CN107287562B - Evaporation coating device and evaporation coating method - Google Patents
Evaporation coating device and evaporation coating method Download PDFInfo
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- CN107287562B CN107287562B CN201610207300.6A CN201610207300A CN107287562B CN 107287562 B CN107287562 B CN 107287562B CN 201610207300 A CN201610207300 A CN 201610207300A CN 107287562 B CN107287562 B CN 107287562B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of evaporation coating devices, including vacuum chamber, turntable mounting, heat electrode, multiple work supports and driving device, vacuum chamber includes opposite roof and bottom wall, turntable mounting is set to the bottom wall of vacuum chamber and is contained in vacuum chamber, heating electrode is set to the central location of turntable mounting, work support is installed on turntable mounting, heating electrode includes first electrode, second electrode and third electrode, multiple first carriers are provided between first electrode and second electrode, multiple second carriers are provided between second electrode and third electrode, when first electrode and the second electrode work, third electrode does not work, and turntable mounting is rotated in a clockwise direction, when second electrode and third electrode work, first electrode does not work, and turntable mounting is rotated in the counterclockwise direction.Unevenly there is the problem of two tone colour in the surface coating that the evaporation coating device can avoid workpiece.Invention additionally discloses a kind of evaporation coating methods.
Description
Technical field
The present invention relates to plated film field more particularly to a kind of evaporation coating device and use the evaporation coating method of the evaporation coating device.
Background technique
In electronics field it is generally necessary to plate protective film layer in product surface or certain parts surface by film plating process
Or functional film layer, for example, phone housing, touch screen surface, display screen surface etc. plate one layer of fingerprint proof membrane, prevent touch screen or
Display screen is easy dirty.Plated film is there are many mode, wherein due to vapor deposition mode have can metal, semiconductor, insulator even
Plastics, paper, deposited metal, semiconductor, insulator, the alloy of heterogeneity ratio, compound and part are organic on fabric surface
The films such as polymer, and the advantages that its is applied widely, with high purity, pollution is few and by recommendation.Vapor deposition is usually in vacuum item
It is carried out under part, thus also known as vacuum coating.Vacuum coating is to isolate the atom of evaporation material in vacuum chamber from heating source
It gets on the surface of plated object (i.e. workpiece), to form the technology of thin film.
In the prior art, hanger and one group of heating electricity that evaporation coating device generally includes vacuum chamber, mounts product to be coated
Evaporation material is set on one group of heating electrode by pole in vapor deposition processing procedure, and the product of plated film will be needed mounted in the hanger
On, it is put into vacuum chamber, closes door for vacuum chamber, then vacuumize, start work when vacuum reaches heating electrode when certain vacuum is spent
Make, when evaporation material reaches fusing point under the heating for heating electrode, under the action of work function, the particle of evaporation material is around
Diffusion, deposits to the product surface for needing plated film.However, often having between product surface different parts, there are offsets, for example, certain
The edge of a little mobile phones is used by thick thinning transient mode, when especially compensation grade is steeper, between thick position and thin position
There are offsets, or even form evaporation material and be difficult to the angle reached, and in the prior art, hanger usually turns towards the same direction
It is dynamic, so that needing the product being deposited is also to rotate in one direction, under such circumstances, the particle deposition of evaporation material to product
Surface filming when unevenly, or even can be difficult to be deposited on the excessive position of offset, so that the film to be formed be made two tone colour occur,
Influence the appearance and/or performance of product.
However, during which to undergo one to stop if reversely rotated after so that hanger is rotated the regular hour during vapor deposition
The dynamic process restarted again of rotation stop, it is low under the process medium speed ratio normal operating conditions, and heat electrode and do not have enough time cooling down
It reworks again, therefore, evaporation material is constantly in evolution (evolution) state, and the surface of product is also easy to cause to be formed by
Film is uneven.
Summary of the invention
Technical problem to be solved by the present invention lies in, a kind of evaporation coating device and evaporation coating method are provided, it can be to avoid workpiece
Surface coating it is uneven and the problem of two tone colour occur, to avoid the appearance and performance that influence workpiece therefrom.
