CN208701191U - A kind of abnormity aluminium vacuum coating fixed frame - Google Patents
A kind of abnormity aluminium vacuum coating fixed frame Download PDFInfo
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- CN208701191U CN208701191U CN201821394738.0U CN201821394738U CN208701191U CN 208701191 U CN208701191 U CN 208701191U CN 201821394738 U CN201821394738 U CN 201821394738U CN 208701191 U CN208701191 U CN 208701191U
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- vacuum
- fixed frame
- aluminium
- pedestal
- elevating mechanism
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Abstract
The utility model provides a kind of special-shaped aluminium vacuum coating fixed frame, including pedestal, sealing rubber ring, aluminium rotating mechanism, elevating mechanism, crucible, substrate, vacuum (-tight) housing, mounting plate, bracket, vacuum pumping pump and power control cabinet, the sealing rubber ring structure glue are pasted on pedestal；The aluminium rotating mechanism is arranged inside sealing rubber ring；The elevating mechanism is installed on the right side of the base by bolt；The crucible is arranged inside vacuum (-tight) housing, and by being welded and fixed.The setting of the utility model aluminium rotating mechanism, 360 ° of rotations can be realized when special-shaped alumina material carries out plated film, the setting of elevating mechanism, it drives vacuum (-tight) housing to realize the effect for opening closure, improves the mechanization degree of equipment, the setting of novel crucible, by adding evaporated material into crucible, and with high frequency induction current heating crucible and evaporated material, higher deposition rate is made it have, simple substance can be coated with and is not easy the compound film thermally decomposed.
Description
Technical field
The utility model belongs to field of mechanical technique more particularly to a kind of special-shaped aluminium vacuum coating fixed frame.
Background technique
Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, specifically includes many types, wraps
Include vacuum ionic evaporation, magnetron sputtering, MBE molecular beam epitaxy, many kinds such as PLD pulsed laser deposition.Main thought is divided into
Two kinds of evaporation and sputtering, evaporation coating are usually to heat target surface component is made to be evaporated out with atomic group or ionic species.
And it is deposited in substrate surface, film is formed by film forming procedure (scatterplot-island structure-fan walks structure-layer growth).For
Sputter class plated film, can simply be interpreted as using electronics or superlaser bombardment target, and make surface component with atomic group or from
Sub- form is sputtered out, and is eventually deposited at substrate surface, undergoes film forming procedure, ultimately forms film.
China Patent Publication No. is CN 207091504U, a kind of entitled novel aluminum product vacuum coating dress of innovation and creation
It sets, including coating chamber, the coating chamber upper surface is fixedly installed with air accumulator and vacuum instrumentation table, setting inside the coating chamber
There is shock absorber, and one side is fixedly connected with vacuum pump, damper is fixedly installed with inside the vacuum pump, the coating chamber is another
Side is provided with control door and control cabinet, the control door upper end are fixedly installed with high threshold, and the control cabinet upper end is provided with low
Valve, the control cabinet upper surface are fixedly installed with total power switch, and the coating chamber lower end is fixedly installed with connecting rod, the company
Extension bar lower end is provided with idler wheel, and the connecting plate is fixedly connected with the connecting rod by bolt.The utility model can be effectively square
Just the movement of the coating apparatus, saves time and cost, while the service life of the coating apparatus can be improved.Structure novel,
It is easy to operate, there is good promotional value.But existing aluminium vacuum coater is common there is also may be only available for
Conventional aluminium, it is incomplete that there are plated films when for special-shaped alumina material plated film, deposition rate when can not achieve aluminium rotation and plated film
Low problem.
Therefore, a kind of special-shaped aluminium vacuum coating fixed frame is invented to be very necessary.
Utility model content
In order to solve the above-mentioned technical problem, the utility model provides a kind of special-shaped aluminium vacuum coating fixed frame, to solve
There is plating when for special-shaped alumina material plated film there is also may be only available for normal conventional aluminium in existing aluminium vacuum coater
Film is incomplete, deposition rate low problem when can not achieve aluminium rotation and plated film.It is a kind of abnormity aluminium vacuum coating fix
Frame, including pedestal, sealing rubber ring, aluminium rotating mechanism, elevating mechanism, crucible, substrate, vacuum (-tight) housing, mounting plate, bracket are taken out true
Sky pump and power control cabinet, the sealing rubber ring are pasted on pedestal；The aluminium rotating mechanism is arranged inside sealing rubber ring；It is described
The quantity of elevating mechanism is 2, is mounted on the base by bolt, and connect respectively with 2 brackets, one of elevating mechanism
It is sequentially connected with lifting motor and with lifting motor；The crucible is arranged inside vacuum (-tight) housing, and by being welded and fixed；It is described
Substrate is pasted onto the bottom of mounting plate；The mounting plate is mounted on the top of vacuum (-tight) housing by welding；The vacuum (-tight) housing is installed to
On elevating mechanism, raising and lowering is driven by elevating mechanism, cooperatively forms sealing sky when dropping to bottom Shi Nengyu sealing rubber ring
Between；The bracket uses 2, and left upper part and the right end top of pedestal are mounted on by bolt；The vacuum pumping pump setting exists
The left side of sealing rubber ring, and connect by conducting wire with power control cabinet；The upper left quarter of pedestal is arranged in the power control cabinet.
