CN218647885U - Silicon wafer butt joint unit and system after texturing - Google Patents
Silicon wafer butt joint unit and system after texturing Download PDFInfo
- Publication number
- CN218647885U CN218647885U CN202222704035.6U CN202222704035U CN218647885U CN 218647885 U CN218647885 U CN 218647885U CN 202222704035 U CN202222704035 U CN 202222704035U CN 218647885 U CN218647885 U CN 218647885U
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- China
- Prior art keywords
- texturing
- silicon wafer
- sliding block
- flower basket
- mechanical arm
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 72
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 72
- 239000010703 silicon Substances 0.000 title claims abstract description 72
- 210000001503 joint Anatomy 0.000 title claims abstract description 16
- 235000012431 wafers Nutrition 0.000 claims abstract description 57
- 238000001514 detection method Methods 0.000 claims description 18
- 238000003032 molecular docking Methods 0.000 claims description 11
- 230000002452 interceptive effect Effects 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 1
- 235000008216 herbs Nutrition 0.000 abstract description 5
- 210000002268 wool Anatomy 0.000 abstract description 5
- 230000007547 defect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 210000004209 hair Anatomy 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a design of silicon chip butt joint unit and system after making herbs into wool, include: the device comprises a mechanical arm, a flower basket part body and a sliding block module; the mechanical arm is arranged on the sliding block module, and the flower basket part moves on the sliding block module through the mechanical arm to butt joint the silicon wafers after texturing. Through the design of the silicon wafer butting unit after texturing, the silicon wafer butting after texturing is automatically conducted.
Description
Technical Field
The utility model relates to a silicon chip makes technical field, especially relates to a design of system fine hair silicon chip butt joint unit and system.
Background
The silicon chip is a carrier of the solar cell, the production process flow of the solar cell is divided into procedures of silicon chip detection, surface texturing, diffusion, silk-screen printing, rapid sintering and the like, and the defect detection is required to be carried out on the feeding and the discharging in each procedure. The flower basket is a container for silicon wafers, 100 silicon wafers can be contained in one flower basket, when the silicon wafers are loaded into the flower basket, due to the fact that defects of silicon wafer fragments, staggered teeth, double wafers, empty wafers and the like can be caused by misoperation, if the silicon wafers in the flower basket have the defects, other normal silicon wafers can be damaged when a diffusion program is carried out. Therefore, it is important to butt-joint the silicon wafers after texturing. In the existing manufacturing process, a proper silicon wafer butt joint system is not available, so that the probability of generating defects of the silicon wafer is easily increased, and time and labor are wasted. Therefore, a need exists for a better product that can be used to butt-joint textured silicon wafers.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a silicon chip butt joint unit and system after making herbs into wool realizes going on steadily of silicon chip butt joint after making herbs into wool.
For solving the technical problem, the utility model provides a silicon chip butt joint unit and system after making herbs into wool:
the silicon chip butt-joint unit after texturing comprises: the device comprises a mechanical arm, a flower basket part body and a sliding block module; the mechanical arm is arranged on the sliding block module, and the flower basket part body is movably arranged on the sliding block module through the mechanical arm to butt joint the silicon wafers after texturing.
Further, the robot arm includes: a fixed member and a grasping member; the fixing piece is fixedly arranged on the sliding block module and connected with the grabbing piece, a grabbing part is arranged on the grabbing piece, and the grabbing part is used for grabbing the flower basket part body.
Further, the slider module includes: the power device comprises a plurality of bearing plates, a power device and a sliding block module connecting piece; the plurality of bearing plates are fixed through connecting pieces, gaps are formed among the plurality of bearing plates, the power device is arranged above the plurality of bearing plates, and the fixing piece of the mechanical arm is movably arranged on the bearing plates through the sliding block module connecting piece; the sliding block module connecting piece can drive the flower basket part body to move in the gap under the driving of the power device.
Further, the flower basket part body comprises: the flower basket comprises two side plates and a plurality of bearing rods, wherein the two side plates are provided with connecting devices, the flower basket part body is matched and fixed with the mechanical arm through the connecting devices on the two side plates, and the bearing rods are arranged between the two side plates and used for placing silicon wafers.
Furthermore, the plurality of bearing rods are arranged in two rows between the two side plates, and the space between the two rows of bearing rods is used for placing silicon wafers.
Furthermore, the grabbing part is a convex rod, and the connecting device is a groove with a hook; the convex rod is matched and fixed with the groove with the hook, and the flower basket part body is fixed on the mechanical arm.
The utility model discloses still include a silicon chip butt joint system after making herbs into wool, include: the silicon wafer docking unit, the vision system and the detection system after texturing as described in any one of the above; the vision system performs vision detection on the silicon wafers conveyed and sorted by the butting unit; the detection system receives information of the vision system.
Further, the vision system includes: industrial cameras, light sources; the light source is annular, and the industrial camera is arranged in the annular of the light source.
Further, the detection system comprises: an industrial personal computer and a server; the industrial personal computer and the server are in interactive connection with the visual system and the silicon wafer butting unit after texturing.
Compared with the prior art, the utility model discloses following beneficial effect has at least: when butt-jointing the silicon chip after texturing, the flower basket part body which moves on the sliding block module is used, is relatively stable, is convenient to butt-joint with other machine parts in the silicon chip manufacturing process, is beneficial to improving the working efficiency, and saves manpower and material resources.
Drawings
Fig. 1 is a schematic view of a silicon wafer docking unit after texturing according to an embodiment of the present invention;
fig. 2 is another schematic view of a silicon wafer docking unit after texturing according to an embodiment of the present invention;
FIG. 3 is a schematic view of a flower basket component according to an embodiment of the present invention;
FIG. 4 is another schematic view of a flower basket component according to an embodiment of the present invention;
fig. 5 is a schematic view of a detection system and a vision system according to an embodiment of the present invention;
fig. 6 is another schematic diagram of a detection system and a vision system according to an embodiment of the present invention.
Detailed Description
The post-texturing silicon wafer docking unit and system of the present invention will now be described in greater detail with reference to the drawings, in which preferred embodiments of the present invention are shown, it being understood that those skilled in the art may modify the invention herein described while still achieving the advantageous effects of the present invention. Accordingly, the following description should be construed as broadly as possible to those skilled in the art and not as limiting the invention.
The invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more fully apparent from the following description and appended claims. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.
In one specific embodiment, referring to fig. 1, the silicon wafer docking unit after texturing includes: the mechanical arm 2, the flower basket part body 3 and the sliding block module 1; the mechanical arm 2 is arranged on the sliding block module 1, and the flower basket part body 3 is in movable connection with the sliding block module 1 through the mechanical arm 2 to butt-joint the silicon wafers after texturing.
Specifically, when the silicon wafers after texturing are butted, the silicon wafers are arranged in the flower basket part body 3, and the mechanical arm 2 drives the silicon wafers to move on the sliding block module 1.
In one embodiment, referring to fig. 2, the robot arm 2 includes: a securing member 210 and a grasping member 211; the fixing part 210 is fixedly arranged on the sliding block module 1 and connected with the grabbing part 211, a grabbing part 2110 is arranged on the grabbing part 211, and the grabbing part 2110 is used for grabbing the flower basket part body 3.
Further, the fixing member 210 and the grasping member 211 are fixed by a common fixing method, such as welding, bolting, etc., the fixing member 210 is used for fixing the grasping member, and the grasping member 211 is used for fixing the flower basket component body.
Specifically, with continued reference to fig. 2, the slider module 1 includes: a plurality of bearing plates 110, a power device 111 and a slider module connecting piece 112; the plurality of load bearing plates 110 are fixed by a connecting member (not shown), a gap is formed between the plurality of load bearing plates 110, the power device 111 is arranged above the plurality of load bearing plates 110, and the fixing member 210 of the robot arm 2 is movably arranged on the load bearing plates 110 by the slider module connecting member 112; the sliding block module connecting piece 112 can drive the flower basket component body 3 to move in the gap under the driving of the power device 11.
Specifically, the power device 111 can be a power motor or other common power devices, and the power device 111 provides power for the operation of the silicon wafer butting unit after texturing, for example, the slider module connecting piece 112 is driven to move up and down in a track manner, and the mechanical arm 2 and the basket part body 3 are driven to move relatively on the slider module 1, so as to achieve the purpose of conveying the silicon wafer.
The number of the bearing plates 110 may be selected as desired.
In one embodiment, please refer to fig. 3 and 4, the flower basket component body 3 includes: the flower basket comprises two side plates 310 and a plurality of bearing rods 311, wherein the two side plates are respectively provided with a connecting device 312, the flower basket part body 3 is matched and fixed with the mechanical arm 2 through the connecting devices 312 on the two side plates, and the bearing rods 311 are arranged between the two side plates 310 and used for placing silicon wafers.
Specifically, the plurality of load-bearing rods 311 are arranged in two rows between the two side plates 310, and the space between the two rows of load-bearing rods 311 is used for placing silicon wafers.
Correspondingly, the silicon wafers after texturing are arranged between the two rows of bearing rods 311.
Further, referring to fig. 2, the grabbing part 2110 is a protruding rod, referring to fig. 3 and 4, the connecting device 312 is a slot with a hook; the protruding rod 2110 is matched and fixed with the slot 312 with the hook to fix the flower basket component body 3 on the mechanical arm 2.
It will be appreciated that the design of the gripping member 2110 and the attachment means 312 is only one embodiment of the present invention, and that the design of the protruding rod and the slot with the hook for cooperating fixation is a preferred implementation.
Therefore, the utility model discloses a flocking back silicon chip butt joint unit, when docking the flocking back silicon chip, use the basket of flowers spare part body of activity on the slider module, it is comparatively stable, and convenient dock with other machine parts in the silicon chip manufacturing process, be favorable to improving work efficiency, the material resources of using manpower sparingly.
Further, please refer to fig. 1, fig. 5 and fig. 6, the present invention further discloses a system for butting silicon wafers after texturing, comprising: the silicon wafer butting unit after texturing, the vision system 4 and the detection system 5; the vision system 4 is used for carrying out vision detection on the silicon wafers conveyed and sorted by the butting unit; the detection system 5 receives information of the vision system 4.
Specifically, referring to fig. 5 and 6, the vision system 4 includes: industrial camera 410, light source 411; the light source 411 is ring-shaped, and the industrial camera 410 is disposed within the ring of the light source 411.
Specifically, as shown in fig. 5 and fig. 6, the detection system 5 includes: an industrial personal computer (not shown in the figure) and a server (not shown in the figure); the industrial personal computer and the server are in interactive connection with the vision system 4 and the silicon wafer butting unit after texturing.
In a specific embodiment of the present invention, when processing the silicon wafer after texturing, the following steps can be performed:
(1) Feeding the automatic butt joint system;
(2) A visual system shoots pictures;
(3) The vision system transmits the pictures to an industrial personal computer and a server of the detection system;
(4) The detection software transmits the picture to a server;
(5) The algorithm server analyzes and counts the occurrence frequency of the defects such as fragments, staggered teeth, double pieces, empty pieces and the like;
(6) Returning the statistical result to the detection system;
(7) And the automatic butt joint system is used for butt joint of the silicon wafers.
To sum up, the utility model can use the movable flower basket part body on the slider module when butting the silicon wafers after texturing through the combined design of the vision system, the silicon wafer butting unit after texturing and the detection system, is relatively stable, is convenient to butt with other machine parts in the silicon wafer manufacturing process, is beneficial to improving the working efficiency and saves manpower and material resources; and the silicon wafer after texturing can be conveniently, stably and efficiently detected by utilizing the matching work of the silicon wafer butting system after texturing.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (6)
1. A silicon chip butt-joint unit after texturing is characterized by comprising: the device comprises a mechanical arm, a flower basket part body and a sliding block module; the mechanical arm is arranged on the sliding block module, and the flower basket part body moves on the sliding block module through the mechanical arm to butt joint the silicon wafers after texturing;
the robot arm includes: a fixed member and a grasping member; the fixed piece is fixedly arranged on the sliding block module and connected with the grabbing piece, a grabbing part is arranged on the grabbing piece, and the grabbing part is used for grabbing the flower basket part body;
the slider module includes: the power device comprises a plurality of bearing plates, a power device and a sliding block module connecting piece; the plurality of bearing plates are fixed through connecting pieces, gaps are formed among the plurality of bearing plates, the power device is arranged above the plurality of bearing plates, and the fixing piece of the mechanical arm is movably arranged on the bearing plates through the sliding block module connecting piece; the sliding block module connecting piece can drive the flower basket part body to move in the gap under the driving of the power device;
the basket of flowers part body includes: the flower basket comprises two side plates and a plurality of bearing rods, wherein connecting devices are arranged on the two side plates, the flower basket part body is matched and fixed with the mechanical arm through the connecting devices on the two side plates, and the bearing rods are arranged between the two side plates and used for placing silicon wafers.
2. The silicon wafer docking unit after texturing of claim 1, wherein the plurality of load bearing bars are arranged in two rows between the two side plates, and a space between the two rows of load bearing bars is used for placing a silicon wafer.
3. The silicon wafer docking unit after texturing of claim 1, wherein the grasping member is a protruding rod and the connecting means is a slot with a hook; the convex rod is matched and fixed with the groove with the hook, and the flower basket part body is fixed on the mechanical arm.
4. A silicon wafer butt-joint system after texturing is characterized by comprising: the silicon wafer docking unit, vision system and inspection system after texturing of any one of claims 1 to 3; the vision system performs vision detection on the silicon wafers conveyed and sorted by the butting unit; the detection system receives information of the vision system.
5. The post-texturing silicon wafer docking system of claim 4, wherein the vision system comprises: industrial cameras, light sources; the light source is annular, and the industrial camera is arranged in the annular of the light source.
6. The post-texturing silicon wafer docking system of claim 4, wherein the detection system comprises: an industrial personal computer and a server; the industrial personal computer and the server are in interactive connection with the visual system and the silicon wafer butting unit after texturing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222704035.6U CN218647885U (en) | 2022-10-14 | 2022-10-14 | Silicon wafer butt joint unit and system after texturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222704035.6U CN218647885U (en) | 2022-10-14 | 2022-10-14 | Silicon wafer butt joint unit and system after texturing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218647885U true CN218647885U (en) | 2023-03-17 |
Family
ID=85494206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222704035.6U Active CN218647885U (en) | 2022-10-14 | 2022-10-14 | Silicon wafer butt joint unit and system after texturing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218647885U (en) |
-
2022
- 2022-10-14 CN CN202222704035.6U patent/CN218647885U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Silicon wafer docking unit and system after velvet production Effective date of registration: 20240103 Granted publication date: 20230317 Pledgee: Shanghai Rural Commercial Bank Co.,Ltd. Jiading sub branch Pledgor: Shanghai HONGPU Information Technology Co.,Ltd. Registration number: Y2024310000006 |