In order to solve the above-mentioned technical problem, the invention adopts the following technical scheme:
On the one hand, the present invention provides a kind of evaporation coating device, including vacuum chamber, turntable mounting, heating electrode, multiple work supports
And driving device, the vacuum chamber include opposite roof and bottom wall, the turntable mounting be set to the bottom wall of the vacuum chamber and
It is contained in the vacuum chamber, the heating electrode is set to the central location of the turntable mounting, and the work support is installed on institute
It states on turntable mounting, the heating electrode includes first electrode, second electrode and third electrode, the first electrode and described second
It is provided with multiple first carriers between electrode, multiple second carryings are provided between the second electrode and the third electrode
Frame, first carrier and second carrier are for carrying evaporation material, and the driving device is for driving described turn
Plate rail rotation, when the first electrode and second electrode work, the third electrode does not work, and the turntable mounting edge
It is rotated clockwise, when the second electrode and third electrode work, the first electrode does not work, and described turn
Plate rail is rotated in the counterclockwise direction.
Wherein, multiple work supports are rotatably mounted on the turntable mounting, when the turntable mounting is along clockwise
When direction rotates, the work support revolves clockwise around the heating electrode and rotation counterclockwise, when the turntable mounting is along inverse
When clockwise rotates, the work support revolves counterclockwise around the heating electrode and rotation clockwise.
Wherein, the polarity of the first electrode and the second electrode polarity on the contrary, the polarity of the first electrode with
The polarity of the third electrode is identical.
Wherein, the material of first carrier and second carrier includes Heat Conduction Material.
Wherein, the driving device includes motor, first gear and multiple second gears, the first gear with described turn
Plate rail coaxial arrangement, each second gear is coaxially disposed with a work support respectively, described in the motor driven
When first gear rotates, the first gear drives the turntable mounting rotation, and drives the second gear rotation, and described second
Gear drives the work support rotation.
Wherein, the work support and the heating electrode extend to the side where the roof of the vacuum chamber.
On the other hand, the present invention also provides a kind of evaporation coating methods, and the evaporation coating method is using steaming described in any of the above item
Plating appts carry out plated film, comprising:
Workpiece is hung on work support；
Evaporation material is placed on the first carrier and the second carrier；
Start driving device, be rotated in a clockwise direction turntable mounting, the turntable mounting drives the work support around adding
Thermode revolves along clockwise direction；Start first electrode and second electrode, makes the vapor deposition material on first carrier
Material evolution, the evolution object of the evaporation material deposit on the workpiece；
Evaporation material ease on first carrier closes the first electrode and the second electrode after rolling, and
Driving device is closed, the turntable mounting is made to stop rotating；
Start driving device, be rotated in the counterclockwise direction turntable mounting, the turntable mounting drives the work support around adding
Thermode revolves in the counterclockwise direction；Start second electrode and third electrode, makes the vapor deposition material on second carrier
Material evolution, the evolution object of the evaporation material deposit on the workpiece.
It is wherein, described that " starting driving device, is rotated in a clockwise direction turntable mounting, and the turntable mounting drives the work
Part bracket revolves along clockwise direction around heating electrode " include:
Rotation that the work support is also counterclockwise, rotates the workpiece in the counterclockwise direction around the work support；
It is described that " starting driving device, is rotated in the counterclockwise direction turntable mounting, and the turntable mounting drives the work support
Revolve in the counterclockwise direction around heating electrode " include:
Work support rotation also clockwise, is rotated in the clockwise direction the workpiece around the work support
It is wherein, described that " starting driving device, is rotated in a clockwise direction turntable mounting, and the turntable mounting drives the work
Part bracket revolves along clockwise direction around heating electrode；Start first electrode and second electrode, makes on first carrier
The evaporation material evolution, the evolution object of the evaporation material deposit on the workpiece " include:
It is rotated in a clockwise direction the turntable mounting lasting 60 seconds~80 seconds.
Wherein, described " the evaporation material ease on first carrier closes first electrode and second electrode after rolling,
And driving device is closed, and so that the turntable mounting is stopped rotating " " start driving device with described, make the turntable mounting along counterclockwise
Direction rotates, and the turntable mounting drives the work support to revolve in the counterclockwise direction around heating electrode；Start second electrode and
Third electrode escapes the evaporation material on second carrier, and the evolution object of the evaporation material deposits to described
On workpiece " between include:
The turntable mounting is set to stop rotating 15 seconds~20 seconds.
