CN115662935A - Substrate supporting and sealing structure - Google Patents
Substrate supporting and sealing structure Download PDFInfo
- Publication number
- CN115662935A CN115662935A CN202211251442.4A CN202211251442A CN115662935A CN 115662935 A CN115662935 A CN 115662935A CN 202211251442 A CN202211251442 A CN 202211251442A CN 115662935 A CN115662935 A CN 115662935A
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- China
- Prior art keywords
- substrate
- upper portion
- support
- limiting groove
- groove
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Abstract
The invention relates to the technical field of wet process equipment in the semiconductor industry, in particular to a substrate supporting and sealing structure which comprises an installation piece and a support piece, wherein an installation groove is formed in the installation piece, a limiting groove is formed in the support piece in a shrinking mode in the circumferential direction, a protruding structure is arranged on the upper portion of the limiting groove in the circumferential direction, the upper portion of the protruding structure protrudes upwards, a limiting structure is arranged on the lower portion of the limiting groove in the circumferential direction, the limiting structure is embedded into the limiting groove, sealing is formed between the limiting groove and the installation piece, and the protruding mechanism is clamped on the upper portion of the installation piece. Support piece adopts embedded "binding off locking" and "sealed" mounting means in inclined plane in this device, has both realized the anticreep function, has also strengthened the sealing function when vacuum adsorption simultaneously, can effectively avoid the vacuum to leak during vacuum adsorption.
Description
Technical Field
The invention relates to the technical field of wet processing equipment in the semiconductor industry, in particular to a substrate supporting and sealing structure.
Background
In semiconductor wet process equipment, a substrate conveying device (basic principle: vacuum adsorption of a substrate to realize substrate fixation) conveys the substrate to various process treatment modules in the equipment, so that the substrate is required to be supported in the conveying process, and the substrate is not easy to be adhered to the conveying device to cause scratch of the substrate; many chemicals are often used in semiconductor wet processes, and some chemicals are highly corrosive and volatile, so that a substrate support material in contact with a substrate needs to have excellent chemical resistance; meanwhile, the fixing device of the substrate in the process treatment module in the equipment (basic principle: vacuum adsorption of the substrate for substrate fixing) also needs to support special substrates such as: warping the substrate (non-planar), thereby avoiding the substrate fixing device from absorbing the substrate failure caused by vacuum leakage due to substrate warping when the substrate fixing device is opened by vacuum absorption, and causing the substrate to swing and break when the rotary spraying process is performed.
The prior art has the following defects:
1. the substrate supporting piece is easy to loosen and fall off without a locking structure when being embedded and installed in the groove;
2. the substrate support member has a low material friction coefficient, which causes the substrate to be damaged due to relative movement of the substrate after the substrate support member contacts the substrate when the vacuum adsorption device or the substrate fixing device is not turned on.
3. When liquid exists on the surface of the substrate support, the substrate support and the substrate are adhered when the substrate conveying device or the substrate fixing device is closed by vacuum adsorption, and the substrate cannot fall off in time to damage the substrate.
Disclosure of Invention
In order to effectively solve the problems in the background art, the present invention provides a substrate supporting and sealing structure.
The specific technical scheme is as follows;
the utility model provides a substrate supporting and seal structure, includes installed part and support piece, the inside mounting groove that is equipped with of installed part, support piece's the circumferencial internal contraction is equipped with the spacing groove, and the upper portion of spacing groove is equipped with protruding structure outward around, and the upper portion of protruding structure upwards protrudes, and the lower part of spacing groove is equipped with limit structure all around, and limit structure imbeds the spacing inslot, forms between spacing groove and the installed part sealedly, and protruding mechanism card is on the upper portion of installed part.
Preferably, the inner wall of the limiting groove is of an inclined surface structure.
Preferably, the support member is provided with a tapered liquid discharge passage at a central portion thereof.
Preferably, the mounting part is provided with a vacuum adsorption channel/liquid discharge channel in the middle.
Preferably, the support is made of a non-metal material.
