CN215896355U - Bearing device and detection equipment - Google Patents

Abstract

The application provides a bearing device and detection equipment. The bearing device comprises a bearing part and a base. The bearing part is provided with a bearing surface, the bearing surface is provided with an adsorption hole and is used for bearing a workpiece, and the bearing surface is soft and deformable; the base is used for installing the carrier, the base is equipped with the gas pocket, the gas pocket with the adsorption hole intercommunication, and be used for with the work piece adsorb in the loading face. In the bearing device and the detection equipment, the bearing part is provided with the bearing surface which has a soft structure and can be deformed, when a workpiece is borne on the bearing surface, the microstructure on the surface of the workpiece can be protected from being damaged, the bearing surface is provided with the adsorption hole, the base is provided with the air hole, and the workpiece is adsorbed on the bearing surface by the adsorption hole and the air hole which are communicated with each other for detection, so that the detection precision of the detection equipment on the workpiece is improved.

Description

Bearing device and detection equipment

Technical Field

The application relates to the technical field of semiconductor detection, in particular to a bearing device and detection equipment.

Background

In the field of semiconductor detection, most substrates need to be placed on a bearing table so as to be convenient for detecting the surface of the substrate, but the contact surface of some substrates and the bearing table is not protected by a film, so that the substrates and microstructures on the substrates are directly contacted with the bearing table, and the microstructures on the surface of the substrates are damaged.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a bearing device and detection equipment.

The bearing device package bearing piece and the base of the embodiment of the application. The bearing part is provided with a bearing surface, the bearing surface is provided with an adsorption hole and is used for bearing a workpiece, and the bearing surface is soft and deformable; the base is used for installing the carrier, the base is equipped with the gas pocket, the gas pocket with the adsorption hole intercommunication, and be used for with the work piece adsorb in the loading face.

In some embodiments, the carrier is glued to the base.

In some embodiments, the perimeter of the carrier wraps around the perimeter of the base.

In some embodiments, the carrying device further includes an air pumping unit, the base includes a first chassis including a first side, the carrying member is mounted on the first side of the first chassis, the first chassis is provided with the air hole, the air hole is communicated with the adsorption hole, and the air pumping unit is configured to pump air to the air hole to adsorb the workpiece on the carrying surface.

In some embodiments, the first base plate further includes a second side opposite to the first side, the base further includes a second base plate mounted on the second side of the first base plate, an outer edge of the second side of the first base plate and/or an outer edge of the first side of the second base plate is provided with a protrusion for spacing the first base plate and the second base plate to form a cavity, and the air exhaust unit is mounted on the second side of the second base plate.

In some embodiments, the carrier further comprises a seal mounted between the first and second chassis and adapted to seal an outer periphery of the cavity.

In some embodiments, the carrying surface can carry workpieces of different sizes corresponding to at least a partial region of the chamber, and the carrying device further comprises a plurality of sealing members corresponding to the at least a partial region, each of the plurality of sealing members being mounted between the first base plate and the second base plate, each of the plurality of sealing members being configured to seal the at least a partial region.

In some embodiments, the carrying device further includes an air valve, the air valve is installed on the second side of the second chassis and extends into the cavity, and the air valve is communicated with the air pumping unit and is used for adjusting the flow rate of the air flow passing through the air hole when the air pumping unit pumps the air hole.

In some embodiments, the bearing device further includes a pressing structure, where the pressing structure includes a plurality of pressing members and a mounting member, and the plurality of pressing members are distributed at an edge of the mounting member and used for pressing the edge of the workpiece against the bearing surface.

In some embodiments, the pressing structure further includes a driving member connected to the mounting member and configured to drive the mounting member to move so as to drive the pressing member to press or release the edge of the workpiece.

In some embodiments, the mounting member is provided with a through hole for providing an inspection space for an inspection device to inspect surface defects of the workpiece.

In some embodiments, the pressing structure includes a plurality of pressing structures for pressing the edges of the workpieces with different sizes on the bearing surface, and the mounting member with a smaller size is inserted into the through hole of the mounting member with a larger size.

In some embodiments, the carrying device further includes a rotating structure, and the rotating structure is connected to the base and is configured to drive the base and the carrying member to rotate.

The detection device of the embodiment of the application comprises a detection device and the bearing device of any one of the above embodiments, wherein the detection device corresponds to the bearing device and is used for detecting the workpiece borne on the bearing device.

In the bearing device and the detection equipment, the bearing part is provided with the bearing surface, the bearing surface is provided with the soft structure and can deform, when a workpiece is borne on the bearing surface, the microstructure on the surface of the workpiece can be protected from being damaged, the bearing surface is provided with the adsorption hole, the base is provided with the air hole, and the adsorption hole and the air hole which are communicated can ensure that the microstructure on the surface of the workpiece is not damaged, so that the workpiece is smoothly adsorbed on the bearing surface to be detected by the detection equipment, and the detection precision of the detection equipment on the workpiece is improved.

Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a perspective view of a load bearing device according to certain embodiments of the present disclosure;

FIG. 2 is a schematic perspective sectional view of the carrier shown in FIG. 1 taken along line II-II;

FIG. 3 is an exploded perspective view of a carrier and a workpiece according to certain embodiments of the present disclosure;

FIG. 4 is a schematic view of the radial distribution of the adsorption holes on the carrier in the carrier device according to some embodiments of the present disclosure;

FIG. 5 is a schematic view of a carrier having a net-shaped distribution of adsorption holes in a carrier according to some embodiments of the present disclosure;

FIG. 6 is a schematic view of a radar-like distribution of adsorption holes on a carrier in a carrier device according to some embodiments of the present disclosure;

FIG. 7 is a schematic view of the carrier having the holes in the carrier device according to some embodiments of the present disclosure;

fig. 8 is a schematic view illustrating a matrix distribution of adsorption holes on a carrier in a carrier device according to some embodiments of the present application;

FIG. 9 is a schematic view of the circumferential distribution of the adsorption holes on the carrier in the carrier device according to some embodiments of the present disclosure;

FIG. 10 is a schematic perspective view of a detection apparatus according to certain embodiments of the present application.

Detailed Description

Embodiments of the present application will be further described below with reference to the accompanying drawings. The same or similar reference numbers in the drawings identify the same or similar elements or elements having the same or similar functionality throughout.

In addition, the embodiments of the present application described below in conjunction with the accompanying drawings are exemplary and are only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the present application.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

Referring to fig. 1 to 3, a carrying device 100 according to an embodiment of the present disclosure includes a carrying component 10 and a base 30. The bearing member 10 is provided with a bearing surface 11, the bearing surface 11 is provided with an adsorption hole 13 and is used for bearing the workpiece 200, and the bearing surface 11 is soft and deformable; the base 30 is used for installing the bearing member 10, and the base 30 is provided with an air hole 31, wherein the air hole 31 is communicated with the absorption hole 13 and is used for absorbing the workpiece 200 on the bearing surface 11.

The workpiece 200 includes, but is not limited to, a wafer, a chip, a ceramic substrate, a display screen panel, a front cover of a mobile phone, a rear cover of a mobile phone, VR glasses, AR glasses, a cover plate of a smart watch, a glass, a lens, a housing of any device (e.g., a mobile phone housing), and the like. The surface of the workpiece 200 after the machining process has many microstructures, and the microstructures of the workpiece 200 often contain important information.

In the field of semiconductor detection, most of substrates (workpieces) need to be placed on a bearing table so as to be convenient for detecting the surface of the substrate, but the surface of the substrate, which is in contact with the bearing table, is not protected by a film, so that the substrate and microstructures on the substrate are directly in contact with the bearing table, and the microstructures on the surface of the substrate are damaged.

In the carrying device 100 of the present application, the carrying member 10 is provided with the carrying surface 11, the carrying surface 11 has a soft structure and is deformable, when the workpiece 200 is carried on the carrying surface 11, the microstructure on the surface of the workpiece 200 can be protected from being damaged, the carrying surface 11 is provided with the adsorption hole 13, the base 30 is provided with the air hole 31, and the workpiece 200 is smoothly adsorbed on the carrying surface 11 for the detection of the detecting device 300 (shown in fig. 10) on the premise that the adsorption hole 31 and the air hole 13 are communicated to ensure that the microstructure on the surface of the workpiece 200 is not damaged, thereby improving the detection accuracy of the detecting device 300 on the workpiece 200.

Referring to fig. 2 and 3, the shape of the supporting member 10 may be circular, rectangular, triangular or other shapes, and the shape of the supporting member 10 may be set according to the shape of the workpiece 200. The shape of the carrier 10 is not limited in the present application, and the carrier 10 will be described in detail below as being circular.

The entire supporting member 10 may be made of soft materials such as silicone, styrene butadiene rubber, chlorosulfonated polyethylene rubber, ethylene propylene rubber, butadiene rubber, chloroprene rubber, etc., so that the supporting surface 11 in the supporting member 10 has better soft characteristics and can be deformed. When the work piece 200 without the protection of the film is placed on the carrying surface 11, the carrying surface 11 can prevent the microstructure of the surface of the carrying surface facing the work piece 200 from being damaged. Alternatively, only a portion of the carrier 10 for carrying the workpiece 200 is made of a soft material such as silicone, styrene butadiene rubber, chlorosulfonated polyethylene rubber, ethylene propylene rubber, butadiene rubber, chloroprene rubber, and the like, so that the carrying surface 11 for carrying the workpiece 200 has a soft structure and can be deformed, and the rest of the carrier 10 may be made of a material such as metal or ceramic, and thus the carrier 10 can have good rigidity and flatness.

Further, the carrying surface 11 may be provided with an absorption hole 13, and the absorption hole 13 penetrates through the carrying member 10 and is used for absorbing the workpiece 200 on the carrying surface 11.

In one embodiment, the number of the suction holes 13 may be one, and when the number of the suction holes 13 is one, the suction holes 13 may be annular suction holes distributed around the center of the carrier 10, or the suction holes 13 may be grooves distributed along the diameter of the carrier 10 to suck the workpiece 200 onto the carrying surface 11 through the suction holes 13.

In another embodiment, the number of the suction holes 13 may be multiple, and the multiple suction holes 13 are distributed on the surface of the carrying surface 11. For example, the plurality of suction holes 13 are unevenly distributed on the carrying surface 11: a plurality of adsorption holes 13 are radially distributed on the bearing surface 11, as shown in fig. 4; alternatively, the plurality of adsorption holes 13 are distributed on the bearing surface 11 in a net shape, as shown in fig. 5; alternatively, the plurality of suction holes 13 are distributed on the carrying surface 11 in a radar pattern, as shown in fig. 6; alternatively, the plurality of suction holes 13 are distributed on the carrying surface 11 in a zigzag manner, as shown in fig. 7; for another example, the plurality of suction holes 13 are uniformly distributed on the carrying surface 11: the plurality of adsorption holes 13 are distributed in a matrix form, as shown in fig. 8; alternatively, the plurality of suction holes 13 are circumferentially distributed on the carrying surface 11, as shown in fig. 9. The plurality of non-uniformly distributed or uniformly distributed adsorption holes 13 can evenly adsorb the workpiece 200 on the bearing surface 11, thereby ensuring the flatness of the workpiece 200.

Referring to fig. 2, the base 30 is used for mounting the supporting member 10. In one embodiment, the base 30 and the carrier 10 can be detachably connected, for example, when the entire carrier 10 is made of a soft material, the carrier 10 can be bent and deformed, and the periphery of the carrier 10 is wrapped around the periphery of the base 30, that is, the carrier 10 has a portion of structure capable of bending toward the periphery of the base 30 to wrap around the periphery of the base 30. Alternatively, the carrier 10 is mounted on the base 30 by screwing the carrier 10 to the base 30. The carrier 10 and the base 30 are detachably connected to each other, so that the carrier 10 can be replaced easily, for example, by replacing the carrier 10 with a different size, or by replacing the carrier 10 with a different material, or by replacing the carrier 10 with a different degree of depreciation.

In another embodiment, the mounting manner of the base 30 and the carrier 10 may be a non-detachable mounting manner, for example, when the entire carrier 10 is made of a soft material, the carrier 10 may be mounted to the base 30 by gluing, specifically, by gluing the base 30 on the side of the carrier 10 opposite to the carrying surface 11; alternatively, the periphery of the carrier 30 is wrapped around the periphery of the base 30, and the carrier 10 is glued to the base 30, so that the carrier 10 is more stably mounted on the base 30. Alternatively, the carrier 10 is fixedly mounted on the base 30 by welding. The supporting member 10 is mounted on the base 30 in a non-detachable manner, so that the supporting member 10 can be mounted more stably, and when the supporting device 100 drives the workpiece 200 to rotate, the supporting member 10 cannot be thrown out.

