CN209128527U - A kind of evaporation coating device of electron beam evaporation plating ito film - Google Patents
A kind of evaporation coating device of electron beam evaporation plating ito film Download PDFInfo
- Publication number
- CN209128527U CN209128527U CN201821782720.8U CN201821782720U CN209128527U CN 209128527 U CN209128527 U CN 209128527U CN 201821782720 U CN201821782720 U CN 201821782720U CN 209128527 U CN209128527 U CN 209128527U
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- fixedly installed
- coating device
- electron beam
- ito film
- sliding
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Abstract
The utility model belongs to electron beam evaporation technique field, in particular a kind of evaporation coating device of electron beam evaporation plating ito film, including evaporation coating device ontology, vacuum chamber is offered on the evaporation coating device ontology, substrate holder is equipped in the vacuum chamber, the rotation connection of the top inner wall of the substrate holder and vacuum chamber, mounting base is fixedly installed in the bottom interior wall of the vacuum chamber, mounting groove is offered at the top of the mounting base, supporting plate is movably installed in the mounting groove, the two sides of the supporting plate are fixedly installed with mounting blocks, riffled tube is rotatably equipped on the mounting blocks, the riffled tube internal screw thread is equipped with threaded rod, the top of the threaded rod and low side all extend to outside riffled tube, the bottom end of the threaded rod is fixedly installed with hook.The utility model is easy to operate, practical, facilitates the placement of evaporation material, meanwhile, convenient for clearing up evaporation material support device, improve the quality of ito film.
Description
Technical field
The utility model relates to a kind of vapor deposition of electron beam evaporation technique field more particularly to electron beam evaporation plating ito film dresses
It sets.
Background technique
Electron beam evaporation plating is one kind of physical vapour deposition (PVD), different from traditional vapor deposition mode, and electron beam evaporation plating utilizes electromagnetism
The cooperation of field, which can be realized accurately, bombards evaporation material using high energy electron, is allowed to melt and then be deposited on substrate, electronics
Beam vapor deposition can plate out the high-precision film of high-purity, in the prior art, manufacture ITO mould by evaporation coating device, retrieved, authorized
Notification number is that the patent document of CN203530419U discloses a kind of evaporation coating device of electron beam evaporation plating ito film, is used for LED chip
Manufacture, it is characterised in that: the side of the vacuum chamber is provided with plasma gun, and the plasma gun is as evaporation source, this reality
It is, using plasma gun as evaporation source, to utilize low voltage and high current electron beam evaporation plating ito thin film, simultaneous interpretation with novel advantage
System high voltage low current electron beam evaporation plating compares, and the damage of substrate is greatly lowered, by controlling evaporation condition, such as substrate temperature
Degree, thicknesses of layers and evaporation rate etc. deposit ito thin film, can prepare that mean transmissivity is big, and sheet resistance small film meets
As the photoelectric characteristic of P-type electrode, when evaporation material evaporation passes through ion plasma, by plasma ionization, secondary acquisition energy
Amount, to obtain good big crystal grain, high transmittance ito thin film, and since ito thin film crystal grain is big, improves ito thin film
Hall coefficient, reduce its square resistance.
But in the prior art, evaporation material support device is fixed setting, is not easy to place evaporation material, meanwhile, when
It when needing to clear up, is not easy to dismantle it cleaning, influences the quality of ito film, for this purpose, proposing a kind of electron beam evaporation plating ito film
Evaporation coating device.
Utility model content
Purpose of the utility model is to solve disadvantages existing in the prior art, and a kind of electron beam evaporation plating proposed
The evaporation coating device of ito film.
To achieve the goals above, the utility model adopts the technical scheme that a kind of steaming of electron beam evaporation plating ito film
Plating appts, including evaporation coating device ontology offer vacuum chamber on the evaporation coating device ontology, are equipped with substrate branch in the vacuum chamber
The top inner wall of frame, the substrate holder and vacuum chamber is rotatablely connected, and is fixedly installed with peace in the bottom interior wall of the vacuum chamber
Seat is filled, mounting groove is offered at the top of the mounting base, supporting plate is movably installed in the mounting groove, the two sides of the supporting plate are equal
Mounting blocks are fixedly installed with, riffled tube is rotatably equipped on the mounting blocks, the riffled tube internal screw thread is equipped with screw thread
Bar, the top of the threaded rod and low side all extend to outside riffled tube, and the bottom end of the threaded rod is fixedly installed with hook, institute
It states and is opened up at the top of mounting base there are two sliding groove, two sliding grooves are the sliding in the two sides of mounting groove, the sliding groove
Sliding block is installed, the bottom of the sliding block and the bottom interior wall of sliding groove are slidably connected, are fixedly installed at the top of the sliding block
Fixed block, the fixed block offer through-hole close to the side of supporting plate, and the through-hole is adapted with hook, set in the sliding groove
There is spring, one end of the spring is fixedly connected with the inner wall of sliding groove, and the other end of the spring is fixedly connected with a slide block.
Preferably, rotation hole is offered at the top of the mounting blocks, inner wall and the riffled tube rotation of the rotation hole connect
It connects.
Preferably, the top of the riffled tube extends to outside rotation hole and is fixedly installed with turntable.
Preferably, sliding bar is fixedly installed in the sliding groove, the sliding bar is slidably connected with sliding block, and spring is sliding
The dynamic outside for being set in sliding bar.
Preferably, the side of the fixed block is fixedly installed with handle, and the handle is located at the top of through-hole.
Preferably, the top of the threaded rod is fixedly installed with limited block, and the stiffness factor of the spring is 1N/m-2N/
m。
Compared with prior art, the utility model has the beneficial effects that firstly, the device passes through supporting plate, mounting groove, extension
Hook, through-hole, turntable, rotation hole, riffled tube, threaded rod, fixed block and mounting base match, in use, by ITO Coating Materials
It is placed on supporting plate, supporting plate is placed in mounting groove, make to rotate turntable, driven by rotary disc riffled tube in hook insertion through-hole
It is rotated in rotation hole, riffled tube drives threaded rod to move upwards, and pulls hook to move upwards, since fixed block is fixedly mounted
In mounting base, supporting plate is made to be tightened up fixation；
It is matched by supporting plate, turntable, riffled tube, threaded rod, hook, through-hole, handle, fixed block and sliding groove, when
When needing to carry out supporting plate disassembly cleaning, at this point, reversion turntable, the rotation of driven by rotary disc riffled tube, riffled tube drive screw thread
Bar moves downward, and threaded rod drives hook to move downward, and when hook moves to via bottoms, pull handle, handle drives solid
Determine block to slide in sliding groove, makes through-hole far from hook, supporting plate can be removed；
The utility model is easy to operate, practical, facilitates the placement of evaporation material, meanwhile, convenient for evaporation material branch
Support arrangement is cleared up, and the quality of ito film is improved.
Detailed description of the invention
Fig. 1 faces schematic cross-sectional view for the utility model；
Fig. 2 is the enlarged structure schematic diagram of part A in Fig. 1.
