CN219309412U

CN219309412U - Sorter is used in monocrystalline silicon production

Info

Publication number: CN219309412U
Application number: CN202320682476.2U
Authority: CN
Inventors: 张硕; 张建; 张美军
Original assignee: Inner Mongolia Saibaolun Technology Co ltd
Current assignee: Inner Mongolia Saibaolun Technology Co ltd
Priority date: 2023-03-31
Filing date: 2023-03-31
Publication date: 2023-07-07
Anticipated expiration: 2033-03-31

Abstract

The utility model relates to the technical field of monocrystalline silicon production, and discloses a sorter for producing monocrystalline silicon, which comprises an operation table, wherein a supporting rod is fixedly arranged at the middle end of the back surface of the operation table, an X-ray generator is fixedly arranged at one end of the bottom surface of the supporting rod, a display is fixedly arranged at one end of the top surface of the operation table, which is close to the supporting rod, a controller is fixedly arranged at the other end of the top surface of the operation table, which is close to the supporting rod, and the controller is respectively and electrically connected with the X-ray generator and the display, a rotating shaft is arranged at one side of the middle end of the top surface of the operation table, and a rotating frame is arranged on the top surface of the rotating shaft. This sorter is used in monocrystalline silicon production is overlooked for cross structure through the swivel mount and constitutes, and four are placed a section of thick bamboo in swivel mount edge mount, and then can rotate along with the swivel mount to make and place the structure and can place a plurality of silicon chips that wait to detect simultaneously, the sorter is when detecting the silicon chip, and the inspector can take out the silicon chip after detecting and put into the silicon chip that does not detect in placing a section of thick bamboo, and then has improved silicon chip detection efficiency.

Description

Sorter is used in monocrystalline silicon production

Technical Field

The utility model relates to the technical field of monocrystalline silicon production, in particular to a sorter for monocrystalline silicon production.

Background

Monocrystalline silicon wafer: a single crystal of silicon is a crystal having a substantially complete lattice structure. Different directions have different properties and are good semiconductor materials. The purity requirement reaches 99.9999% or above. Used for manufacturing semiconductor devices, solar cells, and the like. Is prepared by pulling high-purity polysilicon in a single crystal furnace.

Therefore, chinese patent No. CN 217385191U discloses a sorter for producing monocrystalline silicon, in which a light-shielding sealing cover is lifted to take off a magnetic silicon wafer pressing block, a silicon wafer placing plate is inclined too high, then one end of a monocrystalline silicon wafer is obliquely inserted into an internal groove of a U-shaped baffle, then the monocrystalline silicon wafer is placed into a ring groove in the silicon wafer placing plate, and then the magnetic silicon wafer pressing block is placed at the upper end of a limiting plate, because the magnetic silicon wafer pressing block has magnetic attraction property, the magnetic silicon wafer pressing block can be magnetically connected to the upper end of the limiting plate, then a height adjusting motor drives the angle of the silicon wafer placing plate to adjust, so that the included angle of the silicon wafer placing plate is adjusted to be horizontal, and if the monocrystalline silicon wafer inside the silicon wafer placing plate is to be taken out, the height adjusting motor drives the lifting silicon wafer placing plate, so that the monocrystalline silicon wafer is easier to be taken out.

The device refers to a method of combining X-rays with a control system disclosed in patent CN 206710342U for detecting silicon wafers, but the sorter is used for placing single silicon wafers into a placing plate, taking out the detected silicon wafers after detection, placing the silicon wafers to be detected into the placing plate again, and detecting the silicon wafers again through the X-rays, wherein when the number of the silicon wafers to be detected is large, the structure of the device for placing the silicon wafers can only place the single silicon wafers for detection once, so that the silicon wafer detection efficiency is reduced.

Disclosure of Invention

(one) solving the technical problems

Aiming at the defects of the prior art, the utility model provides a sorter for producing monocrystalline silicon, which has the advantages of improving the silicon wafer detection efficiency and the like and solves the technical problems.

(II) technical scheme

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a sorter is used in monocrystalline silicon production, includes the operation panel, operation panel back middle-end fixed mounting has the bracing piece, bracing piece bottom surface one end fixed mounting has X ray generator, operation panel top surface is close to bracing piece one side one end fixed mounting has the display, operation panel is close to bracing piece one side other end fixed mounting has the controller, and the controller respectively with X ray generator and display electric connection, operation panel top surface middle-end one side is equipped with the pivot, the pivot top surface is equipped with the swivel mount, the swivel mount edge is equipped with the go-between, be equipped with the section of thick bamboo of placing in the go-between, the guide slot has been seted up to the section of thick bamboo inner wall, be equipped with the placing plate in the guide slot, the placing plate bottom surface is equipped with magnet, operation panel front middle-end top is equipped with the horizontal pole, operation panel one end top surface is kept away from to the horizontal pole top surface is equipped with the electro-magnet.

