CN208917295U - A kind of vertical numerical control vacuum coating equipment - Google Patents
A kind of vertical numerical control vacuum coating equipment Download PDFInfo
- Publication number
- CN208917295U CN208917295U CN201821739780.1U CN201821739780U CN208917295U CN 208917295 U CN208917295 U CN 208917295U CN 201821739780 U CN201821739780 U CN 201821739780U CN 208917295 U CN208917295 U CN 208917295U
- Authority
- CN
- China
- Prior art keywords
- numerical control
- vertical
- vacuum coating
- control vacuum
- coating equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a kind of vertical numerical control vacuum coating equipments, belong to vacuum coating equipment field, a kind of vertical numerical control vacuum coating equipment includes vertical coating chamber and work rest, work rest is located at the inside of vertical coating chamber, work rest includes turntable, at least one thread spindle and several adjustable workpiece placing pieces, and one end of thread spindle is inserted on turntable, and thread spindle is rotatably connected with turntable, there is multistage external screw thread, every section of external screw thread is bolted with an adjustable workpiece placing piece on thread spindle.The work rest of the vertical numerical control vacuum coating equipment of the utility model can be adjusted according to the different size workpiece of placement.
Description
Technical field
The utility model belongs to vacuum coating equipment field more particularly to a kind of vertical numerical control vacuum coating equipment.
Background technique
Vacuum coating is an importance of vacuum application field, it be based on vacuum technique, using physics or
Chemical method, and the series of new techniques such as electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetic control are absorbed, for science
Research and actual production provide a kind of new process of film preparation.Briefly, in a vacuum metal, alloy or compound into
Row evaporation or sputtering, the method for making it solidify and deposit on coated object, referred to as vacuum coating.Numerical control is digital control
Abbreviation, Numeric Control Technology is a kind of method controlled using digital information mechanical movement and process.
It requires for workpiece to be coated to be placed on the indoor workpiece of vertical plated film before vertical numerical control vacuum coating equipment plated film
On frame, the selection of work rest has significant impact to plated film final product quality, and current vertical numerical control vacuum coating equipment mostly uses greatly
Workpiece is hung over into the mode on work rest and carries out plated film, in work rest rotation by way of hanging for some workpiece
It will appear significantly workpiece dancing in the process, influence plated film, and be solid for placing the rack of workpiece on work rest
Fixed setting, cannot be adjusted according to different size workpiece.
Utility model content
In order to overcome the drawbacks of the prior art, the technical problem to be solved by the utility model is to propose a kind of vertical number
Vacuum coating equipment is controlled, work rest can be adjusted according to the different size workpiece of placement.
For this purpose, the utility model uses following technical scheme:
A kind of vertical numerical control vacuum coating equipment provided by the utility model, including vertical coating chamber and work rest, work rest
Positioned at the inside of vertical coating chamber, work rest includes turntable, at least one thread spindle and several adjustable workpiece placing pieces,
One end of thread spindle is inserted on turntable, and thread spindle is rotatably connected with turntable, has multistage external screw thread on thread spindle, and every section outer
Screw thread is bolted with an adjustable workpiece placing piece.
The utility model preferably technical solution is that adjustable workpiece placing piece includes casing, sliding part, mobile clamping
Plate and fixed clamp plate corresponding with mobile grip block, the inside of casing offers the screw thread being threadedly engaged with external screw thread
Hole, sliding part are set on the lateral wall of casing, and one end of mobile grip block is fixed on sliding part, one end of fixed clamp plate
It is fixed on the lateral wall of casing, and is located at the lower section of mobile grip block.
The utility model preferably technical solution is that the lower surface of mobile grip block is fixed with the first protective pad, fixed
The upper surface of grip block is fixed with the second protective pad, and the first protective pad is oppositely arranged with the second protective pad.
The utility model preferably technical solution is that sliding part includes sliding block and spring, and outside of sleeve wall offers cunning
Slot, sliding block are inserted in sliding slot, and slide up and down cooperation with sliding slot, and the bottom end of spring is fixedly connected with the top of sliding block, spring
Top is fixedly connected at the upper wall inside sliding slot.
The utility model preferably technical solution is that the bottom end of fixed clamp plate is fixed with hook.
