CN218411080U - Automatic plane flat crystal detection device based on machine vision - Google Patents

Automatic plane flat crystal detection device based on machine vision Download PDF

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CN218411080U
CN218411080U CN202222094379.XU CN202222094379U CN218411080U CN 218411080 U CN218411080 U CN 218411080U CN 202222094379 U CN202222094379 U CN 202222094379U CN 218411080 U CN218411080 U CN 218411080U
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flat crystal
machine vision
device based
plane
signal transmission
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杨宁
赵迪
刘莹
毛斌
张战国
韩李疆
王爱华
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SHAANXI INSTITUTE OF METROLOGY SCIENCE
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SHAANXI INSTITUTE OF METROLOGY SCIENCE
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Abstract

The utility model discloses a belong to plane flat crystal automatic checkout device technical field, specifically be based on plane flat crystal automatic checkout device of machine vision, including plane uniform thickness interferometer, industry camera and data processing terminal, plane uniform thickness interferometer middle part is provided with the mounting bracket, be provided with the collar on the mounting bracket, be provided with the industry camera on the collar, industry camera bottom is provided with the connecting rod, be connected with signal transmission module on the connecting pipe industry camera outer wall, signal transmission module electrical property input connection data processing terminal ensures its accurate interference fringe of output through the original optical path system who remains plane uniform thickness interferometer, only carries out hardware transformation to the reading part. And an industrial camera is adopted to replace a reading microscope for image recognition and collection, so that the detection precision and efficiency are improved.

Description

Automatic plane flat crystal detection device based on machine vision
Technical Field
The utility model relates to a plane flat crystal automatic checkout device technical field specifically is plane flat crystal automatic checkout device based on machine vision.
Background
Sodium light emitted by a sodium lamp irradiates a reflector, the reflector changes the direction of the light to enable the light to be changed from the horizontal direction to the vertical direction, then the light reaches a semi-transparent lens, the light irradiates a collimating objective lens through the semi-transparent lens, the light becomes parallel light after passing through the objective lens and then irradiates a detected flat crystal and a standard flat crystal, the light respectively reflects two beams of light when passing through the lower surface of the detected flat crystal and the upper surface of the standard flat crystal, and then the light forms an image on the semi-transparent lens after passing through the objective lens. Because the two beams of light come from the same light source, the frequencies of the two beams of light are the same, the vibration directions are the same, the phases are the same, the coherence condition is met, but the optical paths are different, and therefore interference fringes are formed. The optical wedges are formed on the lower surface of the detected flat crystal and the upper surface of the standard flat crystal, the optical path difference of the two beams of light is different due to the different thicknesses of the optical wedges, so that the bending degrees of the generated interference fringes are different, and the flatness of the flat crystal surface can be judged according to the bending degrees of the interference fringes. The interference fringes are seen by human eyes through a micrometer eyepiece and an observation objective, and measurement is carried out through a reading drum wheel.
The first part is that interference fringes are formed by an equal thickness interferometer, a standard flat crystal and a measured flat crystal through the principle of optical wave equal thickness interference. The part is based on the light wave interference rule, the measurement principle is strict, and the accuracy is extremely high; the second part is data acquisition, aiming the distance and the bending of the interference fringes to line by human eyes through an optical reading microscope, and reading on a micrometer drum wheel. Because the visual influence on the line and the estimation is larger, the measurement error is also larger; the third part is a data processing part, data processing is realized by manual recording, calculation according to a formula and correction of a standard flat crystal, and the data processing part is complex in work, low in efficiency and easy to generate gross errors.
Therefore, the uncertainty of the measurement result mainly comes from the uncertainty of the standard plane flatness measurement, the error of the micrometer eyepiece indication, the measurement repeatability of the interference fringe spacing and the measurement repeatability of the interference fringe bending. The uncertainty of the standard plane flatness measurement comes from the measurement result of the previous level tracing, the other three uncertainty sources are all related to the principle structure and personnel of the reading microscope, and the influence of the aiming and the estimation error source is not only once. Because human eyes can generate aiming errors when aligning, and can generate estimation errors when reading through a drum wheel of a reading microscope, on the other hand, because the efficiency of aligning and reading is low, the radiation of human body temperature causes the change of the environmental temperature in the surrounding local area, so that the flatness of the plane crystal generates tiny change, and especially, the visual errors generated by the visual fatigue of human eyes cannot be accurately estimated, and the factors cause larger measurement repeatability, and can influence the accuracy and reliability of the measurement result. In addition, with the alternation of new and old people of the metering and detecting mechanism, the defects of the interferometer inevitably cause instability of the measuring result, which is not beneficial to the expansion of the metering work. The digitalized improvement of the interferometer can effectively eliminate the influence of subjective factors and make the measurement result of the flatness more stable, so that the digitalized improvement of the old interferometer to adapt to the current measurement requirement has very practical value and economic value
SUMMERY OF THE UTILITY MODEL
This section is for the purpose of summarizing some aspects of embodiments of the invention and to briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and in the abstract of the specification and the title of the application to avoid obscuring the purpose of this section, the abstract of the specification and the title of the application, and such simplifications or omissions are not intended to limit the scope of the invention.
The utility model discloses the problem that exists among the flat brilliant automatic checkout device of plane in view of current machine vision has been proposed.
Therefore, the utility model aims at providing a plane flat crystal automatic checkout device based on machine vision guarantees its interference fringe of outputting accuracy through the original optical path system who remains plane uniform thickness interferometer, only carries out hardware transformation to the reading part. And an industrial camera is adopted to replace a reading microscope for image recognition and collection, so that the detection precision and efficiency are improved.
For solving the technical problem, according to the utility model discloses an aspect, the utility model provides a following technical scheme:
the plane flat crystal automatic detection device based on the machine vision comprises a plane equal thickness interferometer, an industrial camera and a data processing terminal;
the equal thickness interferometer of plane middle part is provided with the mounting bracket, be provided with the collar on the mounting bracket, be provided with the industry camera on the collar, industry camera bottom is provided with the connecting rod, be connected with signal transmission module on the industry camera outer wall, signal transmission module electric property input connection data processing terminal.
As a plane flat crystal automatic checkout device based on machine vision preferred scheme, wherein: the side wall of the plane isopachromator is provided with an optical path system, and the side wall of the optical path system is provided with an observation component.
As a preferred scheme of plane flat crystal automatic checkout device based on machine vision, wherein: the industrial camera shooting end is connected with a connecting pipe, and the other end of the connecting pipe is connected with the light path system.
As a preferred scheme of plane flat crystal automatic checkout device based on machine vision, wherein: the connecting rod is clamped with the mounting ring.
As a preferred scheme of plane flat crystal automatic checkout device based on machine vision, wherein: the signal transmission module is specifically a signal transmission wire.
As a plane flat crystal automatic checkout device based on machine vision preferred scheme, wherein: the data processing terminal is specifically a computer.
Compared with the prior art, the beneficial effects of the utility model are that: the original optical path system of the planar equal-thickness interferometer is reserved to ensure that the plane equal-thickness interferometer outputs accurate interference fringes, and only the reading part is subjected to hardware reconstruction. And an industrial camera is adopted to replace a reading microscope for image recognition and collection, so that the detection precision and efficiency are improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and detailed embodiments, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive labor. Wherein:
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic side view of the present invention;
fig. 3 is a schematic view of the three-dimensional structure of the present invention.
In the figure; 100 plane equal thickness interferometer, 110 mounting bracket, 111 mounting ring, 120 optical path system, 130 observation assembly, 200 industrial camera, 210 connecting rod, 220 signal transmission module, 230 connecting pipe, 300 data processing terminal.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be implemented in other ways than those specifically described herein, and one skilled in the art may similarly generalize the present invention without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
Next, the present invention will be described in detail with reference to the schematic drawings, and in the detailed description of the embodiments of the present invention, for convenience of explanation, the sectional view showing the device structure will not be enlarged partially according to the general scale, and the schematic drawings are only examples, and should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
To make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The utility model provides a following technical scheme: the plane flat crystal automatic detection device based on machine vision ensures accurate interference fringes through keeping an original optical path system of a plane equal-thickness interferometer in the using process, and only carries out hardware transformation on a reading part. An industrial camera is adopted to replace a reading microscope for image recognition and collection, so that the detection precision and efficiency are improved;
fig. 1-3 are schematic structural diagrams illustrating a first embodiment of the device for automatically inspecting a flat crystal based on machine vision according to the present invention, please refer to fig. 1-3, the main body of the device for automatically inspecting a flat crystal based on machine vision according to the present embodiment includes a flat equal thickness interferometer 100, an industrial camera 200 and a data processing terminal 300;
the plane equal thickness interferometer 100 is provided with a mounting frame 110 in the middle, the mounting frame 110 is provided with a mounting ring 111, the mounting ring 111 is provided with an industrial camera 200, the bottom of the industrial camera 200 is provided with a connecting rod 210, the outer wall of the industrial camera 200 is connected with a signal transmission module 220, the signal transmission module 220 is electrically connected with a data processing terminal 300 in an input mode, specifically, the plane equal thickness interferometer 100 is used for bearing an optical path system 120, the optical path system 120 outputs accurate interference fringes, the mounting frame 110 is used for bearing the industrial camera 200, the industrial camera 200 is used for collecting the interference fringes output by the optical path system 120 and fixedly connected with the mounting frame 110 through the bottom mounting rod, the signal transmission module 220 is used for transmitting graphic signals collected by the industrial camera 200 to the data processing terminal 300, specifically to be a signal data transmission lead, the data processing terminal 300 is used for processing processes such as image filtering, pixel subdivision, marking, sampling and the like on the interference fringes through an image preprocessing process, so as to obtain related original data, and then the original data are processed through a computer data processing procedure to calculate the flatness of the measured flat crystal, and compare the calculated result with the corresponding flat crystal flatness specification in the national measurement JG-2019, and the detected flat crystal level regulation in the country metering and the detected flat crystal;
with reference to fig. 1 to 3, the present real-time plane-flat automatic detection device based on machine vision ensures that the original optical path system 120 of the planar uniform thickness interferometer 100 is retained to output accurate interference fringes, and only the reading part is modified by hardware. The industrial camera 200 is adopted to replace a reading microscope to carry out image recognition and collection, the detection precision and efficiency are improved, the computer image preprocessing program is used for carrying out image filtering, pixel subdivision, marking, sampling and other processing processes on interference fringes to obtain related original data, the computer data processing program is used for processing the original data to calculate the flatness of the measured flat crystal, and the calculation result is compared with corresponding regulations of the national metrological verification regulation JJJG 28-2019 flat crystal on the flatness of the flat crystal to obtain the grade of the flatness of the detected flat crystal.
While the invention has been described above with reference to an embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, as long as there is no structural conflict, the various features of the disclosed embodiments of the present invention can be used in any combination with each other, and the description of these combinations not exhaustive in this specification is merely for the sake of brevity and resource conservation. Therefore, it is intended that the invention not be limited to the particular embodiments disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims (6)

1. Plane flat crystal automatic checkout device based on machine vision, its characterized in that: comprises a planar equal thickness interferometer (100), an industrial camera (200) and a data processing terminal (300);
the utility model discloses a planar equal thickness interferometer (100) is characterized in that mounting bracket (110) is provided with in the middle part, be provided with collar (111) on mounting bracket (110), be provided with industry camera (200) on collar (111), industry camera (200) bottom is provided with connecting rod (210), be connected with signal transmission module (220) on industry camera (200) outer wall, signal transmission module (220) electrical property input connection data processing terminal (300).
2. The automatic flat crystal detection device based on machine vision according to claim 1, characterized in that: the side wall of the plane isopacheter is provided with an optical path system (120), and the side wall of the optical path system (120) is provided with an observation component (130).
3. The automatic flat crystal detection device based on machine vision according to claim 1, characterized in that: the photographing end of the industrial camera (200) is connected with a connecting pipe (230), and the other end of the connecting pipe (230) is connected with the optical path system (120).
4. The automatic flat crystal detection device based on machine vision according to claim 1, characterized in that: the connecting rod (210) is clamped with the mounting ring (111).
5. The automatic flat crystal detection device based on machine vision according to claim 1, characterized in that: the signal transmission module (220) is embodied as a signal transmission wire.
6. The automatic flat crystal detection device based on machine vision according to claim 1, characterized in that: the data processing terminal (300) is embodied as a computer.
CN202222094379.XU 2022-08-10 2022-08-10 Automatic plane flat crystal detection device based on machine vision Active CN218411080U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117308830A (en) * 2023-09-20 2023-12-29 陕西省计量科学研究院 Clamping auxiliary device and method for detecting flatness of flat crystals

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117308830A (en) * 2023-09-20 2023-12-29 陕西省计量科学研究院 Clamping auxiliary device and method for detecting flatness of flat crystals
CN117308830B (en) * 2023-09-20 2024-03-15 陕西省计量科学研究院 Clamping auxiliary device and method for detecting flatness of flat crystals

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