CN219005809U - A fretwork adsorbs tool for micro LED detects - Google Patents
A fretwork adsorbs tool for micro LED detects Download PDFInfo
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- CN219005809U CN219005809U CN202223431458.1U CN202223431458U CN219005809U CN 219005809 U CN219005809 U CN 219005809U CN 202223431458 U CN202223431458 U CN 202223431458U CN 219005809 U CN219005809 U CN 219005809U
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- 238000001179 sorption measurement Methods 0.000 claims abstract description 84
- 238000007789 sealing Methods 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 18
- 238000005086 pumping Methods 0.000 claims description 9
- 239000000741 silica gel Substances 0.000 claims description 4
- 229910002027 silica gel Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000007771 core particle Substances 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 208000012260 Accidental injury Diseases 0.000 abstract description 4
- 208000014674 injury Diseases 0.000 abstract description 4
- 238000000605 extraction Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 3
- 241000252254 Catostomidae Species 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical group C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
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Abstract
In order to solve the problem that the existing platform sucker cannot detect core particle products on the upper surface and the lower surface, the utility model provides a hollowed-out adsorption jig for Micro LED detection, which comprises a rotary DD motor, wherein a planar sucker is arranged on the rotary DD motor, a hollowed-out adsorption platform is arranged above the planar sucker, the top surface of the hollowed-out adsorption platform is provided with an avoidance groove, the periphery of the avoidance groove is provided with a placement table, the bottom surface of the hollowed-out adsorption platform is provided with a sealing groove, the planar sucker is inlaid in the sealing groove, and the hollowed-out adsorption platform and the periphery of the planar sucker are fixedly connected through a platform fixing clamping plate. According to the utility model, the hollow adsorption platform is arranged above the plane sucking disc, so that the plane sucking disc for detecting and applying the existing Micro LED is improved, the improved plane sucking disc is more suitable for various products, and products with core particles on the upper surface and the lower surface can be placed; meanwhile, the probability of accidental injury of the adsorption platform to the product is reduced, and meanwhile, the manufacturing cost is low and the manufacturing time is short.
Description
Technical Field
The utility model relates to the technical field of semiconductor wafer-level visual inspection, in particular to a hollowed-out adsorption jig for Micro LED inspection.
Background
At present, although a hollow step sucker is arranged on a Micro LED huge detection system, the limitation is too large, the manufacturing cost is high, and the manufacturing time is long. Most of the existing Micro LED huge detection systems adopt platform suckers, when customers have core products on the upper surface and the lower surface, the hollow step suckers need to be redesigned to be processed, time and labor are wasted, and limitation is too large. The existing plane sucker cannot be used for placing products with core particles on two surfaces, is large in limitation, cannot meet various types of wafer products, is high in manufacturing cost, long in manufacturing time, time-consuming and labor-consuming, and is not suitable for being applied to early-stage Micro LED detection; therefore, how to overcome the above-mentioned technical problems and drawbacks becomes an important problem to be solved.
Disclosure of Invention
Aiming at the problem that the platform sucker can not detect core particle products on the upper surface and the lower surface, the utility model provides a hollowed-out adsorption jig for Micro LED detection.
The technical scheme adopted by the utility model for solving the technical problems is as follows:
the utility model provides a fretwork adsorption jig for Micro LED detects, includes rotatory DD motor, plane sucking disc, fretwork adsorption platform and platform fixed splint, fixed mounting has on the output shaft of rotatory DD motor plane sucking disc, install the top of plane sucking disc fretwork adsorption platform, fretwork adsorption platform's top surface is provided with the groove of dodging that is used for dodging the core grain, dodging the inner circumference in groove and encircle being provided with the air pumping layer, be provided with the air vent that is used for the negative pressure absorbing on the air pumping layer, dodging the periphery in groove and encircle being provided with a plurality of placing tables, fretwork adsorption platform's bottom surface is provided with the seal groove, install the sealing washer in the seal groove, plane sucking disc inlays in the seal groove, plane sucking disc's periphery is passed through platform fixed splint fixed connection, fretwork adsorption platform with platform fixed splint fixed connection.
Optionally, the rotary disk is further included, the rotary disk is connected to an output shaft of the rotary DD motor, and the rotary disk is fixedly connected with the plane sucker through a bolt.
Optionally, the platform fixed splint comprises two semicircular annular, be provided with a plurality of bolt holes in the longitudinal direction of platform fixed splint, the bolt hole circumference equipartition is in the inboard of platform fixed splint.
Optionally, the periphery of fretwork adsorption platform is provided with a plurality of bolt holes, bolt hole circumference equipartition is in fretwork adsorption platform's periphery, platform fixed splint pass through the bolt with fretwork adsorption platform's upper surface fixed connection.
Optionally, the sealing ring is a silica gel sealing ring.
Optionally, the fretwork adsorption platform is discoid, a plurality of place the platform interval set up in fretwork adsorption platform's inner edge, adjacent two place and be formed with the depressed part between the platform.
Optionally, the avoiding groove is a circular groove.
Optionally, along the direction from the air extraction layer to the center of the avoidance groove, the thickness of the inner side wall of the air extraction layer is gradually reduced.
Optionally, the placing tables are arc-shaped, the number of the placing tables is 4, and 4 placing tables are arranged at intervals.
According to the hollow adsorption jig for Micro LED detection, provided by the utility model, the hollow adsorption platform is arranged above the plane sucking disc, so that the plane sucking disc used for Micro LED detection is improved, the improved sucking disc is more suitable for various products, and products with core particles on the upper surface and the lower surface can be placed; meanwhile, the probability of accidental injury of the adsorption platform to the product is reduced, and meanwhile, the manufacturing cost is low and the manufacturing time is short.
Drawings
FIG. 1 is an explosion schematic diagram of a hollow adsorption jig for Micro LED detection according to an embodiment of the present utility model;
fig. 2 is a schematic structural diagram of a hollow adsorption fixture for Micro LED detection according to an embodiment of the present utility model;
fig. 3 is a schematic structural diagram of a hollow adsorption platform in a hollow adsorption fixture for Micro LED detection according to an embodiment of the present utility model;
reference numerals in the drawings of the specification are as follows:
the device comprises a 1-rotating DD motor, a 2-plane sucker, a 3-hollowed adsorption platform, a 31-placing platform, a 32-concave part, a 33-avoiding groove, a 4-platform fixing clamping plate, a 5-silica gel sealing ring, a 6-sealing groove, a 7-gas pumping layer and a 71-vent hole.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects solved by the utility model more clear, the utility model is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "side", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description and to simplify the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the utility model. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the term "connected" should be interpreted broadly, and for example, it may be a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1-2, in an embodiment, the application provides a fretwork adsorption jig for Micro LED detects, including rotatory DD motor 1, plane sucking disc 2, fretwork adsorption platform 3 and platform fixed splint 4, fixed mounting has on the output shaft of rotatory DD motor 1 plane sucking disc 2, install the top of plane sucking disc 2 fretwork adsorption platform 3, fretwork adsorption platform 3's top surface is provided with the groove 33 of dodging that is used for dodging the core grain, dodging the inner circumference in groove 33 and encircling and be provided with pumping layer 7, be provided with the air vent 71 that is used for negative pressure absorbing on pumping layer 7, dodging the periphery in groove 33 and encircling and be provided with a plurality of placing tables 31, fretwork adsorption platform 3's bottom surface is provided with seal groove 6, install the sealing washer in the seal groove 6, plane sucking disc 2 is inlayed in the seal groove 6, the periphery of plane sucking disc 2 is passed through platform fixed splint 4 fixed connection, fretwork adsorption platform 3 with platform fixed splint 4 fixed connection.
The rotary DD motor 1 is used as the rotary power of the whole adsorption platform, the rotary DD motor 1 rotates to drive the plane sucker 2 to rotate, and the plane sucker 2 rotates to serve as a transfer piece for fixing the hollow adsorption platform 3, so that the plane sucker 2 drives the hollow adsorption platform 3 to rotate, the hollow adsorption platform 3 is directly contacted with a product, the bottom surface of the hollow adsorption platform 3 is provided with a sealing groove 6, a sealing ring is installed in the sealing groove 6, a bulge above the plane sucker 2 is inlaid in the sealing groove 6, and the sealing ring connects the plane sucker 2 with the hollow adsorption platform 3 to seal and prevent air leakage; the platform fixed splint 4 comprises bottom surface ring and side baffle, the side baffle sets up around the excircle of bottom surface ring, the plane sucking disc 2 is placed the top of bottom surface ring, the bottom surface ring is right plane sucking disc 2 supports and spacing, fretwork adsorption platform 3 is located the top of platform fixed splint 4, fretwork adsorption platform 3 with platform fixed splint 4 passes through bolt fixed connection, thereby makes fretwork adsorption platform 3 with plane sucking disc 2 links as an organic wholely, platform fixed splint 4 is fixed with fretwork adsorption platform 3, along with rotatory DD motor 1 rotates. The inner circumference of dodging the groove 33 encircles and is provided with the layer of bleeding 7, be provided with the air vent 71 that is used for negative pressure absorption on the layer of bleeding 7, air vent 71 and negative pressure air supply intercommunication, negative pressure air supply are vacuum pump or other negative pressure sources. The middle parts of the placing tables 31 are provided with avoiding grooves 33 for avoiding core particles, so that products with core particles on the upper surface and the lower surface can be placed, and the accidental injury probability of the hollowed-out adsorption platform 3 to the products is reduced.
As shown in fig. 1-2, in an embodiment, the rotary disk is further included, and is connected to the output shaft of the rotary DD motor 1, and the rotary disk is fixedly connected to the planar suction cup 2 through a bolt.
The rotary disk with plane sucking disc 2 passes through bolt fixed connection, thereby makes the rotary disk with plane sucking disc 2 links as an organic wholely, simultaneously with rotatory DD motor 1 rotates, the rotary disk is right plane sucking disc 2 plays the supporting role, avoids plane sucking disc 2 rotatory in-process, plane sucking disc 2 skew, skew.
As shown in fig. 1-2, in an embodiment, the platform fixing clamp plate 4 is formed by two semicircular rings, and a plurality of bolt holes are longitudinally arranged on the platform fixing clamp plate 4, and the circumference of the bolt holes is uniformly distributed on the inner side of the platform fixing clamp plate 4.
The platform fixing clamp plate 4 is formed by two semicircles, so that the plane sucker 2 is fixed in a combined mode, and the operation is simple, the universality is strong, and the installation is easy.
As shown in fig. 1, in an embodiment, the periphery of the hollow adsorption platform 3 is provided with a plurality of bolt holes, the circumference of the bolt holes is uniformly distributed on the periphery of the hollow adsorption platform 3, and the platform fixing clamp plate 4 is fixedly connected with the upper surface of the hollow adsorption platform 3 through bolts.
The diameter of the hollow adsorption platform 3 is the same as that of the platform fixing clamp plate 4, when the hollow adsorption platform is installed, the plane sucking disc 2 is embedded into the sealing groove 6 of the hollow adsorption platform 3, so that the plane sucking disc 2 and the hollow adsorption platform 3 are connected into a whole, afterwards, the platform fixing clamp plate 4 is installed on the periphery of the plane sucking disc 2, the platform fixing clamp plate 4 clamps the plane sucking disc 2, and finally, the hollow adsorption platform 3 and the platform fixing clamp plate 4 are connected into a whole through bolts, and at the moment, the hollow adsorption platform 3 is located right above the platform fixing clamp plate 4.
In one embodiment, as shown in fig. 1, the seal ring is a silicone seal ring 55.
The silica gel sealing ring 55 has excellent sealing performance, is waterproof and leak-free, so that the plane sucker 2 and the hollow adsorption platform 3 are connected together to seal and prevent air leakage.
As shown in fig. 1, in an embodiment, the hollow adsorption platform 3 is disc-shaped, a plurality of placement platforms 31 are disposed at intervals on the inner edge of the hollow adsorption platform 3, and a recess 32 is formed between two adjacent placement platforms 31.
The hollow adsorption platform 3 is disc-shaped, and the center of the hollow adsorption platform is hollow, so that the hollow adsorption platform 3 can be used for placing products with core particles on two surfaces, has small limitation and can meet the requirement of multi-style wafer products; the placement stage 31 is in contact with the product to support and fix the product. A concave part 32 is formed between two adjacent placing tables 31, and the concave parts 32 are arranged on the upper surface of the hollowed-out adsorption platform 3 at equal angles, so that the contact area between the hollowed-out adsorption platform 3 and a product is reduced, the application range of the hollowed-out adsorption platform is enlarged, and the placing of various wafer products is satisfied.
In one embodiment, as shown in fig. 1, the relief groove 33 is a circular groove.
The avoidance groove 33 is a circular groove, so that products with core particles on the upper surface and the lower surface can be placed, and the accidental injury probability of the hollowed-out adsorption platform 3 to the products is reduced.
As shown in fig. 1, in an embodiment, the thickness of the inner sidewall of the air extraction layer 7 gradually decreases along the direction from the air extraction layer 7 to the center of the avoidance groove 33.
Along the air extraction layer 7 to the circle center direction of the avoidance groove 33, the thickness of the inner side wall of the air extraction layer 7 is gradually reduced, so that the surface of the air extraction layer, which is contacted with a product, is smooth arc-shaped, the contact surface of the air extraction layer and the product is increased, the pressure of the air extraction layer 7 on the product is dispersed, and therefore the supporting surface of the product is prevented from being too small when the air extraction layer is contacted with the product, the local stress of the product is larger, and the product is damaged. The air suction layer 7 is provided with an air vent 71 for negative pressure adsorption, a vacuum pump is used for evacuating air in the air vent 71 to form negative pressure, and a product is fixed on the surface of the hollowed-out adsorption platform 3 due to the action of the negative pressure.
