CN218175195U

CN218175195U - Device for simultaneously drawing multiple crystals

Info

Publication number: CN218175195U
Application number: CN202222563048.6U
Authority: CN
Inventors: 郭李梁; 朱振业
Original assignee: Individual
Current assignee: Individual
Priority date: 2022-09-27
Filing date: 2022-09-27
Publication date: 2022-12-30
Anticipated expiration: 2032-09-27

Abstract

The utility model provides a device for drawing many crystals simultaneously, the utility model discloses a set up the heated board below crystal cooling body, keep warm to crystal cooling body's surface through the heated board, effectually avoided the volatile substance because of condensation phenomenon adheres to below and on the lateral wall of crystal cooling body, the utility model discloses when realizing avoiding the volatile substance adhesion on crystal cooling body, because the heat preservation effect of heated board, avoided because of the cooling that low temperature below the crystal cooling body is regional to its corresponding crucible, prevent that crystal cooling body from taking away too much temperature, played the effect that reduces the heating energy consumption etc, simultaneously, because the heat preservation effect of heated board, make the cooling effect complete action of cooling medium in crystal cooling body on the pulling hole is lifted on the crystal, and then improve the cooling effect to the drawing crystal, realize the quick crystallization of crystal, played the purpose that improves crystal drawing speed etc.

Description

Device for simultaneously drawing multiple crystals

Technical Field

The utility model relates to an intraocular lens preparation field, concretely relates to a device for drawing many crystals simultaneously.

Background

It is known that how to increase the pulling speed of the crystal is one of the key technologies in the aspect of improving the pulling efficiency of the crystal, taking the preparation of multi/single crystal silicon as an example, in the whole production process of the multi/single crystal silicon, the usage amount of cylindrical silicon rods with the diameter of 8mm to 12mm is very large, in the actual production process, excess materials occurring in the preparation process of the cylindrical silicon rods, silicon rods which are broken carelessly, crushed materials generated by multi/single crystal silicon production enterprises in the process stages of cutting, crushing and the like are very complicated to process, many enterprises directly discard or stack the crushed materials in a warehouse for saving trouble, and other enterprises recycle the crushed materials, draw the silicon rods into the silicon rods through a straight pulling furnace, and then cut the silicon rods into a plurality of cylindrical silicon rods with the size of 8mm to 8mm or 10mm to avoid trouble, so that the production cost of the cylindrical silicon rods is increased, impurity introduction is also increased in the cutting process, the production cost of the cylindrical silicon rods is also increased, and the crushed silicon materials are reused as a long-term technology in the field.

The utility model discloses a through the search discovery, the technique that adopts the czochralski method to draw the silicon rod has very matured, and has obtained extensive application in the field of artificial crystal preparation, but current czochralski method can only draw a silicon rod in the center of crucible when drawing the silicon rod, for example chinese utility model patent, patent number 201320678696.4, application date is 2013 10 months 30 days, the publication number is CN203639604U, the patent name is a flexible axle pulling type single crystal furnace; the patent of the Chinese utility model is 202011063763.2, the application date is 30 months 9 and 2020, and the publication number is CN112176400A, and the patent name is a Czochralski method single crystal furnace and a melt temperature gradient control method thereof. The technical schemes disclosed in the two patents are both the technical scheme for drawing the silicon rod by adopting the czochralski method, but the two technical schemes can only realize the simultaneous drawing of one silicon rod and cannot realize the simultaneous drawing of a plurality of silicon rods.

