CN209989462U - Coating equipment - Google Patents

Coating equipment Download PDF

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Publication number
CN209989462U
CN209989462U CN201920481324.XU CN201920481324U CN209989462U CN 209989462 U CN209989462 U CN 209989462U CN 201920481324 U CN201920481324 U CN 201920481324U CN 209989462 U CN209989462 U CN 209989462U
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box
flange
frame
pipe
furnace
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CN201920481324.XU
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Chinese (zh)
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傅其裕
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Baiteng Technology Suzhou Co Ltd
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Baiteng Technology Suzhou Co Ltd
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Abstract

The utility model discloses a coating equipment, this kind of coating equipment include frame, vaporizing device, pyrolysis device and deposition device, be provided with vaporizing device, pyrolysis device and the deposition device that connects gradually in the frame, the external refrigerator of deposition device, the dimer of thermoplastic plastics xylol is vaporized into two poly p-xylene through the vaporizing device heating, and two poly p-xylene of vaporization is the p-xylene monomer through pyrolysis device pyrolysis, and then the deposit is high molecular polymer promptly poly p-xylene in deposition device, on attaching to the product, the frame is by frame, closing cap board, feed bin door, a furnace gate, No. two furnace gates, file box, control panel, shutter board and display screen. In this way, the utility model discloses compact structure, operate steadily, application scope is wide, can carry out the coating film to the product of multiple type and size and handle, can the coating film even, efficient.

Description

Coating equipment
Technical Field
The utility model relates to a coating film technical field especially relates to a coating film equipment.
Background
parylene C or parylene N is parylene which is a novel thermoplastic plastic used for manufacturing an extremely thin film or a deposition coating, the parylene has good gas and water vapor barrier property, physical and mechanical property, electrical insulation property and corrosion resistance, and has wide application in the fields of silicon rubber, magnetic materials, circuit boards, medical devices, books and paintings, historical relics, LED lamps, sensors and the like, and the traditional coating equipment has the following defects: the leakage problem exists, the coated product is single, the coating effect is not ideal, the coating layer is difficult to be uniformly adhered to the surface of the product, and the prior art needs to be improved based on the defects and the shortcomings.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the main technical problem who solves provides a coating equipment, compact structure, operates steadily, and application scope is wide, can carry out the coating film to the product of multiple type and size and handle, and can the coating film even, efficient.
In order to solve the technical problem, the utility model discloses a technical scheme be: the film coating equipment comprises a rack, a vaporizing device, a pyrolysis device and a deposition device, wherein the vaporizing device, the pyrolysis device and the deposition device are sequentially connected and are arranged in the rack, the deposition device is externally connected with a refrigerator, dimer of thermoplastic xylene is heated and vaporized into dimeric paraxylene through the vaporizing device, the vaporized dimeric paraxylene is pyrolyzed into paraxylene monomer through the pyrolysis device, then the paraxylene monomer is deposited into high molecular polymer parylene in the deposition device and is attached to a product, the rack is composed of a frame, a sealing cover plate, a feeding bin door, a first furnace door, a second furnace door, a file box, a control panel, louver plates and a display screen, the frame is built by detachable square pipes, the sealing cover plate is packaged on six sides of the frame, the feeding bin door is arranged on the left side of the frame, the first furnace door and the second furnace door are arranged on the front side of the frame, a file box is arranged on the first furnace door, files can be conveniently placed in the file box, a control panel is arranged on the upper portion of the front side of the frame, shutter plates are arranged on the lower portion of the front side of the frame, a display screen is further mounted on the frame, an electric control cabinet is mounted in the frame, and the control panel and the display screen are electrically connected to the electric control cabinet.