Compared with prior art, technical solution of the present invention at least has the advantages that
In technical solution of the present invention, the heating electrode of the evaporation coating device includes first electrode, second electrode and third
Electrode is provided with multiple first carriers, the second electrode and described between the first electrode and the second electrode
Multiple second carriers, first carrier and second carrier are provided between three electrodes for carrying vapor deposition material
Material, the driving device can drive the turntable mounting to rotate below the vacuum chamber, when the first electrode and described
When second electrode works, the third electrode does not work, and the turntable mounting is rotated in a clockwise direction, when the second electrode
And when third electrode work, the first electrode does not work, and the turntable mounting is rotated in the counterclockwise direction, and by institute
It states work support to be installed on the turntable mounting, therefore, when the turntable mounting is rotated in a clockwise direction, hangs over the workpiece
Workpiece on bracket is also rotated in the clockwise direction, and when the turntable mounting is rotated in the counterclockwise direction, the workpiece is also along inverse
Clockwise rotation.
Since the evaporation coating device includes three electrodes, two arrays of electrodes can be formed, it is one group more compared with the existing technology
Electrode, and multiple first carriers are provided between the first electrode and the second electrode, the second electrode and described
It is provided with multiple second carriers between third electrode, therefore, evaporation material can be divided into two groups, be respectively placed in described first
Carrier and second carrier, when the first electrode and second electrode work, the third electrode does not work,
Evaporation material evolution on first carrier, and the turntable mounting is rotated in a clockwise direction, on first carrier
Evaporation material escaped after, stop the turntable mounting and close the first electrode and the second electrode, at this time without steaming
Plate material evolution, workpiece rotational frequency is slack-off or not turn not will lead to the film that vapor deposition is formed uneven；The dead time can be set
Then length makes the second electrode and the third electrode work, the first electrode does not work, to make described second to hold
Evaporation material evolution on carrier, and the turntable mounting is rotated in the counterclockwise direction, with direction of rotation before on the contrary, to keep away
Unevenly there is the problem of two tone colour in the surface coating for exempting from workpiece, then avoids the appearance and performance that influence workpiece therefrom.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of evaporation coating device in the embodiment of the present invention；
Fig. 2 is the schematic top plan view of the heating electrode of evaporation coating device in the embodiment of the present invention；And
Fig. 3 is the knot of first gear and second gear in the driving device of evaporation coating device in an embodiment of the invention
Structure schematic diagram.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
In addition, the explanation of following embodiment is referred to the additional illustration, the spy that can be used to implement to illustrate the present invention
Determine embodiment.Direction terms mentioned in the present invention, for example, "upper", "lower", "front", "rear", "left", "right", "inner",
"outside", " side " etc. are only the directions with reference to annexed drawings, and therefore, the direction term used is to more preferably, more clearly say
The bright and understanding present invention, rather than indicate or imply signified device or element and must have a particular orientation, with specific square
Position construction and operation, therefore be not considered as limiting the invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, is also possible to detachably connected, or integrally connects
It connects；It can be mechanical connection；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The connection in portion.For the ordinary skill in the art, the tool of above-mentioned term in the present invention can be understood with concrete condition
Body meaning.
In addition, in the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more.If this
Occur the term of " process " in specification, refers not only to independent process, when can not clearly be distinguished with other process, as long as
Effect desired by the process is able to achieve then to be also included in this term.In addition, the numberical range indicated in this specification with "-"
Refer to the range that the numerical value for recording "-" front and back is included as minimum value and maximum value.In the accompanying drawings, structure is similar
Or identical unit is indicated by the same numeral.
Referring to Fig. 1, Fig. 1 is the structural schematic diagram of evaporation coating device in the embodiment of the present invention.In the present embodiment, described
Evaporation coating device includes vacuum chamber 100, turntable mounting 200, heating electrode 300, multiple work supports 400 and driving device 500.It is described
Vacuum chamber 100 includes opposite roof 110 and bottom wall 120, and the side wall 130 of the connection roof 110 and bottom wall 120, institute
It states the setting of side wall 130 to have family door (not shown go out), for picking and placing workpiece, is provided with venthole 140 on the bottom wall 120, is used for
Air passes in and out vacuum chamber 100.The turntable mounting 200 includes opposite top 210 and bottom 220, and the connection top 210
With the interconnecting piece 230 of bottom 220.The turntable mounting 200 is set to the bottom wall 120 of the vacuum chamber 100 and is contained in described true
Empty room 100, the bottom wall 120 of the bottom 220 of turntable mounting 200 towards the vacuum chamber 100.The heating electrode 300 is set to institute
The central location of turntable mounting 200 is stated, the central location of the turntable mounting 200 is the structure of hollow out, in favor of described in air disengaging
Vacuum chamber 100.
The work support 400 extends along the direction parallel with the interconnecting piece 230 of the turntable mounting 200, and one end is installed on
The top 210 of turntable mounting 200, the other end are installed on the bottom 220 of turntable mounting 200.In one embodiment, multiple works
Part bracket 400 fences up the heating electrode 300 along one circle of edge setting of the bottom 220 of the turntable mounting 200.It is described
It is provided with multiple hanger bars 410 on work support 400, the hanger bar 410 extends perpendicularly to the turntable mounting 200
Interconnecting piece 230.Preferably, the two neighboring hanger bar 410 can be staggered on the direction for being parallel to the interconnecting piece 230 and set
It sets, to make full use of space.The hanger bar 410 is for mounting the workpiece (not shown) for needing plated film.Preferably, multiple
The work support 400 is rotatably mounted on the turntable mounting 200, when the turntable mounting 200 is rotated in a clockwise direction
When, the work support 400 around revolution and the rotation counterclockwise clockwise of the heating electrode 300, thus drive the workpiece around
Revolution and the rotation counterclockwise clockwise of heating electrode 300；It is described when the turntable mounting 200 is rotated in the counterclockwise direction
Work support 400 is around revolution and the rotation clockwise counterclockwise of heating electrode 300, to drive the workpiece around the heating
Revolution and the rotation clockwise counterclockwise of electrode 300.
The heating electrode 300 includes first electrode 310, second electrode 320 and third electrode 330, the first electrode
The polarity of 310 polarity and the second electrode 320 is on the contrary, the polarity of the first electrode 310 and the third electrode 330
Polarity is identical.In one embodiment, the first electrode 310 and the third electrode 330 are anode, the second electrode
320 be cathode.It is provided with multiple first carriers 600 between the first electrode 310 and the second electrode 320, described
Multiple second carriers 700 are provided between two electrodes 320 and the third electrode 330.First carrier 600 and described
For second carrier 700 for carrying evaporation material, the evaporation material can be metal, such as indium, tin or indium tin mixture, or
The other substances that can be deposited of person, for example, organic polymer.The material of first carrier 600 and second carrier 700
Matter is or including Heat Conduction Material resistant to high temperature, such as tungsten wire or tungsten boat.
The work support 400 and the heating electrode 300 are to the side where the roof of the vacuum chamber 100 110
Extend.
The driving device 500 is set to 100 lower section of vacuum chamber, and the turntable mounting 200 can be driven to rotate, when
When the first electrode 310 and the second electrode 320 work, the third electrode 330 does not work, and the turntable mounting 200
It is rotated in a clockwise direction, when the second electrode 320 and the third electrode 330 work, the first electrode 310 not work
Make, and the turntable mounting 200 is rotated in the counterclockwise direction.
Further, referring to Fig. 2, Fig. 2 is the vertical view signal of the heating electrode of evaporation coating device in the embodiment of the present invention
Figure.In one embodiment, first electrode 310, second electrode 320 and the third electrode 330 of the heating electrode 300 are
Cylindrical body, and extension is set at cylindrical body two sides interval, i.e., the described first electrode 310 further includes the to be located along the same line
One extension 311 and the second extension 312, the second electrode 320 further include the third extension 321 being located along the same line
And the 4th extension 322, the third electrode 330 further include that the 5th extension 331 and the 6th being located along the same line extends
Portion 332.First extension 311, third extension 321 and the 5th extension 331 are parallel to each other.Multiple first carryings
Frame 600 is between first extension 311 and third extension 321 and the second extension 312 and the 4th extension 322
Between.In one embodiment, first carrier 600 and the second carrier 700 can use two parallel tungsten wires
It is made into, evaporation material 800 is sandwiched between two tungsten wires.
Further, referring to Fig. 3, Fig. 3 is in an embodiment of the invention in the driving device of evaporation coating device
The structural schematic diagram of one gear and second gear.In one embodiment, the driving device 500 include motor (in figure not
Show), first gear 510 and multiple second gears 520, the first gear 510 are coaxially disposed with the turntable mounting 200, institute
First gear 510 described in motor driven are stated, the first gear 510 drives the turntable mounting 200 to rotate.Multiple second teeth
Wheel 520 is meshed with the outer edge of the first gear 510.Each correspondence of the second gear 520 and a workpiece branch
Frame 400 is coaxially disposed, and when first gear 510 described in the motor driven rotates, the first gear 510 drives the turntable mounting
200 rotations, and all second gears 520 are driven, the second gear 520 drives 200 rotation of work support.
In the embodiment of the present invention, since the heating electrode 300 of the evaporation coating device includes the 310, second electricity of first electrode
Pole 320 and third electrode 330 are provided with multiple first carriers between the first electrode 310 and the second electrode 320
600, multiple second carriers 700, first carrying are provided between the second electrode 350 and the third electrode 330
Frame 600 and second carrier 700 are used to carry evaporation material, and the driving device 500 drives the turntable mounting 200 to revolve
Turn, when the first electrode 310 and the work of the second electrode 320, the third electrode 330 does not work, and the turntable
Frame 200 is rotated in a clockwise direction, when the second electrode 320 and the third electrode 330 work, the first electrode
310 do not work, and the turntable mounting 200 is rotated in the counterclockwise direction, and since the work support 400 is installed on described turn
On plate rail 200, therefore, when the turntable mounting 200 is rotated in a clockwise direction, the workpiece on the work support 400 is hung over
Also it is rotated in the clockwise direction, when the turntable mounting is rotated in the counterclockwise direction, the workpiece also rotates in the counterclockwise direction.
Since the evaporation coating device includes three electrodes, i.e. first electrode 310, second electrode 320 and third electrode 330,
Two arrays of electrodes can be formed, more compared with the existing technology one group of electrode, and the first electrode 310 and the second electrode
It is provided with multiple first carriers 600 between 320, is provided between the second electrode 320 and the third electrode 330 multiple
Second carrier 700, therefore, evaporation material 800 can be divided to is two groups, is respectively placed in first carrier 600 and described
Second carrier 700.When the first electrode 310 and the second electrode 320 work, the third electrode 330 does not work,
Evaporation material 800 on first carrier 600 escapes, and the turntable mounting 200 is rotated in a clockwise direction, until described
After evaporation material on first carrier 600 has escaped, stops the turntable mounting 200 and close 310 He of first electrode
The second electrode 320 is escaped without evaporation material 800 at this time, and workpiece rotational frequency is slack-off or does not turn not will lead to the thin of vapor deposition formation
Film is uneven；The turntable mounting 200 stops after a certain period of time, starting the second electrode 320 and the third electrode 330, institute
It states first electrode 310 not work, to make the evaporation material on second carrier 600 escape, and 200 edge of the turntable mounting
It rotates counterclockwise, with direction of rotation before on the contrary, the surface coating at the position to avoid workpiece offset big is uneven
And there is the problem of two tone colour, then avoid the appearance and performance that influence workpiece therefrom.
The embodiment of the present invention also provides a kind of evaporation coating method, and the evaporation coating method uses above embodiments or embodiment
The evaporation coating device carries out plated film, includes the following steps:
Workpiece is hung on work support；
Evaporation material is placed on the first carrier and the second carrier；
Start driving device, be rotated in a clockwise direction turntable mounting, the turntable mounting drives the work support around adding
Thermode revolves along clockwise direction；Start first electrode and second electrode, makes the vapor deposition material on first carrier
Material evolution, the evolution object of the evaporation material deposit on the workpiece；
First electrode and second electrode are closed, and closes driving device, the turntable mounting is made to stop rotating；
Start driving device, be rotated in the counterclockwise direction turntable mounting, the turntable mounting drives the work support around adding
Thermode revolves in the counterclockwise direction；Start second electrode and third electrode, makes the vapor deposition material on second carrier
Material evolution, the evolution object of the evaporation material deposit on the workpiece.
Further, it is described when the turntable mounting drives the work support to revolve along clockwise direction around heating electrode
Work support also carries out rotation counterclockwise, rotates the workpiece in the counterclockwise direction around the work support；
When the turntable mounting drives the work support to revolve in the counterclockwise direction around heating electrode, the work support is also
Rotation clockwise is carried out, is rotated in the clockwise direction the workpiece around the work support.
Detailed process is as follows:
The workpiece that is deposited will be first needed to mount in hanging a workpiece in the hanger bar on work support, every hanger bar；
Evaporation material is placed on the first carrier and the second carrier；
The room door of vacuum chamber is shut；
Start the evaporation coating device, first to the vacuum chamber, becomes 8 × 10 to vacuum degree-2When Pa, starting driving
Device and first electrode and second electrode, are rotated in a clockwise direction turntable mounting, and the turntable mounting drives the work support
It revolves along clockwise direction around heating electrode, the work support rotation, so that the workpiece be made to rotate around the work support；
Also, escape the evaporation material on first carrier, the evolution object of the evaporation material deposits to the workpiece
On, form film.
After the completion of the evaporation material evolution on first carrier, the first electrode and described second are closed
Electrode, and driving device is closed, so that the turntable mounting is stopped rotating, the first electrode and the second electrode is made to stop adding
The revolving speed of heat, turntable mounting becomes smaller, and finally stops；During the revolving speed of turntable mounting becomes smaller until finally stopping this, material is not deposited
Material evolution, from without as revolving speed it is inappropriate caused by non-uniform phenomenon；Preferably, the turntable mounting is along side clockwise
To rotation lasts 60 seconds~80 seconds.The quality of the evaporation material can by actual design and calculate determine, thus make its
It has been escaped within the scope of 60 seconds~80 seconds.
Then, the first electrode and the second electrode are closed, and closes driving device, the turntable mounting is made to stop rotation
Turn；
After the turntable mounting stops rotating 15 seconds~20 seconds, start the driving device, makes turntable mounting in the counterclockwise direction
Rotation, the turntable mounting drives the work support to revolve in the counterclockwise direction around heating electrode, and the work support carries out
Clockwise direction rotation；Start the second electrode and the third electrode, makes the vapor deposition material on second carrier
Material evolution, the evolution object of the evaporation material deposit on the workpiece；Due to the work support around heating electrode along the inverse time
The revolution of needle direction and rotation along clockwise direction, therefore rotation direction and the direction rotated before are all on the contrary, hang over the workpiece
The rotation direction of workpiece on bracket also from rotation direction before on the contrary, to make evaporation material deposit from different orientation,
Make up work support revolve along clockwise direction and in the counterclockwise direction rotation when the evaporation material be unable to uniform deposition not
Foot, to avoid since there are plated film non-uniform phenomenons caused by when offset to avoid thus causing to avoid two tone colour for workpiece
Bad order phenomenon and the bad problem of performance.Preferably, the turntable mounting is rotated in the counterclockwise direction lasting 60 seconds~80 seconds.
The quality of the evaporation material can be determined by actual design and calculating, so that it be made to escape within the scope of 60 seconds~80 seconds
It is complete.
After the completion of evaporation material evolution on second carrier, the second electrode and third electricity are closed
Pole, and driving device is closed, so that the turntable mounting is stopped rotating.
Then, start vacuum breaking device, vacuum chamber is made to fill air and cooling, take out product, complete coating process.
