CN218464919U - Semiconductor pick-and-place device - Google Patents

Abstract

The utility model discloses a semiconductor is picked up and is put device belongs to semiconductor and picks up and put equipment technical field. The utility model discloses a rotating electrical machines, fix elevator motor and swing arm on the elevator motor mount pad, rotating electrical machines and elevator motor mutually perpendicular installation, elevator motor's output shaft fixed mounting cam. The output shaft of the rotating motor is fixedly provided with a sliding block seat, a lifting sliding block is slidably arranged on the sliding block seat, an elastic piece is arranged between one end of the lifting sliding block and the sliding block seat, the other end of the lifting sliding block is provided with beads, the beads and the output shaft of the rotating motor are positioned on the same straight line, and the beads are in point contact with the cam; one end of the swing arm is fixed on the lifting slide block, and the other end of the swing arm is provided with a sucker. The utility model discloses only adopt two motors, can realize the motion of level and vertical direction, simple structure, the operation piece is efficient, mechanical loss and the cost of equipment manufacturing when reducing equipment operation.

Description

Semiconductor pick-and-place device

Technical Field

The utility model belongs to the technical field of the equipment is picked up and put to the semiconductor, especially, relate to a device is picked up and put to semiconductor.

Background

In a semiconductor process, components such as a wafer and a crystal oscillator generally need to be transmitted to other stations for testing, CCD photographing and the like, and the transmission process is generally realized by a manipulator. The present manipulator comprises an X axis, a Y axis and a Z axis, and is slow in operation, long in stroke and large in volume, chinese patent 2022100404349 discloses a wafer pick and place device, as shown in fig. 1, comprising a wafer pick-up mechanism, a wafer pick-up and transfer mechanism, a wafer die bond pick and place mechanism and an optical fine adjustment mechanism, wherein the wafer die bond pick and place mechanism comprises a rotating assembly and a plurality of pick-up heads, the pick-up heads are arranged in the circumferential direction of the rotating assembly and are in driving connection with the rotating assembly, and the wafer pick-up and transfer mechanism is arranged between the wafer pick-up mechanism and the pick-up heads. The wafer pick-and-place device is provided with a plurality of pick-and-place mechanisms and transfer mechanisms, and is too large in size, too high in cost and too much in space.

Therefore, the semiconductor pick-and-place device is provided, and the problems of overlarge volume, excessive components, low efficiency, unreasonable structure and the like of the conventional semiconductor pick-and-place device are solved.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a semiconductor is picked up and is put device aims at solving the problem that exists among the background art. For realizing the purpose, the utility model discloses a technical scheme be:

a semiconductor picking and placing device comprises a rotating motor, a lifting motor and a swing arm, wherein the lifting motor and the swing arm are fixed on a lifting motor mounting seat, the rotating motor and the lifting motor are vertically arranged, and a cam is fixedly arranged on an output shaft of the lifting motor. The output shaft fixed mounting of rotating electrical machines has the slider seat, the gliding style of slider seat installs lifting slide, install the elastic component between lifting slide's one end and the slider seat, the pearl is installed to lifting slide's the other end, the pearl is located same straight line with rotating electrical machines's output shaft, and the pearl contacts with the cam point, when the highest point of cam and pearl contact, lifting slide pressurized and elastic component compressed to the biggest, when the lowest point of cam and pearl contact, lifting slide is bounced by the elastic component and is reached the maximum stroke. One end of the swing arm is fixed on the lifting slide block, and the other end of the swing arm is provided with a sucker.

Further describing the scheme, the lifting motor mounting seat is fixedly provided with the original point sensor, the original point sensor faces the sliding block seat and senses the position information of the sliding block seat, closed-loop control is achieved, and the sensing sliding block seat is enabled to return to zero accurately.

Further describing the above scheme, the suction cups include a single suction cup, a multi-nozzle suction cup and an array suction cup, the single suction cup can transfer a single object; the multi-nozzle sucker is provided with a single pair of suction pipes and a plurality of suction nozzles, and can transfer a plurality of objects at the same time; each suction nozzle of the array suction cups is provided with a pair of suction tubes to selectively pick up defective products among several articles.

Preferably, the rotating motor and the lifting motor are stepping motors, and the stepping motors are motors for converting electric pulse signals into corresponding angular displacement or linear displacement. When a pulse signal is input, the rotor rotates by an angle or advances by one step, and the angle of the cam and the angle of the swing arm can be accurately controlled.

According to an optional implementation mode, the swing arm adopts flexible design, places the piece according to the product on the carousel and adjusts the length that corresponds, and the commonality is strong.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model only adopts two motors, can realize the movement in the horizontal and vertical directions, has simple structure and high efficiency of the operation block, and reduces the mechanical loss and the manufacturing cost of the equipment when the equipment operates;

2. the single sucker, the multi-nozzle sucker and the array sucker are adopted, and the swing arm is in a telescopic design, so that the universality is high;

3. an original point inductor is adopted for carrying out closed loop system design, and the rotating motor and the lifting motor are stepping motors, so that the precision is high.

Drawings

FIG. 1 is a schematic diagram provided in the background art;

fig. 2 is an overall schematic diagram provided by the embodiment of the present invention;

fig. 3 is an exploded schematic view provided by an embodiment of the present invention;

fig. 4 is a schematic structural diagram provided in the embodiment of the present invention.

Wherein, in the figures, the respective reference numerals:

1. a rotating electric machine; 11. a slider seat; 2. a lifting motor mounting base; 3. a lifting motor; 31. a cam; 4. a lifting slide block; 41. an elastic member; 42. beads; 5. swinging arms; 6. a suction cup; 7. a turntable; 8. a product placement block; 9. an origin sensor.

Detailed Description

In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

The technical solution of the present patent will be described in further detail with reference to the following embodiments.

As shown in fig. 1-4, the embodiment of the utility model provides a semiconductor pick-and-place device, including rotating electrical machines 1, fixing elevator motor 3 and swing arm 5 on elevator motor mount pad 2, rotating electrical machines 1 and elevator motor 3 mutually perpendicular install, and elevator motor 3's output shaft fixed mounting has cam 31. The output shaft of the rotating electrical machine 1 is fixedly provided with a slide block seat 11, the slide block seat 11 is slidably provided with a lifting slide block 4, an elastic part 41 is arranged between one end of the lifting slide block 4 and the slide block seat 11, the other end of the lifting slide block 4 is provided with a bead 42, the bead 42 and the output shaft of the rotating electrical machine 1 are positioned on the same straight line, the bead 42 is in point contact with the cam 31, when the highest point of the cam 31 is in contact with the bead 42, the lifting slide block 4 is pressed, the elastic part 41 is compressed to the maximum, and when the lowest point of the cam 31 is in contact with the bead 42, the lifting slide block 4 is bounced to the maximum stroke by the elastic part 41. One end of the swing arm 5 is fixed on the lifting slide block 4, and the other end is provided with a sucker 6.

Further, as shown in fig. 3, an origin sensor 9 is fixedly mounted on the lifting motor mounting base 2, the origin sensor 9 faces the slider base 11 and senses position information of the slider base 11, closed-loop control is achieved, and the sensing slider base 11 is enabled to return to zero accurately.

Further, as shown in fig. 4, the suction cups 6 include a single suction cup, a multi-nozzle suction cup, and an array suction cup, and the single suction cup can transfer a single article; the multi-nozzle sucker is provided with a single pair of suction pipes and a plurality of suction nozzles, and can transfer a plurality of objects at the same time; each suction nozzle of the array suction cup is provided with a pair of suction tubes to selectively pick up defective products among several objects.

Preferably, the rotating motor 1 and the lifting motor 3 are stepping motors, and the stepping motors are motors for converting electric pulse signals into corresponding angular displacement or linear displacement. The rotor is rotated by an angle or one step every time a pulse signal is inputted, and the angle of the cam 31 and the angle of the swing arm 5 can be precisely controlled. Swing arm 5 adopts flexible design, places piece 8 according to the product on the carousel 7 and adjusts the length that corresponds, and the commonality is strong.

The working principle is as follows: the device is arranged beside a turntable 7 of a production line, the swing arm 5 is just positioned above a product placing block 8 when being reset to the zero position, and the suction cup 6 is aligned to be transferred to a product, as shown in figure 2. According to the product requirement, a single sucker 6, a plurality of suckers or an array sucker are selected. When feeding, the rotating motor 1 drives the swing arm 5 to rotate to a feeding position, the lifting motor 3 rotates to enable the highest point of the cam 31 to be in contact with the beads 42, the lifting slide block 4 slides downwards and drives the swing arm 5 and the sucking disc 6 to descend, and the sucking disc 6 sucks a product; the lifting motor 3 rotates to make the lowest point of the cam 31 contact with the bead 42, so that the lifting slide block 4 rises under the rebound of the elastic piece 41; rotating electrical machines 1 drives swing arm 5 once more and rotates back to appointed position, and elevator motor 3 rotates once more and makes the highest point of cam 31 contact with pearl 42, leads to lifting slide 4 gliding and drives swing arm 5 and sucking disc 6 decline, and the product is loosened in the exhaust of sucking disc 6, places the product in product placement piece 8 department, and after the product on product placement piece 8 was all put, carousel 7 rotated a station. The operation sequence is opposite to that of blanking.

In summary, the utility model only adopts two motors, can realize the movement in the horizontal and vertical directions, has simple structure and high efficiency of the operation block, and reduces the mechanical loss and the manufacturing cost of the equipment when the equipment operates; the single sucker, the multi-nozzle sucker and the array sucker are adopted, and the swing arm 5 adopts a telescopic design, so that the universality is strong; an original point inductor 9 is adopted for designing a closed loop system, and the rotating motor 1 and the lifting motor 3 are stepping motors, so that the precision is high.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. As used herein, the terms "vertical," "horizontal," "left," "right," and the like are for illustrative purposes only and do not represent the only embodiments, and as used herein, the terms "upper," "lower," "left," "right," "front," "rear," and the like are used in a positional relationship with reference to the drawings.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The above embodiments are only used for illustrating the present invention, and not for limiting the present invention, and those skilled in the relevant technical field can make various changes and modifications without departing from the spirit and scope of the present invention, so that all equivalent technical solutions also belong to the scope of the present invention, and the protection scope of the present invention should be defined by the claims.

Claims (5)

1. The utility model provides a semiconductor is picked up and is put device, includes rotating electrical machines (1), fixes elevator motor (3) and swing arm (5) on elevator motor mount pad (2), its characterized in that: the rotating motor (1) and the lifting motor (3) are vertically arranged, and a cam (31) is fixedly arranged on an output shaft of the lifting motor (3); a sliding block seat (11) is fixedly installed on an output shaft of the rotating motor (1), a lifting sliding block (4) is installed on the sliding block seat (11) in a sliding mode, an elastic piece (41) is installed between one end of the lifting sliding block (4) and the sliding block seat (11), a bead (42) is installed at the other end of the lifting sliding block (4), the bead (42) and the output shaft of the rotating motor (1) are located on the same straight line, and the bead (42) is in point contact with the cam (31); one end of the swing arm (5) is fixed on the lifting slide block (4), and the other end of the swing arm is provided with a sucker (6).

2. A semiconductor pick and place device according to claim 1, wherein: an original point inductor (9) is fixedly mounted on the lifting motor mounting seat (2), and the original point inductor (9) faces the sliding block seat (11) and induces position information of the sliding block seat (11).

3. A semiconductor pick and place device according to claim 1, wherein: the sucker (6) comprises a single sucker, a plurality of suckers and an array sucker, the plurality of suckers are provided with a single pair of suckers and a plurality of suction nozzles, and each suction nozzle of the array sucker is provided with a pair of suckers.

4. A semiconductor pick and place device according to claim 1, wherein: the rotating motor (1) and the lifting motor (3) are stepping motors.

5. A semiconductor pick and place device according to claim 1, wherein: the swing arm (5) adopts a telescopic design, and the corresponding length is adjusted according to the position of the product placing block (8) on the turntable (7).

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