Referring to fig. 2, specifically, the base 30 is provided with air holes 31, the air holes 31 are communicated with the adsorption holes 13, and the number of the air holes 31 is the same as the number of the adsorption holes 13, so that the air holes 31 are in one-to-one correspondence with and communicated with the adsorption holes 13, thereby realizing the communication of the air passages, and the workpiece 200 can be adsorbed on the bearing surface 11 when the air holes 31 are subjected to air suction processing. The arrangement of the air holes 31 is consistent with the arrangement of the adsorption holes 13, so that the air holes 31 on the base 30 correspond to the adsorption holes 31 of the bearing member 10 one to one, which is not described herein again.

The carrying apparatus 100 may further include an air pumping unit 50, wherein the air pumping unit 50 is configured to pump the air holes 31 to form a negative pressure in the air holes 31 and the adsorption holes 13 communicating with the air holes 31, so as to adsorb the workpiece 200 on the carrying surface 11. Specifically, the air pumping unit 50 may be a vacuum pump, and the vacuum pump performs a vacuum process on the air holes 31, so that the adsorption holes 13 communicating with the air holes 31 form a negative pressure, so that the workpiece 200 can be flatly adsorbed on the bearing surface 11.

Referring to fig. 2 and 3, in one embodiment, the base 30 may include a first chassis 32 and a second chassis 33, a mounting hole (not shown) is formed on an outer periphery of the first chassis 32, a mounting hole 34 is formed on an outer periphery of the second chassis 33, the first chassis 32 and the second chassis 33 may be mounted by sequentially passing the mounting hole 34 of the second chassis 33 and the mounting hole of the first chassis 32 through screws, so as to connect the first chassis 32 and the second chassis 33, and the first chassis 32 and the second chassis 33 are spaced apart to form a cavity 35.

Specifically, the first chassis 32 includes first and second opposing sides 321, 322, the second chassis 33 also includes first and second opposing sides 331, 332, and the second side 322 of the first chassis 32 is opposite to the first side 331 of the second chassis 33. The carrier 10 is mounted to the first side 321 of the first chassis 32. When the periphery of the carrier 10 is wrapped around the periphery of the base 30, the periphery of the carrier 10 may be embedded between the first chassis 32 and the second chassis 33, or the periphery of the carrier 10 may be embedded in the second side 332 of the second chassis 33.

The first chassis 32 is provided with an air hole 31, the air hole 31 penetrates through the first chassis 32 and corresponds to the adsorption hole 13, and the air hole 31 is communicated with the adsorption hole 13 so as to form a communicated air passage between the bearing member 10 and the first chassis 32. Meanwhile, the second chassis 33 is provided with a through hole 333, the through hole 333 penetrates through the second chassis 33, the air suction unit 50 mounted on the second side 332 of the second chassis 33 performs air suction processing on the cavity 35 through the through hole 333, so that the air hole 31 communicated with the cavity 35 forms negative pressure, and thus the bearing surface 11 forms negative pressure, the workpiece 200 borne on the bearing surface 11 is adsorbed on the bearing surface 11, and the flatness of the workpiece 200 borne on the bearing surface 11 is ensured to a certain extent.

Specifically, the outer edge of the second side 322 of the first chassis 32 and/or the outer edge of the first side 331 of the second chassis 33 may be provided with a protrusion 323(334), the protrusion 323(334) being used to space apart the first chassis 32 and the second chassis 33 to form the cavity 35.

In one embodiment, the outer edge of the second side 322 of the first chassis 32 may also be provided with a protrusion 323, in which case the second chassis 33 may not be provided with a protrusion 323, the protrusion 323 serving to space the first chassis 32 from the second chassis 33 to form the cavity 35. The number of the protrusions 323 may include a plurality of protrusions 323, the plurality of protrusions 323 are located at edges of concentric circles of different sizes of the first chassis 32, each protrusion 323 is used to enclose a region of a different size, the regions of different sizes all belong to the cavity 35, and there is a containment relationship between the regions of different sizes. For example, when the protrusion 323 includes two, the larger-sized region includes the smaller-sized region, and the entire cavity 35 is formed. The plurality of protrusions 323 located at the edges of the concentric circles of different sizes of the first base plate 32 divide the cavity 35 into regions of different sizes, so as to control the air pressure in the different regions.

In another embodiment, in order to form the cavity 35 at an interval between the first chassis 32 and the second chassis 33, a protrusion 334 may be provided on an outer edge of the first side 331 of the second chassis 33, and in this case, the first chassis 32 may not be provided with the protrusion 323. Likewise, the number of the protrusions 334 may include a plurality of protrusions 334, the plurality of protrusions 334 are located at the edges of the concentric circles with different sizes of the second chassis 33, each protrusion 334 is used for enclosing an area with different sizes, the areas with different sizes all belong to the cavity 35, and there is a containment relationship between the areas with different sizes. For example, when the protrusion 334 includes two, the larger-sized region includes the smaller-sized region, and the entire cavity 35 is formed. The plurality of protrusions 334 are located at the edges of the concentric circles with different sizes of the second base plate 33, so that the cavity 35 is divided into areas with different sizes, and the air pressure in the different areas can be controlled.

In yet another embodiment, the outer edge of the second side 322 of the first chassis 32 may be provided with a protrusion 323, the outer edge of the first side 331 of the second chassis 33 may be provided with a protrusion 334, and the protrusion 323 of the first chassis 32 is opposite to and interferes with the protrusion 334 of the second chassis 33 to space the first chassis 32 from the second chassis 33 to form the cavity 35. Similarly, the number of the protrusions 323 of the first chassis 32 may include a plurality, the number of the protrusions 334 of the second chassis 33 may include a plurality, the number of the protrusions 323 of the first chassis 32 is the same as that of the protrusions 334 of the second chassis 33, and the plurality of the protrusions 323 of the first chassis 32 and the protrusions 334 of the second chassis 33 opposite to each other and interfering with each other partition the cavity 35 into regions with different sizes, so as to control the air pressure in different regions.

Further, the diameter of the first bottom plate 32 is larger than that of the second bottom plate 33, and the side wall 324 of the first bottom plate 32 extends to a height higher than that of the protrusion 323 of the first bottom plate 32, so that the side wall 324 of the first bottom plate 32 can surround the outer edge of the second bottom plate 33 to further close the cavity 35 formed between the first bottom plate 32 and the second bottom plate 33, thereby preventing air leakage from the cavity 35 and ensuring that the workpiece 200 can be stably attached to the carrying surface 11.

Referring to fig. 2 and 3, in one embodiment, the carrier 100 may further include a sealing member 70, and the sealing member 70 is installed between the first bottom plate 32 and the second bottom plate 33 and is used for sealing the outer edge of the cavity 35.

In particular, the seal 70 may be annular in shape for sealing the outer edge of the cavity 35, i.e. for sealing the gap between the protrusion 323 of the first chassis 32 and/or the protrusion 334 of the second chassis 33, such that the cavity 35 forms a closed air cavity. The sealing element 70 can be made of rubber materials such as NBR nitrile rubber, HNBR hydrogenated nitrile rubber, SIL silicone rubber, VITON fluorine rubber, EPDM ethylene propylene diene monomer rubber, CR chloroprene rubber, IIR butyl rubber and the like, the material of the sealing element 70 can also be other soft materials, and the material of the sealing element 70 is not limited in the application.

The protrusion 323 of the first chassis 32 or the protrusion 334 of the second chassis 33 may be opened with a slot 36, and the sealing member 70 is accommodated in the slot 36. Similarly, the number of the sealing members 70 is the same as that of the protrusions 323(334), and a plurality of the sealing members 70 are installed between the first bottom plate 32 and the second bottom plate 33 to form the closed air chambers in different regions of the cavity 35.

Referring to fig. 2, in one embodiment, the carrying surface 11 can carry workpieces 200 of different sizes, at least a partial region of the cavity 35 corresponding to the workpieces 200 of different sizes, and the sealing member 70 corresponding to the at least partial region to seal at least a partial region of the cavity 35. For example, the load-bearing surface 11 can carry a workpiece 200 of a first size and a workpiece 200 of a second size, the cavity 35 including a first region 351 and a second region 352 (both circular portions carrying the workpiece 200), the second region 352 having a size (diameter) greater than the size (diameter) of the first region 351, and the second region 352 including the first region 351. Wherein the second size is larger than the first size. Specifically, in the embodiment of the present application, the first size may be 8 inches, the second size may be 12 inches, the carrying surface 11 may be provided with a plurality of areas as required to accommodate the workpieces 200 with different sizes, the first size is not limited to 8 inches, for example, the size may be 7 inches, 6 inches, 5 inches, 4 inches, 3 inches, 2 inches, etc., the second size is not limited to 12 inches, 17 inches, 16 inches, 15 inches, 14 inches, 13 inches, 11 inches, etc., and it is only necessary to satisfy that the second size is greater than the first size. The specific locations of the protrusions 323 of the first chassis 32 and the protrusions 334 of the second chassis 33 may be set according to the sizes of different workpieces 200, such that different sized workpieces 200 correspond to different regions of the cavity 35.

Referring to fig. 3, in an embodiment, the carrying device 100 may further include an air valve 40, the air valve 40 is mounted on the second side 332 of the second chassis 33 and extends into the cavity 35, and the air valve 40 is communicated with the air pumping unit 50 and is used for adjusting the flow rate of the air flowing through the air hole 31 when the air pumping unit 50 pumps the air hole 31.

Specifically, the air valve 40 is installed in the through hole 333 of the second chassis 33 and connected to the air pumping unit 50 through a vent pipe (not shown), and when the air pumping unit 50 performs air pumping, the flow rate of the air flow of the air pumping unit 50 through the through hole 333 is controlled by adjusting the air valve 40, so as to control the flow rate of the air flow passing through the air hole 31. When the adjustment air valve 40 increases the flow rate of the air flow of the pumping unit 50 pumping the through hole 333, the workpiece 200 can be quickly adsorbed on the carrying surface 11.

Referring to fig. 2 and 3, further, the second bottom plate 33 corresponding to the first region 351 of the cavity 35 and the second bottom plate 33 corresponding to the second region 352 of the cavity 35 are both provided with through holes 333, so as to control the air pressure in different regions of the cavity 35.

In the present application, the carrier 100 absorbs the workpiece 200 on the carrying surface 11 through the air holes 31 and the absorption holes 13, and compared with pressing the workpiece 200 on the carrying surface 11, the carrier 100 in the present application can protect the microstructure on the surface of the workpiece 200 from being damaged,

referring to fig. 2, in an embodiment, the carrying device 100 may further include a pressing structure 80, and the pressing structure 80 includes a pressing element 81 and a mounting element 83. The pressing members 81 may include one or more pressing members, and when the pressing members 81 include a plurality of pressing members, the plurality of pressing members 81 are distributed on the edge of the mounting member 83 and are used for pressing the edge of the workpiece 200 against the bearing surface 11.

Specifically, the pressing pieces 81 are distributed uniformly on the edge of the mounting piece 83, so as to press the edge of the warped workpiece 200 against the edge of the bearing surface 11, so that the warped workpiece 200 is pressed flat, and the cavity 35 can be sealed. More specifically, each pressing piece 81 may include a threaded post 811 and a pressing portion 812. Each pressing portion 812 has a cylindrical shape. The threaded post 811 is connected to the pressing portion 812 to attach the pressing portion 812 to the edge of the mounting member 83. The pressing part 812 may be made of a soft material to prevent the edge portion of the workpiece 200 from being scratched when the pressing part 812 presses the edge of the workpiece 200. The soft material may be rubber material such as NBR nitrile rubber, HNBR hydrogenated nitrile rubber, SIL silicone rubber, VITON fluorine rubber, EPDM ethylene propylene diene monomer rubber, CR chloroprene rubber, IIR butyl rubber, etc. The threaded post 811 may be made of a metal material or may be made of a rubber material. The material of the threaded post 811 is not limited by the present application.

The mounting member 83 includes a mounting plate 831 and a through hole 832, a mounting hole 833 is provided at an edge of the mounting plate 831, the number of the mounting holes 833 is identical to the number of the pressing members 81, the mounting holes 833 are circumferentially distributed on the mounting plate 831 and correspond to the size of the workpiece 200, and the screw post 811 of the pressing member 81 is engaged with the mounting hole 833 to mount the pressing member 81 on the mounting member 83.

