CN218666258U - Double-chamber multi-target magnetron sputtering film coating machine - Google Patents

Abstract

The utility model belongs to the technical field of the magnetron sputtering coating film technique and specifically relates to a two rooms multitarget magnetron sputtering coating machine, including the coating machine casing, two coating film rooms have been seted up in the middle of the inside of coating machine casing, the outer wall upper right side of coating film room is linked together with the argon gas jar, the below of argon gas jar is provided with the evacuation machine, the one end and the coating film room of evacuation machine are linked together, the inside below rigid coupling of coating film room has the positive pole, the inner wall both sides of coating machine casing all are provided with rotary device. Through the cooperation between motor, hand wheel, screw rod and the third frame, the screw rod can make the third frame move left, and the third frame cooperatees with the riser of the product other end and fixes the product, and the external power supply of switch-on motor afterwards for the output of motor drives whole rotary device through the second frame and rotates, thereby drives the product rotation with the riser cooperation, makes the product can turn over when the coating film, thereby the time of having practiced thrift, improved the coating film efficiency to the product.

Description

Double-chamber multi-target magnetron sputtering film coating machine

Technical Field

The utility model relates to a magnetron sputtering coating technology field specifically is a two room multitarget magnetron sputtering coating machines.

Background

The magnetron sputtering coating machine is a coating technology that uses coating material as a target cathode, bombards a target structure by argon ions to generate cathode sputtering, and sputters atoms of the target structure onto a workpiece to form a deposition layer.

However, when the existing double-chamber multi-target magnetron sputtering coating machine is used, a product is mostly placed above an anode, and because the product needs to coat films on multiple surfaces, the contact surface of the product and the anode can not be coated by the coating mode, so that the product needs to be turned over for secondary coating, but the temperature of the product just finished with coating is generally higher, the existing double-chamber multi-target magnetron sputtering coating machine can not turn over the product, the product needs to be artificially cooled and then turned over, the used time for coating the product is too long, and the efficiency of coating the product is reduced.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problems that the prior double-chamber multi-target magnetron sputtering coating machine can not turn over the product, and leads to overlong time for coating the product, thereby reducing the efficiency of coating the product and providing the double-chamber multi-target magnetron sputtering coating machine.

In order to achieve the above object, the utility model provides a following technical scheme:

the utility model provides a design two rooms multitarget magnetron sputtering coating machine, includes the coating machine casing, two coating film rooms have been seted up in the middle of the inside of coating machine casing, the upper right side of the outer wall of coating film room is linked together with the argon gas jar, the below of argon gas jar is provided with the evacuation machine, the one end and the coating film room of evacuation machine are linked together, the inside below rigid coupling of coating film room has the positive pole, the inner wall both sides of coating machine casing all are provided with rotary device.

Preferably, the rotating device comprises a motor, a second frame, a hand wheel, a screw rod and a third frame, the outer wall of the motor is fixedly connected with the coating machine shell through a support, the output end of the motor is fixedly connected with the left second frame, the inner wall of the second frame is rotatably connected with the hand wheel through a bearing, the screw rod is fixedly connected to one end of the hand wheel, the outer wall of the screw rod is in threaded connection with the third frame, and the outer wall of the third frame is in sliding connection with the coating machine shell through a sliding groove.

Preferably, one end of the third frame is tightly attached to one end of the product, the other end of the product is tightly attached to the vertical plate, and one side of the vertical plate is rotatably connected with the coating machine shell through a bearing.

Preferably, the upper part in the coating chamber is rotatably connected with the first frame through a rotating shaft.

Preferably, the inner wall of the first frame is fixedly connected with a magnet, and the bottom of the first frame is provided with a coating target material.

The utility model provides a two room multitarget magnetron sputtering coating machine, beneficial effect lies in: through the motor, the second frame, the hand wheel, the cooperation between screw rod and the third frame, rotate the hand wheel, make the hand wheel drive the screw rod and rotate, the screw rod can make the third frame remove left, the third frame cooperatees with the riser of the product other end and fixes the product, switch on the external power supply of motor afterwards, make the output of motor drive whole rotary device through the second frame and rotate, thereby drive the product rotation with the riser cooperation, make the product can turn over when the coating film, thereby save time, the coating film efficiency to the product has been improved.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic front plan view of the internal connection structure of FIG. 1;

FIG. 3 is a schematic view of the connection structure at A in FIG. 2;

fig. 4 is a schematic view of the connection structure at B in fig. 2.

In the figure: 1. the coating machine comprises a coating machine shell, 2, a first frame, 3, a rotating device, 301, a motor, 302, a second frame, 303, a hand wheel, 304, a screw rod, 305, a third frame, 4, an auxiliary device, 401, a pull rod, 402, a spring, 403, a limiting block, 404, a rotary table, 5, a vacuumizing machine, 6, an argon tank, 7, an anode, 8, a product, 9, a coating target material, 10, a magnet, 11 and a coating chamber.

Detailed Description

The present invention will be further explained with reference to the accompanying drawings:

example 1:

referring to fig. 1-4, in the present embodiment: the utility model provides a two room multitarget magnetron sputtering coating machine, including coating machine casing 1, two coating film rooms 11 have been seted up in the middle of coating machine casing 1's the inside, coating film room 11 inside is used for changing into the environment that is fit for the coating film, coating film room 11's outer wall upper right side is linked together with argon gas jar 6, the inside inert gas argon gas of argon gas jar 6 can enter into coating film room 11, argon gas jar 6's below is provided with evacuation machine 5, evacuation machine 5's model is selected according to the actual demand, satisfy the work demand can, evacuation machine 5's one end is linked together with coating film room 11, evacuation machine 5 is with 11 inside vacuums to the pressure vacuum state of coating film room, coating film room 11's inside below rigid coupling has anodal 7, anodal 7 installs the earth connection, coating machine casing 1's inner wall both sides all are provided with and are used for carrying out rotatory rotary device 3 to the product.

Referring to fig. 2 and 3, the rotating device 3 includes a motor 301, a second frame 302, a hand wheel 303, a screw 304 and a third frame 305, an outer wall of the motor 301 is fixedly connected with the coating machine casing 1 through a bracket, the model of the motor 301 is selected according to actual requirements, and the working requirements are met, an output end of the motor 301 is fixedly connected with the second frame 302 on the left side, an output end of the motor 301 drives the second frame 302 to rotate, an inner wall of the second frame 302 is rotatably connected with the hand wheel 303 through a bearing, one end of the hand wheel 303 is fixedly connected with the screw 304, the hand wheel 303 drives the screw 304 to rotate, an outer wall of the screw 304 is in threaded connection with the third frame 305, the screw 304 enables the third frame 305 to move left and right, an outer wall of the third frame 305 is slidably connected with the coating machine casing 1 through a chute, and the coating machine casing 1 limits the third frame 305 to move left and right through the chute;

rotate the hand wheel 303, make the hand wheel 303 drive the screw rod 304 and rotate, the screw rod 304 can make the third frame 305 remove left, the third frame 305 cooperatees with the riser of the product other end and fixes product 8, switch on motor 301's external power supply afterwards, make motor 301's output drive whole rotary device 3 through second frame 302 and rotate, thereby drive product 8 with the riser cooperation and rotate, make product 8 can carry out the turn-over when the coating film, thereby the time is saved, the coating film efficiency to product 8 has been improved.

One end of the third frame 305 is tightly attached to one end of the product 8, the other end of the product 8 is tightly attached to a vertical plate, one side of the vertical plate is rotatably connected with the coating machine casing 1 through a bearing, the third frame 305 is matched with the vertical plate to fix the product 8, meanwhile, the product 8 can be driven to rotate, the inner top of the coating chamber 11 is rotatably connected with the first frame 2 through a rotating shaft, the inner wall of the first frame 2 is fixedly connected with a magnet 10, the magnet 10 is used for enabling the position of the coating target 9 to be in an additional magnetic field, the coating target 9 is installed at the bottom of the first frame 2, and the coating target 9 is a cathode and can be electrified.

The working principle is as follows:

when the double-chamber multi-target magnetron sputtering coating machine is used, firstly, a user sends a product to one end of a third frame 305 through a machine door at the front end of a coating machine shell 1, then rotates a hand wheel 303, so that the hand wheel 303 drives a screw 304 to rotate, the screw 304 can enable the third frame 305 to move leftwards, the third frame 305 is matched with a vertical plate at the other end of the product to fix the product 8, then an external power supply of a motor 301 is switched on, an output end of the motor 301 drives the whole rotating device 3 to rotate through a second frame 302, so that the product 8 is driven to rotate by matching with the vertical plate, so that the product 8 can be turned over during coating, thereby saving time, the coating efficiency of the product 8 is improved, then the user switches on the external power supply of a vacuumizing machine 5, so that the vacuumizing machine 5 pumps the inside of a coating chamber 11 to vacuum pressure, then stops the vacuumizing machine 5, and enables an argon gas tank 6 to be deflated, so that the inert gas argon gas in the coating chamber 11 is used for switching on the external power supply of an anode 7 and a target 9, so that an electric field is generated inside, and a magnet 10 gives a magnetic field to the sputtering coating device for the target product 8, and the target is used for finishing the sputtering coating.

Example 2:

referring to fig. 1, 2 and 4, in the present embodiment: a double-chamber multi-target magnetron sputtering film coating machine is characterized in that an auxiliary device 4 is further arranged above a film coating machine shell 1, the auxiliary device 4 comprises a pull rod 401, a spring 402, a limiting block 403 and a rotary table 404, the pull rod 401 is connected with the film coating machine shell 1 in a sliding mode through a sliding chute, the spring 402 is sleeved on the outer wall of the pull rod 401, the elastic coefficient of the spring 402 is 10-20N/cm, two ends of the spring 402 are fixedly connected with the limiting block 403 and the film coating machine shell 1 respectively, the limiting block 403 moves upwards to compress the spring 402, the spring 402 is made of carbon steel materials, the top of the limiting block 403 is fixedly connected with the pull rod 401, the pull rod 401 drives the limiting block 403 to move, the limiting block 403 is made of rubber materials, the bottom of the limiting block 403 is tightly attached to the rotary table 404, the limiting block 403 is used for limiting rotation of the rotary table 404, the outer wall of the rotary table 404 is rotatably connected with the film coating machine shell 1 through a bearing, the rear end of the rotary table 404 is fixedly connected with a first frame 2, and the rotary table 404 is used for driving the first frame 2 to rotate;

the user upwards pulls pull rod 401 earlier, and pull rod 401 drives stopper 403 rebound, and stopper 403 is not restricting the rotation of carousel 404, and stopper 403 compression spring 402 simultaneously rotates carousel 404 this moment, and carousel 404 drives first frame 2 and rotates, and first frame 2 can drive coating film target 9 and magnet 10 simultaneously and rotate to change the angle of coating film, be convenient for carry out the coating film to anomalous product 8.

The working principle is as follows:

when this auxiliary device 4 uses, the user upwards stimulates pull rod 401 earlier, and pull rod 401 drives stopper 403 rebound, and stopper 403 is not restricting the rotation of carousel 404, and stopper 403 compression spring 402 simultaneously rotates carousel 404 this moment, and carousel 404 drives first frame 2 and rotates, and first frame 2 can drive coating film target 9 and magnet 10 simultaneously and rotate to change the angle of coating film, be convenient for carry out the coating film to anomalous product 8, accomplish the use of this time device.

While the invention has been shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the scope of the appended claims.

Claims (5)

1. A double-chamber multi-target magnetron sputtering coating machine comprises a coating machine shell (1) and is characterized in that: two coating film chambers (11) have been seted up in the middle of the inside of coating film machine casing (1), the outer wall upper right side of coating film chamber (11) is linked together with argon gas jar (6), the below of argon gas jar (6) is provided with evacuation machine (5), the one end and the coating film chamber (11) of evacuation machine (5) are linked together, the inside below rigid coupling of coating film chamber (11) has positive pole (7), the inner wall both sides of coating film machine casing (1) all are provided with rotary device (3).

2. The dual-chamber multi-target magnetron sputtering coating machine according to claim 1, characterized in that: rotating device (3) include motor (301), second frame (302), hand wheel (303), screw rod (304) and third frame (305), the outer wall of motor (301) passes through support and coating machine casing (1) looks rigid coupling, the output and the left second frame (302) looks rigid coupling of motor (301), the inner wall of second frame (302) passes through the bearing and rotates with hand wheel (303) to be connected, the one end rigid coupling of hand wheel (303) has screw rod (304), the outer wall and the third frame (305) threaded connection of screw rod (304), the outer wall of third frame (305) passes through spout and coating machine casing (1) sliding connection.

3. The dual-chamber multi-target magnetron sputtering coating machine of claim 2, wherein: one end of the third frame (305) is tightly attached to one end of the product (8), the other end of the product (8) is tightly attached to the vertical plate, and one side of the vertical plate is rotatably connected with the coating machine shell (1) through a bearing.

4. The dual-chamber multi-target magnetron sputtering coating machine according to claim 1, characterized in that: the upper part in the coating chamber (11) is rotatably connected with the first frame (2) through a rotating shaft.

5. The dual-chamber multi-target magnetron sputtering coating machine of claim 4, wherein: the inner wall of the first frame (2) is fixedly connected with a magnet (10), and the bottom of the first frame (2) is provided with a coating target material (9).

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