Preferably, the vaporizing device comprises a tube furnace chassis, an evaporating furnace box, evaporating tubes, heating pieces, a junction box, a sealing structure and a connecting flange, wherein the tube furnace chassis is arranged in the middle of the frame, the evaporating furnace box is arranged on the tube furnace chassis, the evaporating furnace box is a split openable box body, the evaporating tubes are transversely inserted into the evaporating furnace box, the evaporating tubes are transparent glass tubes or stainless steel tubes, the heating pieces are arranged on the evaporating tubes at intervals, the heating pieces are connected to the junction box through wires, the junction box is arranged at the rear part of the evaporating furnace box, a feeding port and a discharging port are respectively arranged at two sides of each evaporating tube, the sealing structure is arranged at the feeding port of each evaporating tube, and the connecting flange is arranged at the; the sealing structure comprises an evaporating pipe flange, a hinge, a flange rear cover, a rear cover heat-insulating shell and a fastening assembly, the evaporating pipe flange is sleeved at a feed inlet of the evaporating pipe, the rear part of the evaporating pipe flange is movably connected with the flange rear cover through the hinge, the rear cover heat-insulating shell is installed on the outer side surface of the flange rear cover, and the front parts of the evaporating pipe flange and the flange rear cover are fixedly connected through the fastening assembly.
Preferably, fastening components includes two ear seats, mounting plate, connecting rod, connecting pipe, horizon bar and knob, two ear seats are fixed in the evaporating pipe flange front portion, and the mounting plate is fixed in behind the flange lid front portion, and the cartridge has the connecting rod on the two ear seats, and the cover has the connecting pipe on the connecting rod, and the connecting pipe middle part dress is fixed with the horizon bar, is provided with the external screw thread on the horizon bar, and the cover has the knob on the horizon bar, be equipped with two spiral arms that stretch out on the knob, be equipped with the fastening opening relative with the horizon bar on the mounting plate, manual rotation horizon bar, horizon bar commentaries on classics to fastening opening part, rotatory knob, the spiral arm and the mounting plate of knob offset, reach the effect of fastening.
Preferably, the pyrolysis device includes box, schizolysis pipe, heating tile, power line box, high temperature thermal-insulated sponge, flange joint, horizontal cartridge has the schizolysis pipe in the box, and the schizolysis outside of tubes side-mounting has two halves arc heating tile, and the connection direction of heating tile department is connected to the power line box, and the power line box is fixed in the box rear end, and it has the thermal-insulated sponge to still fill in the box, and flange joint is installed at schizolysis pipe both ends, flange joint adopts CF50 flange, the box is sealed form, and the box comprises lower box, upper box, connection panel beating and curb plate, and the connection panel beating is installed to the junction inner wall of lower box and upper box, and the horizontal plate of two upper and lower connection panel beating passes through screw fastening connection, and lower box and upper box both sides are packaged with the curb plate.
Preferably, the deposition device comprises a rack, a deposition chamber, a shaft sleeve, a rotating shaft, a driven pulley, a motor, a driving pulley, a toothed belt and a rotating assembly, wherein the deposition chamber is fixed on the rack, the shaft sleeve is installed at the bottom of the deposition chamber, the rotating shaft is inserted in the shaft sleeve through a bearing, the driven pulley is installed at the bottom of the rotating shaft, the motor is further arranged at the side end of the rack, the driving pulley is installed on a motor shaft of the motor, the driven pulley and the driving pulley are connected through the toothed belt, the motor drives the driving pulley to rotate, the driving pulley drives the rotating shaft to rotate, and the rotating assembly is arranged on; the sedimentation chamber comprises a cavity, a cavity upper cover, a cavity lower cover, a feeding flange connecting pipe, a discharging connecting pipe and an observation window, wherein the cavity is barrel-shaped, the cavity lower cover and the cavity upper cover are respectively installed on the upper part and the upper part of the cavity, the feeding flange connecting pipe and the discharging connecting pipe are respectively connected on the two sides of the middle part of the cavity, the feeding flange connecting pipe is fixedly connected with a butt flange of the cracking pipe, the discharging connecting pipe is connected to the refrigerator, the observation window is further arranged on the front part of the cavity, and a coupling agent interface and two vacuum probe interfaces are further arranged on the.
Preferably, the rotating assembly comprises a chassis, connecting rods, partition plates and PCV (positive pressure gradient) pipes, the chassis is fixed on the rotating shaft, the three connecting rods are vertically fixed on the chassis, the partition plates are sleeved on the connecting rods at equal intervals and are 1-30 layers, the partition plates are different layers according to coating products, the PCV pipes are sleeved on the connecting rods between the adjacent partition plates and are used for controlling the distance between the partition plates, and the partition plates are provided with honeycomb holes which are convenient for coating the products.
