rotating member (31).
7. Vacuum coating apparatus according to claim 6, characterized in that the second transmission member (14) is in transmission connection with the rotation member (31);
and/or the support (15) is fixed on the inner wall of the vacuum cavity (4);
and/or the rotating member (31) comprises a first rotating unit (311) and a second rotating unit (312); the rotating mechanism (1) is in transmission connection with the first rotating unit (311), and the second rotating unit (312) is connected with the first rotating unit (311) and is used for supporting the rotation of the first rotating unit (311);
and/or, the substrate rotating support (32) is provided with more than one layer of substrate placing units (321), and the substrate placing units (321) between the layers are connected through more than one connecting rod;
and/or, in a use state, the evaporation material heating component (2) is arranged above the rotary bracket (3);
and/or the evaporation material heating component (2) comprises a heating support frame (21) and more than one evaporation material heating unit (22), wherein the heating support frame (21) is fixed on the inner wall of the vacuum cavity (4), and each evaporation material heating unit (22) is arranged on the heating support frame (21) and is provided with an evaporation material placement groove;
and/or, the vacuum cavity (4) is cylindrical, and the central axis of the cylindrical cavity is in the horizontal direction;
and/or the vacuum coating equipment further comprises a fixed horizontal control rod (5), and the fixed horizontal control rod (5) is connected with the rotating piece (31).
8. Vacuum coating apparatus according to claim 7, characterized in that the drive connection of the second drive member (14) to the rotary member (31) or the first rotary unit (311) is a friction drive connection;
and/or the support (15) is fixedly connected with the second rotation unit (312);
and/or, the first rotating unit (311) is in a ring shape;
and/or, the second rotating unit (312) is in a ring shape;
and/or, the rotating member (31) further comprises more than one connecting unit (313), each connecting unit (313) comprises a connecting shaft (3131) and a rotating connecting member (3132), one side of the connecting shaft (3131) is fixedly connected with the second rotating unit (312), the rotating connecting member (3132) is sleeved on the other side of the connecting shaft, the rotating connecting member (3132) is provided with a groove (3133), the groove (3133) is matched with the first rotating unit (311), and the first rotating unit (311) can rotate in the groove (3133);
and/or, each substrate placing unit (321) is provided with more than one through hole;
and/or, the evaporation material heating component (2) further comprises more than one temperature sensor, the temperature sensor is connected with the evaporation material heating unit (22), and the temperature sensor is used for acquiring a temperature signal of the evaporation material heating unit;
and/or the fixed horizontal control rod (5) is telescopic;
and/or the fixed horizontal control rod (5) is connected with the second rotating unit (312).
9. The vacuum plating apparatus according to any one of claims 6 to 8, further comprising a control unit connected to at least one selected from the group consisting of the vapor deposition material heating member (2) and the rotating mechanism.
10. Vacuum coating apparatus according to claim 9, further comprising a control panel (19), said control panel (19) being connected to said control unit (18);
and/or the control unit (18) is connected with at least one of the evaporation material heating unit (22) and the temperature sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223480152.5U CN219342270U (en) | 2022-12-26 | 2022-12-26 | Rotating mechanism and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223480152.5U CN219342270U (en) | 2022-12-26 | 2022-12-26 | Rotating mechanism and vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219342270U true CN219342270U (en) | 2023-07-14 |
Family
ID=87108384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223480152.5U Active CN219342270U (en) | 2022-12-26 | 2022-12-26 | Rotating mechanism and vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219342270U (en) |
-
2022
- 2022-12-26 CN CN202223480152.5U patent/CN219342270U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8485124B2 (en) | Silver thin-film spread apparatus by means of deposition of nano metallic silver | |
| JP4286496B2 (en) | Vapor deposition apparatus and thin film manufacturing method | |
| CN110801971A (en) | Glass coating spraying equipment | |
| CN219342270U (en) | Rotating mechanism and vacuum coating equipment | |
| US5558909A (en) | Apparatus and method for vacuum-metallizing articles with significant deposition onto three-dimensional surfaces | |
| CN108531847A (en) | A kind of plasma physical vapor deposition multi-station turning fitting device | |
| CN211637054U (en) | Glass coating spraying equipment | |
| CN107287562B (en) | Evaporation coating device and evaporation coating method | |
| CN100500931C (en) | Vacuum coating device | |
| US20130180955A1 (en) | Segmented or selected-area coating | |
| CN110592550A (en) | Magnetron sputtering and electron beam evaporation double-cavity coating device and using method thereof | |
| US20090136663A1 (en) | Vacuum vapor deposition apparatus and method, and vapor deposited article formed therewith | |
| KR20120037870A (en) | Silver thin-film spread apparatus by means of deposition of nano metallic silver | |
| TWI280986B (en) | Vacuum vapor deposition apparatus | |
| CN204982037U (en) | Rotation type coating machine | |
| CN220926903U (en) | Evaporation equipment capable of correcting uniformity of thickness of coating film | |
| JPH10130838A (en) | Vacuum coating device for coating all flanks of base material by turning base material within material flow | |
| CN218880030U (en) | Vacuum coating equipment | |
| WO2003035277A1 (en) | System for inverting substrate | |
| CN111020518A (en) | Substrate evaporation bearing disc and vacuum evaporation instrument | |
| CN202181344U (en) | Vacuum film coating device | |
| CN115216738A (en) | Rotatable plating ring plate pot mechanism and evaporator | |
| CN113913767A (en) | Multi-angle rotating platform for sputtering coating and magnetron sputtering device | |
| TWM415754U (en) | Atmospheric evaporation device and manufacturing apparatus of anti-smudge film | |
| CN210287487U (en) | Evaporation device using hydrophobic antifouling coating material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |