CN211867434U

CN211867434U - Polishing disk fixing device

Info

Publication number: CN211867434U
Application number: CN201922458421.XU
Authority: CN
Inventors: 杨兆明; 颜凯; 中原司
Original assignee: Zhejiang Xinhui Equipment Technology Co ltd
Current assignee: Zhejiang Xinhui Equipment Technology Co ltd
Priority date: 2019-12-31
Filing date: 2019-12-31
Publication date: 2020-11-06
Anticipated expiration: 2029-12-31

Abstract

The utility model provides a polishing disk fixing device, which comprises a fixed disk and a limiting component, wherein the fixed disk is provided with a combining surface and a mounting surface which are arranged oppositely, the fixed disk is provided with air holes which are communicated with the combining surface and the mounting surface, the combining surface is provided with a plurality of rings of annular grooves which are arranged at intervals, and each annular groove is communicated with the air holes; the limiting assembly comprises at least three limiting blocks arranged along the circumferential direction of the fixed disk at intervals, the limiting blocks are connected to the circumferential side wall of the fixed disk, and the circle center of the fixed disk is located inside a polygon formed by taking the limiting blocks as vertexes. The utility model discloses a polishing dish fixing device for the polishing dish can be connected on the fixed disk through vacuum adsorption's mode, and it is spacing both to have realized the axial of CD, makes the dismantlement and the installation easy operation convenience of polishing dish again.

Description

Polishing disk fixing device

Technical Field

The utility model relates to a silicon chip polishing technical field, in particular to polishing dish fixing device.

Background

In a semiconductor polishing process, the method generally comprises: sticking a special polishing pad on a polishing disc, supplying special polishing liquid above the special polishing pad, and matching the rotating speed of the polishing disc with different polishing procedures; the silicon chip is fixed on a clamp below the polishing head, the surface to be polished is directly contacted with the polishing pad, and the corresponding polishing step is completed under the polishing pressure. And aiming at different customer requirements, the polishing disk needs to frequently trim a plane to match the surface to be polished of the silicon wafer.

At present, the polishing disc is usually fixed on the fixed disc by using screws, but the polishing disc is inconvenient to detach and install due to heavy weight, and the machine is easy to be damaged and personnel are easy to be injured due to misoperation.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a polishing dish fixing device convenient to dismantlement and installation of polishing dish.

In order to achieve the above object, the utility model provides a polishing disk fixing device, it includes:

the fixing disc is provided with a combining surface and a mounting surface which are oppositely arranged, the fixing disc is provided with air holes, the air holes are communicated with the combining surface and the mounting surface, the combining surface is provided with a plurality of rings of annular grooves which are arranged at intervals, and each annular groove is communicated with the air hole;

the limiting assembly comprises at least three limiting blocks arranged along the circumferential direction of the fixed disk at intervals, the limiting blocks are connected to the circumferential side wall of the fixed disk, and the circle center of the fixed disk is located inside a polygon formed by taking each limiting block as a vertex.

The polishing disc fixing device as described above, wherein a plurality of circles of the annular grooves are arranged at equal intervals.

The polishing disc fixing device is characterized in that the limiting blocks are provided with buckles, and the peripheral side wall of the fixed disc is provided with a plurality of clamping grooves matched with the buckles of the limiting blocks in a clamping mode.

The polishing disk fixing device as described above, wherein the stopper is connected to the peripheral side wall of the fixed disk by a bolt.

The polishing disk fixing device as described above, wherein the stopper is connected to the peripheral side wall of the fixed disk by a connecting pin.

According to the polishing disc fixing device, the outer surface of the limiting block is provided with the chamfer.

The polishing disc fixing device comprises a fixed disc, a limiting block and a limiting component, wherein the limiting block is arranged on the fixed disc, and the limiting block is arranged on the fixed disc.

The polishing platter fixing apparatus as described above, wherein the air hole is provided at a center of the fixing platter.

The polishing disc fixing device comprises a polishing disc fixing surface and a plurality of air holes, wherein the polishing disc fixing surface is provided with a plurality of radially-arranged channels along the circumferential direction of the air holes, and the annular grooves are communicated with the air holes through the channels.

The polishing disc fixing device as described above, wherein the plurality of channels are uniformly distributed along the circumferential direction of the air hole.