In order to realize the simultaneous drawing of many crystals, the utility model discloses the people has submitted the patent application named as a crystal cooling device for the intraocular lens stove to the national intellectual property office in 2022 years 3 month 21 days, and patent application number is 202220616165.1, and this technical scheme discovers following drawback when the crystal is drawn:

1. because the lower flange or the cooling disc close to the molten liquid in the crucible is internally provided with the cooling medium, the temperature of the outer surface of the lower flange or the cooling disc is lower than that of the area where the lower flange or the cooling disc is located, after the silicon material in the crucible is melted into the silicon liquid, impurities in the silicon liquid and in the furnace chamber volatilize and float to the lower bottom surface or the side wall of the lower flange or the cooling disc, because the cooling medium is communicated into the lower flange or the cooling disc, the temperature of the lower flange or the cooling disc is relatively low, volatile matters are condensed and attached to the bottom surface or the side wall of the lower flange or the cooling disc, when the volatile matters are accumulated to a certain thickness, the volatile matters drop to the upper surface of the molten liquid of the crucible and float to the upper surface of the molten liquid due to the thermal expansion and contraction effect, the volatile matters cannot be melted and further cannot be gasified, the volatile matters can continuously exist on the upper surface of the molten liquid, when the drawing is carried out, the crucible rotates, the volatile matters in the crucible cannot stand still at a certain position on the upper surface of the molten liquid of the silicon material and only can be forced to change when the silicon chip is drawn, and the finished product is scraped.

2. Because the lower surface of the lower flange or the cooling disc is a plane, the cooling effect of the cooling medium on each crystal drawing hole on the lower flange or the cooling disc is the same, at the moment, because the temperature of the melt in the crucible is not uniform, the temperature of the crucible is from the inner edge of the crucible to the center of the crucible in sequence from high to low, when in drawing, the crystallization speed of the crystal at the outer ring of the lower flange or the cooling disc is lower than that of the crystal at the inner ring of the lower flange or the cooling disc due to the fact that the temperature of the outer ring is higher than that of the inner ring when in drawing (the crystallization speed is crystallized first due to the relatively low temperature when the position is closer to the center of the crucible), and under the condition of the same drawing speed, the crystal diameter at the outer ring of the lower flange or the cooling disc is smaller than that at the inner ring of the lower flange or the cooling disc, so that the crystal diameters drawn at the same time are not consistent.

3. The lower surface of the lower flange or the cooling plate is close to but not contacted with the upper surface of the melt in the crucible, and the low temperature on the surface of the lower flange or the cooling plate can absorb part of heat above the crucible, thereby causing unnecessary heat loss, certain power consumption loss and the like.

In summary, it is an urgent need to provide a device for simultaneously drawing a plurality of crystals while avoiding the above-mentioned problems.

Disclosure of Invention

In order to overcome not enough in the background art, the utility model provides a device for drawing many crystals simultaneously, the utility model discloses a set up the heated board below crystal cooling body, effectively avoid the volatile substance to adhere to on the surface of crystal cooling body because of the condensation, the heated board can also adjust crystal cooling body and go up inside and outside circle temperature simultaneously, and then reaches and makes it realize the purpose etc. of constant diameter.

In order to achieve the purpose, the utility model adopts the following technical scheme:

a device for simultaneously drawing a plurality of crystals comprises a furnace body, an upper pulling mechanism, a crystal cooling mechanism, a heat insulation plate, a crucible and a heater, wherein the heater is arranged in the furnace body, the crucible is arranged in the middle of the heater, the crystal cooling mechanism is arranged above the crucible, the heat insulation plate is arranged below the crystal cooling mechanism, a plurality of crystal lower pulling holes which are in one-to-one correspondence with the crystal upper pulling holes of the crystal cooling mechanism are formed in the heat insulation plate, the upper pulling mechanism is arranged above the crystal cooling mechanism, and the lower end heads of seed crystals on the upper pulling mechanism respectively correspond to the crystal upper pulling holes of the crystal cooling mechanism to form the device for simultaneously drawing a plurality of crystals.

According to the device for simultaneously drawing a plurality of crystals, the crucible is lifted up and down or the crystal cooling mechanism is lifted up and down to ensure the distance between the lower surface of the crystal cooling mechanism and the liquid level of the melt in the crucible.

The device for simultaneously drawing a plurality of crystals is characterized in that the lower end of the crucible is connected with a lower shaft which can lift up and down.

The device for simultaneously drawing the plurality of crystals is characterized in that an upper through hole is formed in the middle of the upper surface of the crystal cooling mechanism, a cavity is formed in the crystal cooling mechanism, a plurality of groups of fixing columns are radially arranged on the periphery of the upper through hole, each group of fixing columns comprises at least two fixing columns, a crystal lifting hole is formed in each fixing column, the cavity is communicated with a water outlet pipe and a water inlet pipe respectively, and the water outlet pipe and the water inlet pipe are connected with a cooling medium source respectively.

According to the device for simultaneously drawing the plurality of crystals, at least one stage of upwards-sunken step is arranged below the crystal cooling mechanism from outside to inside to form a step surface, and a circle of crystal lifting holes are respectively formed in each stage of step surface.

The device for simultaneously drawing the plurality of crystals is characterized in that a lower through hole is formed in the middle of the heat insulation plate, a plurality of crystal lower pulling holes are radially formed in the periphery of the lower through hole, and the lower through hole and the crystal lower pulling hole respectively correspond to an upper through hole and a crystal upper pulling hole in the crystal cooling mechanism.

The device for simultaneously drawing the plurality of crystals is characterized in that the heat-insulating plate is of a flat plate type structure, and the overall dimension of the heat-insulating plate is larger than or equal to that of the crystal cooling mechanism.

When the heat insulation plate is of a flat plate type structure, at least one step of upward convex step is arranged on the heat insulation plate from outside to inside, and the step is correspondingly matched with the step surface below the crystal cooling mechanism.

The device for simultaneously drawing a plurality of crystals is characterized in that the replacement structural form of the heat-insulation plate is that a groove which is sunken downwards is arranged in the middle of the heat-insulation plate to form a barrel-shaped structure, and the inner edge surface of the groove is in clearance fit or interference fit with the outer edge surface of the crystal cooling mechanism.

When the outer edge surface of the crystal cooling mechanism is in clearance fit with the inner edge surface of the groove, heat-insulating fillers are arranged at the clearance.

When the heat preservation plate is of a barrel-shaped structure, at least one step of upward convex step is arranged on the heat preservation plate from outside to inside, and the step is correspondingly matched with the step surface below the crystal cooling mechanism.

Due to the adoption of the technical scheme, the utility model discloses following beneficial effect has:

the utility model discloses a set up the heated board below crystal cooling body, keep warm to crystal cooling body's surface through the heated board, effectually avoided the volatile substance because of condensation phenomenon adheres to below and on the lateral wall of crystal cooling body, the utility model discloses when realizing avoiding the volatile substance adhesion on crystal cooling body, because the heat preservation effect of heated board, avoided because of the low temperature below the crystal cooling body to its cooling that corresponds the crucible region, prevent that crystal cooling body from taking away too much temperature, played the effect etc. that reduces the heating energy consumption, simultaneously, because the heat preservation effect of heated board, make the cooling effect complete action of crystal cooling body internal cooling medium on pulling downthehole pore wall on the crystal, and then improve the cooling effect to the pulling crystal, realize the quick crystallization of crystal, played the purpose etc. that improves crystal pulling speed, be fit for popularization and application on a large scale.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

fig. 2 is a schematic view of a first alternative structure of the thermal insulation plate of the present invention;

FIG. 3 is a schematic top view of the structure of FIG. 2;

fig. 4 is a schematic view of a second alternative structure of the thermal insulation plate of the present invention;

fig. 5 is a schematic view of a third alternative structure of the thermal insulation plate of the present invention;

FIG. 6 is a schematic view of a fourth alternative structure of the thermal insulation plate of the present invention;

fig. 7 is a schematic view of a fifth alternative structure of the thermal insulation plate of the present invention;

FIG. 8 is a schematic view of the structure of the step of the heat insulation plate of the present invention;

in the figure: 1. a furnace body; 2. an upper lifting mechanism; 3. a columnar crystal; 4. a crystal cooling mechanism; 401. pulling holes on the crystal; 402. a cavity; 403. perforating; 5. a thermal insulation board; 501. pulling a hole under the crystal; 502. a step; 503. lower punching; 6. melting liquid; 7. a crucible; 8. a heater; 9. a lower shaft; 10. and (5) insulating the filler.

Detailed Description

The invention will be explained in more detail by the following examples, which are intended to protect all the changes and improvements within the scope of the invention, and are not limited to the following examples;

in the description of the present invention, it is to be understood that the terms "center", "lateral", "length", "width", "height", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "side", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in fig. 1, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

The device for simultaneously drawing a plurality of crystals comprises a furnace body 1, an upward-pulling mechanism 2, a crystal cooling mechanism 4, a heat-insulating plate 5, a crucible 7 and a heater 8, wherein the heater 8 is arranged in the furnace body 1, a heat-insulating layer is arranged between the inner wall of the furnace body 1 and the outer edge surface of the heater 8, the crucible 7 with a fixed position or capable of moving up and down is arranged in the middle of the heater 8, the crystal cooling mechanism 4 with a fixed position or capable of moving up and down is arranged above the crucible 7, the upward and downward movement of the crucible 7 or the upward and downward movement of the crystal cooling mechanism 4 can ensure that the distance between the lower surface of the crystal cooling mechanism 4 and the liquid level of the melt 6 in the crucible 7 tends to be constant, the heat-insulating plate 5 is arranged below the crystal cooling mechanism 4, a plurality of crystal downward-pulling holes 501 corresponding to the upward-pulling holes 401 of the crystal cooling mechanism 4 one by one are arranged on the heat-insulating plate 5, and a plurality of upward-pulling mechanisms for simultaneously forming crystal heads 401 for pulling the crystals by the upward-pulling mechanism 2.

The utility model discloses in practical application, through setting up heated board 5, can play following effect:

1. the heated board 5 that passes through sets up, can reduce or avoid crystal cooling mechanism 4 to lead to its surface temperature to be less than the temperature in the furnace chamber owing to let in cooling medium's reason, and then can reduce or avoid the volatile matter condensation in the melt 6 to adhere to the surface of crystal cooling mechanism 4.

2. Through the arrangement of the heat insulation board 5, the temperature uniformity of the pulling holes 401 on the crystals on the crystal cooling mechanism 4 can be better ensured (namely, the temperatures of the pulling holes 401 on the inner ring crystal and the pulling holes 401 on the outer ring crystal on the crystal cooling mechanism 4 can be adjusted, so that the temperature of the pulling holes 401 on the inner ring crystal and the outer ring crystal tends to be isothermal), and because the temperature distribution range of the crucible is higher than the central temperature, the cooling range of the crystal cooling mechanism 4 should be changed along with the temperature distribution range when the crystals are pulled, so that the crystallization consistency of the inner ring crystal and the outer ring crystal is ensured.

3. Through the setting of heated board 5, can also make the temperature in the crystallization zone tend to evenly in the crucible, play and reduce or avoid the cooling medium in crystal cooling mechanism 4 to cool off the crystallization zone in the crucible (crystal cooling mechanism 4 surface temperature is low, can take away a part of heat, after the calorific loss, and then lead to the reduction of temperature), can avoid not being reduced in order to guarantee the temperature in the crystallization zone in the crucible, guarantee the step that the temperature in the crystallization zone in the crucible is not reduced through the method that increases heating power, and then realize the effect of reducing the energy consumption (namely through the setting of heated board 5, can reduce or adjust the absorption of crystal cooling mechanism 4 to 6 liquid level temperatures of molten liquid in the crucible, thereby avoid unnecessary calorific loss, avoid causing the increase of power consumption etc.), can also realize the even etc. of temperature in the crystallization zone of crucible like this way.

During the concrete implementation, in order to realize that the distance between the lower surface of the crystal cooling mechanism 4 and the liquid level of the melt 6 in the crucible 7 tends to be invariable, the preferred structure is crucible 7 oscilaltion, the scheme that the position of the crystal cooling mechanism 4 is motionless, crucible 7 oscilaltion is the conventional and comparatively commonly used technical scheme in this field, and during the implementation, the lower extreme of crucible 7 sets up on the crucible supporting seat, the lower shaft 9 of oscilaltion is connected to the lower extreme of crucible supporting seat, and the oscilaltion of crucible 7 is realized through the lift of lower shaft 9, and this technical scheme is simple structure not only, also can guarantee the crystallization line of crystal invariable all the time (namely the liquid level of the melt 6 is in the fixed position of heater all the time) simultaneously.

If crystal cooling mechanism 4 is selected to ascend and descend vertically, crucible 7 is fixed, crystal cooling mechanism 4 is connected with an elevating mechanism when crystal cooling mechanism 4 realizes the ascending and descending function, crystal cooling mechanism 4 is driven to ascend and descend vertically through elevating mechanism, it should be noted that elevating mechanism is the conventional technology in the field, the specific structure can be seen in the patent number 202220616149.2 of the utility model applied in 2022, 3, 21, the patent name is a cooling screen elevating device for artificial crystal furnace, which is not described herein, in the specific implementation, heater 8 can be set to be the structure of ascending and descending vertically, when the liquid level of molten liquid 6 in crucible 7 descends, heater 8 descends along with crystal cooling mechanism 4, thus, the crystallization line of crystal can be ensured to be unchanged, and the ascending and descending of heater 8 is the conventional structure setting in the field too, which is not described herein.

Further, an upper through hole 403 is formed in the middle of the upper surface of the crystal cooling mechanism 4, a cavity 402 is formed in the crystal cooling mechanism 4, a plurality of sets of fixing columns are radially arranged on the periphery of the upper through hole 403, each set of fixing column comprises at least two fixing columns, a crystal lifting hole 401 is formed in each fixing column, the cavity 402 is communicated with a water outlet pipe and a water inlet pipe respectively, and the water outlet pipe and the water inlet pipe are connected with a cooling medium source respectively.

Further, in order to realize the simultaneous drawing of more crystal bars, a plurality of circles of crystal pulling holes 401 are sequentially arranged on the crystal cooling mechanism 4 from the outer edge to the inner edge at intervals, and at this time, in order to ensure the consistency of the diameters of the crystals pulled by the crystal pulling holes 401 on each circle of crystals, the technical problem to be avoided is that the problem of uneven temperature of the molten liquid in the crucible 7 is solved, so that at least one level of upward-concave step is arranged below the crystal cooling mechanism 4 from the outer side to the inner side to form a step surface, and a circle of crystal pulling holes 401 are respectively arranged on each level of step surface.

The utility model relates to a concrete structure of the crystal cooling mechanism 15, which can be applied for use in 21/3/2022, with the patent number of 202210278020.X, and the patent name is a crystal cooling device for an artificial crystal furnace.

Simultaneously the utility model discloses well crystal cooling body 15's concrete structure can also be in the application of 2021 year 7 month 8 days, the patent number is 202121548804.7, the patent name is a cooling device who is used for using garrulous silicon material to draw many silicon cores simultaneously, or the application of 2021 year 7 month 8 days, the patent number is 202121548805.1, the patent name is a cooling screen who is used for using garrulous silicon material to draw many silicon cores simultaneously, or with the application of 2021 year 7 month 8 days, the patent number is 202121549279.0, the patent name is a device that uses garrulous silicon material to draw many silicon cores simultaneously.

Further, a lower through hole 503 is formed in the middle of the heat insulation board 5, a plurality of crystal lower pulling holes 501 are radially formed in the periphery of the lower through hole 503, and the lower through hole 503 and the crystal lower pulling holes 501 correspond to the upper through hole 403 and the crystal upper pulling hole 401 of the crystal cooling mechanism 4, respectively.

Further, as shown in fig. 1 and 7, the heat-insulating plate 5 has a flat plate structure, and the outer dimension of the heat-insulating plate 5 is greater than or equal to the outer dimension of the crystal cooling mechanism 4.

Further, as shown in fig. 2 and 4, when the heat insulation plate 5 is a flat plate structure, at least one step of step 502 protruding upwards is provided on the heat insulation plate 5 from outside to inside, and the step 502 is correspondingly matched with the step surface below the crystal cooling mechanism 4.

Further, as shown in fig. 5 and 6, the heat insulation plate 5 has an alternative structure in which a downwardly recessed groove is formed in the middle of the heat insulation plate 5 to form a barrel-shaped structure, and an inner edge surface of the groove is in clearance fit or interference fit with an outer edge surface of the crystal cooling mechanism 4.

Further, as shown in fig. 5, when the heat insulation board 5 is configured as a barrel-shaped structure, at least one step 502 protruding upward is disposed on the heat insulation board 5 from outside to inside, and the step 502 is correspondingly matched with the step surface below the crystal cooling mechanism 4.

Further, as shown in fig. 5, when the outer edge surface of the crystal cooling mechanism 4 is in clearance fit with the inner edge surface of the groove, a heat insulating filler 10 is arranged in the clearance.

Further, as shown in fig. 2, 4, 5, below the crystal cooling mechanism 4 outside-in be equipped with the step that at least one-level was sunken upwards and is formed the ladder face be equipped with below the ladder face with the unanimous heated board 5 of ladder face shape, during the implementation, set up the homogeneity that the pull hole 401 temperature was lifted on the assurance crystal cooling mechanism 4 that the ladder step can be better, because the temperature distribution scope of crucible is higher than central temperature for peripheral temperature, when the pulling crystal, the cooling range of crystal cooling mechanism 4 should also change thereupon, and then guarantee the uniformity of interior outer lane crystal crystallization.

Further, as shown in fig. 1 and 7, the heat insulation board 5 is a flat plate structure, and the outer dimension of the heat insulation board 5 is greater than or equal to the outer dimension of the lower flange 5 or the cooling plate 25. During the implementation, the overall dimension of heated board 5 is greater than the overall dimension of crystal cooling mechanism 4 and the structure is shown in fig. 4, 7, and the outer fringe face of heated board 5 outwards extends, can reduce like this or avoid the volatile matter to adhere to the outer fringe face of crystal cooling mechanism 4, can also play the effect of tray simultaneously, falls the volatile matter on the upper surface etc. that heated board 5 extends. When the overall dimension of the insulation board 5 is equal to the overall dimension of the crystal cooling mechanism 4, the structure is shown in fig. 1 and fig. 2, the insulation board 5 and the crystal cooling mechanism 4 can be connected in a bonding manner, can also be connected in a pin or screw fixing manner, can also be hung below the crystal cooling mechanism 4 through a connecting rod, and the like, and the insulation board 5 can be made of graphite felt or a graphite plate or a carbon-carbon composite material plate, and the like.

Further, as shown in fig. 5 and 6, the heat insulation plate 5 has an alternative structural form that a downward-recessed groove is formed in the middle of the heat insulation plate 5 to form a barrel-shaped structure, and the inner edge surface of the groove is connected with the outer edge surface of the crystal cooling mechanism 4 in a clearance fit or interference fit manner. When the crystal cooling mechanism is implemented, when the outer edge surface of the crystal cooling mechanism 4 is in clearance fit with the inner edge surface of the groove, the heat-insulating filler 10 is arranged at the clearance. The heat insulation filler 10 is any one of a quartz felt, a graphite felt or a zirconium felt. Set up the heated board 5 of barrel-shaped structure, can play and prevent that the volatile matter from bonding and pile up on the lateral wall of crystal cooling mechanism 4, can also play the effect of adjusting 4 lateral walls heat preservation effects of crystal cooling mechanism simultaneously, through the heat preservation effect of adjusting 4 lateral walls of crystal cooling mechanism, the temperature of pulling hole 401 is lifted to the crystal on the realization regulation 4 outer lanes of crystal cooling mechanism, and then the diameter of the cylindricality crystal 3 of drawing is realized adjusting, the effect of setting up heat preservation filler 10 is also when playing the heat preservation effect, the thickness size through adjustment interpolation heat preservation filler 10 adjusts heat preservation temperature, the temperature of pulling hole 401 is lifted to the crystal on the final realization adjustment 4 outer lanes of crystal cooling mechanism, realize adjusting diameter etc. of the cylindricality crystal 3 of drawing.

During implementation, an insulation board can be arranged on the upper panel of the crystal cooling mechanism 4, namely, the outer surface of the crystal cooling mechanism 4 is completely coated with a layer of insulation material.

During implementation, the middle part of the heat insulation plate 5 can be provided with a lower through hole 503 consistent with the through hole at the central part of the crystal cooling mechanism 4, the periphery of the lower through hole 503 is provided with a plurality of crystal lower pulling holes 501 corresponding to the crystal upper pulling holes 401 on the crystal cooling mechanism 4 one by one, when at least one level of step which is concave upwards is arranged below the crystal cooling mechanism 4 from outside to inside to form a step surface, the heat insulation plate 5 is provided with at least one level of step 502 which is convex upwards from outside to inside, the step 502 is matched with the step surface on the crystal cooling mechanism 4, and the specific structure is shown in attached figures 2, 4 and 5.

The cooling medium involved in the utility model is cooling water or cooling oil or cooling gas, such as liquid nitrogen and the like.

When the utility model is used in concrete, the utility model is arranged above a crucible 7 in a furnace body 1, the lower part of a crystal cooling mechanism 4 of the utility model is close to a melt 6 in the crucible 7 but can not be contacted, when in work, raw materials are firstly put into the crucible 7, a heater 8 is opened to heat the crucible 7 on a lower shaft 9, after the raw materials of the crucible 7 are melted into the melt 6, a lifting mechanism is lifted to drive a seed crystal to descend, when the seed crystal passes through a crystal lifting hole 401 and a crystal lifting hole 501, the seed crystal descends by contacting with the melt 6, after the lower end of the seed crystal is melted, the seed crystal is slowly lifted, because a cooling medium is introduced into the crystal cooling mechanism, at the moment, the melt 6 ascends along with the seed crystal, when the melt is close to the lower part of the crystal cooling mechanism 4, because the temperature of this place is less than the temperature of crucible 7, melt 6 crystallizes gradually, after the temperature reduces gradually and just forms required cylindrical crystal 3 after the crystallized melt gets into crystal and lifts pulling hole 401, when using, the coolant in crystal cooling mechanism 4 can carry out forced cooling to cylindrical crystal 3 after just crystallizing through crystal lifting pulling hole 401, heated board 5 that sets up on crystal cooling mechanism 4 can avoid volatile matter to adhere on the surface of crystal cooling mechanism 4, simultaneously through the setting of heated board 5, can also adjust the heat preservation (cold insulation effect) effect that every circle of crystal lifted pulling hole 401, and then realize adjusting the diameter etc. that inner and outer lane crystal lifted pulling hole 401 pulled cylindrical crystal 3.

In implementation, the shape of the step 502 provided on the heat insulation board 5 may be circular, or a quincunx shape (a specific structure is shown in fig. 8) formed by an inwardly recessed arc provided between every two crystal lower pulling holes 501, or an outwardly protruding arc or various irregular shapes provided between every two crystal lower pulling holes 501.

The utility model discloses when concrete implementation, all coolant access & exit that involve all can set up to the multiunit.

The utility model discloses when practical application, not only can be used for the drawing of silicon core, can also realize the drawing of other crystal materials simultaneously.

The details of the above-mentioned parts are not described in detail since they are prior art.

The embodiments selected for the purpose of disclosing the invention, are presently considered to be suitable, it being understood, however, that the invention is intended to cover all variations and modifications of the embodiments, which fall within the scope of the concept and invention.

Claims

1. The utility model provides a device for drawing many crystals simultaneously, includes furnace body (1), goes up pulling mechanism (2), crystal cooling body (4), heated board (5), crucible (7) and heater (8), characterized by: the device is characterized in that a heater (8) is arranged in the furnace body (1), a crucible (7) is arranged in the middle of the heater (8), a crystal cooling mechanism (4) is arranged above the crucible (7), an insulation board (5) is arranged below the crystal cooling mechanism (4), a plurality of crystal lower lifting holes (501) which correspond to the crystal upper lifting holes (401) of the crystal cooling mechanism (4) in a one-to-one mode are formed in the insulation board (5), an upper lifting mechanism (2) is arranged above the crystal cooling mechanism (4), and the lower end heads of seed crystals on the upper lifting mechanism (2) respectively correspond to the crystal upper lifting holes (401) of the crystal cooling mechanism (4) to form the device for simultaneously pulling a plurality of crystals.

2. The apparatus as claimed in claim 1, wherein: the crucible (7) is lifted up and down or the crystal cooling mechanism (4) is lifted up and down to ensure the distance between the lower surface of the crystal cooling mechanism (4) and the liquid level of the melt (6) in the crucible (7).

3. The apparatus as claimed in claim 1, wherein: the lower end of the crucible pot (7) is connected with a lower shaft (9) which can lift up and down.

4. The apparatus as claimed in claim 1, wherein: an upper perforation (403) is arranged in the middle of the upper portion of the crystal cooling mechanism (4), a cavity (402) is arranged in the crystal cooling mechanism (4), a plurality of groups of fixing columns are radially arranged on the periphery of the upper perforation (403), each group of fixing columns comprises at least two fixing columns, a crystal lifting hole (401) is arranged on each fixing column, the cavity (402) is communicated with a water outlet pipe and a water inlet pipe respectively, and the water outlet pipe and the water inlet pipe are connected with a cooling medium source respectively.

5. The apparatus as claimed in claim 1, wherein: at least one stage of upward sunken step is arranged below the crystal cooling mechanism (4) from outside to inside to form a step surface, and a circle of crystal upward pulling holes (401) are respectively arranged on each stage of step surface.

6. The apparatus as claimed in claim 1, wherein: the middle of the heat insulation plate (5) is provided with a lower through hole (503), the periphery of the lower through hole (503) is radially provided with a plurality of crystal lower pulling holes (501), and the lower through hole (503) and the crystal lower pulling holes (501) respectively correspond to an upper through hole (403) and a crystal upper pulling hole (401) on the crystal cooling mechanism (4).

7. The apparatus as claimed in claim 1, wherein: the heat insulation plate (5) is of a flat plate type structure, and the overall dimension of the heat insulation plate (5) is larger than or equal to that of the crystal cooling mechanism (4).

8. The apparatus as claimed in claim 1, wherein: when the heat preservation plate (5) is of a flat plate type structure, at least one step of upward convex step (502) is arranged on the heat preservation plate (5) from outside to inside, and the step (502) is correspondingly matched with a step surface below the crystal cooling mechanism (4).

9. The apparatus as claimed in claim 1, wherein: the replacement structural style of heated board (5) sets up the recess of undercut for the middle part at heated board (5) and forms the barrel type structure, the inner edge face of recess and the outer edge face of crystal cooling body (4) are clearance fit or interference fit.

10. The apparatus as set forth in claim 9, wherein: when the outer edge surface of the crystal cooling mechanism (4) is in clearance fit with the inner edge surface of the groove, heat-insulating fillers (10) are arranged at the clearance.

11. The apparatus as claimed in claim 1, wherein: when heated board (5) set up to the barrel type structure, be equipped with at least one-level bellied ladder step (502) that makes progress on heated board (5) outside-in, ladder step (502) correspond the cooperation with the ladder surface below crystal cooling body (4).