CN218631978U - Substrate supporting and sealing structure - Google Patents
Substrate supporting and sealing structure Download PDFInfo
- Publication number
- CN218631978U CN218631978U CN202222721497.9U CN202222721497U CN218631978U CN 218631978 U CN218631978 U CN 218631978U CN 202222721497 U CN202222721497 U CN 202222721497U CN 218631978 U CN218631978 U CN 218631978U
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- substrate
- installed part
- spacing groove
- upper portion
- support
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Abstract
The utility model relates to a wet processing procedure equipment technical field of semiconductor trade, especially a substrate support and seal structure, including installed part and support piece, the inside mounting groove that is equipped with of installed part, support piece's ring week is inwards shrunk and is equipped with the spacing groove, and the upper portion ring week of spacing groove is outwards equipped with protruding structure, and the upper portion of protruding structure upwards protrudes, and the lower part ring week of spacing groove is equipped with limit structure, and limit structure imbeds the spacing inslot, forms between spacing groove and the installed part sealedly, and protruding mechanism card is on the upper portion of installed part. Support piece adopts embedded "binding off locking" and "inclined plane sealing" mounting means in this device, has both realized the anticreep function, has also strengthened the sealing function when vacuum adsorption simultaneously, can effectively avoid the vacuum to reveal during vacuum adsorption.
Description
Technical Field
The utility model relates to a wet processing procedure equipment technical field of semiconductor trade, especially a base plate supports and seal structure.
Background
In semiconductor wet process equipment, a substrate conveying device (basic principle: vacuum adsorption of a substrate to realize substrate fixing) conveys the substrate to various process treatment modules in the equipment, so that the substrate is required to be supported in the conveying process and is not easy to be adhered to the conveying device to scratch; many chemicals are often used in semiconductor wet processes, and some chemicals are highly corrosive and volatile, so that a substrate support material in contact with a substrate needs to have excellent chemical resistance; meanwhile, the fixing device of the substrate in the process treatment module in the equipment (basic principle: vacuum adsorption of the substrate for substrate fixing) also needs to support special substrates such as: warping the substrate (non-planar), thereby avoiding the substrate fixing device from absorbing the substrate failure caused by vacuum leakage due to substrate warping when the substrate fixing device is opened by vacuum absorption, and causing the substrate to swing and break when the rotary spraying process is performed.
The prior art has the following defects:
1. the substrate supporting piece is easy to loosen and fall off without a locking structure when being embedded and installed in the groove;
2. the substrate support member has a low material friction coefficient, which causes the substrate to move relatively to the substrate when the substrate transfer apparatus or the substrate fixing apparatus is not opened for vacuum adsorption, thereby damaging the substrate.
3. When liquid exists on the surface of the substrate support, the substrate support and the substrate are adhered when the substrate conveying device or the substrate fixing device is closed by vacuum adsorption, and the substrate cannot fall off in time to damage the substrate.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a problem among the above-mentioned background of effectual solution has proposed a base plate and has supported and seal structure.
The specific technical scheme is as follows;
the utility model provides a substrate supporting and seal structure, includes installed part and support piece, the inside mounting groove that is equipped with of installed part, support piece's circumference internal contraction is equipped with the spacing groove, and the upper portion circumference of spacing groove outwards is equipped with protruding structure, and the upper portion of protruding structure is upwards salient, and the lower part circumference of spacing groove is equipped with limit structure, and limit structure imbeds the spacing groove, forms between spacing groove and the installed part sealedly, and protruding mechanism card is on the upper portion of installed part.
Preferably, the inner wall of the limiting groove is of an inclined surface structure.
Preferably, the support member is provided with a tapered drainage passage at a middle portion thereof.
Preferably, the mounting part is provided with a vacuum adsorption channel/liquid discharge channel in the middle.
Preferably, the support is made of a non-metal material.
Compared with the prior art, the beneficial effects of the utility model are that: the supporting piece in the device adopts an embedded installation mode of closing-up locking and inclined plane sealing, so that the anti-falling function is realized, the sealing function during vacuum adsorption is enhanced, and vacuum leakage can be effectively avoided during vacuum adsorption; the supporting piece is in contact with the substrate in a circle of line contact mode, so that particle pollution and adhesion caused by large contact area can be effectively avoided; the support part is provided with an inclined liquid discharge hole, so that the phenomenon of adhesion or slipping caused by liquid in the contact area of the support part and the substrate can be effectively prevented; the support piece is made of special non-metallic materials and has a high friction coefficient. When the adhesive tape is in contact with the substrate, the phenomenon of adhesion or slipping is not easy to occur even if the contact area is small.
Drawings
FIG. 1 is a schematic view of the structure of the supporting member of the present invention;
FIG. 2 is a schematic structural view of the mounting member of the present invention;
fig. 3 is an assembly view of the middle mounting member and the supporting member according to the present invention.
Detailed Description
For ease of description, spatially relative terms such as "over … …", "over … …", "over … …", "over", etc. may be used herein to describe the spatial positional relationship of one device or feature to another device or feature as shown in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be oriented 90 degrees or at other orientations and the spatially relative descriptors used herein interpreted accordingly.
The following detailed description of the preferred embodiments of the present invention is provided in connection with the accompanying drawings. As shown in fig. 1 to 3, a substrate supporting and sealing structure comprises an installation part 1 and a support part 2, wherein the installation part is internally provided with an installation groove 3, the support part is provided with a limit groove 4 which is circumferentially and inwardly contracted, the upper part of the limit groove is circumferentially and outwardly provided with a convex structure 5, and the inner wall of the limit groove is of an inclined surface structure. An inclined plane sealing structure and a closing-up locking structure are formed between the limiting groove and the mounting piece. The upper part of the convex structure protrudes upwards and is in round line contact with the substrate 6, so that the pollution and adhesion of particles caused by large contact area can be effectively avoided; limiting structure 7 is arranged on the periphery of the lower portion of the limiting groove, the limiting structure is embedded into the limiting groove, sealing is formed between the limiting groove and the mounting piece, and the protruding mechanism is clamped on the upper portion of the mounting piece. The binding off locking structure is adopted to avoid the falling off of the substrate supporting piece, and meanwhile, the nonmetal material with larger friction coefficient is adopted to increase the friction force between the substrate and the supporting piece so as to avoid the phenomenon of scratching when in contact; although the material has a large friction coefficient, it is not easy to be "stuck" to the substrate when contacting with a small area of the substrate.
The middle part of the support part is provided with a conical liquid discharge channel 8. The middle part of the mounting part is provided with a vacuum adsorption channel/liquid discharge channel 9. The two liquid discharge channels are on the same axis.
The supporting piece is made of special non-metallic materials, has a high friction coefficient, and is not easy to generate the phenomenon of adhesion or slipping even if the contact area of the supporting piece and the substrate is small.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (5)
1. A substrate supporting and sealing structure, characterized in that: including installed part and support piece, the inside mounting groove that is equipped with of installed part, support piece's surrounding internal contraction is equipped with the spacing groove, and the upper portion surrounding of spacing groove is equipped with protruding structure outward, and the upper portion of protruding structure is upwards salient, and the lower part surrounding of spacing groove is equipped with limiting structure, and limiting structure imbeds the spacing inslot, forms sealedly between spacing groove and the installed part, and protruding mechanism card is on the upper portion of installed part.
2. The substrate support and seal arrangement of claim 1, wherein an inner wall of the retaining groove is a sloped surface.
3. The substrate support and seal arrangement of claim 1, wherein the support member is provided with a tapered drainage channel at a middle portion thereof.
4. The substrate support and seal arrangement of claim 1, wherein the mounting member is provided with a vacuum suction/drainage channel in the middle.
5. The substrate support and seal arrangement of claim 1, wherein the support member is formed of a non-metallic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222721497.9U CN218631978U (en) | 2022-10-13 | 2022-10-13 | Substrate supporting and sealing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222721497.9U CN218631978U (en) | 2022-10-13 | 2022-10-13 | Substrate supporting and sealing structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218631978U true CN218631978U (en) | 2023-03-14 |
Family
ID=85470529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222721497.9U Active CN218631978U (en) | 2022-10-13 | 2022-10-13 | Substrate supporting and sealing structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218631978U (en) |
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2022
- 2022-10-13 CN CN202222721497.9U patent/CN218631978U/en active Active
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