CN217385191U

CN217385191U - Sorter is used in monocrystalline silicon production

Info

Publication number: CN217385191U
Application number: CN202220973901.9U
Authority: CN
Inventors: 李瑞鹏; 武瑞; 武治军; 曹政民; 曹进根; 万遥; 陈春娟; 贾鹏程; 王大伟; 贾海东
Original assignee: Wuxi Zhonghuan Application Material Co ltd
Current assignee: Wuxi Zhonghuan Application Material Co ltd
Priority date: 2022-04-26
Filing date: 2022-04-26
Publication date: 2022-09-06
Anticipated expiration: 2032-04-26

Abstract

The utility model discloses a sorter is used in monocrystalline silicon production relates to monocrystalline silicon production technical field, places the structure for solving current sorter silicon wafer for monocrystalline silicon production, because place and take out inconveniently, causes to place and takes out the difficulty and easily cause the problem of fish tail risk to monocrystalline silicon piece. Including optical analysis appearance, optical analysis appearance's upper end is provided with the lens storehouse, the upper end in lens storehouse is provided with the silicon chip storehouse, the top in silicon chip storehouse is provided with the sealed lid of shading, the upper end of the sealed lid of shading is provided with the handle, and the board is placed to the silicon chip, and it sets up the inside in lens storehouse, altitude mixture control motor, its setting are keeping away from the silicon chip is placed the one end of board and lens storehouse inner wall pivot junction, the inside that the board was placed to the silicon chip is provided with the silicon chip inspection hole, and the limiting plate, its setting is in the top of altitude mixture control motor is inboard.

Description

Sorter is used in monocrystalline silicon production

Technical Field

The utility model relates to a monocrystalline silicon production technical field specifically is a sorter is used in monocrystalline silicon production.

Background

Monocrystalline silicon piece: a single crystal of silicon is a crystal having a substantially complete lattice structure. Different directions have different properties and are good semiconducting materials. The purity requirement reaches 99.9999% or above. For the manufacture of semiconductor devices, solar cells, and the like. The polycrystalline silicon is pulled in a single crystal furnace.

In a conventional inspection apparatus for a single crystal silicon wafer, as described in application No.: 201720531819. X; the name is as follows: a single crystal silicon wafer detector. The device includes: the X-ray detector comprises a workbench, an X-ray generator and an X-ray optical shutter, wherein the workbench is horizontally arranged, the X-ray generator is fixedly arranged at the left end of the upper end surface of the workbench, and the X-ray optical shutter is fixedly arranged on the right end surface of the X-ray generator. The upper end surface of the positioning shaft is fixedly connected with a scintillation detector pipe clamp, and the scintillation detector is arranged in a clamping part of the scintillation detector pipe clamp. The utility model has the advantages of no damage to the monocrystalline silicon wafer sample, convenient use, simple structure, high orientation precision and the like.

However, the silicon wafer placing structure of the sorter for monocrystalline silicon production has the problems that the placing and taking are difficult and the monocrystalline silicon wafer is easily scratched due to the inconvenience of placing and taking; therefore, the existing demand is not satisfied, and a sorter for producing monocrystalline silicon is provided for the demand.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a sorter is used in monocrystalline silicon production to current sorter silicon wafer for production that proposes in solving above-mentioned background art places the structure, because place and take out inconveniently, causes to place and takes out the problem that the difficulty just easily caused the fish tail risk to monocrystalline silicon piece.

In order to achieve the above object, the utility model provides a following technical scheme: the sorter for monocrystalline silicon production comprises an optical analyzer, wherein a lens bin is arranged at the upper end of the optical analyzer and is welded with the optical analyzer, a silicon wafer bin is arranged at the upper end of the lens bin and is integrally formed with the lens bin, a shading sealing cover is arranged above the silicon wafer bin, a handle is arranged at the upper end of the shading sealing cover, and the handle is fixedly connected with the shading sealing cover through a bolt;

further comprising:

the silicon wafer placing plate is arranged inside the lens bin, and the lower part of one end of the silicon wafer placing plate is connected with the inner wall rotating shaft of the lens bin;

the height adjusting motor is arranged at one end far away from the joint of the silicon wafer placing plate and the rotating shaft of the inner wall of the lens bin, the output end of the height adjusting motor is in transmission connection with the silicon wafer placing plate, a silicon wafer detecting hole is formed in the silicon wafer placing plate, and the silicon wafer detecting hole and the silicon wafer placing plate are integrally formed;

and the limiting plate is arranged on the inner side above the height adjusting motor and is fixedly connected with the silicon wafer placing plate through bolts.

Preferably, the upper end of the limiting plate is provided with a magnetic silicon wafer pressing block, and the magnetic silicon wafer pressing block is connected with the limiting plate in a magnetic mode.

Preferably, the lower end of the inner side of the magnetic silicon wafer pressing block is provided with a scratch-proof rubber pad, and the scratch-proof rubber pad is in adhesive connection with the magnetic silicon wafer pressing block.

Preferably, a U-shaped baffle is arranged vertically above the joint of the silicon wafer placing plate and the rotating shaft on the inner wall of the lens bin, and the U-shaped baffle is fixedly connected with the silicon wafer placing plate through bolts.

Preferably, the inside in lens storehouse is provided with dustproof sealing lens, and the inner wall draw-in groove sealing fixed connection in dustproof sealing lens and lens storehouse.

Preferably, one side of the optical analyzer is provided with a connecting rod, the connecting rod is connected with the optical analyzer through a bolt, one side of the connecting rod is provided with a bolt fixing table, and the bolt fixing table is fixedly connected with the connecting rod.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model adopts the arrangement of the lens bin, the silicon chip placing plate, the height adjusting motor, the limiting plate, the magnetic silicon chip pressing block, the anti-scratching rubber pad, the U-shaped baffle plate and the silicon chip detecting hole to lift the shading sealing cover and take down the magnetic silicon chip pressing block, the silicon chip placing plate inclines to a too high posture, then one end of the monocrystalline silicon chip is obliquely inserted into the inner groove of the U-shaped baffle plate, then the monocrystalline silicon chip is placed into the annular groove in the silicon chip placing plate, then the magnetic silicon chip pressing block is placed at the upper end of the limiting plate, because the magnetic silicon chip pressing block has magnetic attraction performance, the magnetic silicon chip pressing block can be magnetically attracted and connected at the upper end of the limiting plate, then the height adjusting motor drives the silicon chip placing plate to adjust the angle, so that the included angle of the silicon chip placing plate is adjusted to be horizontal, if the monocrystalline silicon chip in the silicon chip placing plate is taken out, the height adjusting motor drives the silicon chip placing plate, the silicon single crystal wafer is taken out more easily, and the problems that the existing sorter silicon wafer placement structure for the production of the silicon single crystal is inconvenient to place and take out, difficult to place and take out and prone to causing scratch risks to the silicon single crystal wafer are solved.

2. Through the setting of the shading sealing cover, the handle, the connecting rod and the bolt fixing table, the shading performance above the optical analyzer is greatly improved by the shading sealing cover, the influence of external light on a detection result is prevented, the detection accuracy and precision of the monocrystalline silicon wafer are improved, the stability of the installation of the optical analyzer is greatly improved by the connecting rod and the bolt fixing table, the bolt fixing table can be firmly fixed on a platform through bolts, and the influence of shaking on the detection result is reduced.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is the internal structure schematic diagram of the lens bin and the silicon wafer bin of the present invention.

Fig. 3 is a schematic view of the overlooking structure of the silicon wafer placing plate of the present invention.

Fig. 4 is a partial enlarged view of the position a of the present invention.

In the figure: 1. an optical analyzer; 2. a lens chamber; 3. a silicon chip bin; 4. a connecting rod; 5. a bolt fixing table; 6. a light-shielding sealing cover; 7. a handle; 8. a dust-tight sealing lens; 9. a silicon wafer placing plate; 10. a height adjustment motor; 11. a limiting plate; 12. magnetically attracting the silicon wafer pressing block; 13. scratch-resistant rubber mats; 14. a U-shaped baffle plate; 15. and (6) detecting holes in the silicon wafer.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-4, the present invention provides an embodiment: a sorter for monocrystalline silicon production comprises an optical analyzer 1, wherein a lens bin 2 is arranged at the upper end of the optical analyzer 1, the lens bin 2 is welded with the optical analyzer 1, a silicon wafer bin 3 is arranged at the upper end of the lens bin 2, the silicon wafer bin 3 and the lens bin 2 are integrally formed, a shading sealing cover 6 is arranged above the silicon wafer bin 3, a handle 7 is arranged at the upper end of the shading sealing cover 6, and the handle 7 is fixedly connected with the shading sealing cover 6 through bolts;

further comprising:

the silicon wafer placing plate 9 is arranged inside the lens bin 2, and the lower part of one end of the silicon wafer placing plate 9 is connected with the inner wall rotating shaft of the lens bin 2;

the height adjusting motor 10 is arranged at one end far away from the joint of the silicon wafer placing plate 9 and the rotating shaft on the inner wall of the lens bin 2, the output end of the height adjusting motor 10 is in transmission connection with the silicon wafer placing plate 9, a silicon wafer detecting hole 15 is formed in the silicon wafer placing plate 9, and the silicon wafer detecting hole 15 and the silicon wafer placing plate 9 are integrally formed;

and the limiting plate 11 is arranged on the inner side above the height adjusting motor 10, and the limiting plate 11 is fixedly connected with the silicon wafer placing plate 9 through bolts.

Further, the upper end of the limiting plate 11 is provided with a magnetic silicon wafer pressing block 12, the magnetic silicon wafer pressing block 12 is connected with the limiting plate 11 in a magnetic mode, and the magnetic silicon wafer pressing block 12 is convenient for clamping and fixing the lower monocrystalline silicon wafer.

Further, the lower end of the inner side of the magnetic silicon wafer pressing block 12 is provided with an anti-scratching rubber pad 13, the anti-scratching rubber pad 13 is in adhesive connection with the magnetic silicon wafer pressing block 12, and the anti-scratching rubber pad 13 effectively prevents the clamping end of the magnetic silicon wafer pressing block 12 of the monocrystalline silicon wafer from being scratched and damaged.

Further, a U-shaped baffle 14 is arranged vertically above the joint of the silicon wafer placing plate 9 and the rotating shaft on the inner wall of the lens bin 2, the U-shaped baffle 14 is fixedly connected with the silicon wafer placing plate 9 through bolts, and the U-shaped baffle 14 is used for supporting a monocrystalline silicon wafer when the silicon wafer placing plate 9 is obliquely arranged.

Further, the inside in lens storehouse 2 is provided with dustproof sealing lens 8, and the sealed fixed connection of inner wall draw-in groove in dustproof sealing lens 8 and lens storehouse 2, and dustproof sealing lens 8 has effectively improved the leakproofness of optical analysis appearance 1 top.

Further, one side of optical analysis appearance 1 is provided with connecting rod 4, and connecting rod 4 and 1 bolted connection of optical analysis appearance, and one side of connecting rod 4 is provided with bolt fastening platform 5, and bolt fastening platform 5 and connecting rod 4 fixed connection, and connecting rod 4 and bolt fastening platform 5 have greatly improved the stability of 1 installation of optical analysis appearance for on bolt fastening platform 5 can firmly the bolt fastening's platform, the reduction is rocked the influence to the testing result.

The working principle is as follows: when the silicon wafer placing plate is used, the shading sealing cover 6 is lifted to take down the magnetic silicon wafer pressing block 12, the silicon wafer placing plate 9 is inclined to be in a too high posture, one end of a monocrystalline silicon wafer is obliquely inserted into the inner groove of the U-shaped baffle plate 14, the monocrystalline silicon wafer is placed into the annular groove in the silicon wafer placing plate 9, the magnetic silicon wafer pressing block 12 is placed at the upper end of the limiting plate 11, the magnetic silicon wafer pressing block 12 can be connected to the upper end of the limiting plate 11 in a magnetic absorption mode due to the magnetic absorption performance of the magnetic silicon wafer pressing block 12, the height adjusting motor 10 drives the silicon wafer placing plate 9 to be adjusted in angle, the included angle of the silicon wafer placing plate 9 is adjusted to be horizontal, if the monocrystalline silicon wafer inside the silicon wafer placing plate 9 is to be taken out, the monocrystalline silicon wafer is taken out more easily, the problem of the existing silicon wafer placing structure of a sorter for monocrystalline silicon production is solved, and the silicon wafer placing plate is inconvenient to place and take out, cause and place and take out the problem that the difficulty just easily caused the fish tail risk to monocrystalline silicon piece, the sealed lid 6 of shading has greatly improved the shading performance of optical analysis appearance 1 top, prevents the influence of external light to the testing result, has improved monocrystalline silicon piece's detection accuracy and precision, connecting rod 4 and bolt fixing platform 5 have greatly improved the stability of optical analysis appearance 1 installation for bolt fixing platform 5 can firmly on the platform of bolt fastening, reduce and rock the influence to the testing result.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The sorter is used for monocrystalline silicon production and comprises an optical analyzer (1), wherein a lens bin (2) is arranged at the upper end of the optical analyzer (1), the lens bin (2) is connected with the optical analyzer (1) in a welding mode, a silicon wafer bin (3) is arranged at the upper end of the lens bin (2), the silicon wafer bin (3) and the lens bin (2) are integrally formed, a shading sealing cover (6) is arranged above the silicon wafer bin (3), a handle (7) is arranged at the upper end of the shading sealing cover (6), and the handle (7) is fixedly connected with the shading sealing cover (6) through bolts;

the method is characterized in that: further comprising:

the silicon wafer placing plate (9) is arranged inside the lens bin (2), and the lower part of one end of the silicon wafer placing plate (9) is connected with the inner wall rotating shaft of the lens bin (2);

the height adjusting motor (10) is arranged at one end far away from the connection part of the silicon wafer placing plate (9) and the rotating shaft of the inner wall of the lens bin (2), the output end of the height adjusting motor (10) is in transmission connection with the silicon wafer placing plate (9), a silicon wafer detecting hole (15) is formed in the silicon wafer placing plate (9), and the silicon wafer detecting hole (15) and the silicon wafer placing plate (9) are integrally formed;

and the limiting plate (11) is arranged on the inner side above the height adjusting motor (10), and the limiting plate (11) is fixedly connected with the silicon wafer placing plate (9) through bolts.

2. The sorter for the production of single crystal silicon according to claim 1, characterized in that: the upper end of the limiting plate (11) is provided with a magnetic silicon wafer pressing block (12), and the magnetic silicon wafer pressing block (12) is connected with the limiting plate (11) in a magnetic mode.

3. The sorter for producing single crystal silicon according to claim 2, characterized in that: and the lower end of the inner side of the magnetic silicon wafer pressing block (12) is provided with an anti-scratching rubber pad (13), and the anti-scratching rubber pad (13) is in adhesive connection with the magnetic silicon wafer pressing block (12).

4. The sorter for the production of single crystal silicon according to claim 1, characterized in that: a U-shaped baffle (14) is arranged vertically above the joint of the silicon wafer placing plate (9) and the rotating shaft on the inner wall of the lens bin (2), and the U-shaped baffle (14) is fixedly connected with the silicon wafer placing plate (9) through bolts.

5. The sorter for the production of single crystal silicon according to claim 1, characterized in that: the inside in lens storehouse (2) is provided with dustproof sealing lens (8), and the inner wall draw-in groove sealing fixed connection in dustproof sealing lens (8) and lens storehouse (2).

6. The sorter for the production of single crystal silicon according to claim 1, characterized in that: one side of optical analysis appearance (1) is provided with connecting rod (4), and connecting rod (4) and optical analysis appearance (1) bolted connection, one side of connecting rod (4) is provided with bolt fixed station (5), and bolt fixed station (5) and connecting rod (4) fixed connection.