Compared with the prior art, the beneficial effects of the utility model are that: the structure is compact, the operation is stable, the application range is wide, the coating treatment can be carried out on products with various types and sizes, the coating can be uniform, and the efficiency is high;
the sealing structure is convenient to discharge when opened, and can be tightly closed when closed, so that raw materials are prevented from leaking;
the pyrolysis device is provided with the high-temperature heat insulation sponge, so that heat can be preserved, heat dissipation is reduced, and energy is saved;
the deposition device is provided with a motor, and a product rotates in the coating process, so that the coating uniformity is ensured, and the coating dead angle is reduced.
Drawings
FIG. 1 is a schematic structural view of a coating apparatus.
Fig. 2 is a schematic view of the internal structure of a plating apparatus.
FIG. 3 is a schematic view of a vaporization device of a coating apparatus.
FIG. 4 is a schematic view of an evaporator tube structure of a coating apparatus.
Fig. 5 is a schematic structural diagram of a fastening assembly of the coating device.
FIG. 6 is a schematic view of a pyrolysis apparatus of a coating apparatus.
Fig. 7 is a schematic view of the inner structure of a pyrolysis device of a coating apparatus.
FIG. 8 is a schematic view of a deposition apparatus of a coating apparatus.
FIG. 9 is a schematic view of the internal structure of a deposition device of a coating apparatus.
FIG. 10 is a partial cross-sectional view of a spacer of a plating apparatus.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided to enable those skilled in the art to more easily understand the advantages and features of the present invention, and to make clear and definite definitions of the protection scope of the present invention.
Referring to fig. 1 to 10, an embodiment of the present invention includes:
a film coating device comprises a frame 1, a vaporizing device 2, a pyrolysis device 3 and a deposition device 4, wherein the vaporizing device 2, the pyrolysis device 3 and the deposition device 4 are sequentially connected and arranged in the frame 1, the deposition device 4 is externally connected with a refrigerator, dimer of thermoplastic xylene is heated and vaporized into dimeric paraxylene through the vaporizing device 2, the vaporized dimeric paraxylene is pyrolyzed into paraxylene monomer through the pyrolysis device 3, then the paraxylene monomer is deposited into high polymer parylene in the deposition device 4 and is attached to a product, the frame 1 comprises a frame 11, a cover plate 12, a feeding bin door 13, a first furnace door 14, a second furnace door 15, a file box 16, a control panel 17, shutter plates 18 and a display screen 19, the frame 11 is built by detachable square tubes, the frame 11 is packaged with the cover plate 12, the left side of the frame 11 is provided with the feeding bin door 13, a first furnace door 14 and a second furnace door 15 are arranged on the front side of the frame 11, a file box 16 is arranged on the first furnace door 14, files can be conveniently placed in the file box 16, a control panel 17 is arranged on the upper portion of the front side of the frame 11, shutter plates 18 are arranged on the lower portion of the front side of the frame 11, a display screen 19 is further mounted on the frame 11, an electric control cabinet is arranged in the frame 11, and the control panel 17 and the display screen 19 are electrically connected to the electric control cabinet.
The vaporizing device 2 comprises a tube furnace chassis 21, an evaporating furnace box 22, an evaporating tube 23, a heating sheet 24, a junction box 25, a sealing structure 26 and a connecting flange 27, wherein the tube furnace chassis 21 is arranged in the middle of the frame 11, the evaporating furnace box 22 is installed on the tube furnace chassis 21, the evaporating furnace box 22 is a split openable box body, the evaporating tube 23 is transversely inserted into the evaporating furnace box 22, the evaporating tube 23 is made of a transparent glass tube or a stainless steel tube, the heating sheet 24 is arranged on the evaporating tube 23 at intervals, the heating sheet 24 is connected to the junction box 25 through a wire, the junction box 25 is arranged at the rear part of the evaporating furnace box 22, a feeding port and a discharging port are respectively arranged at two sides of the evaporating tube 23, the sealing structure 26 is installed at the feeding port of the evaporating tube 23, and; the sealing structure 26 comprises an evaporating pipe flange 261, a hinge 262, a flange rear cover 263, a rear cover heat-insulating shell 264 and a fastening component 265, the cover of the evaporating pipe 23 is provided with the evaporating pipe flange 261 at the feed inlet, the rear part of the evaporating pipe flange 261 is movably connected with the flange rear cover 263 through the hinge 262, the rear cover heat-insulating shell 264 is arranged on the outer side surface of the flange rear cover 263, and the front parts of the evaporating pipe flange 261 and the flange rear cover 263 are fixedly connected through the fastening component 265.