As the preferable technical scheme of the utility model, one side, far away from the supporting rod, of the middle end of the top surface of the operating platform is rotatably connected with a rotating shaft, the middle ends of the top surface of the rotating shaft and the bottom surface of the rotating frame are fixedly arranged, the rotating frame is in a cross-shaped structure in overlooking, and four connecting rings are fixedly arranged at the edge of the rotating frame.

As the preferable technical scheme of the utility model, the inner wall of the connecting ring is fixedly provided with the placing cylinder, the inner wall of the placing cylinder is equidistantly provided with a plurality of guide grooves, the placing plate is in sliding connection with the placing cylinder through the guide grooves, and the middle end of the bottom surface of the placing plate is fixedly provided with a magnet.

As the preferable technical scheme of the utility model, the bottom surface of the placing cylinder is fixedly provided with an annular limiting plate, the top surface of the placing cylinder is fixedly provided with an annular limiting plate II, and the inner diameter of the annular limiting plate II is larger than that of the annular limiting plate.

As a preferable technical scheme of the utility model, when the placing cylinder is positioned right below the X-ray generator, the top surface of the placing cylinder is completely attached to the output end of the X-ray generator.

As the preferable technical scheme of the utility model, the top end of the middle end of the front surface of the operating platform is fixedly provided with the cross rod, the top surface of the cross rod is far away from the operating platform and is fixedly provided with the electromagnet, the magnetic pole of the electromagnet is the same as the magnetic pole of the adjacent surface of the magnet, and the electromagnet is electrically connected with the controller.

Compared with the prior art, the utility model provides a sorter for producing monocrystalline silicon, which has the following beneficial effects:

1. according to the utility model, the rotating frame is formed by a cross structure in overlooking, and the four placing cylinders are arranged at the edge of the rotating frame, so that the placing structure can simultaneously place a plurality of silicon wafers to be detected, and when the silicon wafers are detected by the sorter, a detector can take out the detected silicon wafers and place the undetected silicon wafers in the placing cylinders, thereby improving the silicon wafer detection efficiency.

2. According to the utility model, the rotary frame is rotatably connected with the top surface of the operating platform, the placing barrel is arranged on the rotary frame, the placing plate is slidably connected with the placing barrel, the magnet is arranged on the bottom surface of the placing plate, the cross rod is arranged at the middle end of the front surface of the operating platform, the electromagnet is arranged on the top surface of the cross rod, the magnetic pole of the electromagnet is the same as that of the adjacent surface of the magnet, and the placing plate is pushed to slide in the placing barrel, so that the detecting personnel can conveniently take and place the silicon wafer.

Drawings

FIG. 1 is a schematic perspective view of the structure of the present utility model;

FIG. 2 is a schematic side cross-sectional view of the structure of the present utility model;

FIG. 3 is an enlarged partial schematic view of A in FIG. 2, which is a structural view of the present utility model;

fig. 4 is an enlarged partial schematic view of B in fig. 2, which is a structural view of the present utility model.

Wherein: 1. an operation table; 2. a support rod; 3. an X-ray generator; 4. a rotating shaft; 5. a rotating frame; 6. placing a cylinder; 7. a guide groove; 8. placing a plate; 9. a magnet; 10. a cross bar; 11. an electromagnet; 601. an annular limiting plate; 602. and the annular limiting plate II.

Detailed Description

Embodiments of the present utility model are described in further detail below with reference to the accompanying drawings and examples. The following examples are illustrative of the utility model but are not intended to limit the scope of the utility model.

In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "head," "tail," and the like are used as an orientation or positional relationship based on that shown in the drawings, merely to facilitate description of the utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the utility model. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Referring to fig. 1-4, a sorter for producing monocrystalline silicon comprises an operation table 1, a supporting rod 2 is fixedly arranged at the middle end of the back surface of the operation table 1, an X-ray generator 3 is fixedly arranged at one end of the bottom surface of the supporting rod 2, a display is fixedly arranged at one end of the top surface of the operation table 1, which is close to one side of the supporting rod 2, a controller is fixedly arranged at the other end of the top surface of the operation table 1, which is close to one side of the supporting rod 2, the controller is respectively electrically connected with the X-ray generator 3 and the display, a rotating shaft 4 is arranged at one side of the top surface of the operation table 1, a rotating frame 5 is arranged at the top surface of the rotating shaft 4, a connecting ring is arranged at the edge of the rotating frame 5, a placing cylinder 6 is arranged in the connecting ring, a guide groove 7 is formed in the inner wall of the placing cylinder 6, a placing plate 8 is arranged in the guide groove 7, a magnet 9 is arranged at the bottom surface of the placing plate 8, a cross rod 10 is arranged at the top end of the front surface of the operation table 1, an electromagnet 11 is arranged at the top surface of one end of the cross rod 10, the top surface of the operation table 1 is provided with an electromagnet 11, the X-ray generator 3 is arranged at the top surface of the other end of the operation table 1, the controller is arranged at the top of the operation table 2, the X-ray generator 3 is arranged, the controller is arranged at the top of the operation table 1, the controller, the X-ray generator 3 is detected in the placing cylinder 6, and the silicon chip is fed back by the controller through the controller, and detected by the display.

Further, a rotating shaft 4 is rotatably connected to one side, far away from the supporting rod 2, of the middle end of the top surface of the operating platform 1, the middle ends of the top surface of the rotating shaft 4 and the bottom surface of the rotating frame 5 are fixedly arranged, the rotating frame 5 is formed by a cross-shaped structure in overlooking, four connecting rings are fixedly arranged at the edge of the rotating frame 5, a placing cylinder 6 is fixedly arranged on the inner wall of the connecting ring, a plurality of guide grooves 7 are formed in the inner wall of the placing cylinder 6 at equal intervals, a placing plate 8 is in sliding connection with the placing cylinder 6 through the guide grooves 7, a magnet 9 is fixedly arranged at the middle end of the bottom surface of the placing plate 8, a cross rod 10 is fixedly arranged at the top end of the middle end of the front surface of the operating platform 1, an electromagnet 11 is fixedly arranged on the top surface of the cross rod 10, far away from the operating platform 1, the magnetic pole of the electromagnet 11 is the same as the magnetic pole of the adjacent surface of the magnet 9, the electromagnet 11 is electrically connected with a controller, and in the process of detecting silicon wafers, when the placing cylinder 6 is positioned under the X-ray generator 3, the other placing cylinder 6 far away from the placing cylinder 6 is positioned right above the electromagnet 11, the magnetic poles of the electromagnet 11 are the same as the magnetic poles of the surface of the magnet 9 adjacent to the electromagnet, and the principle of homopolar repulsion is utilized, at the moment, the magnet 9 receives repulsive force to push the placing plate 8 to slide to the top end of the inner wall of the placing cylinder 6 in the guide groove 7, so that a detecting person places a silicon wafer on the placing plate 8 or takes out the detected silicon wafer on the placing plate 8, when the silicon wafer is detected by the single crystal silicon production sorter, the detecting person can place or take the silicon wafer, along with the rotation of the rotating frame 5 by the detecting person in a single direction, when the placing cylinder 6 rotates to the position below the X-ray generator 3, the placing cylinder 6 with the detected silicon wafer rotates from the position below the X-ray generator 3, and along with the rotation of the placing cylinder 6 to the position right above the electromagnet 11, the detecting person takes out the detected silicon wafer, and the undetected silicon chips are put in, so that a structure for placing the silicon chips can circularly place a plurality of silicon chips, and when the silicon chips are detected, a detector can take out the detected silicon chips from the placing cylinder, thereby improving the detection efficiency of the silicon chips.

Further, the bottom surface of the placing cylinder 6 is fixedly provided with an annular limiting plate 601, the top surface of the placing cylinder 6 is fixedly provided with an annular limiting plate II 602, the inner diameter of the annular limiting plate II 602 is larger than that of the annular limiting plate 601, the annular limiting plate 601 is fixedly arranged on the bottom surface of the placing cylinder 6, the top surface of the placing cylinder 6 is fixedly provided with the annular limiting plate II 602, the placing plate 8 is limited, and the placing plate 8 is prevented from sliding out of the placing cylinder 6.

Further, when placing a section of thick bamboo 6 and being located X-ray generator 3 directly under, place a section of thick bamboo 6 top surface and the complete laminating of X-ray generator 3 output, through placing a section of thick bamboo 6 top surface and the complete laminating of X-ray generator 3 output, and then prevent that outside light from getting into and placing in the section of thick bamboo 6, influence testing result.

When the silicon wafer sorting device is used, the placing frame 5 is rotated to the position right above the electromagnet 11, the controller is started, the electromagnet 11 starts to generate magnetism, the magnet 9 is subjected to the force of homopolar repulsion, the placing plate 8 is pushed to slide towards the top end of the inner wall of the placing frame 6 in the guide groove 7, when the placing plate 8 slides to the top end of the inner wall of the placing frame 6, a silicon wafer to be detected is placed on the placing plate 8, the placing frame 5 is rotated, when the placing frame 6 is rotated to the electromagnet 11, the steps are repeated until the placing frame 6 of a first silicon wafer loading is rotated to the position right below the X-ray generator 3, the silicon wafer is detected through X-rays, a display is observed, after the silicon wafer detection is completed, the placing frame 5 is rotated to the position right below the X-ray generator 3, the silicon wafer is detected, after the detection is completed, the step is repeated until the placing frame 6 of the first silicon wafer loading is rotated to the electromagnet 11, the detected by a detector, the silicon wafer is placed in the silicon wafer not detected, after the X-ray generator 3 is completely detected, the silicon wafer is detected again, and the silicon wafer can be sorted out, and the silicon wafer can be detected in batches after the silicon wafer is placed.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a sorter is used in monocrystalline silicon production, includes operation panel (1), operation panel (1) back middle-end fixed mounting has bracing piece (2), bracing piece (2) bottom surface one end fixed mounting has X ray generator (3), operation panel (1) top surface is close to bracing piece (2) one side one end fixed mounting has the display, operation panel (1) is close to bracing piece (2) one side other end fixed mounting has the controller, and the controller respectively with X ray generator (3) and display electric connection, its characterized in that: the utility model discloses a rotary table, including operation panel (1), rotary frame (5), link, guide slot (7) have been seted up to section of thick bamboo (6) inner wall to be equipped with in operation panel (1), operation panel (1) middle-end one side is equipped with pivot (4), pivot (4) top surface is equipped with swivel mount (5), swivel mount (5) edge is equipped with the go-between, be equipped with in the go-between and place section of thick bamboo (6), be equipped with in guide slot (7) and place board (8), place board (8) bottom surface and be equipped with magnet (9), operation panel (1) openly middle-end top is equipped with horizontal pole (10), operation panel (1) one end top surface is kept away from to horizontal pole (10) top surface is equipped with electro-magnet (11).

2. The sorter for producing single crystal silicon according to claim 1, characterized in that: the rotary table is characterized in that a rotary shaft (4) is rotatably connected to one side, far away from the support rod (2), of the middle end of the top surface of the operating table (1), the middle ends of the top surface of the rotary shaft (4) and the bottom surface of the rotary frame (5) are fixedly arranged, the rotary frame (5) is formed by a cross-shaped structure in overlooking mode, and four connecting rings are fixedly arranged at the edge of the rotary frame (5).

3. The sorter for producing single crystal silicon according to claim 1, characterized in that: the inner wall of the connecting ring is fixedly provided with a placement barrel (6), a plurality of guide grooves (7) are formed in the inner wall of the placement barrel (6) at equal intervals, the placement plate (8) is in sliding connection with the placement barrel (6) through the guide grooves (7), and a magnet (9) is fixedly arranged in the middle of the bottom surface of the placement plate (8).

4. The sorter for producing single crystal silicon according to claim 1, characterized in that: the bottom surface of the placing cylinder (6) is fixedly provided with an annular limiting plate (601), the top surface of the placing cylinder (6) is fixedly provided with an annular limiting plate II (602), and the inner diameter of the annular limiting plate II (602) is larger than the inner diameter of the annular limiting plate (601).

5. The sorter for producing single crystal silicon according to claim 1, characterized in that: when the placing cylinder (6) is positioned right below the X-ray generator (3), the top surface of the placing cylinder (6) is completely attached to the output end of the X-ray generator (3).

6. The sorter for producing single crystal silicon according to claim 1, characterized in that: the front middle-end top end of the operating platform (1) is fixedly provided with a cross rod (10), the top surface of the cross rod (10) is far away from the operating platform (1) and is fixedly provided with an electromagnet (11), the magnetic pole of the electromagnet (11) is the same as the magnetic pole of the adjacent surface of the magnet (9), and the electromagnet (11) is electrically connected with the controller.