As shown in fig. 1, in an embodiment, the placement platforms 31 are circular arc-shaped, the number of the placement platforms 31 is 4, and 4 placement platforms 31 are arranged at intervals.
The placing tables 31 are composed of 4 circular arc placing tables 31, the circular arc placing tables 31 support products, and a concave portion 32 is arranged between two adjacent placing tables 31, so that the products can be taken out conveniently.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (9)
1. A fretwork adsorbs tool for Micro LED detects, its characterized in that: including rotatory DD motor, plane sucking disc, fretwork adsorption platform and platform fixed splint, fixed mounting has on the output shaft of rotatory DD motor plane sucking disc, install the top of plane sucking disc fretwork adsorption platform, fretwork adsorption platform's top surface is provided with the groove of dodging that is used for dodging the core grain, dodging the inner circumference in groove and encircle being provided with the pumping layer, be provided with the air vent that is used for the negative pressure absorbing on the pumping layer, dodging the periphery in groove and encircle being provided with a plurality of placing table, fretwork adsorption platform's bottom surface is provided with the seal groove, install the sealing washer in the seal groove, plane sucking disc inlays in the seal groove, plane sucking disc's periphery passes through platform fixed splint fixed connection, fretwork adsorption platform with platform fixed splint fixed connection.
2. The hollowed-out adsorption jig for Micro LED detection according to claim 1, wherein: the rotary disk is connected to the output shaft of the rotary DD motor, and the rotary disk is fixedly connected with the plane sucker through a bolt.
3. The hollowed-out adsorption jig for Micro LED detection according to claim 1, wherein: the platform fixing clamp plate is composed of two semicircular rings, a plurality of bolt holes are formed in the longitudinal direction of the platform fixing clamp plate, and the circumference of each bolt hole is uniformly distributed on the inner side of the platform fixing clamp plate.
4. The hollowed-out adsorption jig for Micro LED detection according to claim 3, wherein: the periphery of fretwork adsorption platform is provided with a plurality of bolt holes, the bolt hole circumference equipartition is in fretwork adsorption platform's periphery, the platform fixed splint pass through the bolt with fretwork adsorption platform's upper surface fixed connection.
5. The hollowed-out adsorption jig for Micro LED detection according to claim 1, wherein: the sealing ring is a silica gel sealing ring.
6. The hollowed-out adsorption jig for Micro LED detection according to claim 1, wherein: the hollow adsorption platform is disc-shaped, a plurality of placing tables are arranged at intervals on the inner edge of the hollow adsorption platform, and a concave part is formed between every two adjacent placing tables.
7. The hollowed-out adsorption jig for Micro LED detection according to claim 1, wherein: the avoiding groove is a circular groove.
8. The hollowed-out adsorption jig for Micro LED detection according to claim 1, wherein: and the thickness of the inner side wall of the air pumping layer is gradually reduced along the direction from the air pumping layer to the circle center of the avoidance groove.
9. The hollowed-out adsorption jig for Micro LED detection according to claim 1, wherein: the placing tables are arc-shaped, the number of the placing tables is 4, and 4 placing tables are arranged at intervals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223431458.1U CN219005809U (en) | 2022-12-21 | 2022-12-21 | A fretwork adsorbs tool for micro LED detects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223431458.1U CN219005809U (en) | 2022-12-21 | 2022-12-21 | A fretwork adsorbs tool for micro LED detects |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219005809U true CN219005809U (en) | 2023-05-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223431458.1U Active CN219005809U (en) | 2022-12-21 | 2022-12-21 | A fretwork adsorbs tool for micro LED detects |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219005809U (en) |
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2022
- 2022-12-21 CN CN202223431458.1U patent/CN219005809U/en active Active
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Address after: 518000, 1st Floor, Building B5, Taohuayuan Science and Technology Innovation Ecological Park, Tiegang Community, Xixiang Street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Yibi Technology Co.,Ltd. Address before: Room 425, Block C, Bao'an New Generation Information Technology Industrial Park, No. 3, North Second Lane, Chuangye Second Road, 28 Dalang Community, Xin'an Street, Bao'an District, Shenzhen, Guangdong 518000 Patentee before: Shenzhen Yibi Technology Co.,Ltd. |