The fastening assembly 265 includes a double-lug seat 2651, a fastening plate 2652, a connecting rod 2653, a connecting tube 2654, a horizontal rod 2655 and a knob 2657, the double-lug seat 2651 is fixed to the front portion of the flange 261 of the evaporation tube, the fastening plate 2652 is fixed to the front portion of the rear cover 263 of the flange, the connecting rod 2653 is inserted into the double-lug seat 2651, the connecting rod 2653 is sleeved with the connecting tube 2654, the horizontal rod 2655 is fixed to the middle portion of the connecting tube 2654, an external thread is provided on the horizontal rod 2655, the knob 2657 is sleeved on the horizontal rod 2655, the knob 2657 is provided with two extending swing arms, the fastening plate 2652 is provided with a fastening opening 26520 opposite to the horizontal rod 2655, the horizontal rod 2655 is manually rotated to the fastening opening 26520, the knob 2657 is rotated, and the swing arms of the knob 2657 abut against the fastening plate 2652, so.
The pyrolysis device 3 comprises a box body 31, a pyrolysis tube 32, heating tiles 33, a power supply line box 34, high-temperature heat insulation sponge 35 and a butt flange 36, the pyrolysis tube 32 is transversely inserted in the box body 31, the two semi-arc heating tiles 33 are installed on the outer side surface of the pyrolysis tube 32, the connection guide of the heating tiles 33 is connected to the power supply line box 34, the power supply line box 34 is fixed at the rear end of the box body 31, the temperature heat insulation sponge 35 is filled in the box body 31, the butt flanges 36 are installed at the two ends of the pyrolysis tube 32, the butt flange 36 adopts a CF50 connecting flange, the box body 31 is in a sealed shape, the box body 31 is composed of a lower box body 311, an upper box body 312, a connecting metal plate 313 and a side plate 314, a connecting metal plate 313 is installed on the inner wall of the connection position of the lower box body 311 and the upper box body 312, the upper and the lower box body 312 are fixedly.
The deposition device 4 comprises a rack 41, a deposition chamber 42, a shaft sleeve 43, a rotating shaft 44, a driven pulley 45, a motor 46, a driving pulley 47, a toothed belt 48 and a rotating assembly 49, wherein the deposition chamber 42 is fixed on the rack 41, the shaft sleeve 43 is installed at the bottom of the deposition chamber 42, the rotating shaft 44 is inserted in the shaft sleeve 43 through a bearing, the driven pulley 45 is installed at the bottom of the rotating shaft 44, the motor 46 is further arranged at the side end of the rack 41, the driving pulley 47 is installed on a motor shaft of the motor 46, the driven pulley 45 is connected with the driving pulley 47 through the toothed belt 48, the driving pulley 47 is driven by the motor 46 to rotate, the rotating shaft 44 is driven by the driving pulley 47 to rotate, and the rotating assembly 49; the deposition chamber 42 comprises a chamber 421, a chamber upper cover 422, a chamber lower cover 423, a feeding flange connecting pipe 424, a discharging connecting pipe 425 and an observation window 426, wherein the chamber 421 is barrel-shaped, the chamber lower cover 422 and the chamber upper cover 423 are respectively installed on the upper part and the upper part of the chamber 421, the feeding flange connecting pipe 424 and the discharging connecting pipe 425 are respectively connected to two sides of the middle part of the chamber 421, the feeding flange connecting pipe 424 is fixedly connected with the butt flange 36 of the cracking pipe 32, the discharging connecting pipe 425 is connected to the refrigerator, the observation window 426 is further arranged at the front part of the chamber 421, and a coupling agent interface and two vacuum probe interfaces are further arranged on the chamber 421.
The rotating assembly 49 comprises a base plate 491, connecting rods 492, partition plates 493 and PCV (positive pressure gradient) tubes 494, wherein the base plate 491 is fixed on the rotating shaft 44, the three connecting rods 492 are vertically fixed on the base plate 491, the partition plates 493 are equidistantly sleeved on the connecting rods 492, the partition plates 493 are 1-30 layers, the partition plates 493 are different layers according to coating products, the PCV tubes 494 are sleeved on the connecting rods 492 between the adjacent partition plates 493 and used for controlling the distance between the partition plates 493, honeycomb holes 4930 are formed in the partition plates 493, and coating of the products is facilitated by the honeycomb holes 4930.
The utility model relates to a coating equipment during operation, open feed bin door 13 and seal structure 26 in proper order, put into evaporating pipe 23 thermoplastic, thermoplastic is parylene C or parylene N promptly to the parylene, cover 263 makes it closed with evaporating pipe flange 261 after rotating the flange, manual rotation horizontal rod 2655, horizontal rod 2655 changes to fastening opening 26520 department, rotatory knob 2657, the spiral arm of knob 2657 offsets with mounting plate 2652, reach the effect of fastening, put into the rotary assembly 49 department in deposit room 42 in proper order with the product of waiting to coat a film, open the equipment power, vaporizing device 2 works, heating plate 24 circular telegram heats evaporating pipe 23, heat to 180 ℃ -200 ℃, parylene C or parylene N vaporization obtain two poly-p-xylene, the pyrolysis of two poly-p-xylene of vaporization conveys to device 3, heating tile 33 circular telegram heats 7000 pipe 32, wait to heat to 1000 ℃ -1000 ℃, vaporized dimeric paraxylene is pyrolyzed into paraxylene monomers, the paraxylene monomers are continuously conveyed into a deposition chamber 42 of the deposition device 4, the deposition chamber 42 is externally connected with a refrigerator, the temperature in the deposition chamber 42 is about 35 ℃, the paraxylene monomers are deposited and attached to a product to be coated, a motor 46 drives a rotating assembly 49 to rotate, uniform coating of the product is guaranteed, a cavity upper cover 422 is opened after coating is completed, the product is taken out, and an inner cavity is cleaned.
The utility model relates to a coating equipment, compact structure, operate steadily, application scope is wide, can carry out the coating film to the product of multiple type and size and handle, can the coating film even, efficient.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims (6)

1. A coating equipment is characterized in that: the film coating equipment comprises a frame, a vaporizing device, a pyrolysis device and a deposition device, wherein the vaporizing device, the pyrolysis device and the deposition device are sequentially connected and are arranged in the frame, the deposition device is externally connected with a refrigerating machine, the frame is formed by a frame, a sealing cover plate, a feeding bin door, a first furnace door, a second furnace door, a file box, a control panel, shutter plates and a display screen, the frame is formed by building detachable square tubes, six surfaces of the frame are packaged with the sealing cover plate, the left side of the frame is provided with the feeding bin door, the front side of the frame is provided with the first furnace door and the second furnace door, the first furnace door is provided with the file box, the upper portion of the front side of the frame is provided with the control panel, the lower portion of the front side of the frame is provided with the shutter plates, the display screen is.
2. The plating device according to claim 1, wherein: the vaporization device comprises a tube furnace chassis, an evaporation furnace box, evaporation tubes, heating pieces, a junction box, a sealing structure and a connecting flange, wherein the tube furnace chassis is arranged in the middle of a frame, the evaporation furnace box is arranged on the tube furnace chassis and is a split openable box body, the evaporation tubes are transversely inserted into the evaporation furnace box and are transparent glass tubes or stainless steel tubes, the heating pieces are arranged on the evaporation tubes at intervals and are connected to the junction box through wires, the junction box is arranged at the rear part of the evaporation furnace box, the two sides of each evaporation tube are respectively provided with a feeding port and a discharging port, the feeding ports of the evaporation tubes are provided with the sealing structures, and the discharging ports of the evaporation tubes are provided with the connecting flange; the sealing structure comprises an evaporating pipe flange, a hinge, a flange rear cover, a rear cover heat-insulating shell and a fastening assembly, the evaporating pipe flange is sleeved at a feed inlet of the evaporating pipe, the rear part of the evaporating pipe flange is movably connected with the flange rear cover through the hinge, the rear cover heat-insulating shell is installed on the outer side surface of the flange rear cover, and the front parts of the evaporating pipe flange and the flange rear cover are fixedly connected through the fastening assembly.