The utility model preferably technical solution is, further includes baffle ring, and one end of baffle ring is rotatably connected on by pin shaft
On hook, a lipostomous is formed with hook when baffle ring is closed.
The utility model preferably technical solution is that the other end of baffle ring is fixed with protrusion, offered on hook with it is convex
Play the groove of cooperation.
The utility model preferably technical solution is, further includes first motor, and first motor is fixed on vertical coating chamber
The center of bottom, the output shaft of first motor pass through the bottom wall of vertical coating chamber, and the lower surface center with turntable
It is fixedly connected.
The utility model preferably technical solution is, cavity is offered in turntable, and the bottom end of thread spindle passes through turntable, and
It extends in cavity and is fixedly connected with the second motor, the second motor is fixed in cavity.
The utility model preferably technical solution is, further includes pole target, and pole target is vertically arranged in inside vertical coating chamber
Center.
The utility model has the following beneficial effects:
Vertical numerical control vacuum coating equipment provided by the utility model, can basis by being equipped with adjustable workpiece placing piece and hook
Different size workpiece places it on adjustable workpiece placing piece or hook, and passes through external screw thread and adjustable workpiece placing piece
It is threadedly engaged, so that adjustable workpiece placing piece can carry out upper and lower position adjusting appropriate at external screw thread, had both adjusted adjustable workpiece
Placing piece itself the distance between adjusts two neighboring adjustable workpiece placing piece in the indoor relative position of vertical plated film, energy
Appropriate adjustment is carried out according to the specification of product, and adjustable workpiece placing piece can place the workpiece of different size specification, consolidates effect
Fruit is good.It drives work rest to rotate integrally by first motor, and the second motor is combined to drive thread spindle and thereon adjustable workpiece
Placing piece rotation, so that plated film is more uniform, improves final product quality so that adjustable workpiece placing piece had not only revolved but also rotation.Pass through
The setting of first protective pad and the second protective pad carries out buffer protection to the upper and lower ends of workpiece.It is blocked on hook by baffle ring
Opening, avoid workpiece from dropping out, protrusion with groove cooperation improve baffle ring closure when stability, avoid baffle ring in rotary course
It is opened, it is ensured that work is normally carried out.
Detailed description of the invention
Fig. 1 is the schematic view of the front view of the utility model；
Fig. 2 is the schematic cross-sectional view of the adjustable workpiece placing piece of the utility model；
Structural schematic diagram when Fig. 3 is the utility model baffle ring closure；
Fig. 4 is structural schematic diagram when the utility model baffle ring is opened；
Fig. 5 is the schematic cross-sectional view of the utility model turntable.
In figure:
1, vertical coating chamber；2, work rest；21, turntable；22, thread spindle；221, external screw thread；23, adjustable workpiece placing piece；
231, casing；232, sliding part；2321, sliding block；2322, spring；2323, sliding slot；233, mobile grip block；2331, first is anti-
Protection pad；234, fixed clamp plate；2341, the second protective pad；235, threaded hole；3, it links up with；4, baffle ring；5, pin shaft；6, raised；7,
Groove；8, first motor；9, cavity；10, the second motor；11, pole target.
Specific embodiment
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.
