CN217543304U

CN217543304U - Bearing device and detection equipment

Info

Publication number: CN217543304U
Application number: CN202121353906.3U
Authority: CN
Inventors: 陈鲁; 金建高; 张鹏斌; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2021-06-17
Filing date: 2021-06-17
Publication date: 2022-10-04
Anticipated expiration: 2031-06-17

Abstract

The application provides a bearing device and detection equipment. The bearing device comprises a base, a bearing piece and a positioning assembly. The base includes the first side and the second side that carry on the back mutually, and the base is equipped with the through-hole that runs through first side and second side, and first side is equipped with the adsorption tank with through-hole spaced. The bearing part is provided with a bearing surface and a binding surface opposite to the bearing surface, the bearing surface is provided with an adsorption hole, the adsorption hole is used for adsorbing a workpiece on the bearing surface, the binding surface is matched with the upper surface of the first side and seals the adsorption groove, and the bearing part is also provided with a matching piece. The positioning assembly comprises a positioning piece, and the positioning piece is matched with the matching piece to position the bearing piece. In the bearing device of this application, the vacuum adsorption through the location of locating component and adsorption tank will hold the carrier and be fixed in the base accurately to the different carriers of quick replacement improve check out test set's work efficiency, and satisfy the demand that a check out test set is compatible polytype holds the carrier, make check out test set can detect the work piece of different grade type.

Description

Bearing device and detection equipment

Technical Field

The application relates to the technical field of semiconductor detection, in particular to a bearing device and detection equipment.

Background

With the development of semiconductor inspection technology, workpieces of different types (such as taiko wafers, hoop wafers, common wafers, etc.) need to be supported on different types of supporting parts for inspection, so that the functions of inspection equipment need to be diversified more and more, and in order to meet the increasing demands for inspection diversification, one inspection equipment is required to be compatible with multiple wafers, so that supporting parts suitable for wafers of different types need to be designed, and a supporting device capable of rapidly replacing the supporting parts of different types needs to be designed, so that the inspection efficiency is improved.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a bearing device and detection equipment.

The bearing device comprises a base, a bearing piece and a positioning assembly. The base comprises a first side and a second side which are back to back, the base is provided with a through hole which penetrates through the first side and the second side, and the first side is provided with an adsorption groove which is spaced from the through hole. The bearing piece is provided with a bearing surface and a binding surface opposite to the bearing surface, the bearing surface is provided with an adsorption hole, the adsorption hole is used for adsorbing a workpiece on the bearing surface, the binding surface is matched with the upper surface of the first side and seals the adsorption groove, and the bearing piece is further provided with a matching piece. The positioning assembly comprises a positioning piece, and the positioning piece is matched with the matching piece to position the bearing piece.

In some embodiments, the bearing member further includes an annular boss deviating from the bearing surface, the annular boss is provided with an accommodating cavity, the fitting member corresponds to the accommodating cavity, and the accommodating cavity is used for accommodating the positioning assembly. The binding surface is the lower surface of the annular boss.

In some embodiments, the carrier further comprises a first mounting surface located between the carrying surface and the abutting surface. The first mounting surface is provided with an air hole which is communicated with the adsorption hole.

In some embodiments, a partition wall is formed between the through hole and the adsorption groove, and the partition wall is provided with a through hole communicating the through hole and the adsorption groove. The bearing device further comprises an air pumping unit which is communicated with the through hole through an air pipe and used for pumping air to the adsorption tank so as to adsorb the bearing piece on the upper surface of the base.

In some embodiments, the base is opened with a communication hole penetrating through an inner wall of the through hole and an outer side surface of the base. The bearing device further comprises a first joint, an air pumping unit and a pipeline. The first joint is arranged on the outer side surface of the base and communicated with the communication hole. The air pumping unit penetrates through the through hole. The air extraction unit is communicated with the communication hole through the pipeline.

In some embodiments, the bearing device further comprises a second joint, the second joint is mounted on the first mounting surface of the bearing piece, one end of the second joint is communicated with the air hole, and the other end of the second joint is communicated with the first joint through a pipeline.

In some embodiments, the bearing device further includes an air pumping unit, the positioning assembly further includes a base body, the base body is fixedly connected to the movable member of the air pumping unit, and an upper surface of the base body is higher than an upper surface of the base. The positioning piece is arranged on the upper surface of the base body and used for being matched with the matching piece on the bearing piece.

In some embodiments, the number of positioning members is singular.

In some embodiments, the number of the positioning elements is at least three, an included angle is formed between each two adjacent positioning elements and a central connecting line of the base, and in all the included angles formed, at least one included angle is different from the other included angles.

In certain embodiments, the carrier further comprises a plurality of sensor assemblies mounted to the base, each sensor assembly comprising a mount and a transceiver, the mount being mounted to the base. The transceiver install in the mounting bracket, the transceiver includes transmitting terminal and receiving terminal, the transmitting terminal is used for to the receiving terminal transmission signal, the receiving terminal is used for receiving the signal that the transmitting terminal was launched, the transceiver is used for producing instruction information according to the signal that receives, in order to instruct the type that holds the piece.

In some embodiments, the carrier further comprises a second mounting surface opposite the carrying surface, the second mounting surface being located between the first mounting surface and the abutting surface of the carrier, the second mounting surface being mounted with a barrier sheet for cooperating with the transceiver to generate the indication information.

In some embodiments, the type of the bearing member is multiple, each type of the bearing member is used for bearing one type of the workpiece, and when the matching piece of one type of the bearing member is disengaged from the positioning member and detached from the base, the matching piece of the other type of the bearing member and the positioning member can be matched and mounted on the base.

In some embodiments, the carriers comprise a first type of carrier for carrying a first type of workpiece. The first type bearing piece is provided with a slot, the bearing surfaces are distributed on two sides of the slot, and the slot is used for providing a carrying space for carrying the first type workpiece for the carrying piece.

In some embodiments, the first type bearing member has an adsorption hole in an arc-shaped section distributed in a circular shape around the center of the first type bearing member, and the bearing surface of the first type bearing member is further provided with an air discharge groove distributed in a radial direction around the center of the first type bearing member, the air discharge groove being in communication with the adsorption hole of the first type bearing member.

In some embodiments, the outer edges of the first type of carrier are provided with stops for stopping the first type of workpiece.

In some embodiments, the carrier comprises a second type of carrier for carrying a second type of workpiece. The second type holds carrier and includes two relative archs, bellied upper surface does the bearing surface that the second type held carrier, two form between the arch and dodge the groove, it is used for the carrier transport to dodge the groove the second type work piece provides the transport space.

In some embodiments, the adsorption hole of the second type bearing part is arc-shaped around the center of the second type bearing part, an inclined plane is arranged at one end of the inner side wall of the avoiding groove close to the adsorption hole, and the inclined plane is used for reducing the contact area between the second type workpiece and the bearing surface.

In some embodiments, the second type carrier is provided with a stopper, which is mounted on an outer edge of the second type carrier and is used for stopping the second type workpiece.

In certain embodiments, the carriers comprise a third type of carrier for carrying a third type of workpiece. The third type bearing piece is provided with a first mounting surface, the first mounting surface is provided with an air hole, the third type bearing piece is provided with a groove, and the groove is communicated with the air hole.

In some embodiments, the third type of carrier comprises a porous ceramic structure, an upper surface of the porous ceramic structure being a load-bearing surface of the third type of carrier. And the micropores on the porous ceramic structure form adsorption holes of the third type bearing piece, and the adsorption holes of the third type bearing piece are communicated with the grooves.

In some embodiments, the third type of bearing element is provided with a third mounting surface between the bearing surface and the first mounting surface of the third type of bearing element, and the third type of bearing element further comprises a plurality of supporting elements, the plurality of supporting elements are mounted on the third mounting surface, and the upper surfaces of the plurality of supporting elements are flush with the bearing surface.

The detection device of the embodiment of the application comprises a detection device and the bearing device of any one of the above embodiments, wherein the detection device corresponds to the bearing device and is used for detecting the workpiece borne on the bearing device.

In the bearing device and the detection equipment of the application, on the one hand, the bearing part is provided with the fitting piece, and the positioning assembly in the bearing device comprises a positioning piece which is matched with the fitting piece, so that the bearing part to be installed on the base is positioned, and the bearing part is accurately borne on the base. On the other hand, the loading end that holds carrier is equipped with the absorption hole, holds carrier's binding face and the cooperation of the upper surface of the first side of base and seals the adsorption tank, will hold carrier positioning back on the base utilizing the cooperation of setting element and fitting piece, carries out the processing of bleeding to sealed adsorption tank again to the carrier that will bear on the base adsorbs in the upper surface of the first side of base. Therefore, the bearing device and the detection equipment can accurately fix the bearing part on the base through the positioning of the positioning assembly and the vacuum adsorption of the adsorption groove, the bearing part is prevented from being fixed in a screw mode, the different types of bearing parts can be replaced quickly, the working efficiency of the detection equipment is improved, and meanwhile, the requirement that one detection equipment is compatible with multiple types of bearing parts is met, so that the detection equipment can detect workpieces of different types.

Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the present application.

Drawings

The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a perspective view of a load bearing device according to certain embodiments of the present disclosure;

FIG. 2 is an exploded perspective view of the carrier shown in FIG. 1;

FIG. 3 is a schematic perspective view of a carrier and a first type of workpiece according to some embodiments of the present disclosure;

FIG. 4 is a schematic perspective cross-sectional view of the carrier shown in FIG. 3 taken along line IV-IV;

FIG. 5 is a perspective view of a second type of carrier of the carrier of certain embodiments of the present application;

FIG. 6 is a schematic perspective cross-sectional view of the carrier shown in FIG. 5 taken along line VI-VI;

FIG. 7 is a perspective view of a third type of load bearing member of the load bearing apparatus according to some embodiments of the present disclosure;

FIG. 8 is a schematic perspective cross-sectional view of the carrier of FIG. 7 taken along line VIII-VIII;

FIG. 9 is a schematic perspective view of a detection apparatus according to certain embodiments of the present disclosure.

Detailed Description

Embodiments of the present application will be further described below with reference to the accompanying drawings. The same or similar reference numbers in the drawings identify the same or similar elements or elements having the same or similar functionality throughout.

In addition, the embodiments of the present application described below in conjunction with the accompanying drawings are exemplary and are only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the present application.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

Referring to fig. 1 to 3, a carrying device 100 according to an embodiment of the present disclosure includes a base 10, a carrying component 30, and a positioning assembly 50. The base 10 comprises a first side 11 and a second side 12 which are opposite to each other, the base 10 is provided with a through hole 13 which penetrates through the first side 11 and the second side 12, and the first side 11 is provided with an adsorption groove 14 which is separated from the through hole 13; the bearing member 30 is provided with a bearing surface 301 and a fitting surface 302 opposite to the bearing surface 301, the bearing surface 301 is provided with an adsorption hole 303, the adsorption hole 303 is used for adsorbing the workpiece 200 on the bearing surface 301, the fitting surface 302 is matched with the upper surface 151 of the first side 11 and seals the adsorption groove 14, and the bearing member 30 is further provided with a matching member 304; the positioning assembly 50 includes a positioning member 51, and the positioning member 51 cooperates with the mating member 304 to position the carrier 30.

The workpiece 200 includes, but is not limited to, a wafer, a chip, a ceramic substrate, a display screen panel, a front cover of a mobile phone, a rear cover of a mobile phone, VR glasses, AR glasses, a cover plate of a smart watch, a glass, a lens, a housing of any device (e.g., a mobile phone housing), and the like. When the workpiece 200 is a wafer, different types of wafers need to be carried on the different types of carriers 30 for inspection, wherein the wafers may include wafers (taiko wafers) processed by taiko process, and when the taiko process grinds the wafers, a portion of the outer edge of the wafer about 3mm is retained, and only the inner portion of the wafer is ground. The wafer may be a normal wafer that can be carried on the carrier 30 for inspection without being subjected to a film-coating process. Or the wafer may be an iron ring wafer which is mounted on the carrier 30 for inspection after being filmed by using an iron ring frame. The types of wafers are not limited to the three mentioned above, and may be other types of wafers. The present application will be described in detail only by taking the workpiece 200 as a wafer, and the workpiece 200 is similar to a wafer in other types of devices, and will not be described in detail.

Referring to fig. 1 and fig. 2, in the carrying device 100 of the present application, on one hand, the carrying element 30 is provided with a matching element 304, and the positioning assembly 50 in the carrying device 100 includes a positioning element 51, and the positioning element 51 is matched with the matching element 304 to position the carrying element 30 to be installed on the base 10, so as to accurately carry the carrying element 30 on the base 10. On the other hand, the carrying surface 301 of the carrier 30 is provided with an absorption hole 303, the absorption hole 303 is used for absorbing the workpiece 200 on the carrying surface 301, and the attaching surface 302 of the carrier 30 is matched with the upper surface 151 of the first side 11 of the base 10 to seal the absorption groove 14; after the carrier 30 is positioned on the susceptor 10 by the engagement between the positioner 51 and the engaging member 304, the sealed adsorption tank 14 is evacuated, so that the carrier 30 supported on the susceptor 10 is adsorbed on the upper surface 151 of the first side 11 of the susceptor 10. Therefore, the carrier device 100 and the inspection apparatus 1000 (shown in fig. 9) of the present application precisely fix the carrier 30 on the base 10 by positioning the positioning assembly 50 and vacuum-absorbing the absorption groove 14, thereby avoiding fixing the carrier 30 by using screws or the like, facilitating quick replacement of different types of carriers 30, improving the working efficiency of the inspection apparatus 1000, and simultaneously satisfying the requirement that one inspection apparatus 1000 is compatible with multiple types of carriers 30, thereby enabling the inspection apparatus 1000 to inspect different types of workpieces 200 (shown in fig. 3).

The shape of the base 10 may be circular, rectangular, triangular or other shapes, and the shape of the base 10 may be set according to the shapes of the workpiece 200 and the carrier 30. In the embodiment of the present application, the outer side surface 19 of the base 10 may include a circular arc section and a tangent plane section, wherein the tangent plane section facilitates the installation of other components of the carrying device 100 on the outer periphery of the base 10.

In the embodiment of the present application, the base 10 is provided with a through hole 13 penetrating through the first side 11 and the second side 12, the shape of the through hole 13 may be circular, rectangular or other shapes, and the positioning component 50 penetrates through the through hole 13 to be matched with the matching component 304, so that the specific shape of the through hole 13 may be set according to the shape of the positioning component 50, so as to facilitate the positioning component 50 to penetrate through the through hole 13. In the present application, the shape of the through hole 13 is described in detail by taking as an example a circular shape.

In the embodiment of the present application, the first side 11 of the base 10 may be provided with a protrusion 15, the protrusion 15 is provided with a suction groove 14, an upper surface 151 of the protrusion 15 is used for bearing the bearing member 30, and a portion of the base 10 other than the protrusion 15 may be used for mounting other components of the bearing device 100. In other embodiments, the upper surface of the base 10 is planar (i.e., without the projections 15), and the planar surface is used to carry the carrier 30. The present application will be described in detail with reference to the upper surface 151 of the bump 15 as an example of the upper surface of the base 10.