In the present embodiment, due in the evaporation coating method, first making the first electrode and the second electrode work, and the
Three electrodes do not work, and escape the evaporation material on the first carrier, and make the work support first revolution and inverse time clockwise
Needle rotation just makes the work support stop operating after rolling to the evaporation material ease on first carrier, therefore, the mistake
It is uneven that journey not will cause plated film；It pauses after a certain period of time, then the second electrode and the third electrode is made to work, make second
Evaporation material evolution on carrier, and the work support is made revolve counterclockwise and rotation clockwise, thus described in making to hang over
The rotation direction of workpiece on work support with before on the contrary, the evaporation material is made to deposit to work support along clockwise direction
Revolution and in the counterclockwise direction rotation when the place that cannot arrive of the evaporation material, to avoid since there are draw when offset for workpiece
The plated film non-uniform phenomenon risen, so that two tone colour is avoided, bad order phenomenon caused by avoiding thus and the bad problem of performance.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means particular features, structures, materials, or characteristics described in conjunction with this embodiment or example
It is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are different
Surely identical embodiment or example is referred to.Moreover, the particular features, structures, materials, or characteristics of description can be any one
It can be combined in any suitable manner in a or multiple embodiment or examples.
Embodiments described above does not constitute the restriction to the technical solution protection scope.It is any in above-mentioned implementation
Made modifications, equivalent substitutions and improvements etc., should be included in the protection model of the technical solution within the spirit and principle of mode
Within enclosing.
Claims (10)
1. a kind of evaporation coating device, which is characterized in that including vacuum chamber, turntable mounting, heating electrode, multiple work supports and driving dress
It sets, the vacuum chamber includes opposite roof and bottom wall, and the turntable mounting is set to the bottom wall of the vacuum chamber and is contained in institute
Vacuum chamber is stated, the heating electrode is set to the central location of the turntable mounting, and the work support is installed on the turntable mounting
On, the heating electrode includes first electrode, second electrode and third electrode, between the first electrode and the second electrode
Multiple first carriers are provided with, multiple second carriers are provided between the second electrode and the third electrode, it is described
First carrier and second carrier are for carrying evaporation material, and the driving device is for driving the turntable mounting to revolve
Turn, when the first electrode and second electrode work, the third electrode does not work, the vapor deposition material on the first carrier
Material evolution, and the turntable mounting is rotated in a clockwise direction, until stopping after the evaporation material on first carrier has gone out
Only the turntable mounting and the first electrode and the second electrode are closed, escaped at this time without evaporation material, the turntable mounting stops
Only after a certain period of time, when the second electrode and the third electrode work, the first electrode does not work, to make described the
Evaporation material evolution on two carriers, and the turntable mounting is rotated in the counterclockwise direction.
2. evaporation coating device as described in claim 1, which is characterized in that multiple work supports are rotatably mounted in described
On turntable mounting, when the turntable mounting is rotated in a clockwise direction, the work support revolves clockwise around the heating electrode
And rotation counterclockwise, when the turntable mounting is rotated in the counterclockwise direction, the work support is counterclockwise around the heating electrode
Revolution and rotation clockwise.
3. evaporation coating device as claimed in claim 2, which is characterized in that the polarity of the first electrode and the second electrode
Polarity is on the contrary, the polarity of the first electrode is identical as the polarity of the third electrode.
4. evaporation coating device as claimed in claim 3, which is characterized in that the material of first carrier and second carrier
Matter includes Heat Conduction Material.
5. such as the described in any item evaporation coating devices of Claims 1-4, which is characterized in that the driving device includes motor, first
Gear and multiple second gears, the first gear and the turntable mounting are coaxially disposed, and each second gear is respectively with one
Work support described in root is coaxially disposed, and when first gear described in the motor driven rotates, the first gear drives described turn
Plate rail rotation, and the second gear rotation is driven, the second gear drives the work support rotation.
6. such as the described in any item evaporation coating devices of Claims 1-4, which is characterized in that the work support and heating electricity
Extremely extend to the side where the roof of the vacuum chamber.
7. a kind of evaporation coating method, which is characterized in that carry out plated film, packet using as claimed in any one of claims 1 to 66 described in any item evaporation coating devices
It includes:
Workpiece is hung on work support；
Evaporation material is placed on the first carrier and the second carrier；
Start driving device, be rotated in a clockwise direction turntable mounting, the turntable mounting drives the work support around heating electricity
It revolves along clockwise direction pole；Start first electrode and second electrode, the evaporation material on first carrier is made to escape
Out, the evolution object of the evaporation material deposits on the workpiece；
Evaporation material ease on first carrier closes the first electrode and the second electrode, and close after rolling
Driving device makes the turntable mounting stop rotating；
Start driving device, be rotated in the counterclockwise direction turntable mounting, the turntable mounting drives the work support around heating electricity
It revolves in the counterclockwise direction pole；Start second electrode and third electrode, the evaporation material on second carrier is made to escape
Out, the evolution object of the evaporation material deposits on the workpiece.
8. evaporation coating method as claimed in claim 7, which is characterized in that described " starting driving device, makes turntable mounting along clockwise
Direction rotates, and the turntable mounting drives the work support to revolve along clockwise direction around heating electrode " include:
Rotation that the work support is also counterclockwise, rotates the workpiece in the counterclockwise direction around the work support；
It is described that " starting driving device, is rotated in the counterclockwise direction turntable mounting, and the turntable mounting drives the work support around adding
Thermode revolves in the counterclockwise direction " include:
Work support rotation also clockwise, is rotated in the clockwise direction the workpiece around the work support.
9. evaporation coating method as claimed in claim 8, which is characterized in that described " starting driving device, makes turntable mounting along clockwise
Direction rotates, and the turntable mounting drives the work support to revolve along clockwise direction around heating electrode；Start first electrode and
Second electrode escapes the evaporation material on first carrier, and the evolution object of the evaporation material deposits to described
On workpiece " include:
It is rotated in a clockwise direction the turntable mounting lasting 60 seconds~80 seconds.
10. evaporation coating method as claimed in claim 9, which is characterized in that " the evaporation material ease on first carrier
After rolling, first electrode and second electrode are closed, and closes driving device, the turntable mounting is made to stop rotating " " start with described
Driving device is rotated in the counterclockwise direction the turntable mounting, and the turntable mounting drives the work support around heating electrode edge
Counterclockwise revolve；Start second electrode and third electrode, escapes the evaporation material on second carrier, institute
The evolution object for stating evaporation material deposits on the workpiece " between include:
The turntable mounting is set to stop rotating 15 seconds~20 seconds.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610207300.6A CN107287562B (en) | 2016-03-31 | 2016-03-31 | Evaporation coating device and evaporation coating method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610207300.6A CN107287562B (en) | 2016-03-31 | 2016-03-31 | Evaporation coating device and evaporation coating method |
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| CN107287562B true CN107287562B (en) | 2019-08-02 |
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| US11555247B2 (en) * | 2019-09-20 | 2023-01-17 | Jiangsu Favored Nanotechnology Co., Ltd. | Coating apparatus and movable electrode arrangement, movable support arrangement, and application thereof |
| CN111101099B (en) * | 2020-01-06 | 2024-03-29 | 宣城托新精密科技有限公司 | Anhydrous atomization vapor deposition method and vapor deposition device for automobile ornament |
| CN114308586A (en) * | 2021-12-30 | 2022-04-12 | 上海创功通讯技术有限公司 | Ceramic-like composite material and preparation method and application thereof |
| CN115110037B (en) * | 2022-06-23 | 2024-01-12 | 北海惠科半导体科技有限公司 | Coating method of evaporation coating device and evaporation coating device |
| CN115110038B (en) * | 2022-06-29 | 2024-01-12 | 北海惠科半导体科技有限公司 | Evaporation coating device and coating method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001286027A (en) * | 2000-03-31 | 2001-10-12 | Taiton Kk | Spiral tube and its sputtering method |
| CN103119193A (en) * | 2010-07-23 | 2013-05-22 | 莱宝光电有限公司 | Device and method for vacuum coating |
| CN206127416U (en) * | 2016-10-10 | 2017-04-26 | 布勒莱宝光学设备（北京）有限公司 | Vacuum coating equipment and work piece linkage thereof |
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2016
- 2016-03-31 CN CN201610207300.6A patent/CN107287562B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001286027A (en) * | 2000-03-31 | 2001-10-12 | Taiton Kk | Spiral tube and its sputtering method |
| CN103119193A (en) * | 2010-07-23 | 2013-05-22 | 莱宝光电有限公司 | Device and method for vacuum coating |
| CN206127416U (en) * | 2016-10-10 | 2017-04-26 | 布勒莱宝光学设备（北京）有限公司 | Vacuum coating equipment and work piece linkage thereof |
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