3. The plating device according to claim 2, wherein: the fastening assembly comprises a double-lug seat, a fastening plate, a connecting rod, a connecting pipe, a horizontal rod and a knob, the double-lug seat is fixed in the front of the flange of the evaporation tube, the fastening plate is fixed in the front of the rear cover of the flange, the connecting rod is inserted on the double-lug seat, the connecting pipe is sleeved on the connecting rod, the horizontal rod is fixed in the middle of the connecting pipe, external threads are arranged on the horizontal rod, the knob is sleeved on the horizontal rod, two extending spiral arms are arranged on the knob, and a fastening opening opposite to the horizontal rod is arranged on the fastening plate.
4. The plating device according to claim 1, wherein: the pyrolysis device includes box, schizolysis pipe, heating tile, power line box, high temperature thermal-insulated sponge, flange joint, horizontal cartridge has the schizolysis pipe in the box, and the lateral surface is installed two halves arc heating tile outside the schizolysis pipe, and the connection direction of heating tile department is connected to the power line box, and the power line box is fixed in the box rear end, and it has the thermal-insulated sponge of temperature to still fill in the box, and flange joint is installed at schizolysis pipe both ends, flange joint adopts CF50 flange joint, the box is sealed form, and the box comprises lower box, last box, connection panel beating and curb plate, and the connection panel beating is installed to the junction inner wall of lower box and last box, and the horizontal plate of two upper and lower connection panel beating passes through screw fastening connection, and lower box and upper box both sides are packaged.
5. The plating device according to claim 1, wherein: the deposition device comprises a rack, a deposition chamber, a shaft sleeve, a rotating shaft, a driven belt wheel, a motor, a driving belt wheel, a toothed belt and a rotating assembly, wherein the deposition chamber is fixed on the rack, the shaft sleeve is installed at the bottom of the deposition chamber, the rotating shaft is inserted into the shaft sleeve through a bearing, the driven belt wheel is installed at the bottom of the rotating shaft, the motor is further arranged at the side end of the rack, the driving belt wheel is installed on a motor shaft of the motor, the driven belt wheel is connected with the driving belt wheel through the toothed belt, and the rotating assembly is arranged; the sedimentation chamber comprises a cavity, a cavity upper cover, a cavity lower cover, a feeding flange connecting pipe, a discharging connecting pipe and an observation window, wherein the cavity is barrel-shaped, the cavity lower cover and the cavity upper cover are respectively installed on the upper part and the upper part of the cavity, the feeding flange connecting pipe and the discharging connecting pipe are respectively connected on the two sides of the middle part of the cavity, the feeding flange connecting pipe is fixedly connected with a butt flange of the cracking pipe, the discharging connecting pipe is connected to the refrigerator, the observation window is further arranged on the front part of the cavity, and a coupling agent interface and two vacuum probe interfaces are further arranged on the.
6. The plating device according to claim 5, wherein: the rotating assembly comprises a chassis, connecting rods, clapboards and PCV pipes, the chassis is fixed on the rotating shaft, the three connecting rods are vertically fixed on the chassis, the clapboards are sleeved on the connecting rods at equal intervals, the clapboards are 1-30 layers, the PCV pipes are sleeved on the connecting rods between the adjacent clapboards, and honeycomb holes are formed in the clapboards.
CN201920481324.XU 2019-04-10 2019-04-10 Coating equipment Active CN209989462U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920481324.XU CN209989462U (en) 2019-04-10 2019-04-10 Coating equipment

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Application Number Priority Date Filing Date Title
CN201920481324.XU CN209989462U (en) 2019-04-10 2019-04-10 Coating equipment

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Publication Number Publication Date
CN209989462U true CN209989462U (en) 2020-01-24

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Application Number Title Priority Date Filing Date
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114318240A (en) * 2022-01-18 2022-04-12 北京胜泰东方科技有限公司 Device and method for coating parylene film on inner wall of pipeline
CN116586263A (en) * 2023-05-06 2023-08-15 派珂纳米科技(苏州)有限公司 High temperature resistant organic polymer film deposition equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114318240A (en) * 2022-01-18 2022-04-12 北京胜泰东方科技有限公司 Device and method for coating parylene film on inner wall of pipeline
CN114318240B (en) * 2022-01-18 2023-12-15 苏州航东真空技术有限公司 Method for coating film on inner wall of pipeline by poly-p-xylene
CN116586263A (en) * 2023-05-06 2023-08-15 派珂纳米科技(苏州)有限公司 High temperature resistant organic polymer film deposition equipment

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