As Figure 1-Figure 5, a kind of vertical numerical control vacuum coating equipment provided in the present embodiment, including vertical coating chamber 1,
Work rest 2, first motor 8, the second motor 10 and pole target 11, work rest 2 are located at the inside of vertical coating chamber 1, work rest 2
Including 21,2 thread spindles 22 of turntable and 6 adjustable workpiece placing pieces 23, the bottom end of every thread spindle 22 is inserted in turntable 21
On, and thread spindle 22 is rotatably connected with turntable 22, all have three sections of external screw threads 221 on every thread spindle 22, external screw thread 221 from
It is arranged up to lower equidistant interval, every section of external screw thread 221 is bolted with an adjustable workpiece placing piece 23, adjustable workpiece placing piece 23
With being threadedly engaged for external screw thread 221 so that adjustable workpiece placing piece 23 can carry out upper and lower position tune appropriate at external screw thread 221
Section had not only adjusted relative position of the adjustable workpiece placing piece 23 in vertical coating chamber 1 itself, but also the two neighboring adjustable workpiece of adjustment
The distance between placing piece 23 can carry out appropriate adjustment according to the specification of product, for the work of some inconvenient hanging placing pieces 23
Part can be placed on adjustable workpiece placing piece 23, and adjustable workpiece placing piece 23 can place the workpiece of different size specification, surely
Admittedly working well, first motor 8 is fixed on the center of vertical 1 bottom of coating chamber, and the output shaft at 8 top of first motor passes through
The bottom wall of vertical coating chamber 1, and being fixedly connected with the lower surface center of turntable 21, offers cavity 9 in turntable 21, and every
The bottom end of thread spindle 22 both passes through turntable 21, and extends in cavity 9 and be fixedly connected with the second motor 10, and the second motor 10 is fixed
In cavity 9, the model of first motor 8 and the second motor 10 is HG-SR202, and pole target 11 is vertically arranged in vertical coating chamber 1
Internal center, pole target 11 establish circular magnetic field around, provide condition for subsequent ionization and sputter coating, pass through first
Motor 8 drives work rest 2 to rotate integrally, and the second motor 10 is combined to drive thread spindle 22 and the thereon adjustable rotation of workpiece placing piece 23
Turn, so that adjustable workpiece placing piece 23 had not only revolved but also rotation, so that plated film is more uniform, improves final product quality.
For the ease of adjusting adjustable workpiece placing piece 23 and fixed workpiece, further, adjustable workpiece placing piece 23 includes
Casing 231, sliding part 232, mobile grip block 233 and fixed clamp plate 234 corresponding with mobile grip block 233, casing
231 inside offers the threaded hole 235 being threadedly engaged with external screw thread 221, is equipped at left and right sides of the lateral wall of casing 231
The inner end of sliding part 232, mobile grip block 233 is fixed on sliding part 232, and the inner end of fixed clamp plate 234 is fixed on casing
On 231 lateral wall, and it is located at the lower section of mobile grip block 233, sliding part 232 makes mobile grip block 233 can up and down adjustment
Its position, the position of mobile grip block 233 is adjusted according to the workpiece of different size, is then passed through mobile grip block 233 and is fixed
Grip block 234 grips workpiece.
For the not disfiguring workpiece in clamping process, further, it is anti-that the lower surface of mobile grip block 233 is fixed with first
Protection pad 2331, the upper surface of fixed clamp plate 234 are fixed with the second protective pad 2341, the first protective pad 2331 and the second protective pad
2341 are oppositely arranged, and by the setting of the first protective pad 2331 and the second protective pad 2341, delay to the upper and lower ends of workpiece
Punching protection.
In order to enable mobile grip block 233 can slide up and down, and there is good clamping effect, further, sliding part
232 include sliding block 2321 and spring 2322, and 231 lateral wall of casing offers sliding slot 2323, and sliding block 2321 is inserted in sliding slot 2323,
And cooperation is slided up and down with sliding slot 2323, the bottom end of spring 2322 is fixedly connected with the top of sliding block 2321, the top of spring 2322
End is fixedly connected at the upper wall inside sliding slot 2323, when needing clamping workpiece, is up pushed mobile grip block 233, is driven
The upward sliding in sliding slot 2323 of sliding block 2321, spring 2322 are shunk, and workpiece is placed on mobile grip block 233 and fixed clamp
Between plate 234, after workpiece is placed, mobile grip block 233 is unclamped, spring 2322 extends, and acts in the elastic force of spring 2322
Under, band 2321 slide downward of movable slider, and then drive mobile grip block 233 to move downward and clamped with the cooperation of fixed clamp plate 234
Workpiece can clamp workpiece of different specifications and sizes, and good clamping effect.
In order to which to needing the workpiece for hanging placement to place, further, the bottom end of fixed clamp plate 234 is fixed with extension
Hook 3 can hang over the workpiece that some needs are hung and place on hook 3.
In order to avoid during work rest 2 rotates, workpiece drops out hook 3, further includes baffle ring 4, baffle ring further
4 one end is rotatably connected on hook 3 by pin shaft 5, is formed a lipostomous with hook 3 when baffle ring 4 is closed, is passed through baffle ring 4
The opening on hook 3 is blocked, workpiece is avoided to drop out.