The aluminium rotating mechanism includes adjustable shelf, fixed frame, first bearing, plush copper fixture block, rotating electric machine, motor cabinet,
Sliding slot and shaft coupling, the adjustable shelf are slidably connected by sliding slot and pedestal；The fixed mount setting on the right side of adjustable shelf, and
It is mounted on the base by bolt；The first bearing uses 2, is inlaid in the top of adjustable shelf and fixed frame respectively；It is described
Plush copper fixture block uses 2, is interference fitted respectively with 2 first bearings, wherein the plush copper fixture block being mounted on fixed frame also passes through
Shaft coupling is connect with rotating electric machine；The rotating electric machine is bolted on motor cabinet, and motor cabinet is fixedly mounted on bottom again
On seat；The sliding slot is provided on pedestal.
The elevating mechanism includes lifting motor, gear, toothed chain, transmission shaft, second bearing and crane, and the gear is adopted
With 2, the top and bottom of elevating mechanism are separately mounted to, are connected respectively by corresponding transmission shaft with corresponding second bearing
It connects, second bearing is inlaid on bracket；Wherein the gear and lifting motor close to the lower end of the elevating mechanism of lifting motor are driven
Connection, herein using lifting motor substitution transmission shaft and second bearing, as power output end；The toothed chain engages biography with gear
It is dynamic；One end of the crane is riveted on toothed chain, and the other end is equipped with vacuum (-tight) housing.
The crucible is made boat foil or Filamentous high-frequency induction heating source, deposition rate with higher using tantalum and can be coated with
Simple substance and it is not easy the compound film thermally decomposed.
The end face of the plush copper fixture block offers lines identical with anisotropic aluminium shape, is conducive to be clamped special-shaped alumina material
It is more reliable, it will not there is a situation where slip when rotation.
Compared with prior art, the utility model has the following beneficial effects:
1. the setting of the utility model aluminium rotating mechanism can realize 360 ° of rotations when special-shaped alumina material carries out plated film
Turn, so that plated film is more evenly, comprehensively；
2. the setting of the elevating mechanism of the utility model drives vacuum (-tight) housing to realize the effect for opening closure, improves equipment
Mechanization degree；
3. the setting of the crucible of the utility model adds by adding evaporated material into crucible, and with high frequency induction current
Hot crucible and evaporated material make it have higher deposition rate, can be coated with simple substance and be not easy the compound film thermally decomposed.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the aluminium rotating mechanism structural schematic diagram of the utility model.
Fig. 3 is the elevating mechanism structural schematic diagram of the utility model.
Fig. 4 is the plush copper fixture block schematic diagram of the utility model.
In figure:
1- pedestal, 2- sealing rubber ring, 3- aluminium rotating mechanism, 31- adjustable shelf, 32- fixed frame, 33- first bearing, 34-
Plush copper fixture block, 35- rotating electric machine, 36- motor cabinet, 37- sliding slot, 38- shaft coupling, 4- elevating mechanism, 41- lifting motor, 42- tooth
Wheel, 43- toothed chain, 44- transmission shaft, 45- second bearing, 46- crane, 5- crucible, 6- substrate, 7- vacuum (-tight) housing, 8- mounting plate, 9-
Bracket, 10- vacuum pumping pump, 11- power control cabinet.