In figure: 1, evaporation coating device ontology；2, vacuum chamber；3, substrate holder；4, mounting base；5, mounting groove；6, supporting plate；7, pacify
Fill block；8, riffled tube；9, threaded rod；10, it links up with；11, sliding groove；12, sliding block；13, fixed block；14, through-hole；15, spring.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-2 is please referred to, the utility model provides a kind of technical solution: a kind of evaporation coating device of electron beam evaporation plating ito film,
Including evaporation coating device ontology 1, vacuum chamber 2 is offered on evaporation coating device ontology 1, is equipped with substrate holder 3, substrate branch in vacuum chamber 2
The top inner wall of frame 3 and vacuum chamber 2 is rotatablely connected, and is fixedly installed with mounting base 4 in the bottom interior wall of vacuum chamber 2, mounting base 4
Top offers mounting groove 5, and supporting plate 6 is movably installed in mounting groove 5, and the two sides of supporting plate 6 are fixedly installed with mounting blocks 7, peace
It is rotatably equipped with riffled tube 8 on dress block 7,8 internal screw thread of riffled tube is equipped with threaded rod 9, and the top of threaded rod 9 and low side are equal
It extends to outside riffled tube 8, the bottom end of threaded rod 9 is fixedly installed with hook 10, and the top of mounting base 4 opens up that there are two sliding grooves
11, two sliding grooves 11 are that sliding block 12 is slidably fitted in the two sides of mounting groove 5, sliding groove 11, the bottom of sliding block 12 with
The bottom interior wall of sliding groove 11 is slidably connected, and the top of sliding block 12 is fixedly installed with fixed block 13, and fixed block 13 is close to supporting plate 6
Side offers through-hole 14, and through-hole 14 is adapted with hook 10, and spring 15, one end of spring 15 and sliding are equipped in sliding groove 11
The inner wall of slot 11 is fixedly connected, and the other end of spring 15 is fixedly connected with sliding block 12；
The top of mounting blocks 7 offers rotation hole, and the inner wall and riffled tube 8 of rotation hole are rotatablely connected, riffled tube 8
Top extends to outside rotation hole and is fixedly installed with turntable, and sliding bar, sliding bar and sliding block 12 are fixedly installed in sliding groove 11
It is slidably connected, and spring 15 is slidably located in the outside of sliding bar, the side of fixed block 13 is fixedly installed with handle, and handle is located at
The top of through-hole 14, the top of threaded rod 9 are fixedly installed with limited block, and the stiffness factor of spring 15 is 1N/m-2N/m, the device
Pass through supporting plate 6, mounting groove 5, hook 10, through-hole 14, turntable, rotation hole, riffled tube 8, threaded rod 9, fixed block 13 and installation
Seat 4 matches, in use, ITO Coating Materials is placed on supporting plate 6, supporting plate 6 is placed in mounting groove 5, inserts hook 10
Enter in through-hole 14, rotate turntable, driven by rotary disc riffled tube 8 rotates in rotation hole, and riffled tube 8 drives threaded rod 9 upward
Movement pulls hook 10 to move upwards, since fixed block 13 is fixedly mounted in mounting base 4, supporting plate 6 is made to be tightened up fixation, leads to
Supporting plate 6, turntable, riffled tube 8, threaded rod 9, hook 10, through-hole 14, handle, fixed block 13 and sliding groove 11 is crossed to match, when
When needing to carry out supporting plate 6 disassembly cleaning, at this point, reversion turntable, driven by rotary disc riffled tube 8 rotate, riffled tube 8 drives spiral shell
Rasp bar 9 moves downward, and threaded rod 9 drives hook 10 to move downward, when hook 10 moves to 14 bottom of through-hole, pull handle,
Handle drives fixed block 13 to slide in sliding groove 11, makes through-hole 14 far from hook 10, can remove supporting plate 6, the utility model
It is easy to operate, it is practical, facilitate the placement of evaporation material, meanwhile, convenient for clearing up evaporation material support device, improve
The quality of ito film.
Working principle: being equipped with plasma pipette tips and coil in evaporation coating device ontology 1, plasma pipette tips, which generate, accelerates electronics
The ITO Coating Materials on supporting plate 6 is bombarded, the kinetic energy of electronics, which is converted into thermal energy, makes ITO Coating Materials heating evaporation, generates in coil
Magnetic fields under, be moved on the substrate on substrate holder 3, formed ito film, in use, ITO Coating Materials is placed
On supporting plate 6, supporting plate 6 is placed in mounting groove 5, makes to rotate turntable, driven by rotary disc internal screw thread in 10 insertion through-hole 14 of hook
Pipe 8 rotates in rotation hole, and riffled tube 8 drives threaded rod 9 to move upwards, and pulls hook 10 to move upwards, due to fixed block
13 are fixedly mounted in mounting base 4, and supporting plate 6 is made to be tightened up fixation, when needing to carry out supporting plate 6 disassembly cleaning, at this point, reversion
Turntable, driven by rotary disc riffled tube 8 rotate, and riffled tube 8 drives threaded rod 9 to move downward, and threaded rod 9 drives hook 10 downwards
Movement, when hook 10 moves to 14 bottom of through-hole, pull handle, handle drives fixed block 13 to slide in sliding groove 11, makes
Through-hole 14 can remove supporting plate 6 far from hook 10, and the utility model is easy to operate, practical, facilitate putting for evaporation material
It sets, meanwhile, convenient for clearing up evaporation material support device, improve the quality of ito film.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (6)
1. a kind of evaporation coating device of electron beam evaporation plating ito film, including evaporation coating device ontology (1), it is characterised in that: the vapor deposition dress
It sets and offers vacuum chamber (2) on ontology (1), be equipped with substrate holder (3) in the vacuum chamber (2), the substrate holder (3) and true
The top inner wall of cavity (2) is rotatablely connected, and is fixedly installed with mounting base (4), the peace in the bottom interior wall of the vacuum chamber (2)
It offers mounting groove (5), is movably installed with supporting plate (6) in the mounting groove (5), the two of the supporting plate (6) at the top of dress seat (4)
Side is fixedly installed with mounting blocks (7), is rotatably equipped with riffled tube (8) on the mounting blocks (7), the riffled tube (8)
Internal screw thread is equipped with threaded rod (9), and the top of the threaded rod (9) and low side all extend to riffled tube (8) outside, the screw thread
The bottom end of bar (9) is fixedly installed with hook (10), is opened up at the top of the mounting base (4) there are two sliding groove (11), two cunnings
Dynamic slot (11) are to be slidably fitted with sliding block (12) in the two sides of mounting groove (5), the sliding groove (11), the sliding block (12)
Bottom and the bottom interior wall of sliding groove (11) be slidably connected, be fixedly installed with fixed block (13) at the top of the sliding block (12),
The fixed block (13) offers through-hole (14) close to the side of supporting plate (6), and the through-hole (14) is adapted with hook (10), institute
It states in sliding groove (11) and is equipped with spring (15), one end of the spring (15) is fixedly connected with the inner wall of sliding groove (11), described
The other end of spring (15) is fixedly connected with sliding block (12).
2. a kind of evaporation coating device of electron beam evaporation plating ito film according to claim 1, it is characterised in that: the mounting blocks
(7) rotation hole is offered at the top of, the inner wall of the rotation hole and riffled tube (8) are rotatablely connected.
3. a kind of evaporation coating device of electron beam evaporation plating ito film according to claim 1, it is characterised in that: the internal screw thread
The top of pipe (8) extends to outside rotation hole and is fixedly installed with turntable.
4. a kind of evaporation coating device of electron beam evaporation plating ito film according to claim 1, it is characterised in that: the sliding groove
(11) it is fixedly installed with sliding bar in, the sliding bar is slidably connected with sliding block (12), and spring (15) is slidably located in sliding
The outside of bar.
5. a kind of evaporation coating device of electron beam evaporation plating ito film according to claim 1, it is characterised in that: the fixed block
(13) side is fixedly installed with handle, and the handle is located at the top of through-hole (14).
6. a kind of evaporation coating device of electron beam evaporation plating ito film according to claim 1, it is characterised in that: the threaded rod
(9) top is fixedly installed with limited block, and the stiffness factor of the spring (15) is 1N/m-2N/m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821782720.8U CN209128527U (en) | 2018-10-31 | 2018-10-31 | A kind of evaporation coating device of electron beam evaporation plating ito film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821782720.8U CN209128527U (en) | 2018-10-31 | 2018-10-31 | A kind of evaporation coating device of electron beam evaporation plating ito film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209128527U true CN209128527U (en) | 2019-07-19 |
Family
ID=67233391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821782720.8U Active CN209128527U (en) | 2018-10-31 | 2018-10-31 | A kind of evaporation coating device of electron beam evaporation plating ito film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209128527U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114717530A (en) * | 2022-04-15 | 2022-07-08 | 北航（四川）西部国际创新港科技有限公司 | Sample rack for EB-PVD experimental workpiece and sample evaporation and transition method thereof |
-
2018
- 2018-10-31 CN CN201821782720.8U patent/CN209128527U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114717530A (en) * | 2022-04-15 | 2022-07-08 | 北航（四川）西部国际创新港科技有限公司 | Sample rack for EB-PVD experimental workpiece and sample evaporation and transition method thereof |
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