CN215976017U

CN215976017U - Device for improving utilization rate of magnetron sputtering target

Info

Publication number: CN215976017U
Application number: CN202122591776.3U
Authority: CN
Inventors: 孔伟华
Original assignee: Jiangsu Dongjiu Photoelectric Technology Co ltd
Current assignee: Jiangsu Dongjiu Photoelectric Technology Co ltd
Priority date: 2021-10-27
Filing date: 2021-10-27
Publication date: 2022-03-08
Anticipated expiration: 2031-10-27

Abstract

The utility model discloses a device for improving the utilization rate of a magnetron sputtering target material in the technical field of magnetron sputtering, which comprises a box body, wherein the bottom end of the box body is uniformly and fixedly connected with a plurality of support columns; the upper end of the box body is rotatably connected with a box cover, and the surface of the box cover is provided with a cleaning mechanism for cleaning dirt on the surface of the target material; an adjusting mechanism for fixing and adjusting the position of the target material is arranged in the box body; the device easy operation, convenient to use does not need artifical clearance target, can effectually save time and manpower, and it is efficient to clear up the target simultaneously, and is effectual, clears up no dead angle, can effectually promote the utilization ratio of target when the coating film.

Description

Device for improving utilization rate of magnetron sputtering target

Technical Field

The utility model relates to the technical field of magnetron sputtering, in particular to a device for improving the utilization rate of a magnetron sputtering target material.

Background

Physical vapor deposition is a technique that utilizes physical means to deposit a thin film on a substrate. Magnetron sputtering is one of the physical vapor deposition techniques. Among magnetron sputtering coating techniques, a magnetron sputtering technique in which a magnetic field generating device is disposed on the back surface of a target material as a material to be processed is the mainstream of the sputtering method. Magnetron sputtering forms a magnetic field on the surface of a target through a magnet, and plasma is confined near the surface of the target by utilizing the drift motion of electrons, so that high-density plasma is formed; high-energy ions (generally argon ions accelerated by an electric field) bombard the surface of the target, ions or atoms on the surface of the target exchange energy with the incident high-energy ions and then are splashed out of the surface of the target, and a film is deposited on the substrate.

When a large amount of dirt is stained with on the target surface that needs processing, when processing the target, still need manual clearance target surperficial dirt, artifical clearance is harder, the time-wasting, and the manual work is difficult to the comprehensive dirt clean up with the target surface of feeling simultaneously, consequently can influence the utilization ratio of target when the coating film.

Therefore, the present invention provides a device for improving the utilization rate of magnetron sputtering target materials, so as to solve the problems in the background art.

Disclosure of Invention

The utility model aims to provide a device for improving the utilization rate of a magnetron sputtering target material, so as to solve the problems in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme: a device for improving the utilization rate of a magnetron sputtering target comprises a box body, wherein the bottom end of the box body is uniformly and fixedly connected with a plurality of support columns; the upper end of the box body is rotatably connected with a box cover, and the surface of the box cover is provided with a cleaning mechanism for cleaning dirt on the surface of the target material; and an adjusting mechanism for fixing and adjusting the position of the target material is arranged in the box body.

As a further scheme of the utility model: the adjusting mechanism comprises a first threaded rod, a first bevel gear, a second bevel gear, a supporting plate, a fixing block and a second threaded rod; the target material to be cleaned can be fixed well through the adjusting mechanism, and the target material can be adjusted to the optimal cleaning position according to the thickness of the target material.

As a still further scheme of the utility model: the supporting plate is positioned in the box body and is connected with the box body in a sliding manner; the first threaded rod is rotatably connected with the bottom end surface of the supporting plate and is in threaded fit with the box body, a first sliding groove is formed in the surface of the first threaded rod, and the first bevel gear is in sliding connection with the first sliding groove; the first bevel gear is in clearance fit with the first threaded rod and is rotationally connected with the box body, the second bevel gear is meshed with the first bevel gear and is rotationally connected with the box body; grooves are symmetrically formed in the left end and the right end of the box body, the second threaded rods are distributed in the left side and the right side of the surface of the supporting plate and are located in the grooves, the second threaded rods are in threaded fit with the supporting plate, the fixing blocks are rotatably connected with the second threaded rods, and the fixing blocks are in sliding fit with the surface of the supporting plate; the first bevel gear can be driven to rotate by rotating the second bevel gear, the first bevel gear can be driven to rotate by rotating the first threaded rod, the supporting plate inside the box body can be driven to move upwards under the action of the box body when the first threaded rod rotates, the fixing blocks can be driven to slide on the surface of the supporting plate by rotating the second threaded rods on the left side and the right side, and the target materials to be cleaned can be fixed on the surface of the supporting plate by the fixing blocks on the left side and the right side.