Specific embodiment
The utility model is described further below in conjunction with attached drawing:
Embodiment:
As shown in attached drawing 1 to attached drawing 4
The utility model provides a kind of special-shaped aluminium vacuum coating fixed frame, including pedestal 1, sealing rubber ring 2, aluminium rotation
Mechanism 3, elevating mechanism 4, crucible 5, substrate 6, vacuum (-tight) housing 7, mounting plate 8, bracket 9, vacuum pumping pump 10 and power control cabinet 11, it is described close
Sealing rubber ring 2 is pasted on pedestal 1；The aluminium rotating mechanism 3 is arranged inside sealing rubber ring 2；The quantity of the elevating mechanism 4
It is 2, is mounted on pedestal 1 by bolt, and is connect respectively with two brackets 9；The crucible 5 is arranged inside vacuum (-tight) housing 7,
And by being welded and fixed；The substrate 6 is pasted onto the bottom of mounting plate 8；The mounting plate 8 is mounted on vacuum (-tight) housing 7 by welding
Top；The vacuum (-tight) housing 7 is installed on elevating mechanism 4, raising and lowering is driven by elevating mechanism 4, when dropping to bottom
Sealing space can be cooperatively formed with sealing rubber ring 2；The bracket 9 uses 2, and the left upper part of pedestal 1 is mounted on by bolt
With right end top；The left side of sealing rubber ring 2 is arranged in the vacuum pumping pump 10, and is connect by conducting wire with power control cabinet 11；It is described
The upper left quarter of pedestal 1 is arranged in power control cabinet 11.
The aluminium rotating mechanism 3 includes adjustable shelf 31, fixed frame 32, first bearing 33, plush copper fixture block 34, rotating electric machine
35, motor cabinet 36, sliding slot 37 and shaft coupling 38, the adjustable shelf 31 are slidably connected by sliding slot 37 with pedestal 1；The fixed frame
32 are arranged in the right side of adjustable shelf 31, and are mounted on pedestal 1 by bolt；The first bearing 33 uses 2, is embedded in respectively
At the top of adjustable shelf 31 and fixed frame 32；The plush copper fixture block 34 uses 2, is interference fitted respectively with 2 first bearings 33,
The plush copper fixture block 34 being wherein mounted on fixed frame is also connect by shaft coupling 38 with rotating electric machine 35；The rotating electric machine 35 is logical
It crosses bolt to be fixed on motor cabinet 36, motor cabinet 36 is fixedly mounted on again on pedestal 1；The sliding slot 37 is provided on pedestal 1.
The elevating mechanism 4 includes lifting motor 41, gear 42, toothed chain 43, transmission shaft 44, second bearing 45 and crane
46, the gear 42 uses 2, is separately mounted to the top and bottom of elevating mechanism, respectively by corresponding transmission shaft 44 with
Corresponding second bearing 45 connects, and second bearing 45 is inlaid on bracket 9；Wherein under the elevating mechanism of lifting motor 4
The gear 42 and lifting motor 41 at end are sequentially connected, and substitute transmission shaft 44 and second bearing 45 using lifting motor 41 herein, make
For power output end；The toothed chain 43 and 42 engaged transmission of gear；One end of the crane 46 is riveted on toothed chain 43, another
End is equipped with vacuum (-tight) housing 7.
The crucible 5 is made boat foil or Filamentous high-frequency induction heating source, deposition rate with higher using tantalum and can be coated with
Simple substance and it is not easy the compound film thermally decomposed.
The end face of the plush copper fixture block 34 offers lines identical with anisotropic aluminium shape, is conducive to make special-shaped alumina material card
Connect it is more reliable, will not there is a situation where slip when rotation.
Working principle
In the utility model, special-shaped alumina material is connected on plush copper fixture block 34 first, by slidable adjustment adjustable shelf 31 come
It realizes the fixation to special-shaped alumina material, the rotation of lifting motor 41 is controlled by power control cabinet 11, lifting motor 41 passes through 42 band of gear
The dynamic toothed chain 43 for being equipped with crane 46, vacuum (-tight) housing 7 is fallen, and forms a closed space with sealing rubber ring 2, passes through pumping
The left side that vacuum pump 10 passes through sealing rubber ring 2 pumps the air inside vacuum (-tight) housing 7, then passes through the control rotation of power control cabinet 11
Rotating motor 35 drives special-shaped alumina material to be rotated by shaft coupling 38, when plated film, by adding evaporated material into crucible, is used in combination
High frequency induction current heating crucible and evaporated material make it have higher deposition rate, can be coated with simple substance and be not easy to thermally decompose
Compound film.
The opening in technical solutions of the utility model using technical solution described in the utility model or those skilled in the art
It gives, designs similar technical solution, and reach above-mentioned technical effect, be to fall into the protection scope of the utility model.
Claims (5)
1. a kind of abnormity aluminium vacuum coating fixed frame, it is characterised in that: including pedestal (1), sealing rubber ring (2), aluminium rotation
Mechanism (3), elevating mechanism (4), crucible (5), substrate (6), vacuum (-tight) housing (7), mounting plate (8), bracket (9), vacuum pumping pump (10)
With power control cabinet (11), the sealing rubber ring (2) is pasted on pedestal (1)；The aluminium rotating mechanism (3) is arranged in sealing rubber ring
(2) internal；The quantity of the elevating mechanism (4) be 2, be mounted on pedestal (1) by bolt, and respectively with 2 brackets (9)
Connection, one of elevating mechanism (4) are sequentially connected with lifting motor (41) and with lifting motor (41)；The crucible (5)
Setting is internal in vacuum (-tight) housing (7), and by being welded and fixed；The substrate (6) is pasted onto the bottom of mounting plate (8)；The installation
Plate (8) is mounted on the top of vacuum (-tight) housing (7) by welding；The vacuum (-tight) housing (7) is installed on elevating mechanism (4), by elevator
Structure (4) drives raising and lowering, cooperatively forms sealing space when dropping to bottom Shi Nengyu sealing rubber ring (2)；The bracket (9)
Using 2, left upper part and the right end top of pedestal (1) are mounted on by bolt；Vacuum pumping pump (10) setting is sealing
The left side of cushion rubber (2), and connect by conducting wire with power control cabinet (11)；Upper left quarter of power control cabinet (11) setting in pedestal (1).
2. abnormity aluminium vacuum coating fixed frame as described in claim 1, it is characterised in that: the aluminium rotating mechanism (3)
Including adjustable shelf (31), fixed frame (32), first bearing (33), plush copper fixture block (34), rotating electric machine (35), motor cabinet (36),
Sliding slot (37) and shaft coupling (38), the adjustable shelf (31) are slidably connected by sliding slot (37) with pedestal (1)；The fixed frame
(32) setting is mounted on pedestal (1) on the right side of adjustable shelf (31), and by bolt；The first bearing (33) uses 2,
It is inlaid in the top of adjustable shelf (31) and fixed frame (32) respectively；The plush copper fixture block (34) use 2, respectively with 2 first
Bearing (33) interference fit, wherein the plush copper fixture block (34) being mounted on fixed frame also passes through shaft coupling (38) and rotating electric machine
(35) it connects；The rotating electric machine (35) is bolted on motor cabinet (36), and motor cabinet (36) is fixedly mounted on bottom again
On seat (1)；The sliding slot (37) is provided on pedestal (1).
3. abnormity aluminium vacuum coating fixed frame as described in claim 1, it is characterised in that: the elevating mechanism (4) includes
Gear (42), toothed chain (43), transmission shaft (44), second bearing (45) and crane (46), the gear (42) use 2, point
It is not mounted on the top and bottom of elevating mechanism, is connected respectively by corresponding transmission shaft (44) with corresponding second bearing (45)
It connects, second bearing (45) is inlaid on bracket (9)；Wherein close to the gear (42) of the lower end of the elevating mechanism of lifting motor (4)
It is sequentially connected with lifting motor (41), substitutes transmission shaft (44) and second bearing (45) using lifting motor (41) herein, as
Power output end；The toothed chain (43) and gear (42) engaged transmission；One end of the crane (46) is riveted on toothed chain (43)
On, the other end is equipped with vacuum (-tight) housing (7).
4. abnormity aluminium vacuum coating fixed frame as described in claim 1, it is characterised in that: the crucible (5) uses tantalum system
At boat foil or Filamentous high-frequency induction heating source.
5. abnormity aluminium vacuum coating fixed frame as claimed in claim 2, it is characterised in that: the end of the plush copper fixture block (34)
Face offers lines identical with anisotropic aluminium shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821394738.0U CN208701191U (en) | 2018-08-28 | 2018-08-28 | A kind of abnormity aluminium vacuum coating fixed frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821394738.0U CN208701191U (en) | 2018-08-28 | 2018-08-28 | A kind of abnormity aluminium vacuum coating fixed frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208701191U true CN208701191U (en) | 2019-04-05 |
Family
ID=65944404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821394738.0U Expired - Fee Related CN208701191U (en) | 2018-08-28 | 2018-08-28 | A kind of abnormity aluminium vacuum coating fixed frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208701191U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112779522A (en) * | 2020-12-28 | 2021-05-11 | 芯思杰技术(深圳)股份有限公司 | Film coating device and film coating method |
-
2018
- 2018-08-28 CN CN201821394738.0U patent/CN208701191U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112779522A (en) * | 2020-12-28 | 2021-05-11 | 芯思杰技术(深圳)股份有限公司 | Film coating device and film coating method |
| CN112779522B (en) * | 2020-12-28 | 2023-11-28 | 芯思杰技术(深圳)股份有限公司 | Coating device and coating method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190405 Termination date: 20200828 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |