CN210151240U

CN210151240U - Water-cooling heat shield for monocrystalline silicon preparation and monocrystalline furnace

Info

Publication number: CN210151240U
Application number: CN201920935816.1U
Authority: CN
Inventors: 吴学军
Original assignee: Ningxia Xu Sakura Amperex Technology Ltd
Current assignee: Ningxia Xu Sakura Amperex Technology Ltd
Priority date: 2019-06-20
Filing date: 2019-06-20
Publication date: 2020-03-17
Anticipated expiration: 2029-06-20

Abstract

A water-cooling heat shield for monocrystalline silicon preparation comprises an inner barrel, an outer barrel, an annular bottom, a first partition plate, a second partition plate, a plurality of partition plate groups, a water inlet pipe and a water outlet pipe, wherein the inner barrel is concentrically sleeved in the outer barrel, the top of the outer barrel is turned inwards to form an inner edge, the first partition plate and the second partition plate are vertically arranged in the annular inner cavity, the partition plate groups are arranged between the inner edge and the annular bottom, and a cooling liquid inlet and a cooling liquid outlet are arranged on the annular wall of the inner barrel between the first partition plate and the second partition plate. The cooling efficiency is improved, the utility model also provides a single crystal growing furnace for monocrystalline silicon preparation.

Description

Water-cooling heat shield for monocrystalline silicon preparation and monocrystalline furnace

Technical Field

The utility model relates to a silicon single crystal stick crystal pulling equipment technical field, in particular to water-cooling heat shield and single crystal growing furnace for monocrystalline silicon preparation.

Background

The single crystal furnace is necessary equipment in the process of converting polycrystalline silicon into monocrystalline silicon, and the monocrystalline silicon is a basic raw material in photovoltaic power generation and semiconductor industries. Monocrystalline silicon is one of the most important monocrystalline materials in the world as a key supporting material of the modern information society, and not only is the main functional material for developing computers and integrated circuits, but also the main functional material for photovoltaic power generation and solar energy utilization. In the process of pulling silicon single crystals, the cooling speed of the crystal bars is effectively improved through the water cooling heat shield, so that the pulling efficiency is improved.

Disclosure of Invention

In view of the above, it is necessary to provide a water-cooled heat shield for manufacturing single-crystal silicon, which has high cooling efficiency.

There is also a need for a single crystal furnace for producing single crystal silicon having high cooling efficiency.

A water-cooling heat shield for monocrystalline silicon preparation comprises an inner cylinder, an outer cylinder, an annular bottom, a first partition plate, a second partition plate, a plurality of partition plate groups, a water inlet pipe and a water outlet pipe, wherein the inner cylinder and the outer cylinder are conical cylinders with a large upper part and a small lower part, the inner cylinder is concentrically sleeved in the outer cylinder, the annular bottom is arranged at the lower end parts of the inner cylinder and the outer cylinder, the inner annular wall of the annular bottom is hermetically connected with the outer annular wall of the inner cylinder, the outer annular wall of the annular bottom is hermetically connected with the inner annular wall of the outer cylinder, the top part of the outer cylinder is turned inwards to form an inner edge, the end surface of the inner edge is hermetically connected with the outer annular wall of the upper end part of the inner cylinder, the outer cylinder and the annular bottom form an annular inner cavity, the shapes of the first partition plate and the second partition plate are matched with the longitudinal section shape, the upper end of the first partition plate is contacted with the inner edge, the lower end of the first partition plate is not contacted with the annular bottom, the upper end of the second partition plate is contacted with the inner edge, the lower end of the second partition plate is contacted with the annular bottom, the partition plate groups are arranged between the inner edge and the annular bottom, two adjacent partition plate groups are arranged in parallel, each partition plate group comprises an upper partition plate and a lower partition plate, the upper partition plate and the lower partition plate are both arc-shaped and matched with the outer annular wall of the inner cylinder in shape, the inner side wall of the upper partition plate is in sealed connection with the outer annular wall of the inner cylinder, the outer side wall of the upper partition plate is in sealed connection with the inner annular wall of the outer cylinder, the outer side wall of the lower partition plate is in sealed connection with the inner annular wall of the outer cylinder, the upper partition plate and the lower partition plate are arranged in parallel relatively, one end of the upper partition plate is contacted with, one end of the lower clapboard is contacted with the first clapboard, the other end of the lower clapboard is not contacted with the second clapboard, a cooling liquid outlet is arranged on the annular wall of the inner cylinder between the first clapboard and the second clapboard, the cooling liquid outlet is arranged close to the inner edge of the outer cylinder body, one end of the water outlet pipe is a free end, the other end of the water outlet pipe is connected with a cooling liquid outlet, a cooling liquid inlet is arranged on the annular wall of the inner cylinder between the first partition plate and the second partition plate, a partition plate group is arranged between the first partition plate and the second partition plate where the cooling liquid inlet is positioned, the cooling liquid inlet is positioned between the inner edge of the outer cylinder and the upper clapboard close to the inner edge of the outer cylinder, the cooling liquid inlet is also arranged close to the second clapboard, one end of the water inlet pipe is a free end, and the other end of the water inlet pipe is connected with the cooling liquid inlet.

Preferably, the water-cooling heat shield for monocrystalline silicon preparation still includes water supply connector, water connectors, cistern, sensor, water supply connector one end is connected with the free end of inlet tube, water connectors's the other end passes through the pipeline and is connected with the cistern, water connectors one end is connected with the free end of outlet pipe, water connectors's the other end passes through the pipeline and is connected with the cistern, installs the sensor on the pipeline between water connectors and the cistern.

Preferably, the sensor is a vortex street flow sensor.

Preferably, the water cooling and heating screen for preparing monocrystalline silicon comprises a first control component, the first control component comprises a first microprocessor and a first alarm lamp, the sensor is connected with the first microprocessor, and the first microprocessor is connected with the first alarm lamp.

Preferably, the water-cooling heat shield for monocrystalline silicon preparation includes second control unit, second control unit includes second microprocessor, first relay, bee calling organ, second alarm lamp, second relay, power, the sensor is connected with second microprocessor, second microprocessor is connected with first relay, first relay is connected with bee calling organ, first relay is connected with the second alarm lamp, second microprocessor is connected with the second relay, the second relay is connected with bee calling organ, the power is connected with second microprocessor, first relay, second relay, bee calling organ respectively.

Preferably, a red lamp, a yellow lamp and a green lamp are arranged in the second alarm lamp.

Preferably, the water-cooling heat shield for preparing monocrystalline silicon further comprises a first valve and a second valve, the first valve is mounted on a pipeline between the sensor and the water storage tank, and the second valve is mounted on a pipeline between the water inlet joint and the water storage tank.

Preferably, the water-cooling heat shield for preparing monocrystalline silicon further comprises a safety valve, and the safety valve is installed on a pipeline between the water outlet connector and the sensor.

The utility model provides a monocrystalline silicon preparation is with single crystal growing furnace, includes furnace body, connecting rod, monocrystalline silicon preparation is with the water-cooling heat shield, the connecting rod is a plurality of, and a plurality of connecting rods are followed the inner tube circumference of water-cooling heat shield is arranged for monocrystalline silicon preparation, the one end of connecting rod and the upper portion fixed connection of inner tube inner ring wall, the other end of connecting rod is connected with the upper portion of furnace body inside wall.

Preferably, the single crystal furnace for preparing the monocrystalline silicon further comprises a thermal field component arranged inside the furnace body, the thermal field component comprises a heat-insulating cylinder, a mounting seat, a crucible, a heater and a thermal screen component, the outer wall of the heat-insulating cylinder is in contact with the inner wall of the furnace body, the mounting seat is arranged at the bottom of the inner cavity of the heat-insulating cylinder, the crucible is arranged on the mounting seat, the heater surrounds the crucible, the thermal screen component comprises an outer guide cylinder, a graphite inner guide tube and a guide cylinder felt, the outer guide cylinder is arranged right above the crucible, the outer guide cylinder is a cylindrical cylinder, the top of the outer guide cylinder is outwards turned over to form an outer edge, the bottom of the outer guide cylinder is inwards turned over to form an inner edge, the outer edge of the outer guide cylinder is connected with the upper end part of the heat-insulating cylinder, the graphite inner guide tube is also a conical cylinder with a large upper part and a small lower part, the graphite inner guide tube is nested in the outer guide cylinder, and the bottom, the guide cylinder felt is filled between the graphite inner guide pipe and the graphite outer guide cylinder, and the water-cooling and heat-shielding screen for preparing the monocrystalline silicon is embedded in the graphite inner guide pipe.

The utility model discloses in, the coolant liquid export is close to the coolant liquid entry setting, and the coolant liquid gets into the back from the coolant liquid entry, flows along baffle group top-down, forms the S-shaped orbit that flows, then flows in the bottom of the cavity between first baffle, the second baffle, flows from the coolant liquid export again, and the at utmost has utilized the inner tube to be the lateral wall surface, and the furthest has increased the flow distance of coolant liquid, has improved cooling efficiency.

Drawings

FIG. 1 is an isometric view of a water-cooled heat shield for single crystal silicon production with the outer cylinder removed.

FIG. 2 is an isometric view with the water cooling and heating screen partially broken away for single crystal silicon production.

Fig. 3 is a functional block diagram of the first control part.

Fig. 4 is a functional block diagram of a second control component.

FIG. 5 is a sectional view of the single crystal furnace for single crystal silicon production.

In the figure: the water-cooling heat shield 10 for preparing the monocrystalline silicon, the inner cylinder 11, the coolant outlet 121, the coolant inlet 122, the outer cylinder 12, the inner edge 121, the annular bottom 13, the first partition plate 14, the second partition plate 15, the partition plate group 16, the upper partition plate 161, the lower partition plate 162, the water inlet pipe 17, the water outlet pipe 18, the water inlet connector 19, the water outlet connector 110, the water reservoir 120, the sensor 130, the first control component 140, the first microprocessor 1401, the first alarm lamp 1402, the second control component 150, the second microprocessor 1501, the first relay 1502, the buzzer 1503, the second alarm lamp 1504, the second relay, the power supply 1506, the furnace body 20, the connecting rod 30, the thermal field component 40, the heat preservation cylinder 41, the mounting seat 42, the crucible 43, the heater 1505, the heat shield component 45, the outer guide cylinder 451, the graphite inner guide 452 and the guide cylinder felt 453.

Detailed Description

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Referring to fig. 1 to 5, an embodiment of the present invention provides a water-cooling heat shield 10 for monocrystalline silicon preparation, including an inner cylinder 11, an outer cylinder 12, an annular bottom 13, a first partition plate 14, a second partition plate 15, a plurality of partition plate groups 16, a water inlet pipe 17, and a water outlet pipe 18, where the inner cylinder 11 and the outer cylinder 12 are tapered cylinders with large top and small bottom, the inner cylinder 11 is concentrically sleeved in the outer cylinder 12, the annular bottom 13 is disposed at a lower end portion of the inner cylinder 11 and the outer cylinder 12, an inner annular wall of the annular bottom 13 is hermetically connected with an outer annular wall of the inner cylinder 11, an outer annular wall of the annular bottom 13 is hermetically connected with an inner annular wall of the outer cylinder 12, a top portion of the outer cylinder 12 is turned inwards to form an inner edge 121, an end surface of the inner edge 121 is hermetically connected with an outer annular wall of an upper end portion of the inner cylinder 11, the outer cylinder 12 and the annular bottom 13, The second partition board 15 is vertically arranged in the annular inner cavity, the first partition board 14 and the second partition board 15 are parallel to each other, the upper end of the first partition board 14 is contacted with the inner edge 121, the lower end of the first partition board 14 is not contacted with the annular bottom 13, the upper end of the second partition board 15 is contacted with the inner edge 121, the lower end of the second partition board 15 is contacted with the annular bottom 13, the partition board groups 16 are arranged between the inner edge 121 and the annular bottom 13, two adjacent partition board groups 16 are arranged in parallel to each other, each partition board group 16 comprises an upper partition board 161 and a lower partition board 162, the upper partition board 161 and the lower partition board 162 are both arc-shaped matched with the outer annular wall of the inner cylinder 11, the inner side wall of the upper partition board 161 is hermetically connected with the outer annular wall of the inner cylinder 11, the outer side wall of the upper partition board 161 is hermetically connected with the inner annular wall of the outer cylinder 12, the inner side wall of, the upper partition plate 161 and the lower partition plate 162 are arranged in parallel relatively, one end of the upper partition plate 161 is in contact with the second partition plate 15, the other end of the upper partition plate 161 is not in contact with the second partition plate 15, one end of the lower partition plate 162 is in contact with the first partition plate 14, the other end of the lower partition plate 162 is not in contact with the second partition plate 15, a cooling liquid outlet 121 is arranged on the annular wall of the inner cylinder 11 between the first partition plate 14 and the second partition plate 15, the partition plate group 16 is not arranged between the first partition plate 14 and the second partition plate 15 where the cooling liquid outlet 121 is located, the cooling liquid outlet 121 is arranged close to the inner edge 121 of the outer cylinder 12, one end of the water outlet pipe 18 is a free end, the other end of the water outlet pipe 18 is connected with the cooling liquid outlet 121, a cooling liquid inlet 122 is arranged on the annular wall of the inner cylinder 11 between the first partition plate 14 and the second partition plate 15, the partition plate 14 and the partition plate 15 where the cooling liquid inlet 122 is located, the partition plate group 16, the coolant inlet 122 is also disposed near the second partition 15, one end of the water inlet pipe 17 is a free end, and the other end of the water inlet pipe 17 is connected to the coolant inlet 122.

In the utility model, the cooling liquid outlet 121 is arranged close to the cooling liquid inlet 122, and after entering from the cooling liquid inlet 122, the cooling liquid flows from top to bottom along the partition plate group 16 to form an S-shaped flow track, then flows into the bottom of the cavity between the first partition plate 14 and the second partition plate 15, and then flows out from the cooling liquid outlet 121, so that the inner cylinder 11 is utilized as the surface of the side wall to the maximum extent, the flow distance of the cooling liquid is increased to the maximum extent, and the cooling efficiency is improved; in addition, the flowing arrangement of the cooling liquid avoids the situation of short circuit of the cooling liquid to cause the reduction of the cooling efficiency.

Referring to fig. 1 to 5, further, the water-cooling heat shield 10 for monocrystalline silicon preparation further includes a water inlet connector 19, a water outlet connector 110, a water reservoir 120, and a sensor 130, wherein one end of the water inlet connector 19 is connected to a free end of the water inlet pipe 17, the other end of the water inlet connector 19 is connected to the water reservoir 120 through a pipeline, one end of the water outlet connector 110 is connected to a free end of the water outlet pipe 18, the other end of the water outlet connector 110 is connected to the water reservoir 120 through a pipeline, and the sensor 130 is installed on the pipeline between the water outlet connector 110 and the water reservoir.

Referring to fig. 1 to 5, further, the sensor 130 is a vortex street flow sensor 130.

In this embodiment, the sensor 130 can detect the flow rate and temperature of the cooling liquid synchronously, for example, a Vortex street (Vortex) flow sensor 130, which is model SV7500, or a digital flow switch for water, which is model PF3W711-06-DT-M, can be used.

Referring to fig. 1 to 5, further, the water-cooled heat shield 10 for single crystal silicon production includes a first control member 140, the first control member 140 includes a first microprocessor 1401 and a first alarm lamp 1402, the sensor 130 is connected to the first microprocessor 1401, and the first microprocessor 1401 is connected to the first alarm lamp 1402.

In one particular embodiment, the first microprocessor 1401 is a programmable logic controller and the sensor 130 is equipped with temperature and flow signal lines, such that when the flow or temperature exceeds a set value, the first microprocessor 1401 signals the first warning light 1402 and the first warning light 1402 signals a warning.

Referring to fig. 1 to 5, the water-cooled heat shield for silicon single crystal production 10 further includes a second control unit 150, the second control unit 150 includes a second microprocessor 1501, a first relay 1502, a buzzer 1503, a second alarm lamp 1504, a second relay 1505, and a power supply 1506, the sensor 130 is connected to the second microprocessor 1501, the second microprocessor 1501 is connected to the first relay 1502, the first relay 1502 is connected to the buzzer 1503, the first relay 1502 is connected to the second alarm lamp 1504, the second microprocessor 1501 is connected to the second relay 1505, the second relay 1505 is connected to the buzzer 1503, the second relay 1505 is connected to the second alarm lamp 1504, and the power supply 1506 is connected to the second microprocessor 1501, the first relay 1502, the second relay 1505, and the buzzer 1503, respectively.

In a specific embodiment, the second microprocessor 1501 is a programmable logic controller, and the temperature and flow signal lines installed on the sensor 130 control the first relay 1502 and the second relay 1505 respectively, for example, when the flow exceeds a set value, the first relay 1502 is turned on, the buzzer 1503 and the second warning lamp 1504 both send out warning signals to warn operators of abnormal flow, when the temperature exceeds a set value, the second relay 1505 is turned on, the buzzer 1503 and the second warning lamp 1504 both send out warning signals to warn operators of abnormal temperature.

Referring to fig. 1 to 5, a red light, a yellow light, and a green light are disposed in the second alarm lamp 1504.

In one particular embodiment, normally, only the green light is on in the second warning light 1504, only the yellow light is on when the flow rate exceeds the set value, and only the red light is on when the temperature exceeds the set value.

Referring to fig. 1 to 5, further, the water-cooled heat shield 10 for single-crystal silicon production further includes a first valve installed on a pipe between the sensor 130 and the water reservoir 120, and a second valve installed on a pipe between the water inlet joint 19 and the water reservoir 120.

Referring to fig. 1 to 5, further, the water-cooled heat shield 10 for single crystal silicon production further includes a safety valve installed on a pipeline between the water outlet joint 110 and the sensor 130.

Referring to fig. 1 to 5, the embodiment of the utility model provides a single crystal silicon preparation is with single crystal growing furnace still, including furnace body 20, connecting rod 30, single crystal growing for water cooling heat shield 10, connecting rod 30 is a plurality of, and a plurality of connecting rods 30 are arranged along single crystal growing for water cooling heat shield 10's inner tube 11 circumference, the upper portion fixed connection of inner tube 11 inner ring wall in connecting rod 30's one end and inner tube, and the other end of connecting rod 30 is connected with the upper portion of furnace body 20 inside wall.

Referring to fig. 1 to 5, further, the single crystal furnace for preparing single crystal silicon further includes a thermal field component 40 disposed inside the furnace body 20, the thermal field component 40 includes a thermal insulation cylinder 41, a mounting seat 42, a crucible 43, a heater 44, and a thermal shield assembly 45, an outer wall of the thermal insulation cylinder 41 contacts with an inner wall of the furnace body 20, the mounting seat 42 is disposed at a bottom of an inner cavity of the thermal insulation cylinder 41, the crucible 43 is disposed on the mounting seat 42, the heater 44 surrounds the crucible 43, the thermal shield assembly 45 includes an outer guide cylinder 451, an inner graphite guide 452, and a guide cylinder felt 453, the outer guide cylinder 451 is disposed right above the crucible 43, the outer guide cylinder 451 is a cylindrical cylinder, a top of the outer guide cylinder 451 is turned outward to form an outer edge, a bottom of the outer guide cylinder 451 is turned inward to form an inner edge, the outer edge of the outer guide cylinder 451 is connected with an upper end of the thermal insulation cylinder 41, the inner graphite guide 452 is a tapered cylinder with a large upper portion and a small lower portion, the, the bottom of the graphite inner guide 452 is clamped on the inner edge of the outer guide cylinder 451, a guide cylinder felt 453 is filled between the graphite inner guide 452 and the outer guide cylinder 451, and the water-cooling heat shield 10 for preparing monocrystalline silicon is embedded in the graphite inner guide 452.

The embodiment of the utility model provides a module or unit in the device can merge, divide and delete according to actual need.

While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.

Claims

1. The utility model provides a water-cooling heat shield for monocrystalline silicon preparation which characterized in that: the inner cylinder and the outer cylinder are conical cylinders with large top and small bottom, the inner cylinder is concentrically sleeved in the outer cylinder, the annular bottom is arranged at the lower end parts of the inner cylinder and the outer cylinder, the inner annular wall of the annular bottom is in sealing connection with the outer annular wall of the inner cylinder, the outer annular wall of the annular bottom is in sealing connection with the inner annular wall of the outer cylinder, the top part of the outer cylinder is turned inwards to form an inner edge, the end surface of the inner edge is in sealing connection with the outer annular wall of the upper end part of the inner cylinder, the outer cylinder and the annular bottom form an annular inner cavity, the shapes of the first partition plate and the second partition plate are matched with the longitudinal section shape of the annular inner cavity in direction, the first partition plate and the second partition plate are vertically arranged in the annular inner cavity, the first partition plate and the second partition plate are parallel to each other, and the upper end of the first partition plate is in contact, the lower end of the first partition plate is not contacted with the annular bottom, the upper end of the second partition plate is contacted with the inner edge, the lower end of the second partition plate is contacted with the annular bottom, the partition plate groups are arranged between the inner edge and the annular bottom, two adjacent partition plate groups are arranged in parallel, each partition plate group comprises an upper partition plate and a lower partition plate, the upper partition plate and the lower partition plate are both arc-shaped and matched with the outer annular wall of the inner cylinder in shape, the inner side wall of the upper partition plate is in sealing connection with the outer annular wall of the inner cylinder, the outer side wall of the upper partition plate is in sealing connection with the inner annular wall of the outer cylinder, the inner side wall of the lower partition plate is in sealing connection with the outer annular wall of the outer cylinder, the upper partition plate and the lower partition plate are arranged in parallel relatively, one end of the upper partition plate is contacted with the second partition plate, the other end of the upper partition plate is not, the other end of baffle and second baffle contactless down, be equipped with the coolant liquid export on the rampart of inner tube between first baffle, second baffle, coolant liquid export place first baffle, second baffle do not set up baffle group between, the coolant liquid export is close to outer barrel inner edge setting, the one end of outlet pipe is the free end, the other end and the coolant liquid exit linkage of outlet pipe are equipped with the coolant liquid entry on the rampart of inner tube between first baffle, second baffle, set up baffle group between coolant liquid entry place first baffle, the second baffle, the coolant liquid entry is located outer barrel inner edge and is close to between the last baffle of outer barrel inner edge, the coolant liquid entry still is close to the second baffle setting, the one end of inlet tube is the free end, the other end and the coolant liquid entry linkage of inlet tube.

2. The water-cooled heat shield for single crystal silicon production of claim 1, wherein: the water-cooling heat shield for monocrystalline silicon preparation still includes water supply connector, water connectors, cistern, sensor, water supply connector one end is connected with the free end of inlet tube, water connectors's the other end passes through the pipeline and is connected with the cistern, water connectors one end is connected with the free end of outlet pipe, water connectors's the other end passes through the pipeline and is connected with the cistern, installs the sensor on the pipeline between water connectors and the cistern.

3. The water-cooled heat shield for single-crystal silicon production of claim 2, wherein: the sensor is a vortex street flow sensor.

4. The water-cooled heat shield for single-crystal silicon production of claim 2, wherein: the cold and hot screen for preparing the water by the monocrystalline silicon comprises a first control component, wherein the first control component comprises a first microprocessor and a first alarm lamp, the sensor is connected with the first microprocessor, and the first microprocessor is connected with the first alarm lamp.

5. The water-cooled heat shield for single-crystal silicon production of claim 2, wherein: the water-cooling heat shield for monocrystalline silicon preparation includes second control unit, second control unit includes second microprocessor, first relay, bee calling organ, second alarm lamp, second relay, power, the sensor is connected with second microprocessor, second microprocessor is connected with first relay, first relay is connected with bee calling organ, first relay is connected with the second alarm lamp, second microprocessor is connected with the second relay, the second relay is connected with bee calling organ, the second relay is connected with the second alarm lamp, the power is connected with second microprocessor, first relay, second relay, bee calling organ respectively.

6. The water-cooled heat shield for single-crystal silicon production of claim 5, wherein: a red lamp, a yellow lamp and a green lamp are arranged in the second alarm lamp.

7. The water-cooled heat shield for single-crystal silicon production of claim 5, wherein: the water-cooling heat shield for preparing the monocrystalline silicon further comprises a first valve and a second valve, the first valve is installed on a pipeline between the sensor and the reservoir, and the second valve is installed on a pipeline between the water inlet joint and the reservoir.

8. The water-cooled heat shield for single-crystal silicon production of claim 5, wherein: the water-cooling heat shield for preparing the monocrystalline silicon further comprises a safety valve, and the safety valve is installed on a pipeline between the water outlet connector and the sensor.

9. A single crystal furnace for preparing monocrystalline silicon is characterized in that: including furnace body, connecting rod, any one of claims 1 to 8 water-cooling heat shield for monocrystalline silicon preparation, the connecting rod is a plurality of, and a plurality of connecting rods are followed water-cooling heat shield for monocrystalline silicon preparation's inner tube circumference arranges, the one end of connecting rod and the upper portion fixed connection of inner tube inner ring wall, the other end of connecting rod is connected with the upper portion of furnace body inside wall.

10. A single crystal furnace for single crystal silicon production as set forth in claim 9, wherein: the single crystal furnace for preparing the monocrystalline silicon further comprises a thermal field component arranged inside the furnace body, the thermal field component comprises a heat preservation cylinder, a mounting seat, a crucible, a heater and a thermal shielding component, the outer wall of the heat preservation cylinder is in contact with the inner wall of the furnace body, the mounting seat is arranged at the bottom of the inner cavity of the heat preservation cylinder, the crucible is arranged on the mounting seat, the heater surrounds the crucible, the thermal shielding component comprises an outer guide cylinder, a graphite inner guide cylinder and a guide cylinder felt, the outer guide cylinder is arranged right above the crucible, the outer guide cylinder is a cylindrical cylinder, the top of the outer guide cylinder is outwards turned over to form an outer edge, the bottom of the outer guide cylinder is inwards turned over to form an inner edge, the outer edge of the outer guide cylinder is connected with the upper end part of the heat preservation cylinder, the graphite inner guide cylinder is also a conical cylinder with a large upper part and a small lower part, the graphite inner guide cylinder is nested in the outer guide cylinder, and the bottom of the graphite, the guide cylinder felt is filled between the graphite inner guide pipe and the graphite outer guide cylinder, and the water-cooling and heat-shielding screen for preparing the monocrystalline silicon is embedded in the graphite inner guide pipe.