When the number of the pressing structures 80 is one, the through hole 832 of the mount 83 may be used to provide a detection space for the detection apparatus 300 to detect a defect of the surface of the workpiece 200.

In one embodiment, the pressing structure 80 may further include a driving member 85, wherein the driving member 85 is connected to the mounting member 83 and is used for driving the mounting member 83 to move so as to drive the pressing member 81 to press or release the edge of the workpiece 200.

Specifically, the driving member 85 may be a driving element such as a motor, a cylinder, or the like. The driving member 85 lowers or raises the mounting member 83 along the axis of the bearing surface 11, so that the pressing member 81 mounted on the mounting member 83 presses or releases the edge of the workpiece 200. Here, the pressing structure 80 may include two driving members 85, the two driving members 85 are installed at opposite sides of the installation plate 831, and the two driving members 85 simultaneously drive the installation part 83 to move, so that the pressing members 81 installed on the installation part 83 can smoothly press the edge of the workpiece 200.

In the embodiment of the present application, the pressing structures 80 include a plurality of pressing structures 80 for pressing the edges of the workpieces 200 with different sizes on the carrying surface 11, and the mounting members 83 with smaller sizes are inserted into the through holes 832 of the mounting members 83 with larger sizes.

Referring to fig. 3, in particular, the number of the pressing structures 80 is the same as the number of the size types of the workpieces 200 that can be carried by the carrying surface 11. For example, when the carrying surface 11 can carry workpieces 200 of two sizes (8 inches and 12 inches), the number of the pressing structures 80 includes two, each of the pressing structures 80 includes a pressing member 81, a mounting member 83 and a driving member 85, for example, a pressing structure 80a with a larger size and a pressing structure 80b with a smaller size, the through hole 832a of the mounting member 83a is larger than the through hole 832b of the mounting member 83b, so as to accommodate at least a part of the pressing structure 80b in the through hole 832a of the pressing structure 80a with the larger size, and at the same time, provide a detection space for the detection device 300 to detect defects on the surface of the workpieces 200 with different sizes. Further, the mounting member 83b with a smaller size may further include a protrusion 834, the protrusion 834 extends from one side of the mounting plate 831b to the bearing surface 11, the protrusion 834 is disposed in the through hole 832a of the pressing structure 80a with a larger size, and a mounting hole (not shown) is opened at the bottom of the protrusion 834, and the pressing member 81b is mounted in the mounting hole at the bottom of the protrusion 834.

When the size of the workpiece 200 carried on the carrying surface 11 is 12 inches, the driving member 85b of the pressing structure 80b with smaller size can be controlled to drive the mounting plate 83b to ascend, and the driving member 85a of the pressing structure 80a with larger size can be controlled to drive the mounting plate 83a to descend so as to press the edge of the workpiece 200, so that the inspection device 300 can detect the defect on the entire surface of the 12 inches workpiece 200. When the size of the workpiece 200 carried on the carrying surface 11 is 8 inches, the driving member 85a of the pressing structure 80a with larger size can be controlled to drive the mounting plate 83a to ascend, and the driving member 85b of the pressing structure 80b with smaller size can be controlled to drive the mounting plate 83b to descend so as to press the edge of the workpiece 200, and the inspection apparatus 300 can inspect the defect on the surface of the workpiece 200 through the through hole 832b with smaller size.

Referring to fig. 3, in an embodiment, the carrier 100 may further include a rotating structure 90, and the rotating structure 90 is connected to the base 30 and is configured to drive the base 30 and the carrier 10 to rotate, so as to detect the workpiece 200 in a rotating state.

Specifically, the rotating structure 90 is mounted on the second side 322 of the second chassis 32 and connected to an external motor, and the motor drives the rotating structure 90 to rotate, so as to drive the base 30 and the bearing member 10 mounted on the base 30 to rotate, thereby detecting the workpiece 200 borne on the bearing surface 11 in a rotating state.

Referring to fig. 10, the present application further provides a detection apparatus 1000, wherein the detection apparatus 1000 includes a detection device 300 and the carrying device 100 of any of the above embodiments, wherein the detection device 300 corresponds to the carrying device 100 and is used for detecting the workpiece 200 carried on the carrying device 100.