In order to improve the stability of the closure of baffle ring 4, further, the other end of baffle ring 4 is fixed with protrusion 6, opens on hook 3
Equipped with the groove 7 with 6 cooperation of protrusion, when baffle ring 4 is closed, protrusion 6 is sticked into groove 7, improves stabilization when baffle ring 4 is closed
Property, avoid baffle ring 4 in rotary course from being opened, it is ensured that work is normally carried out.
The content being not described in detail in this specification belongs to the prior art well known to professional and technical personnel in the field.This reality
It is described with reference to the preferred embodiments with novel, those skilled in the art know, in the spirit for not departing from the utility model
In the case where range, various changes or equivalence replacement can be carried out to these features and embodiment.The utility model is not by this
The limitation of specific embodiment disclosed in place, other embodiments fallen into claims hereof belong to the utility model
The range of protection.
Claims (10)
1. a kind of vertical numerical control vacuum coating equipment, including vertical coating chamber (1) and work rest (2), the work rest (2) are located at institute
State the inside of vertical coating chamber (1), it is characterised in that:
The work rest (2) includes turntable (21), at least one thread spindle (22) and several adjustable workpiece placing pieces
(23)；
One end of the thread spindle (22) is inserted on the turntable (21), and the thread spindle (22) can turn with the turntable (21)
Dynamic connection；
There are multistage external screw thread (221) on the thread spindle (22)；
Every section of external screw thread (221) is bolted with the adjustable workpiece placing piece (23).
2. vertical numerical control vacuum coating equipment according to claim 1, it is characterised in that:
The adjustable workpiece placing piece (23) include casing (231), sliding part (232), mobile grip block (233) and with institute
State the corresponding fixed clamp plate (234) of mobile grip block (233)；
The inside of described sleeve pipe (231) offers the threaded hole (235) being threadedly engaged with the external screw thread (221)；
The sliding part (232) is set on the lateral wall of described sleeve pipe (231)；
One end of the mobile grip block (233) is fixed on the sliding part (232)；
One end of the fixed clamp plate (234) is fixed on the lateral wall of described sleeve pipe (231), and is located at the mobile clamping
The lower section of plate (233).
3. vertical numerical control vacuum coating equipment according to claim 2, it is characterised in that:
The lower surface of the mobile grip block (233) is fixed with the first protective pad (2331)；
The upper surface of the fixed clamp plate (234) is fixed with the second protective pad (2341)；
First protective pad (2331) is oppositely arranged with second protective pad (2341).
4. vertical numerical control vacuum coating equipment according to claim 2, it is characterised in that:
The sliding part (232) includes sliding block (2321) and spring (2322)；
Described sleeve pipe (231) lateral wall offers sliding slot (2323)；
The sliding block (2321) is inserted in the sliding slot (2323), and slides up and down cooperation with the sliding slot (2323)；
The bottom end of the spring (2322) is fixedly connected with the top of the sliding block (2321)；
The top of the spring (2322) is fixedly connected at the internal upper wall of the sliding slot (2323).
5. vertical numerical control vacuum coating equipment according to claim 2, it is characterised in that:
The bottom end of the fixed clamp plate (234) is fixed with hook (3).
6. vertical numerical control vacuum coating equipment according to claim 5, it is characterised in that:
It further include baffle ring (4)；
One end of the baffle ring (4) is rotatably connected on the hook (3) by pin shaft (5), when the baffle ring (4) closure and institute
It states hook (3) and forms a lipostomous.
7. vertical numerical control vacuum coating equipment according to claim 6, it is characterised in that:
The other end of the baffle ring (4) is fixed with raised (6)；
The groove (7) with raised (6) cooperation is offered on the hook (3).
8. vertical numerical control vacuum coating equipment according to claim 1, it is characterised in that:
It further include first motor (8)；
The first motor (8) is fixed on the center of vertical coating chamber (1) bottom；
The output shaft of the first motor (8) passes through the bottom wall of the vertical coating chamber (1), and the following table with the turntable (21)
Face center is fixedly connected.
9. vertical numerical control vacuum coating equipment according to claim 1, it is characterised in that:
Cavity (9) are offered in the turntable (21)；
The bottom end of the thread spindle (22) passes through the turntable (21), and extends in the cavity (9) and be fixedly connected with second
Motor (10), second motor (10) are fixed in the cavity (9).