Compared with the prior art, the utility model has the advantages as follows:

the polishing disk fixing device of the utility model has the advantages that the polishing disk can be connected on the fixed disk in a vacuum adsorption mode by arranging the air holes and the annular grooves communicated with the air holes, thereby not only realizing the axial limiting of the optical disk, but also simplifying and facilitating the operations of the disassembly and the installation of the polishing disk; through setting up spacing subassembly, realized polishing dish radial spacing to make polishing dish can be reliable connect on the fixed disk.

Drawings

The drawings are only intended to illustrate and explain the present invention and do not limit the scope of the invention. Wherein:

fig. 1 is a schematic structural view of a polishing disc fixing device according to the present invention;

fig. 2 is a schematic view showing the structure of a fixed platter in the polishing platter fixing unit shown in fig. 1.

The reference numbers illustrate:

100. fixing the disc;

110. a bonding surface; 111. an annular groove; 112. a channel;

120. a mounting surface;

130. a peripheral side wall;

140. air holes;

200. a limiting block; 210. chamfering;

300. and (7) polishing the disc.

Detailed Description

In order to clearly understand the technical solution, purpose and effect of the present invention, the detailed embodiments of the present invention will be described with reference to the accompanying drawings. Where adjective or adverbial modifiers "" upper "" and "" lower "" are used merely to facilitate relative reference between groups of terms, and do not describe any particular directional limitation on the modified terms. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

As shown in fig. 1 and 2, the present invention provides a polishing disk fixing device, which includes a fixing disk 100 and a limiting component, wherein:

the fixed disk 100 is substantially cylindrical, the fixed disk 100 is provided with a peripheral side wall 130, a combining surface 110 and a mounting surface 120 which are oppositely arranged, the combining surface 110 can be attached to the polishing disk 300, the fixed disk 100 is provided with air holes 140, the air holes 140 are communicated with the combining surface 110 and the mounting surface 120, the combining surface 110 is provided with a plurality of rings of annular grooves 111 which are arranged at intervals, and each annular groove 111 is communicated with the air hole 140;

the limiting assembly includes at least three limiting blocks 200 spaced along the circumferential direction of the fixed disk 100, the limiting blocks 200 are connected to the circumferential side wall 130 of the fixed disk 100, and the center of the fixed disk 100 is located inside a polygon formed by using each limiting block 200 as a vertex, so as to realize radial limiting of the polishing disk 300.

When in use, the polishing disc 300 is arranged on the combining surface 110 of the fixed disc 100 after being grinded according to the requirement of the polishing contact surface required by the silicon wafer, the polishing disc 300 is radially limited by the limit blocks 200 to ensure that the polishing disc 300 does not generate radial displacement relative to the fixed disc 100, then the vacuumizing device is communicated with the air holes 140, and the air holes 140 are communicated with the annular grooves 111, so that the vacuumizing device can pump the air in the annular grooves 111 through the air holes 140, the external pressure is greater than the pressure in the annular grooves 111, the polishing disc 300 is firmly adsorbed on the fixed disc 100, the axial limit of the polishing disc 300 is realized, when the polishing disc 300 needs to be dismounted, only the air pumping is stopped and the vacuumizing device is removed, the external air enters the annular grooves 111 through the air holes 140, and the pressure in the annular grooves 111 is approximately equal to the external pressure, the negative pressure adsorption can be eliminated so that the polishing platter 300 can be removed from the fixed platter 100.

The polishing disk fixing device of the utility model, by arranging the air hole 140 and the annular groove 111 communicated with the air hole 140, enables the polishing disk 300 to be connected to the fixed disk 100 in a vacuum adsorption mode, not only realizes the axial limit of the optical disk, but also enables the disassembly and installation operations of the polishing disk 300 to be simple and convenient; by providing the limit assembly, the radial limit of the polishing platter 300 is achieved, so that the polishing platter 300 can be reliably connected to the fixed platter 100.

Further, as shown in fig. 2, a plurality of rings of annular grooves 111 are provided at equal intervals to make the polishing platter 300 uniformly stressed, thereby ensuring the reliability of the connection between the polishing platter 300 and the fixed platter 100.

Further, each stopper 200 of spacing subassembly is along the circumference equipartition of fixed disk 100, and the distance between two adjacent stoppers 200 equals promptly, and such structure can ensure spacing effect of spacing subassembly to polishing dish 300, the stopper 200 of being convenient for again arranges.

Further, as shown in fig. 1, the outer surface of the limiting block 200 is provided with a chamfer 210, and the chamfer 210 can prevent the edges of the limiting block 200 from scratching the surface of the polishing disc 300 or scratching the surface of the worker.

In one embodiment of the present invention, as shown in fig. 2, an air hole 140 is formed in the center of the fixed disk 100 so that the air in the annular groove 111 can be uniformly pumped.

Further, as shown in fig. 2, a plurality of channels 112 radially arranged are arranged on the joint surface 110 along the circumferential direction of the air hole 140, the plurality of circles of annular grooves 111 are communicated with the air hole 140 through the channels 112, that is, one end of the channel 112 is communicated with the air hole 140, the channels 112 penetrate through the plurality of circles of annular grooves 111, and the arrangement of the channels 112 not only enables the gas in each annular groove 111 to be simultaneously pumped away by the vacuum pumping device, but also can accelerate the speed of pumping the gas in each annular groove 111.

Further, as shown in fig. 2, the plurality of channels 112 are uniformly distributed along the circumferential direction of the air hole 140, so that the air in the annular groove 111 is rapidly pumped away and the polishing disc 300 is uniformly stressed.

The utility model discloses an in the embodiment, be equipped with buckle (not shown in the figure) on the stopper 200, be equipped with on the week lateral wall 130 of fixed disk 100 a plurality ofly with each stopper 200's buckle joint complex draw-in groove (not shown in the figure), the quantity of draw-in groove is not less than the quantity of stopper 200 promptly, the preferred, the quantity of draw-in groove equals with the quantity of stopper 200, through the joint cooperation of buckle and draw-in groove, stopper 200 is connected on the week lateral wall 130 of fixed disk 100.

Alternatively, the stopper 200 is bolted to the peripheral wall 130 of the fixed plate 100, so that the stopper 200 can be easily detached.

Alternatively, the stopper 200 is connected to the circumferential sidewall 130 of the fixed disk 100 by a connecting pin, so that the stopper 200 can be easily detached.

In summary, the polishing disk fixing device of the utility model, by arranging the air hole and the annular groove communicated with the air hole, enables the polishing disk to be connected to the fixed disk in a vacuum adsorption manner, not only realizes axial limiting of the optical disk, but also enables the operations of disassembling and installing the polishing disk to be simple and convenient; through setting up spacing subassembly, realized polishing dish radial spacing to make polishing dish can be reliable connect on the fixed disk.

The above description is only exemplary of the present invention, and is not intended to limit the scope of the present invention. Any person skilled in the art should also realize that such equivalent changes and modifications can be made without departing from the spirit and principles of the present invention. Moreover, it should be noted that the components of the present invention are not limited to the above-mentioned integral application, and various technical features described in the present invention can be selected to be used alone or in combination according to actual needs, so that the present invention naturally covers other combinations and specific applications related to the invention of the present invention.

Claims

1. A polishing disk holding apparatus, comprising:

2. The polishing pad holding apparatus according to claim 1,

and a plurality of circles of the annular grooves are arranged at equal intervals.

3. The polishing pad holding apparatus according to claim 1,

the limiting blocks are provided with buckles, and the side walls of the fixed disc are provided with a plurality of clamping grooves matched with the buckles of the limiting blocks in a clamping mode.

4. The polishing pad holding apparatus according to claim 1,

the limiting blocks are connected to the peripheral side wall of the fixed disc through bolts.

5. The polishing pad holding apparatus according to claim 1,

the limiting block is connected to the peripheral side wall of the fixed disc through a connecting pin.

6. The polishing pad holding apparatus according to claim 1,

the outer surface of the limiting block is provided with a chamfer.

7. The polishing pad holding apparatus according to claim 1,

and the limiting blocks of the limiting assembly are uniformly distributed along the circumferential direction of the fixed disc.

8. The polishing pad holding apparatus according to any one of claims 1 to 7,

the air hole is formed in the center of the fixed disc.

9. The polishing pad holding apparatus according to claim 8,

and a plurality of radially-arranged channels are arranged on the joint surface along the circumferential direction of the air holes, and the annular grooves are communicated with the air holes through the channels.

10. The polishing pad holding apparatus according to claim 9,

the channels are uniformly distributed along the circumferential direction of the air holes.