Referring to fig. 3, in the carrying device 100 of the present application, the carrying member 10 is provided with a carrying surface 11, the carrying surface 11 has a soft structure and is deformable, when the workpiece 200 is carried on the carrying surface 11, the microstructure on the surface of the workpiece 200 can be protected from being damaged, the carrying surface 11 is provided with an absorption hole 13, the base 30 is provided with an air hole 31, and the workpiece 200 is flatly absorbed on the carrying surface 11 for the detection by the detection device 300 on the premise that the absorption hole 31 and the air hole 13 are communicated to ensure that the microstructure on the surface of the workpiece 200 is not damaged, so as to improve the detection accuracy of the detection device 300 on the workpiece 200.

In the description herein, reference to the description of the terms "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present application, "a plurality" means at least two, e.g., two, three, unless specifically limited otherwise.

Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations of the above embodiments may be made by those of ordinary skill in the art within the scope of the present application, which is defined by the claims and their equivalents.

Claims (13)

1. A load bearing device, comprising:

the bearing part is provided with a bearing surface, the bearing surface is provided with an adsorption hole and is used for bearing a workpiece, and the bearing surface is soft and deformable; and

the base, the base is used for the installation hold carrier, the base is equipped with the gas pocket, the gas pocket with the adsorption hole intercommunication, and be used for with the work piece adsorb in the loading end.

2. The carrier as claimed in claim 1, wherein the carrier is glued to the base; and/or

The periphery of the bearing piece is wrapped on the periphery of the base.

3. The carrying device according to claim 1, further comprising an air pumping unit, wherein the base comprises a first bottom plate, the first bottom plate comprises a first side, the carrying member is mounted on the first side of the first bottom plate, the first bottom plate is provided with the air hole, the air hole is communicated with the adsorption hole, and the air pumping unit is used for pumping air to the air hole to adsorb the workpiece on the carrying surface.

4. The carrying device according to claim 3, wherein the first chassis further comprises a second side opposite to the first side, the base further comprises a second chassis mounted on the second side of the first chassis, an outer edge of the second side of the first chassis and/or an outer edge of the first side of the second chassis is provided with a protrusion for spacing the first chassis and the second chassis to form a cavity, and the air pumping unit is mounted on the second side of the second chassis.

5. The carrier as claimed in claim 4 further comprising a seal mounted between the first and second chassis and adapted to seal an outer periphery of the cavity.

6. The carrier as claimed in claim 4, wherein the carrying surface is capable of carrying workpieces of different sizes corresponding to at least a partial region of the cavity, and the carrier further comprises a plurality of seals corresponding to the at least a partial region, each of the plurality of seals being mounted between the first and second base plates, each of the plurality of seals being configured to seal the at least a partial region.

7. The carrying device according to claim 4, further comprising an air valve, the air valve being installed on the second side of the second chassis and extending into the cavity, the air valve being communicated with the air pumping unit and being configured to adjust a flow rate of the air flowing through the air hole when the air pumping unit pumps the air hole.

8. The carrying device according to any one of claims 1 to 7, further comprising a pressing structure, wherein the pressing structure comprises a plurality of pressing members and a plurality of mounting members, and the plurality of pressing members are distributed at the edge of the mounting members and are used for pressing the edge of the workpiece against the carrying surface.

9. The carrier as claimed in claim 8, wherein the pressing structure further comprises a driving member connected to the mounting member and configured to drive the mounting member to move to drive the pressing member to press or release the edge of the workpiece.

10. The carrier device as claimed in claim 8, wherein the mounting member is provided with a through hole for providing a detection space for a detection device to detect surface defects of the workpiece.

11. The apparatus as claimed in claim 10, wherein the pressing structure comprises a plurality of pressing structures for pressing the edges of the workpieces with different sizes on the carrying surface, and the mounting member with smaller size is disposed through the through hole of the mounting member with larger size.

12. The carrying device as claimed in claim 1, further comprising a rotating structure connected to the base for rotating the base and the carrying member.

13. A detection apparatus, comprising:

a detection device; and

the carrier according to any one of claims 1 to 12, wherein the inspection device corresponds to the carrier and is used for inspecting a workpiece carried on the carrier.

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