As a still further scheme of the utility model: the cleaning mechanism comprises a motor, a first synchronizing wheel, a second synchronizing wheel, a synchronous belt, a third bevel gear, a fourth bevel gear, a third threaded rod, a sliding frame and a cleaning barrel; the cleaning mechanism can automatically clean dirt on the surface of the target material, so that labor and time can be effectively saved, and the utilization rate of the target material is improved.

As a still further scheme of the utility model: the left side and the right side of the surface of the box cover are symmetrically provided with second sliding chutes, the sliding frame is in sliding connection with the second sliding chutes on the left side and the right side, the cleaning barrel is positioned at the bottom end of the box cover and is in rotating connection with the sliding frame; the motor is fixedly connected with the upper end face of the sliding frame, the first synchronizing wheels are distributed at the left side and the right side of the motor, and the first synchronizing wheels at the left side and the right side are respectively and fixedly connected with output shafts at the left side and the right side of the motor; the second synchronizing wheel is fixedly connected with the cleaning barrel, and the synchronous belt is simultaneously meshed with the first synchronizing wheel and the second synchronizing wheel; the first synchronizing wheels on the left side and the right side can be driven to rotate through the starting motor, the second synchronizing wheels can be driven to rotate through the synchronous belts when the first synchronizing wheels rotate, and the cleaning barrel can be driven to rotate to clean dirt on the surface of the target when the second synchronizing wheels rotate.

As a still further scheme of the utility model: the third bevel gear is meshed with the fourth bevel gear, and the third bevel gear is fixedly connected with the first synchronous wheel; the third threaded rod is fixedly connected with the box cover, and the fourth bevel gear is in threaded fit with the third threaded rod; when the first synchronizing wheel rotates, the third bevel gear can be driven to rotate, the third bevel gear drives the fourth bevel gear to rotate, the fourth bevel gear can drive the sliding frame to slide in the second sliding groove under the action of the third threaded rod when rotating, the second sliding groove drives the cleaning barrel to move to clean other positions on the surface of the target material, and when the sliding frame slides to the end position in the second sliding groove, the sliding frame can be driven to move to the original position to clean by controlling the reverse rotation of the motor.

Advantageous effects

Compared with the prior art, the utility model has the beneficial effects that:

according to the device, a target material to be cleaned is placed in a box body, then a second threaded rod is rotated to drive a fixing block to fix and stabilize the target material, then a box cover is covered to rotate a first bevel gear, the first bevel gear drives a second bevel gear to rotate, the second bevel gear drives a first threaded rod to rotate, and a supporting plate can drive the target material to a position contacting with a cleaning barrel through the first threaded rod; then starting a motor, driving a cleaning barrel to clean dirt on the surface of the target material by the motor, driving a third bevel gear to rotate by the motor, driving a fourth bevel gear to rotate by the third bevel gear, and driving the cleaning barrel to move by the fourth bevel gear through a third threaded rod to clean the target material; the device easy operation, convenient to use does not need artifical clearance target, can effectually save time and manpower, and it is efficient to clear up the target simultaneously, and is effectual, clears up no dead angle, can effectually promote the utilization ratio of target when the coating film.

Drawings

FIG. 1 is a schematic structural view of the present invention as a whole;

FIG. 2 is an enlarged schematic view of A in FIG. 1;

FIG. 3 is a schematic structural view of a bottom view of the present invention;

FIG. 4 is a schematic structural view illustrating an opened state of a cover according to the present invention;

fig. 5 is an enlarged structural diagram of B in fig. 4.

In the figure: 1-box body, 2-support column, 3-box cover, 4-first threaded rod, 5-first bevel gear, 6-second bevel gear, 7-support plate, 8-fixed block, 9-second threaded rod, 10-first chute, 11-groove, 12-motor, 13-first synchronous wheel, 14-second synchronous wheel, 15-synchronous belt, 16-third bevel gear, 17-fourth bevel gear, 18-third threaded rod, 19-sliding frame, 20-cleaning barrel and 21-second chute.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

Referring to fig. 1 to 5, in an embodiment of the present invention, a device for improving utilization rate of a magnetron sputtering target includes a box body 1, wherein a plurality of supporting pillars 2 are uniformly and fixedly connected to a bottom end of the box body 1; the upper end of the box body 1 is rotatably connected with a box cover 3, and the surface of the box cover 3 is provided with a cleaning mechanism for cleaning dirt on the surface of the target material; the box body 1 is internally provided with an adjusting mechanism for fixing and adjusting the position of the target material.

In the embodiment, the adjusting mechanism comprises a first threaded rod 4, a first bevel gear 5, a second bevel gear 6, a supporting plate 7, a fixed block 8 and a second threaded rod 9; the target material to be cleaned can be fixed well through the adjusting mechanism, and the target material can be adjusted to the optimal cleaning position according to the thickness of the target material.

In the embodiment, the supporting plate 7 is positioned in the box body 1, and the supporting plate 7 is connected with the box body 1 in a sliding way; the first threaded rod 4 is rotatably connected with the bottom end surface of the supporting plate 7, the first threaded rod 4 is in threaded fit with the box body 1, a first sliding groove 10 is formed in the surface of the first threaded rod 4, and the first bevel gear 5 is in sliding connection with the first sliding groove 10; the first bevel gear 5 is in clearance fit with the first threaded rod 4, the first bevel gear 5 is rotationally connected with the box body 1, the second bevel gear 6 is meshed with the first bevel gear 5, and the second bevel gear 6 is rotationally connected with the box body 1; grooves 11 are symmetrically formed in the left end and the right end of the box body 1, the second threaded rods 9 are distributed in the left side and the right side of the surface of the supporting plate 7, the second threaded rods 9 are located in the grooves 11, the second threaded rods 9 are in threaded fit with the supporting plate 7, the fixing blocks 8 are rotatably connected with the second threaded rods 9, and the fixing blocks 8 are in sliding fit with the surface of the supporting plate 7; can drive first bevel gear 5 through rotating second bevel gear 6 and rotate, first bevel gear 5 can drive first threaded rod 4 when rotating, can drive the inside backup pad 7 rebound of box body 1 under the effect of box body 1 when first threaded rod 4 rotates, can drive fixed block 8 in backup pad 7 surface slip through rotating the second threaded rod 9 of the left and right sides, can play the target that will clear up through the fixed block 8 of the left and right sides and fix in backup pad 7 surface.

In the embodiment, the cleaning mechanism comprises a motor 12, a first synchronizing wheel 13, a second synchronizing wheel 14, a synchronizing belt 15, a third bevel gear 16, a fourth bevel gear 17, a third threaded rod 18, a sliding frame 19 and a cleaning barrel 20; the cleaning mechanism can automatically clean dirt on the surface of the target material, so that labor and time can be effectively saved, and the utilization rate of the target material is improved.

In the embodiment, the left side and the right side of the surface of the box cover 3 are symmetrically provided with second sliding grooves 21, the sliding frame 19 is in sliding connection with the second sliding grooves 21 on the left side and the right side, the cleaning barrel 20 is positioned at the bottom end of the box cover 3, and the cleaning barrel 20 is rotationally connected with the sliding frame 19; the motor 12 is fixedly connected with the upper end face of the sliding frame 19, the first synchronous wheels 13 are distributed at the left side and the right side of the motor 12, and the first synchronous wheels 13 at the left side and the right side are respectively and fixedly connected with output shafts at the left side and the right side of the motor 12; the second synchronous wheel 14 is fixedly connected with the cleaning barrel 20, and the synchronous belt 15 is simultaneously meshed with the first synchronous wheel 13 and the second synchronous wheel 14; the first synchronizing wheels 13 on the left side and the right side can be driven to rotate by starting the motor 12, the second synchronizing wheels 14 can be driven to rotate by the first synchronizing wheels 13 through the synchronous belts 15 when the first synchronizing wheels 13 rotate, and the cleaning barrel 20 can be driven to rotate to clean dirt on the surface of the target when the second synchronizing wheels 14 rotate.

In the embodiment, a third bevel gear 16 is meshed with a fourth bevel gear 17, and the third bevel gear 16 is fixedly connected with a first synchronous wheel 13; the third threaded rod 18 is fixedly connected with the box cover 3, and the fourth bevel gear 17 is in threaded fit with the third threaded rod 18; when the first synchronizing wheel 13 rotates, the third bevel gear 16 can be driven to rotate, the third bevel gear 16 drives the fourth bevel gear 17 to rotate, when the fourth bevel gear 17 rotates, the sliding frame 19 can be driven to slide in the second sliding groove 21 under the action of the third threaded rod 18, the second sliding groove 21 drives the cleaning barrel 20 to move to clean other positions of the surface of the target material, and when the sliding frame 19 slides to the end position in the second sliding groove 21, the control motor 12 rotates reversely, so that the sliding frame 19 drives the cleaning barrel 20 to move to the original position for cleaning.

The working principle of the utility model is as follows:

when the device is used, the box cover 3 is opened firstly, then the target material to be cleaned is placed on the surface of the supporting plate 7 in the box body 1, then the second threaded rods 9 on the left side and the right side are rotated to drive the fixing blocks 8 to fix and stabilize the target material, after the target material is fixed, the box cover 3 is covered, then the first bevel gear 5 is rotated, the first threaded rod 4 can be driven to rotate when the first bevel gear 5 rotates, the supporting plate 7 in the box body 1 can be driven to move upwards under the action of the box body 1 when the first threaded rod 4 rotates, and when the supporting plate 7 drives the target material to move upwards to a position contacting with the cleaning cylinder 20, the rotation of the first bevel gear 5 is stopped; at the moment, the motor 12 is started to drive the first synchronous wheels 13 on the left side and the right side to rotate, the first synchronous wheels 13 can drive the second synchronous wheels 14 to rotate through the synchronous belts 15 when rotating, and the second synchronous wheels 14 can drive the cleaning barrel 20 to rotate to clean dirt on the surface of the target material when rotating; when the first synchronizing wheel 13 rotates, the third bevel gear 16 can be driven to rotate, the third bevel gear 16 drives the fourth bevel gear 17 to rotate, when the fourth bevel gear 17 rotates, the sliding frame 19 can be driven to slide in the second sliding groove 21 under the action of the third threaded rod 18, the second sliding groove 21 drives the cleaning barrel 20 to move to clean other positions of the surface of the target material, when the sliding frame 19 slides to the end position in the second sliding groove 21, the control motor 12 rotates reversely, so that the sliding frame 19 drives the cleaning barrel 20 to move to the original position for cleaning, and dirt on the surface of the target material can be cleaned.

Claims

1. The utility model provides a device of improvement magnetron sputtering target utilization ratio, includes box body (1), its characterized in that: the bottom end of the box body (1) is uniformly and fixedly connected with a plurality of support columns (2); the upper end of the box body (1) is rotatably connected with a box cover (3), and a cleaning mechanism for cleaning dirt on the surface of the target material is arranged on the surface of the box cover (3); the box body (1) is internally provided with an adjusting mechanism for fixing and adjusting the position of the target material.

2. The apparatus according to claim 1, wherein the magnetron sputtering target utilization ratio is increased by: the adjusting mechanism comprises a first threaded rod (4), a first bevel gear (5), a second bevel gear (6), a supporting plate (7), a fixing block (8) and a second threaded rod (9).

3. The apparatus according to claim 2, wherein the magnetron sputtering target utilization ratio is increased by: the supporting plate (7) is positioned inside the box body (1), and the supporting plate (7) is connected with the box body (1) in a sliding manner; the first threaded rod (4) is rotatably connected with the bottom end surface of the supporting plate (7), the first threaded rod (4) is in threaded fit with the box body (1), a first sliding groove (10) is formed in the surface of the first threaded rod (4), and the first bevel gear (5) is in sliding connection with the first sliding groove (10); the first bevel gear (5) is in clearance fit with the first threaded rod (4), the first bevel gear (5) is rotationally connected with the box body (1), the second bevel gear (6) is meshed with the first bevel gear (5), and the second bevel gear (6) is rotationally connected with the box body (1); both ends symmetry is equipped with recess (11) about box body (1), second threaded rod (9) distribute and are located recess (11) internal position in backup pad (7) surface left and right sides position and second threaded rod (9), second threaded rod (9) and backup pad (7) screw-thread fit, fixed block (8) rotate with second threaded rod (9) and are connected and fixed block (8) and backup pad (7) surface sliding fit.

4. The apparatus according to claim 1, wherein the magnetron sputtering target utilization ratio is increased by: the cleaning mechanism comprises a motor (12), a first synchronizing wheel (13), a second synchronizing wheel (14), a synchronizing belt (15), a third bevel gear (16), a fourth bevel gear (17), a third threaded rod (18), a sliding frame (19) and a cleaning barrel (20).

5. The apparatus according to claim 4, wherein the magnetron sputtering target utilization ratio is increased by: the left side and the right side of the surface of the box cover (3) are symmetrically provided with second sliding grooves (21), the sliding frame (19) is in sliding connection with the second sliding grooves (21) on the left side and the right side, the cleaning barrel (20) is located at the bottom end of the box cover (3), and the cleaning barrel (20) is rotationally connected with the sliding frame (19); the motor (12) is fixedly connected with the upper end face of the sliding frame (19), the first synchronous wheels (13) are distributed at the left side and the right side of the motor (12), and the first synchronous wheels (13) at the left side and the right side are respectively and fixedly connected with output shafts at the left side and the right side of the motor (12); the second synchronizing wheel (14) is fixedly connected with the cleaning barrel (20), and the synchronous belt (15) is meshed with the first synchronizing wheel (13) and the second synchronizing wheel (14) simultaneously.

6. The apparatus according to claim 4, wherein the magnetron sputtering target utilization ratio is increased by: the third bevel gear (16) is meshed with the fourth bevel gear (17), and the third bevel gear (16) is fixedly connected with the first synchronous wheel (13); the third threaded rod (18) is fixedly connected with the box cover (3), and the fourth bevel gear (17) is in threaded fit with the third threaded rod (18).