Specifically, the susceptor 10 may be formed of a ceramic material to ensure a high flatness of the upper surface 151 of the susceptor 10. Preferably, the flatness of the upper surface 151 of the susceptor 10 may be in a range of [5.0 μm,10.0 μm ], for example, the flatness of the upper surface 151 of the susceptor 10 is 5.0 μm, 5.3 μm, 5.5 μm, 5.8 μm, 6.0 μm, 6.2 μm, 6.3 μm, 6.5 μm, 6.8 μm, 7.0 μm, 7.3 μm, 7.5 μm, 7.8 μm, 8.0 μm, 8.3 μm, 8.5 μm, 8.8 μm, 9.0 μm, 9.3 μm, 9.5 μm, 9.8 μm, or 10.0 μm, etc., and when the upper surface 151 of the susceptor 10 having a high flatness is mated with the carrier 30, the adsorption groove 14 can be sealed to prevent air leakage from the adsorption groove 14.

Referring to fig. 2 and fig. 4, in the embodiment of the present application, the supporting member 30 may further include an annular boss 305 departing from the supporting surface 301, the annular boss 305 has a receiving cavity 3051, the mating member 304 corresponds to the receiving cavity 3051, and the receiving cavity 3051 may be used to receive the positioning element 50. In some embodiments, the abutment surface 302 of the carrier 30 is the lower surface 3052 of the annular boss 305.

Further, the annular boss 305 may further include a plurality of openings 3053, and the plurality of openings 3053 may be uniformly distributed on the side surface of the annular boss 305 and communicate with the receiving cavity 3051, so as to reduce the weight of the supporting element 30. Of course, in other embodiments, the plurality of holes 3053 may be irregularly distributed on the side of the annular boss 305.

More specifically, the bearing member 30 may be made of a ceramic material to ensure that the abutting surface 302 (the lower surface 3052 of the annular boss 305) has a high flatness, and similarly, the flatness of the abutting surface 302 may be in the same range as that of the upper surface 151 of the susceptor 10, so that the abutting surface 302 and the upper surface 151 of the susceptor 10 can be tightly abutted to seal the adsorption groove 14, and when the air pumping unit 70 performs air pumping processing on the adsorption groove 14, air leakage of the adsorption groove 14 can be effectively prevented. Since the carrier device 100 fixes the carrier 30 on the susceptor 10 by vacuum adsorption of the adsorption groove 14, the carrier 30 can be prevented from shaking or moving during the movement of the carrier 30.

Referring to fig. 2, in the embodiment of the present application, a partition wall 16 is formed between the through hole 13 and the adsorption tank 14, the partition wall 16 is provided with a through hole 161, and the through hole 161 communicates the through hole 13 and the adsorption tank 14. The carrying device 100 may further include an air suction unit 70, wherein the air suction unit 70 is partially disposed through the through hole 13 and is communicated with the through hole 161 through an air pipe (not shown) to perform air suction treatment on the adsorption groove 14 communicated with the through hole 161, so that the air pressure in the adsorption groove 14 is negative pressure, and the carrying member 30 carried on the susceptor 10 is adsorbed on the upper surface 151 of the susceptor 10. The adsorption of the adsorption groove 14 can prevent the carrier 30 mounted on the susceptor 10 from shaking or moving during the movement of the carrier 100.

Referring to fig. 3, in some embodiments, the carrying device 100 may further include a bottom plate 20, the bottom plate 20 is disposed on the second side 12 of the base 10, and the air-extracting unit 70 is mounted on the bottom plate 20 and penetrates through the through hole 13. Specifically, one end of the air-extracting unit 70 can be fixedly mounted on the base plate 20 by means of a screw connection, and the other end of the air-extracting unit 70 is connected with the positioning assembly 50.

In some embodiments, the air extracting unit 70 is communicated with the adsorption tank 14 through an air pipe, so that a communicated air path is formed between the air extracting unit 70 and the adsorption tank 14, and the air extracting unit 70 can perform air extracting treatment on the adsorption tank 14. Specifically, one end of the air pipe is connected to the air suction unit 70, and the other end is connected to the through hole 161, so that an air path communicating between the air suction unit 70 and the adsorption tank 14 is formed to perform air suction processing on the adsorption tank 14.

In an embodiment of the present application, the carrying device 100 may include an air valve assembly 40, wherein the air valve assembly 40 is used for connecting the air pipe and the air pumping unit 70 and/or connecting the pipeline and the air pumping unit 70. Specifically, the air valve assembly 40 may include a first valve assembly 41, a second valve assembly 42, a third valve assembly 43, and a fourth valve assembly 44.

In certain embodiments, the carrier 100 may include only the first valve assembly 41. The first valve assembly 41 is mounted to an end of the pumping cell 70 remote from the base plate 20. Wherein one end of the first valve assembly 41 is communicated with the air pumping unit 70, the other end of the first valve assembly 41 is communicated with the through hole 161 through the air pipe, thereby forming a communicating air path between the air extracting unit 70 and the adsorption tank 14 so as to perform an air extracting process on the adsorption tank 14 to fix the bearing member 30 borne on the susceptor 10. In addition, compared with the carrying device 100 in which the air tube is directly connected to the air pumping unit 70, the carrying device 100 connected to the air pumping unit 70 through the first valve assembly 41 can effectively prevent the air leakage at the connection between the air pumping unit 70 and the air tube.

In certain embodiments, the carrier 100 may include only the second valve assembly 42. Specifically, the second valve assembly 42 is mounted to the partition wall 16 and communicates with the bore 161. At this time, one end of the air tube is directly connected to the air extracting unit 70, and the other end of the air tube is communicated with the through hole 161 through the second valve assembly 42, so that a communicating air path is formed between the air extracting unit 70 and the adsorption tank 14, so as to perform an air extracting process on the adsorption tank 14, and fix the bearing member 30 borne on the base 10. In addition, compared with the carrying device 100 in which the air pipe directly communicates with the through hole 161, the carrying device 100 in which the second valve assembly 42 communicates with the through hole 161 can effectively prevent the air leakage at the connection between the air pipe and the through hole 161.

In some embodiments, the carrying device 100 may include a first valve assembly 41 and a second valve assembly 42, wherein the first valve assembly 41 is installed at an end of the air pumping unit 70 far from the bottom plate 20, the second valve assembly 42 is installed at the partition wall 16 and is communicated with the through hole 161, one end of the first valve assembly 41 is communicated with the air pumping unit 70, and the other end of the first valve assembly 41 is connected with the second valve assembly 42 through an air pipe, so as to form a communicating air path between the air pumping unit 70 and the adsorption tank 14, so as to perform an air pumping process on the adsorption tank 14, so as to fix the carrying element 30 carried on the susceptor 10. The bearing device 100 is connected with the air extraction unit 70 through the first valve assembly 41, and the second valve assembly 42 is connected with the through hole 161, so that the air leakage phenomenon at the position of the air pipe connected with the air extraction unit 70 can be effectively avoided, and the air leakage phenomenon at the position of the air pipe connected with the through hole 161 can be effectively prevented.

Specifically, the quantity of adsorption tanks 14 can include a plurality ofly, and a plurality of adsorption tanks 14 distribute in lug 15, but a plurality of adsorption tanks 14 evenly distributed in lug 15, also non-uniform distribution in lug 15, preferably, a plurality of adsorption tanks 14 evenly distributed in lug 15 to hold carrier 30 and adsorb in base 10 more steadily. In the embodiment of the present application, the number of the adsorption grooves 14 is two, two adsorption grooves 14 are distributed on two sides of the through hole 13, the partition wall 16 between each adsorption groove 14 and the through hole 13 is provided with a through hole 161, and similarly, the number of the valve assemblies in the second valve assembly 42 connected to the through hole 161 is the same as the number of the through holes 161, so that the air pumping unit 70 performs air pumping processing on the adsorption grooves 14 through the air pipe, the second valve assembly 42 and the through holes 161 in sequence, thereby fixing the bearing member 30 borne on the pedestal 10; further, the number of the first valve assemblies 41 connected to the air extracting unit 70 may also be the same as the number of the through holes 161, so that the air extracting unit 70 sequentially passes through the first valve assemblies 41, the air pipes, the second valve assemblies 42 and the through holes 161 (or the first valve assemblies 41, the air pipes and the through holes 161) to perform the air extracting process on the adsorption tank 14, thereby fixing the carrier 30 carried on the susceptor 10 to the susceptor 10. Meanwhile, the two communication modes can realize independent control of each adsorption tank 14 by the air extraction unit 70.

In some embodiments, the base 10 is opened with a communication hole 17, and the communication hole 17 penetrates through the inner wall 131 of the through hole 13 and the outer side surface 19 of the base 10. Specifically, the communication hole 17 is located in the side wall between the two adsorption grooves 14, the communication hole 17 is prevented from communicating with the adsorption grooves 14, and the communication hole 17 communicates with the suction unit 70, so as to perform suction processing on the adsorption hole 303 on the carrier 30, so as to adsorb the workpiece 200 carried on the carrier 30 to the carrier 30. Therefore, two independent air paths are formed between the pedestal 10 and the bearing piece 30 and between the pedestal 10 and the adsorption hole 33, and the adsorption of the bearing piece 30 and the adsorption of the workpiece 200 are respectively realized.

In the embodiment of the present application, the number of the communication holes 17 is two, and the two communication holes 17 are respectively located on two sides of the base 10, specifically, the two communication holes 17 are respectively located on the tangent plane sections of two sides of the outer side surface 19 of the base 10, wherein the number of the third valve assemblies 43 and the number of the fourth valve assemblies 44 may be consistent with the number of the communication holes 17, so as to realize the independent control of each communication hole 17 by the suction unit 70.

In some embodiments, the carrying device 100 may further include a first joint 60 and a pipe (not shown), wherein the pipe may have the same structure as the trachea. The first joint 60 is disposed on the outer side surface 19 of the base 10, and may be disposed on a tangent plane section of the outer side surface 19 of the base 100, and is communicated with the communication hole 17. The suction unit 70 communicates with the communication hole 17 through a pipe. That is, one end of the communication hole 17 located on the outer side surface 19 of the base 10 is connected to the first joint 60, one end of the communication hole 17 located on the through hole 13 is connected to the air-extracting unit 70 through a pipe, and the pipe can be accommodated in the through hole 13. Specifically, the first connector 60 is a pluggable interface to facilitate plugging and unplugging.

In some embodiments, one end of the pipe is connected to the pumping cell 70, and the other end of the pipe is connected to one end of the communication hole 17 at the through hole 13, thereby forming an air path between the pumping cell 70 and the communication hole 17.

In certain embodiments, the carrier 100 can further include a third valve assembly 43, and the third valve assembly 43 is mounted to an end of the suction unit 70 remote from the base plate 20. Wherein one end of the third valve assembly 43 is communicated with the air exhaust unit 70, and the other end of the third valve assembly 43 is communicated with the communication hole 17 through a pipe, so that an air passage is formed between the air exhaust unit 70 and the communication hole 17. In addition, compared with the carrying device 100 in which the pipeline is directly connected with the air extracting unit 70, the carrying device 100 connected with the air extracting unit 70 through the third valve assembly 43 can effectively prevent the air leakage phenomenon at the connection part of the air extracting unit 70 and the pipeline.

In certain embodiments, the carrier 100 may further include a fourth valve assembly 44, where the third valve assembly 43 is absent. The fourth valve assembly 44 is installed on the inner wall 131 of the through hole 13 and communicates with the communication hole 17, and at this time, one end of the pipe is connected with the pumping unit 70 and the other end of the pipe is connected with the fourth valve assembly 44 and communicates with the communication hole 17, thereby forming an air path between the pumping unit 70 and the communication hole 17. In addition, compared with the situation that the pipeline is directly connected with one end of the communication hole 17, which is located at the through hole 13, the bearing device 100 is connected with one end of the communication hole 17, which is located at the through hole 13, through the fourth valve assembly 44, and therefore the phenomenon that the pipeline is connected with the communication hole 17 and air leaks can be effectively prevented.

In some embodiments, the bearing device 100 may include a third valve assembly 43 and a fourth valve assembly 44, the third valve assembly 43 is mounted at one end of the suction unit 70 far from the bottom plate 20, and the fourth valve assembly 44 is mounted at the inner wall 131 of the through hole 13 and communicates with the communication hole 17. One end of the third valve assembly 43 communicates with the suction unit 70, and the other end of the third valve assembly 43 is connected to a pipe and to the fourth valve assembly 44, thereby forming a communicating air path between the suction unit 70 and the communication hole 17. The bearing device 100 is connected with the air extraction unit 70 through the third valve assembly 43, and the fourth valve assembly 44 is connected with the communication hole 17, so that the air leakage phenomenon at the position where the pipeline is connected with the air extraction unit 70 can be effectively prevented, and the air leakage phenomenon at the position where the pipeline is connected with the communication hole 17 can be effectively prevented.

Referring to fig. 2 to 4, in the embodiment of the present application, the fitting element 304 may be a circular hole, and the positioning element 51 of the positioning assembly 50 may be a cylinder. When the supporting member 30 is moved to the base 10, the supporting member 30 is positioned by the cylinder (positioning member 51), and the positioning member 51 is engaged with the engaging member 304 to support the supporting member 30 on the base 10, and then the suction unit 70 is used to perform suction treatment on the suction groove 14 through the air tube and the through hole 161, so as to suck the supporting member 30 on the upper surface 151 of the base 10.

In another embodiment, the fitting element 304 may be a cylindrical positioning element, and the positioning element 51 may be a circular hole, when the supporting element 30 is moved onto the susceptor 10, the positioning element 51 is positioned by the circular hole (the positioning element 51), and the positioning element 51 is matched with the fitting element 304 to support the supporting element 30 on the susceptor 10, and then the suction unit 70 is used to perform suction treatment on the suction groove 14 through the air pipe and the through hole 161, so as to suck the supporting element 30 on the upper surface 151 of the susceptor 10.

In the embodiment of the present application, the carrier 30 further includes a first mounting surface 306, the first mounting surface 306 is located between the carrier surface 301 and the attachment surface 302, the first mounting surface 306 is provided with an air hole 307, the air hole 307 is communicated with the suction hole 303, so as to perform air suction processing on the suction hole 303 through the air hole 307, so as to suck the workpiece 200 carried on the carrier surface 301 onto the carrier surface 301, and when performing rotation detection on the workpiece 200 carried on the carrier surface 301, the workpiece 200 is prevented from deviating or being thrown off the carrier surface 301; meanwhile, the workpiece 200 is adsorbed on the bearing surface 301 through the vacuum adsorption of the adsorption holes 303, so that the workpiece 200 is prevented from being fixed on the bearing surface 301 in a pressing manner, and the workpiece 200 is prevented from being broken due to stress generated by pressing.

Further, the carrying apparatus 100 may further include a second joint 80, the second joint 80 is disposed on the first mounting surface 306, one end of the second joint 80 is communicated with the air hole 307, and the other end of the second joint 80 is communicated with the first joint 60 through a pipeline (not shown), so that a communicated air path is formed between the air hole 307 and the air pumping unit 70, so that the air pumping unit 70 performs air pumping processing on the suction hole 303 through the pipeline, the communication hole 17, the first joint 60, the pipeline, the second joint 80, and the air hole 307, so that the workpiece 200 carried on the carrying surface 301 can be stably carried on the carrying surface 301, and the workpiece 200 can be prevented from deviating or being thrown off the carrying surface 71 during the movement of the carrying member 30.

The second connector 80 may be a pluggable interface to facilitate the plugging and unplugging of the pipeline, the structure of the pipeline may be the same as that of the air pipe structure, one end of the pipeline is connected to the first connector 60, and the other end of the pipeline is connected to the second connector 80. Specifically, when the carrier 30 is fixedly mounted on the susceptor 10, one end of the pipeline is connected to the first connector 60, and the other end of the pipeline is connected to the second connector 80, so that a communicating air path is formed between the pumping unit 70 and the suction hole 303. When another type of the carrier 30 needs to be replaced, the pipeline may be pulled out from the first connector 60, or the pipeline may be pulled out from the second connector 80, so as to detach the carrier 30 mounted on the susceptor 10, so as to mount the another type of the carrier 30 on the susceptor 10, and after the another type of the carrier 30 is mounted on the susceptor 10, the pipeline connected to the first connector 60 may be connected to the second connector 80, or the pipeline connected to the second connector 80 may be connected to the first connector 60, so that a communicating air path is formed between the suction hole 303 of the another type of the carrier 30 and the air suction unit 70.

Referring to fig. 2 to fig. 4, in an embodiment of the present application, the positioning assembly 50 may include a positioning member 51 and a seat body 52, the seat body 52 is fixedly connected to the air-extracting unit 70, an upper surface 521 of the seat body 52 is higher than an upper surface 151 of the base 10, and the positioning member 51 is disposed on the upper surface 521 of the seat body 52 and is used for cooperating with the mating member 304 of the supporting member 30 to position the supporting member 30.

When the positioning element 51 is a positioning column, the positioning element 51 can be fixedly mounted on the upper surface 521 of the base 52 by a screw fixing method. Alternatively, the positioning element 51 may be fixedly mounted on the upper surface 521 of the base 52 by welding.

In one embodiment, the number of the positioning members 51 is singular, e.g., one, three, five, etc., positioning members 51. The positioning members 51 are arranged in a single number, so that when the bearing member 30 is loaded on the base 10, whether the bearing member 30 is correctly installed can be determined by the installation positions of the single positioning members 51, and a foolproof effect is achieved.

In another embodiment, the number of the positioning elements 51 is at least three, and two adjacent positioning elements 51 form an included angle with a central connecting line of the base 10, at least one included angle is different from other included angles among all the formed included angles, and the bearing element 30 can be accurately positioned on the base 10 by the positioning elements 51. For example, the number of the positioning members 51 is three, and of all the included angles formed by the two adjacent positioning members 51 and the central connecting line of the base 10, two of the included angles are 90 °, and the other included angle is 180 °, when the bearing member 30 is placed on the base 10, whether the bearing member 30 is correctly installed can be determined by the installation positions of the three positioning members 51, and the foolproof effect is also achieved.

In the embodiment of the present application, the pumping unit 70 may include a fixed member 71 and a movable member 72. The fixing member 71 may be fixedly mounted to the base plate 20 by a screw connection. The movable member 72 is rotatably mounted on one end of the fixed member 71 away from the bottom plate 20, and the other end of the movable member 72 is fixedly connected to the seat body 52 of the positioning assembly 50, so that the fixed member 51 can support the positioning assembly 50. Specifically, the fixed member 71 and the movable member 72 may be slip rings, the rotating portion of the slip rings is the movable member 72, and the fixed portion of the slip rings is the fixed member 71. The pumping unit 70 may further comprise a pump, such as a vacuum pump, for pumping the suction grooves 14 and the suction holes 303, so as to fix the carrier 30 to the susceptor 10 by vacuum suction through the suction grooves 14, and to suck the workpiece 200 carried on the carrying surface 301 onto the carrying surface 301 by vacuum suction through the suction holes 303.

Specifically, the seat body 52 is provided with an accommodating groove 522 and a duct groove 523, and the accommodating groove 522 is communicated with the duct groove 523. The through hole 524 is formed at the bottom of the receiving groove 522, and the receiving groove 522 is used for receiving the first valve element 41 and/or the third valve element 43, that is, when the carrying apparatus 100 includes the first valve element 41, the receiving groove 522 is used for receiving the first valve element 41; when the carrier 100 includes the third valve assembly 43, the receiving groove 522 is used for receiving the third valve assembly 43; when the carrier 100 includes the first valve assembly 41 and the third valve assembly 43, the receiving groove 522 is used for receiving the first valve assembly 41 and the third valve assembly 43. The receiving slot 522 is provided to facilitate the connection of the first valve assembly 41 and/or the third valve assembly 43 with the pumping unit 70 through the through hole 524, and to provide a receiving space to prevent the first valve assembly 41 and/or the third valve assembly 43 from being too protruded to interfere with the engagement between the engaging member 304 of the carrier 30 and the positioning member 51.

Specifically, the duct groove 523 may include a plurality of duct grooves 523, the duct groove 523 is used for receiving, limiting and guiding the air tube and/or duct, and the duct groove 523 is configured to prevent the air tube and/or duct from being disordered when the air suction unit 70 is communicated with the air suction unit, so as to prevent the fitting element 304 from being fitted with the positioning element 51. For example, the number of the pipe grooves 523 is four, wherein two pipe grooves 523 may be used to receive the air pipes, and the other two pipes may be used to receive the pipes.

Referring to fig. 2, in some embodiments, the carrier 100 may further include a plurality of sensor assemblies 90 mounted on the base 10, each sensor assembly 90 including a mounting frame 91 and a transceiver 92. Wherein the mounting bracket 91 is mounted to the base 10, for example, the mounting bracket 91 may be mounted to a tangent plane section of the outer side surface 19 of the base 10; or the mounting bracket 91 is mounted on the lower surface of the base 10 (the surface opposite to the upper surface 151 of the base 10); or the mounting block 91 is mounted on the outer peripheral portion of the upper surface 151 of the base 10 when the bearing 30 is not influenced to be carried on the upper surface 151 of the base 10.

The transceiver 92 is mounted to the mounting block 91, and may be fixed to the mounting block 91 by means of screws, for example. Specifically, the transceiver 92 comprises a transmitting end 921 and a receiving end 923, wherein the transmitting end 921 is configured to transmit a signal to the receiving end 923, the receiving end 923 is configured to receive the signal transmitted by the transmitting end 921, and the transceiver 92 is configured to generate indication information according to the received signal to indicate the type of the supporting element 30 mounted on the base 10. The transmitting end 921 may transmit an acoustic wave signal, an optical signal, or the like.

In certain embodiments, the number of sensor assemblies 90 is related to the number of types of carriers 30, and assuming that the number of sensor assemblies 90 is n and the maximum number of types of carriers 30 is m, the following relationship is satisfied between the number of sensor assemblies 90 n and the maximum number of types of carriers 30 m: m =2 ⁿ 1, so that the sensor assembly 90 generates indication information according to the type of the carrier 30 carried on the base 10, wherein the indication information is a number consisting of 0 and 1. For example, when the number n of the sensor assemblies 90 is 0, the number m of types of the carriers 30 is also 0. When the number n of the sensor assemblies 90 is 1, the maximum number m of types of the carriers 30 is 1, and at this time, if the indication information is 0, it indicates that no carrier is placed on the base 10, and if the indication information is 1, it indicates that one type of the carrier 30 is placed on the base 10. When the number n of the sensor assemblies 90 is 2 (as shown in the present embodiment), the maximum number m of types of the carriers 30 is 3, which are respectively denoted as a, B, and C, and the two sensor assemblies 90 are respectively denoted as a and B. When different types of carriers 30 are carried on the base 10, the indication generated by the sensor assembly 90 can be as follows:

	a	b
			A	1	0
B	0	1
			C	1	1

that is, when the indication information generated by the two sensor assemblies 90 is "10", it indicates that the type of the carrier 30 is a; when the indication information generated by the two sensor assemblies 90 is "01", it indicates that the type of the bearing member 30 is B; when the indication information generated by the two sensor assemblies 90 is "11", it indicates that the type of the bearing member 30 is C. Therefore, the carrier device 100 can determine the type of the carrier 10 carried on the base 10 according to different indication information, so as to place different types of workpieces 200 on the corresponding carriers 30.

Referring to fig. 2, in some embodiments, the carrier 30 may further include a second mounting surface 308, the second mounting surface 308 is located between the carrying surface 301 and the attaching surface 302, the second mounting surface 308 is mounted with a blocking piece 309, and the blocking piece 309 is used for cooperating with the transceiver 92 to generate the indication information.

Specifically, the first mounting surface 306 may be closer to the mounting surface 301 than the second mounting surface 308; or the first mounting surface 306 may be flush with the second mounting surface 308; or the second mounting surface 308 may be closer to the mounting surface 301 than the first mounting surface 306. The blocking tab 309 is attached to the second mounting surface 308 to facilitate the plugging of the pipeline to the second connector 80 on the first mounting surface 306 or to facilitate the removal of the pipeline from the second connector 80 on the first mounting surface 306.

Referring to fig. 4, in some embodiments, the second side 12 of the base 10 may be provided with a protrusion 18, and the supporting device 100 further includes a driving structure 93, the driving structure 93 is mounted on the bottom plate 20 and connected to the protrusion 18, the driving structure 93 is used for driving the base 10 and the supporting member 30 to rotate, wherein when the supporting member 30 rotates, the supporting member 30 drives the matching member 304, the positioning member 51 and the movable member 72 of the pumping unit 70 to rotate.

Specifically, the driving structure 93 may be a motor, an air cylinder, or other driving devices, and is configured to drive the base 10 and the carrier 30 to rotate, so as to detect the workpiece 200 carried on the carrying surface 301 in a rotating state. Because the positioning element 51 is matched with the fitting element 304, when the supporting element 30 rotates, the positioning element 51 and the base 52 are driven to rotate together, and the design of the movable element 72 can prevent the air tube and/or the pipeline connected to the air pumping unit 70 through the through hole 524 of the base 52 from being entangled, thereby ensuring that the air channels are always communicated in the rotation process of the base 10 and the supporting element 30.

In some embodiments, there are multiple types of the carriers 30, each type of the carriers 30 is used for carrying one type of the workpieces 200, and when the mating member 304 of one type of the carrier 30 is disengaged from the positioning member 51 and detached from the base 10, the mating member 304 of the other type of the carrier 30 and the positioning member 51 can be engaged with and mounted on the base 10.

Referring to fig. 2, each type of the carrier 30 includes the above-mentioned structure of the carrier 30, that is, the abutting surface 302, the fitting member 304, the annular boss 305, the first mounting surface 306, the air hole 307, the second mounting surface 308 and the blocking sheet 309 of each type of the carrier 30 are the same in structure, and each type of the carrier 30 includes the carrying surface 301 and the suction hole 303 with different structures, thereby ensuring that the different types of the carriers 30 can be fitted and fixed on the susceptor 10, and the suction holes 303 of the different types of the carriers 30 can be subjected to air suction by the air suction unit 70.

In the embodiment of the present application, each type of the carrier 30 is mounted to the base 10 in the following manner: the bearing member 30 is supported on the upper surface 151 of the base 10 by the cooperation of the fitting member 304 and the positioning member 51, at this time, the adhering surface 302 of the bearing member 30 is tightly adhered to the upper surface 151 of the base 10, the absorption groove 14 is sealed, and the suction unit 70 performs suction processing on the absorption groove 14, so as to fix the bearing member 30 on the base 10. The way each type of carrier 30 is detached from the base 10 is: the pipe connecting the first joint 60 and the second joint 80 is pulled out from the first joint 60 or the second joint 80, and the suction unit 70 applies positive pressure to the adsorption tank 14 to detach the carrier 30 adsorbed on the susceptor 10. When another type of bearing piece 30 needs to be replaced, the quick replacement is carried out through the installation mode and the disassembly mode, the requirement that the same base 10 is matched with multiple types of bearing pieces 30 is met, and meanwhile, the efficiency of replacing the bearing pieces 30 is improved, so that the efficiency of detecting different types of workpieces 200 is improved.

Referring to fig. 2 and 3, in one embodiment, the carrier 30 includes a first type carrier 31 for carrying a first type of workpiece 201; the first type carrier 31 has a slot 3110, and bearing surfaces 311 are distributed on two sides of the slot 3110, and the slot 3110 is used for providing a carrying space for the carrying member to carry the first type workpiece 201.

Specifically, the first type workpiece 201 may be a common wafer that can be carried on the first type carrier 31 for inspection without being subjected to a film pasting process. Since the first type of workpieces 201 do not need to be subjected to a film coating process, the first type of carrier 31 may be provided with a slot 3110, the shape and size of the slot 3110 is related to the shape and size of a carrier (e.g., a robot), and two openings of the slot 3110 at two ends are located at an outer edge of the first type of carrier 31, so that the carrier extends into the slot 3110 through the openings, thereby carrying the first type of workpieces 201 on the carrying surfaces 311 distributed on two sides of the slot 3110. Meanwhile, the arrangement of the slot 3110 can reduce the contact area between the first type of workpiece 201 and the carrying surface 311, and reduce the damage to the first type of workpiece 200.

In the embodiment of the present application, the suction holes 313 of the first-type bearing 31 are arc-shaped segments distributed in a circular ring shape around the center of the first-type bearing 31, the number of the arc-shaped segments is multiple, the arc-shaped segments are uniformly distributed in the direction from the center of the first-type bearing 31 to the outer edge of the first-type bearing 31, and the upper surfaces of the arc-shaped segments jointly form the bearing surface 311 of the first-type bearing 31. The suction unit 70 can perform suction processing on the suction holes 313 to suck the first type of workpiece 201 on the carrying surface 311.

Further, the carrying surface 311 of the first type carrier 31 is further provided with an exhaust groove 3111, the exhaust groove 3111 is radially distributed along the center of the first type carrier 31 in a circular shape, and the exhaust groove 3111 is communicated with the suction hole 313 of the first type carrier 31. Specifically, the exhaust groove 3111 radiates from the center of the first-type carrier 31 toward the outer edge of the first-type carrier 31 to communicate with the suction holes 313 on both sides of the exhaust groove 3111. The exhaust groove 3111 includes a plurality of exhaust grooves 3111, and the plurality of exhaust grooves 3111 communicate with the plurality of adsorption holes 313 to accelerate the circulation of gas in the plurality of adsorption holes 313, thereby improving the efficiency of exhausting the adsorption holes 313 by the exhausting unit 70. Referring to fig. 4, the air holes 317 are connected to the outermost suction holes 313 (arc-shaped segments), and the exhaust groove 3111 is disposed such that the air pumping unit 70 performs air pumping processing on the suction holes 313 through the air holes 317, thereby sucking the first type of workpiece 201 on the carrying surface 311.

In some embodiments, the outer edge of the first type carrier 31 is provided with a stopper 3112, and the stopper 3112 is used for limiting the first type workpiece 201. The position-limiting member 3112 may be made of a soft material such as rubber, and when the position-limiting member 3112 abuts against the outer edge of the first workpiece 201, the outer edge of the first workpiece 201 can be effectively protected.

Specifically, the retaining members 3112 may include a plurality of retaining members 3112, for example, the retaining members 3112 may include at least three members, when the retaining members 3112 include three members, the three retaining members 3112 are distributed at the outer edge of the first type carrier 31 at intervals, and when the first type workpiece 201 is detected to rotate, the three retaining members 3112 can prevent the first type workpiece 201 carried on the carrying surface 311 from deviating or being thrown off the carrying surface 311.

Referring to fig. 5, in the embodiment of the present application, the carrier 30 (shown in fig. 9) may further include a second type carrier 32 for carrying a second type of workpiece 202; the second type carrier 32 includes two opposite protrusions 3210, the upper surfaces of the two protrusions 3210 are the carrying surfaces 321 of the second type carrier 32, an avoiding groove 3211 is formed between the two protrusions 3210, and the avoiding groove 3211 can be used to provide a carrying space for the carrying member to carry the second type workpiece 202.

Specifically, the second type workpieces 202 may be taiko wafers, and a portion of the edge of the second type workpieces 202 of about 3mm may contact the carrier face 321, while the remaining portion of the second type workpieces 202 may not contact the second type carrier 32.

Specifically, the two protrusions 3210 are arc-shaped, the two protrusions 3210 are opposite to each other to form a gap 3212, the gap 3212 is communicated with the avoiding groove 3211, and the size of the gap 3212 is related to the size of the opening of the carrier for carrying the second type of workpiece 202, so that the carrier for carrying the second type of workpiece 202 can extend into the avoiding groove 3211 from the gap 3212 without affecting the stable carrying of the second type of workpiece 202 on the carrying surface 321, so as to place the second type of workpiece 202 on the carrying surface 321. The number of the gaps 3212 may be one, and at this time, one ends of the two protrusions 3210 are abutted against each other; the number of the spaces 3212 may also be two, in which case both ends of the two projections 3210 are spaced apart.

The suction hole 323 of the second type bearing member 32 is annular around the center of the second type bearing member 32, an inclined surface 3213 is disposed at one end of the inner sidewall 32111 of the avoiding groove 3211, which is close to the suction hole 323, and the inclined surface 3213 is used to reduce the contact area between the second type workpiece 202 and the bearing surface 321.

Referring to fig. 6, the suction holes 323 of the second type bearing member 32 are annular grooves and are distributed on the two protrusions 3210, and the arrangement of the inclined surface 3213 can reduce the contact area between the second type workpiece 202 and the carrying surface 321 while ensuring the strength of the side wall (i.e., the upper portion of the inner side wall 32111) of the suction holes 323 close to the avoiding groove 3211. Specifically, in the direction from the relief groove 3211 to the bearing surface 321, the thickness of the upper portion of the inner sidewall 32111 gradually decreases to form a slope 3213, and the area of the bearing surface 321 is reduced to ensure that the bearing surface 321 only contacts the portion of the edge of the second type workpiece 202 having a size of about 3mm, thereby protecting the integrity of the ground portion of the second type workpiece 200.

When the second type of workpiece 202 is supported on the supporting surface 321, the air-extracting unit 70 (shown in fig. 4) performs an air-extracting process on the absorbing holes 323 through the second joint 80 and the air holes 327, so as to absorb the edge of the workpiece 202 with a size of about 3mm on the supporting surface 321.

In some embodiments, the second type of carrier 32 is also provided with a stop 3214, the stop 3214 being mounted to an outer edge of the second type of carrier 32 and serving to stop the second type of workpiece 202. Specifically, the structure, material and number of the position limiters 3214 of the second type of carrier 32 are respectively the same as those of the position limiters 3112 (shown in fig. 3) of the first type of carrier 31, and are not repeated herein. The outer side surface of the workpiece 202 abuts against the position-limiting element 3214 to limit the second type of workpiece 202, so as to prevent the second type of workpiece 202 from deviating or throwing out of the supporting surface 321.

Referring to fig. 7 and 8, in some embodiments, the carrier 30 (shown in fig. 9) includes a third type carrier 33 for carrying a third type workpiece 203, the third type carrier 33 has a groove 3310, and the groove 3310 is in communication with the air hole 337 in the first mounting surface 336.

Specifically, the third type of workpiece 203 may be a hoop wafer. After the wafer is filmed by the iron ring frame, the carrier 100 places the wafer and the iron ring frame together in the third type carrier 33.

The third type carrier 33 comprises a porous ceramic structure 3311, the upper surface of the porous ceramic structure 3311 is the carrying surface 331 of the third type carrier 33, the carrying surface 331 is used for carrying the wafer, and the rest of the upper surface of the third type carrier 33 can be used for carrying the hoop frame. In one embodiment, a step 33101 is provided within the recess 3310 and a porous ceramic structure 3311 is mounted to the step 33101 and spaced from the bottom of the recess 3310. The air exhausting unit 70 (shown in fig. 4) can exhaust the air from the groove 3310 through the connected air holes 337 to make the air pressure in the groove 3310 negative.

The micro holes on the porous ceramic structure 3311 form adsorption holes (not shown) of the third-type carrier 33, and the micro holes on the porous ceramic structure 3311 penetrate the porous ceramic structure 3311 so that the adsorption holes of the third-type carrier 33 communicate with the grooves 3310. When the wafer of the third type of workpiece 203 is loaded on the loading surface 331, the air-extracting unit 70 performs air-extracting processing on the grooves 3310 through the air holes 337, so that the suction holes become negative pressure, and the third type of workpiece 203 is adsorbed on the loading surface 331.

In an embodiment of the present invention, the third type of carrier 33 may further include a third mounting surface 3312, the third mounting surface 3312 is located between the carrying surface 331 and the first mounting surface 336, the third type of carrier 33 may further include a plurality of supporting members 3313, the plurality of supporting members 3313 are mounted on the third mounting surface 3312, and the upper surfaces 33131 of the plurality of supporting members 3313 are all flush with the carrying surface 331.

The number of the supporting pieces 3313 may be two, three, or more than three for supporting the iron ring frame in the third type of workpiece 203. Specifically, the number of the supporting members 3313 may include six, and six supporting members 3313 are uniformly distributed on the outer periphery of the third type carrier 33, so as to smoothly carry the iron ring frame in the third type workpiece 203 on the upper surfaces 33131 of the six supporting members 3313. The material of the support 3313 may be metal, ceramic, rubber, etc., and the present application does not limit the material of the support 3313.

Referring to fig. 9, the present application further provides a detecting apparatus 1000, the detection apparatus 1000 includes the detection device 400 and the carrying device 100 of any of the above embodiments. Referring to fig. 3, 5 and 7, the inspection device 400 corresponds to the carrier device 100 and is used for inspecting the workpieces 200 (such as the first type of workpiece 201, the second type of workpiece 202 and the third type of workpiece 203) carried on the carriers 30 of different types. The inspection apparatus 400 can inspect the surface defects of the workpieces 200 by capturing images of the workpieces 200 (such as the first type of workpiece 201, the second type of workpiece 202, and the third type of workpiece 203) carried on different types of carriers 30.

Referring to fig. 2 and fig. 9, in the carrying device 100 and the detecting apparatus 1000 of the present application, on one hand, the carrying member 30 is provided with the mating member 304, the positioning assembly 50 in the carrying device 100 includes the positioning member 51, the positioning member 51 cooperates with the mating member 304 to position the carrier 30 to be mounted on the base 10, so as to accurately carry the carrier 30 on the base 10. On the other hand, the carrying surface 301 of the carrier 30 is provided with an absorption hole 303, the absorption hole 303 is used for absorbing the workpiece 200 on the carrying surface 301, and the attaching surface 302 of the carrier 30 is matched with the upper surface 151 of the first side 11 of the base 10 and seals the absorption groove 14; after the carrier 30 is positioned on the susceptor 10 by the engagement between the positioner 51 and the engaging member 304, the sealed adsorption tank 14 is evacuated, so that the carrier 30 supported on the susceptor 10 is adsorbed on the upper surface 151 of the first side 11 of the susceptor 10. Therefore, the loading device 100 and the inspection apparatus 1000 (shown in fig. 9) of the present application precisely fix the loading element 30 on the base 10 by the positioning of the positioning assembly 50 and the vacuum absorption of the absorption groove 14, and the use of screws or the like for fixing the loading element 30 is avoided, so that the loading elements 30 of different types can be rapidly replaced, and the work efficiency of the inspection apparatus 1000 can be improved. Meanwhile, the carriers 30 include a plurality of types, and the pedestals 10 in the carrier device 100 are compatible with the plurality of types of carriers 30, so as to meet the requirement that one inspection apparatus 1000 is compatible with the plurality of types of carriers 30, thereby enabling the inspection apparatus 1000 to inspect different types of workpieces 200.

In the description of the present specification, reference to the description of the terms "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present application, "a plurality" means at least two, e.g., two, three, unless explicitly specifically defined otherwise.

Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations of the above embodiments may be made by those of ordinary skill in the art within the scope of the present application, which is defined by the claims and their equivalents.

Claims

1. A load bearing device, comprising:

the base comprises a first side and a second side which are opposite to each other, the base is provided with a through hole penetrating through the first side and the second side, and the first side is provided with an adsorption groove spaced from the through hole;

the bearing part is provided with a bearing surface and a binding surface opposite to the bearing surface, the bearing surface is provided with an adsorption hole, the adsorption hole is used for adsorbing a workpiece on the bearing surface, the binding surface is matched with the upper surface of the first side and seals the adsorption groove, and the bearing part is also provided with a matching piece; and

the positioning assembly comprises a positioning piece, and the positioning piece is matched with the matching piece to position the bearing piece.

2. The carrying apparatus according to claim 1, wherein the carrying member further comprises an annular projection facing away from the carrying surface, the annular projection is provided with a receiving cavity, the fitting member corresponds to the receiving cavity, and the receiving cavity is used for receiving the positioning assembly; the binding surface is the lower surface of the annular boss.

3. The carrying apparatus of claim 1 wherein the carrying member further comprises a first mounting surface, the first mounting surface being located between the carrying surface and the abutting surface; the first mounting surface is provided with an air hole which is communicated with the adsorption hole.

4. The carrying device as claimed in claim 1, wherein a partition wall is formed between the through hole and the adsorption tank, and the partition wall is provided with a through hole for communicating the through hole with the adsorption tank; bear the device and still include the unit of bleeding, the unit of bleeding pass through the trachea with the perforation intercommunication, and right the adsorption tank is bled and is handled in order will bear the piece and adsorb in the upper surface of base.

5. The carrying device as claimed in claim 1, wherein the base is provided with a communication hole, and the communication hole penetrates through the inner wall of the through hole and the outer side surface of the base; the bearing device further comprises:

the first joint is arranged on the outer side surface of the base and is communicated with the communication hole;

the air extracting unit penetrates through the through hole; and

and the air exhaust unit is communicated with the communication hole through the pipeline.

6. The carrier according to claim 5 further comprising a second connector, wherein the second connector is mounted on the first mounting surface of the carrier, the first mounting surface is opened with an air hole, one end of the second connector is communicated with the air hole, and the other end of the second connector is communicated with the first connector through a pipeline.

7. The carrying device according to claim 1, wherein the carrying device further comprises an air pumping unit, the positioning assembly further comprises a base body, the base body is fixedly connected with the movable member of the air pumping unit, and the upper surface of the base body is higher than the upper surface of the base; the positioning piece is arranged on the upper surface of the seat body and is used for being matched with the matching piece on the bearing piece.

8. The load bearing device of claim 1, it is characterized in that the preparation method is characterized in that, the number of the positioning pieces is singular; or

The number of the positioning pieces is at least three, an included angle is formed between each two adjacent positioning pieces and a central connecting line of the base, and at least one included angle is different from other included angles in all the formed included angles.

9. The carrier as claimed in claim 1, further comprising: a plurality of sensor assemblies mounted to the base, each of the sensor assemblies comprising:

a mounting bracket mounted to the base;

the transceiver, the transceiver install in the mounting bracket, the transceiver includes transmitting terminal and receiving terminal, the transmitting terminal is used for to the receiving terminal transmission signal, the receiving terminal is used for receiving the signal that the transmitting terminal was launched, the transceiver is used for producing instruction information according to the signal of receiving, in order to instruct the type that holds the piece.

10. The carrier device of claim 9, wherein the carrier further comprises a second mounting surface opposite the carrying surface, the second mounting surface being located between the first mounting surface and the abutting surface of the carrier, the second mounting surface being mounted with a blocking tab for cooperating with the transceiver to generate the indication.

11. The carrier according to any of claims 1-10,

the type of the bearing part is multiple, each type of the bearing part is used for bearing one type of the workpiece, and when the matching piece of one type of the bearing part is disengaged from the positioning part and detached from the base, the matching piece of the other type of the bearing part can be matched with the positioning part and installed on the base.

12. The carrier as claimed in claim 11 wherein the carrier comprises a first type of carrier for carrying a first type of workpiece; the first type bearing piece is provided with a slot, bearing surfaces are distributed on two sides of the slot, and the slot is used for providing a carrying space for carrying the first type of workpieces.

13. The apparatus according to claim 12, wherein the suction holes of the first type bearing member are arc-shaped segments distributed in a circular ring shape around the center of the first type bearing member, the bearing surface of the first type bearing member is further provided with air discharge grooves distributed along a radial direction that is circular around the center of the first type bearing member, and the air discharge grooves are communicated with the suction holes of the first type bearing member.

14. The carrier according to claim 12 wherein outer edges of the first type of carrier are provided with stops for stopping the first type of workpiece.

15. The carrier device according to claim 11 wherein the carrier comprises a second type of carrier for carrying a second type of workpiece; the second type holds carrier and includes two relative archs, bellied upper surface does the bearing surface that the second type held carrier, two form between the arch and dodge the groove, it is used for the carrier transport to dodge the groove the second type work piece provides the transport space.

16. The carrying device according to claim 15, wherein the suction holes of the second type carrying member are arc-shaped around the center of the second type carrying member, and an inclined surface is provided at an end of the inner side wall of the avoiding groove close to the suction holes, and the inclined surface is used for reducing a contact area between the second type workpiece and the carrying surface.

17. The carrier as recited in claim 15, the bearing part of the second type is provided with a limiting part, the limiting piece is arranged on the outer edge of the second type bearing piece and used for limiting the second type workpieces.

18. The carrier according to claim 11 wherein the carriers comprise a third type of carrier for carrying a third type of workpiece; the third type bearing piece is provided with a first mounting surface, the first mounting surface is provided with an air hole, the third type bearing piece is provided with a groove, and the groove is communicated with the air hole.

19. The load carrying apparatus of claim 18 wherein the third type of carrier comprises a porous ceramic structure having a top surface that is a load bearing surface of the third type of carrier; and the micropores on the porous ceramic structure form adsorption holes of the third type bearing piece, and the adsorption holes of the third type bearing piece are communicated with the grooves.

20. The load carrying apparatus according to claim 18 wherein the third type of load carrying member has a third mounting surface between the load carrying surface and the first mounting surface of the third type of load carrying member, the third type of load carrying member further comprising a plurality of supporting members, the plurality of supporting members being mounted on the third mounting surface, the upper surfaces of the plurality of supporting members being flush with the load carrying surface.

21. Detection the equipment is characterized in that the equipment comprises a device, which is characterized by comprising

A detection device; and

the carrier of any one of claims 1-20, wherein the inspection device corresponds to the carrier and is adapted to inspect a workpiece carried on the carrier.