CN218446336U - Novel single crystal growing furnace camera cooling system - Google Patents

Abstract

The utility model belongs to the technical field of monocrystalline silicon production facility, concretely relates to novel camera cooling system of single crystal growing furnace, include: camera safety cover, cooling water circle device, the camera safety cover sets up on the camera support of single crystal furnace outer wall, the camera safety cover includes: roof, inside wall pipe and outside wall pipe, inside wall outside of the pipe is located to outside wall pipe cover, form water-cooling cavity between inside wall pipe and the outside wall pipe, be provided with delivery port and water inlet on the outside wall pipe, cooling water circulating device includes: the utility model discloses can reduce the operating temperature of single crystal growing furnace camera, make the life cycle of camera increase 1-1.5 times, improve camera operating stability, be provided with the drawing liquid pump in the heat radiation water tank, the drawing liquid pump through water supply pipe with the water inlet is connected, the delivery port passes through the return water pipe with the heat radiation water tank is connected.

Description

Novel single crystal growing furnace camera cooling system

Technical Field

The utility model belongs to the technical field of monocrystalline silicon production facility, concretely relates to novel single crystal growing furnace camera cooling system.

Background

During the growth process of the czochralski silicon, firstly, polysilicon raw materials are put into a quartz crucible and melted at the temperature of more than 1420 ℃, after the temperature is stabilized to the target temperature, the monocrystalline silicon seed crystal with determined crystal orientation is fused with the melt for seeding, and then the growth process of the monocrystalline silicon is completed through the working procedures of shouldering, shoulder rotating, diameter equalizing, ending, cooling and the like.

In the current production process of solar energy level czochralski silicon, a vision system is responsible for measuring the temperature and brightness of a molten silicon liquid level and the diameter of a crystal, wherein the diameter of the crystal directly influences the crystallization rate of a silicon single crystal rod, the vision system of a single crystal furnace comprises a set of parts such as an observation hole, gold-plated glass, quartz glass, a camera support, a camera, a lens and a camera protective cover, the observation hole, the gold-plated glass and the quartz glass form a camera window, the camera support is positioned on the outer end face of the camera window, the camera is installed on the camera support, the lens of the camera faces the camera window, the camera and the lens are protected by the camera protective cover, in the growth process of the single crystal, the camera plays a vital role in acquiring conditions and information in the single crystal furnace, the existing camera protective cover cannot be cooled by self, the temperature of the camera rises in the use process, abnormal capture of the camera and large pixel change can be caused, further, the change of the captured crystal growth brightness is frequent, the diameter of the crystal is unstable, and the crystallization rate and the single yield are influenced.

SUMMERY OF THE UTILITY MODEL

The utility model overcomes the defects in the prior art and provides a novel camera cooling system of a single crystal furnace.

In order to solve the technical problem, the utility model discloses a technical scheme be:

a novel cooling system of a single crystal furnace camera comprises: camera safety cover, cooling water circle device, the camera safety cover sets up on the camera support of single crystal growing furnace outer wall, the lower extreme opening of camera safety cover, the lower extreme of camera safety cover with the camera support is connected, and in the use of single crystal growing furnace, the camera is installed on the camera support, and the outside of locating the camera is buckled to the camera safety cover for the protection camera prevents that the camera from receiving the collision, the camera safety cover includes: roof, inside wall pipe and outside wall pipe, inside wall outside of the pipe is located to outside wall pipe cover, the upper end of inside wall pipe, outside wall pipe all with the lower terminal surface sealing connection of roof, sealing connection between the lower extreme of inside wall pipe and outside wall pipe, form water-cooling cavity between inside wall pipe and the outside wall pipe, be provided with delivery port and water inlet on the outside wall pipe, cooling water circulating device includes: the cooling water circulation device comprises a heat radiation water tank, a liquid pumping pump, a water supply pipeline and a water return pipeline, wherein the liquid pumping pump is arranged in the heat radiation water tank, the liquid pumping pump passes through the water supply pipeline and the water inlet is connected, the water outlet passes through the water return pipeline and the heat radiation water tank is connected, and more preferably, one set of cooling water circulation device can be provided with a plurality of groups of liquid pumping pumps, water supply pipelines and water return pipelines and corresponds to a plurality of camera protection covers of a plurality of single crystal furnaces.

Furthermore, the water outlet is located at the upper part of the outer wall pipe, the water inlet is located at the lower part of the outer wall pipe, cooling water enters the cavity from the water inlet, then the cavity is gradually filled, and the cooling water flows out from the water outlet after the liquid level reaches the height of the water outlet, so that the filling amount of the cooling water in the cavity is ensured, and the heat exchange efficiency is improved.

Further, evenly laid a plurality of heat dissipation wings on the outer terminal surface of inside wall pipe, the heat dissipation wing is sheet structure, just the one end vertical fixation of heat dissipation wing be in on the outer terminal surface of inside wall pipe, the other end orientation of heat dissipation wing outside wall pipe, just the tip of heat dissipation wing with there is the clearance between the outside wall pipe, through setting up the heat dissipation wing, can improve the heat transfer area between inside wall pipe and the cooling water, improve heat exchange efficiency for the heat dissipation of camera environment.

Further, the lower extreme of roof is provided with temperature sensor, can detect the surface temperature of camera through temperature sensor, when the high temperature, can remind the staff.

Furthermore, the temperature sensor is connected with a monitoring terminal, a refrigerating machine is arranged in the heat dissipation water tank, the monitoring terminal controls the refrigerating machine to work, when the surface temperature of the camera is too high, the monitoring terminal can display the temperature to workers, meanwhile, the monitoring terminal controls the refrigerating machine to work, the temperature of cooling water is reduced, and the cooling effect of the camera protection cover is improved.

Furthermore, the lower extreme of camera safety cover with can dismantle between the camera support and be connected.

Furthermore, the lower extreme of outside wall pipe is provided with the hem along circumference, the hem can be located by the cover on the camera support, the side end face of camera support with the interior terminal surface of hem laminates mutually, the side end face of camera support is provided with a plurality of screw holes, be provided with on the hem a plurality of with screw hole matched with connect the through-hole, connecting bolt runs through connect the through-hole and twist in the screw hole, when needs wash the cavity or maintain the camera, be convenient for pull down the camera protection cover through detachable design.

Compared with the prior art, the utility model following beneficial effect has.

1. The utility model discloses a camera safety cover sets up to double-walled tube structure, has the cavity between inside wall pipe and outside wall pipe, has the cooling water in the cavity, can carry out the heat transfer cooling to the temperature in the camera safety cover, can reduce the operating temperature of camera, makes the life cycle of camera increase 1-1.5 times, improves camera operating stability, through the visual system who improves the single crystal growing furnace, promotes monocrystalline silicon crystallization rate 2% -3%, increases per unit yield 1-2kg.

2. The utility model discloses be provided with temperature sensor in the camera safety cover, be provided with the refrigerator in the heat dissipation water tank, during the normal condition, the refrigerator is out of work, the cooling water is at the heat dissipation water tank heat dissipation naturally, but the power saving cost, when the operating temperature of camera risees to appointed temperature, the refrigerator begins to work, cooling water cooling rate accelerates, participate in endless cooling water temperature and reduce, improve the heat exchange efficiency of camera safety cover, can reduce the operating temperature of camera rapidly, after the operating temperature of camera reduces back to safe temperature, the refrigerator stop work, energy saving.

3. The utility model discloses well a cooling water circulating device can set up multiunit drawing liquid pump, water supply pipe and return water pipe, corresponds a plurality of camera safety covers of a plurality of single crystal growing furnaces, can practice thrift the equipment cost by a wide margin.

Drawings

The present invention will be further described with reference to the accompanying drawings.

Fig. 1 is a schematic structural view of the camera protection cover of the present invention.

Fig. 2 is a schematic structural view of the heat dissipation water tank of the present invention.

Fig. 3 is a sectional view of the camera protection cover of the present invention.

Fig. 4 is a schematic view of the hem of the present invention.

In the figure: the camera protection cover is 1, the single crystal growing furnace is 2, the camera support is 3, the camera is 4, the camera window is 5, the roof is 11, the inner wall pipe is 12, the outer wall pipe is 13, the cavity is 14, the water outlet is 15, the water inlet is 16, the heat dissipation fin is 17, the temperature sensor is 18, the hem is 19, the heat dissipation water tank is 21, the liquid pump is 22, the water supply pipeline is 23, the water return pipeline is 24, the refrigerator is 25, the threaded hole is 31, and the connecting through hole is 32.

Detailed Description

The following is a further description with reference to specific examples.

A novel single crystal growing furnace camera cooling system comprises: camera safety cover 1, cooling water circle device, camera safety cover 1 sets up on the camera support 3 of 2 outer walls of single crystal growing furnace, the lower extreme opening of camera safety cover 1, the lower extreme of camera safety cover 1 with camera support 3 is connected, camera safety cover 1 includes: roof 11, inside wall pipe 12 and outside wall pipe 13, outside wall pipe 13 cover is located outside inside wall pipe 12, outside wall pipe 13's upper end all with roof 11 lower terminal surface sealing connection, sealing connection between inside wall pipe 12 and the lower extreme of outside wall pipe 13, form cavity 14 between inside wall pipe 12 and the outside wall pipe 13, be provided with delivery port 15 and water inlet 16 on the outside wall pipe 13, delivery port 15 is located the upper portion of outside wall pipe 13, water inlet 16 is located the lower part of outside wall pipe 13, cooling water circle device includes: radiating water tank 21, drawing liquid pump 22, water supply pipe 23 and return water pipe 24, be provided with drawing liquid pump 22 in the radiating water tank 21, drawing liquid pump 22 passes through water supply pipe 23 with water inlet 16 is connected, delivery port 15 passes through return water pipe 24 with radiating water tank 21 is connected, water supply pipe 23 and return water pipe 24 are the hose, conveniently dismantle camera safety cover 1.

A plurality of heat dissipation fins 17 are uniformly distributed on the outer end face of the inner-wall tube 12, the heat dissipation fins 17 are in a sheet-like structure, one end of each heat dissipation fin 17 is vertically fixed on the outer end face of the inner-wall tube 12, the other end of each heat dissipation fin 17 faces the outer-wall tube 13, and a gap exists between the end of each heat dissipation fin 17 and the outer-wall tube 13.

The lower end of the top plate 11 is provided with a temperature sensor 18, the temperature sensor 18 is connected with a monitoring terminal, a refrigerator 25 is arranged in the heat-dissipation water tank 21, and the monitoring terminal controls the refrigerator 25 to work.

The lower extreme of camera safety cover 1 with can dismantle between the camera support 3 and be connected. The lower end of the exterior wall tube 13 is circumferentially provided with a folded edge 19, the folded edge 19 can be sleeved on the camera support 3, the side end surface of the camera support 3 is attached to the inner end surface of the folded edge 19, the side end surface of the camera support 3 is provided with a plurality of threaded holes 31, the folded edge 19 is provided with a plurality of connecting through holes 32 matched with the threaded holes 31, and connecting bolts penetrate through the connecting through holes 32 and are screwed in the threaded holes 31.

The utility model discloses a theory of operation as follows: the single crystal furnace and the camera are normally started, then the liquid pump is started to form cooling water circulation, the temperature in the camera protection cover is subjected to continuous heat exchange, and the camera is prevented from working in a high-temperature environment.

The roof lower extreme is provided with temperature sensor, be provided with the refrigerator in the heat dissipation water tank, during the normal condition, the refrigerator is out of work, the cooling water dispels the heat at the heat dissipation water tank naturally, but the power consumption cost is practiced thrift, when the operating temperature of camera risees appointed temperature, monitor terminal refrigerator begins to work, the cooling water cooling speed is accelerated, participate in the temperature reduction of endless cooling water, improve the heat exchange efficiency of camera safety cover, can reduce the operating temperature of camera rapidly, after the operating temperature of camera reduces back to safe temperature, the refrigerator stop work.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. It will be apparent to those skilled in the art that modifications and improvements can be made to the above-described embodiments without departing from the spirit and scope of the invention. Accordingly, it will be appreciated that those skilled in the art, upon attaining an understanding of the foregoing may readily produce alterations to, variations of, and equivalents to these embodiments without departing from the spirit and scope of the present invention as defined by the appended claims.

Claims (8)

1. A novel single crystal growing furnace camera cooling system which is characterized by comprising: camera safety cover (1), cooling water circle device, camera safety cover (1) sets up on camera support (3) of single crystal growing furnace (2) outer wall, the lower extreme opening of camera safety cover (1), the lower extreme of camera safety cover (1) with camera support (3) are connected, camera safety cover (1) includes: roof (11), inside wall pipe (12) and outside wall pipe (13), outside inside wall pipe (12) is located to outside wall pipe (13) cover, the upper end of inside wall pipe (12), outside wall pipe (13) all with the lower terminal surface sealing connection of roof (11), sealing connection between the lower extreme of inside wall pipe (12) and outside wall pipe (13), vacuole formation (14) between inside wall pipe (12) and the outside wall pipe (13), be provided with delivery port (15) and water inlet (16) on outside wall pipe (13), cooling water circle device includes: radiating water tank (21), drawing liquid pump (22), water supply pipe (23) and return water pipe (24), be provided with drawing liquid pump (22) in radiating water tank (21), drawing liquid pump (22) pass through water supply pipe (23) with water inlet (16) are connected, delivery port (15) are passed through return water pipe (24) with radiating water tank (21) are connected.

2. The novel camera cooling system of the single crystal furnace as claimed in claim 1, wherein the water outlet (15) is located at an upper portion of the outer wall tube (13), and the water inlet (16) is located at a lower portion of the outer wall tube (13).

3. The novel cooling system for the single crystal furnace camera according to claim 1, wherein a plurality of heat dissipation fins (17) are uniformly distributed on the outer end face of the inner-wall tube (12), the heat dissipation fins (17) are of a sheet-like structure, one ends of the heat dissipation fins (17) are vertically fixed on the outer end face of the inner-wall tube (12), the other ends of the heat dissipation fins (17) face the outer-wall tube (13), and a gap exists between the end of each heat dissipation fin (17) and the outer-wall tube (13).

4. The novel cooling system of the single crystal furnace camera is characterized in that a temperature sensor (18) is arranged at the lower end of the top plate (11).

5. The novel camera cooling system of the single crystal furnace as claimed in claim 1, wherein the lower end of the camera protection cover (1) is detachably connected with the camera support (3).

6. The novel camera cooling system of the single crystal furnace is characterized in that a folded edge (19) is arranged at the lower end of the outer wall tube (13) along the circumferential direction, the folded edge (19) can be sleeved on the camera support (3), the side end face of the camera support (3) is attached to the inner end face of the folded edge (19), a plurality of threaded holes (31) are formed in the side end face of the camera support (3), a plurality of connecting through holes (32) matched with the threaded holes (31) are formed in the folded edge (19), and connecting bolts penetrate through the connecting through holes (32) and are screwed in the threaded holes (31).

7. The novel cooling system of the single crystal furnace camera as claimed in claim 4, wherein the temperature sensor (18) is connected with a monitoring terminal, a refrigerating machine (25) is arranged in the heat dissipation water tank (21), and the monitoring terminal controls the refrigerating machine (25) to work.

8. The novel cooling system of the single crystal furnace camera is characterized in that the water supply pipeline (23) and the water return pipeline (24) are both flexible pipes.

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