10. vertical numerical control vacuum coating equipment according to claim 1, it is characterised in that:
It further include pole target (11)；
The pole target (11) is vertically arranged in the internal center of the vertical coating chamber (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821739780.1U CN208917295U (en) | 2018-10-25 | 2018-10-25 | A kind of vertical numerical control vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821739780.1U CN208917295U (en) | 2018-10-25 | 2018-10-25 | A kind of vertical numerical control vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208917295U true CN208917295U (en) | 2019-05-31 |
Family
ID=66710630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821739780.1U Active CN208917295U (en) | 2018-10-25 | 2018-10-25 | A kind of vertical numerical control vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208917295U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114381706A (en) * | 2022-01-19 | 2022-04-22 | 湖南轩圣模型制造有限公司 | Surface vacuum coating equipment for double-sided plastic product |
| CN114592177A (en) * | 2022-01-26 | 2022-06-07 | 西南大学 | Design of PVD (physical vapor deposition) uniform coating tool for steel collar |
-
2018
- 2018-10-25 CN CN201821739780.1U patent/CN208917295U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114381706A (en) * | 2022-01-19 | 2022-04-22 | 湖南轩圣模型制造有限公司 | Surface vacuum coating equipment for double-sided plastic product |
| CN114381706B (en) * | 2022-01-19 | 2023-11-03 | 湖南轩圣模型制造有限公司 | Surface vacuum coating equipment for double-sided plastic products |
| CN114592177A (en) * | 2022-01-26 | 2022-06-07 | 西南大学 | Design of PVD (physical vapor deposition) uniform coating tool for steel collar |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208917295U (en) | A kind of vertical numerical control vacuum coating equipment | |
| CN105543792B (en) | Magnetic control sputtering device and magnetically controlled sputter method | |
| CN104988464B (en) | A kind of uniform magnetron sputtering deposition method of axial-symmetric shell part inner surface and its device | |
| CN208147068U (en) | A kind of self-tapping equipment | |
| CN104112640B (en) | A kind of magnetron sputtering apparatus and magnetically controlled sputter method | |
| CN206706198U (en) | Magnetic control sputtering device and magnetron sputtering apparatus | |
| CN206157219U (en) | Rotating cathode with adjustable target surface magnetic field intensity | |
| CN204211774U (en) | A kind of high-frequency quenching equipment for diaphragm spring | |
| CN110527966A (en) | A kind of horizontal magnetron sputtering apparatus for long tube plated film | |
| CN209194040U (en) | A kind of PVD vacuum arc plating film device | |
| CN204251689U (en) | A kind of vacuum plating unit | |
| CN206799730U (en) | A kind of automatic pivoted frame of coating machine | |
| CN206887217U (en) | Transmission structure and Pvd equipment | |
| CN209128527U (en) | A kind of evaporation coating device of electron beam evaporation plating ito film | |
| CN211876607U (en) | Drying device of titanium alloy powder | |
| CN109371365A (en) | The Zr-Cu-Al-Ti glassy metal film of controllable reflectivity | |
| CN101734863B (en) | Ternary manganese nitride Mn3CuN thin film with trans-perovskite structure | |
| CN205466798U (en) | Frock is cut in segmentation of squaring machine polycrystal | |
| CN212713734U (en) | Semiconductor refrigeration piece target cooling device | |
| CN210972989U (en) | Coating film feed divider of cell-phone shell | |
| CN109825813A (en) | A kind of vacuum magnetic control rotary double-face coating clamp | |
| CN204369970U (en) | One can magnetron sputtered vacuum deposition system | |
| CN208129004U (en) | A kind of agricultural production vegetable seedling culturing cabinet | |
| CN107150215B (en) | Accurate positioning device for storage battery large cover assembling manipulator taking and placing positions and application method thereof | |
| CN209722288U (en) | A kind of novel three targets magnetic sputtering film plating machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220107 Address after: 362000 Jiumu Industrial Park, Nanan Economic Development Zone, Quanzhou City, Fujian Province Patentee after: JOMOO KITCHEN & BATH Co.,Ltd. Address before: 361021 401-4, No. 598, Guankou South Road, Jimei District, Xiamen City, Fujian Province Patentee before: JINSHAN LAIBAO (XIAMEN) TECHNOLOGY Co.,Ltd. |