Compared with the prior art, the invention has the beneficial effects that: the supporting piece in the device adopts an embedded type 'closing-up locking' and 'inclined plane sealing' mounting mode, so that the anti-falling function is realized, the sealing function during vacuum adsorption is enhanced, and the vacuum leakage can be effectively avoided during vacuum adsorption; the supporting piece is in contact with the substrate in a circle of line contact mode, so that particle pollution and adhesion caused by large contact area can be effectively avoided; the support part is provided with an inclined liquid discharge hole, so that the phenomenon of adhesion or slipping caused by liquid in the contact area of the support part and the substrate can be effectively prevented; the support piece is made of special non-metallic materials and has a high friction coefficient. When the adhesive tape is in contact with the substrate, the phenomenon of adhesion or slipping is not easy to occur even if the contact area is small.
Drawings
FIG. 1 is a schematic view of the structure of the support member of the present invention;
FIG. 2 is a schematic view of the construction of the mounting member of the present invention;
fig. 3 is an assembly view of the mounting member and the support member in the present invention.
Detailed Description
For ease of description, spatially relative terms such as "over 8230," "upper surface," "above," and the like may be used herein to describe the spatial positional relationship of one device or feature to other devices or features as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary terms "at 8230; \8230; 'above" may include both orientations "at 8230; \8230;' above 8230; 'at 8230;' below 8230;" above ". The device may also be oriented 90 degrees or at other orientations and the spatially relative descriptors used herein interpreted accordingly.
The following detailed description of the preferred embodiments will be made with reference to the accompanying drawings. As shown in fig. 1 to 3, a substrate supporting and sealing structure comprises an installation part 1 and a support part 2, wherein an installation groove 3 is arranged inside the installation part, a limiting groove 4 is formed in the circumferential inward contraction of the support part, a protruding structure 5 is arranged on the circumferential outward of the upper part of the limiting groove, and the inner wall of the limiting groove is an inclined surface structure. An inclined plane sealing structure and a closing-up locking structure are formed between the limiting groove and the mounting piece. The upper part of the convex structure protrudes upwards and is in round line contact with the substrate 6, so that the pollution and adhesion of particles caused by large contact area can be effectively avoided; limiting structure 7 is arranged around the lower portion of the limiting groove, the limiting structure is embedded into the limiting groove, sealing is formed between the limiting groove and the mounting piece, and the protruding mechanism is clamped on the upper portion of the mounting piece. The binding off locking structure is adopted to avoid the falling off of the substrate supporting piece, and meanwhile, the nonmetal material with larger friction coefficient is adopted to increase the friction force between the substrate and the supporting piece so as to avoid the phenomenon of scratching when in contact; although the material has a large friction coefficient, it is not easy to be "stuck" to the substrate when contacting with a small area of the substrate.
The middle part of the support part is provided with a conical liquid discharge channel 8. The middle part of the mounting part is provided with a vacuum adsorption channel/liquid discharge channel 9. The two liquid discharge channels are on the same axis.
The support is made of special non-metallic materials, has a high friction coefficient, and is not easy to generate the phenomenon of adhesion or slipping even if the contact area of the support and the substrate is small.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (5)
1. A substrate supporting and sealing structure is characterized in that: including installed part and support piece, the inside mounting groove that is equipped with of installed part, support piece's the internal contraction in ring week is equipped with the spacing groove, and the upper portion ring week of spacing groove is equipped with protruding structure outward, and the upper portion of protruding structure upwards protrudes, and the lower part ring week of spacing groove is equipped with limit structure, and limit structure imbeds the spacing inslot, forms between spacing groove and the installed part sealedly, and protruding mechanism card is on the upper portion of installed part.
2. The substrate support and seal arrangement of claim 1, wherein an inner wall of the retaining groove is a sloped surface.
3. The substrate support and seal arrangement of claim 1, wherein the support member is provided with a tapered drainage channel at a middle portion thereof.
4. The substrate support and seal arrangement of claim 1, wherein the mounting member is provided with a vacuum suction/drainage channel in the middle.
5. The substrate support and seal arrangement of claim 1, wherein the support member is formed of a non-metallic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211251442.4A CN115662935A (en) | 2022-10-13 | 2022-10-13 | Substrate supporting and sealing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211251442.4A CN115662935A (en) | 2022-10-13 | 2022-10-13 | Substrate supporting and sealing structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115662935A true CN115662935A (en) | 2023-01-31 |
Family
ID=84988095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211251442.4A Pending CN115662935A (en) | 2022-10-13 | 2022-10-13 | Substrate supporting and sealing structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115662935A (en) |
-
2022
- 2022-10-13 CN CN202211251442.4A patent/CN115662935A/en active Pending
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