CN218120384U - Spin dryer for improving strip-shaped particles through annular jig - Google Patents
Spin dryer for improving strip-shaped particles through annular jig Download PDFInfo
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- CN218120384U CN218120384U CN202221639083.5U CN202221639083U CN218120384U CN 218120384 U CN218120384 U CN 218120384U CN 202221639083 U CN202221639083 U CN 202221639083U CN 218120384 U CN218120384 U CN 218120384U
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- annular jig
- jig
- annular
- spin dryer
- dryer
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Abstract
The utility model relates to a silicon chip washs technical field. A spin dryer for improving strip-shaped particles through an annular jig comprises a spin dryer main body, wherein the spin dryer main body comprises a spin dryer cavity and a cover plate, the annular jig is arranged above the spin dryer cavity and fixed above the spin dryer cavity through screws, a circle of sealing silica gel is arranged on the lower surface of the cover plate, and the outer diameter of the sealing silica gel is consistent with that of the annular jig; the sealing silica gel is provided with a plurality of grooves which are distributed in the circumferential direction, the openings of the grooves face to the central axis of the cover plate, and the grooves are clamped with the outer edge of the annular jig; the annular jig is made of stainless steel, the outer diameter of the annular jig is 650.6mm, the inner diameter of the annular jig is 580mm, and the thickness of the annular jig is 3mm; the upper surface of the annular jig is provided with eight mounting holes which are distributed at equal intervals. The recess just in time is pressed under annular tool when the lid descends, has increased sealing performance, and through the production experiment, the silicon chip that spin-dries behind the increase annular tool, the strip granule disappears.
Description
Technical Field
The utility model relates to a silicon chip washs the field, concretely relates to improve drier of strip granule through loop type tool.
Background
The polished wafer is placed into a spin dryer for spin-drying after being cleaned, under the attraction generated by the high-speed rotation of the spin dryer, water stains are sucked into a cavity of the spin dryer, the water stains are adsorbed on a silicon wafer and are lengthened into linear particles by rotating force, and the linear particles are poor, and the appearance inspection is named as strip-shaped particles.
SUMMERY OF THE UTILITY MODEL
Problem to prior art exists, the utility model provides a through loop type tool improve drier of strip granule to solve above-mentioned at least one technical problem.
The technical scheme of the utility model is that: a spin dryer for improving strip-shaped particles through a ring-shaped jig comprises a spin dryer main body and is characterized in that the spin dryer main body comprises a spin dryer cavity and a cover plate, the ring-shaped jig is arranged above the spin dryer cavity and fixed above the spin dryer cavity through screws, a circle of sealing silica gel is arranged on the lower surface of the cover plate, and the outer diameter of the sealing silica gel is consistent with that of the ring-shaped jig;
the sealing silica gel is provided with a plurality of grooves which are distributed in the circumferential direction, the openings of the grooves face the central axis of the cover plate, and the grooves are clamped with the outer edge of the annular jig;
the annular jig is made of stainless steel, the outer diameter of the annular jig is 650.6mm, the inner diameter of the annular jig is 580mm, and the thickness of the annular jig is 3mm;
the upper surface of ring type tool is equipped with eight mounting holes that the equidistant was arranged, just the aperture of mounting hole is 5.5mm.
The annular jig is stably embedded on the plane of the spin dryer, when the manipulator brings water into the wafer box from the cleaning machine tank body, the manipulator is blocked at the periphery by the annular jig, the sealing silica gel is used for being embedded around the circular cover in a sealing mode, the groove is just pressed under the annular jig when the cover descends, the sealing performance is improved, through production experiments, silicon wafers are added after the annular jig is used for spin drying, strip-shaped particles disappear, and the method for adding the annular jig of the spin dryer is proved to be effective and feasible.
Preferably, the upper surface of the ring-shaped jig inclines outwards from the center of the ring-shaped jig.
The utility model discloses an optimized the structure of loop type tool, thereby made the loop type tool produce the difference in height and can make the lid descend the back compress tightly the effect better when not changing loop type tool thickness.
Further preferably, a flat head bolt is fixed on the mounting hole, and the top of the flat head bolt is not higher than the opening of the mounting hole.
The utility model discloses a counter bore can ensure that loop type tool surface is smooth.
Preferably, the upper surface of the annular jig is a mirror structure.
Further preferably, the ring width of the ring-shaped jig is between 35 and 40 mm. Different compressing effects can be provided according to different ring widths, and the ring width is limited so as to prevent the cover plate from being closed.
Further preferably, the mounting holes are axially symmetrically arranged along the central axis of the annular jig. The utility model discloses a fixed effect of playing that eight mounting holes can be better.
Further preferably, the central authorities of apron are equipped with one and are arched transparent window, the lower surface of transparent window is equipped with a circular spacing groove, sealing silica gel fixes the inner wall in circular spacing groove.
The utility model discloses an it can observe the working effect of ring type tool when using to have increased transparent window on the apron.
Drawings
Fig. 1 is a schematic structural view of the ring-shaped jig of the present invention;
fig. 2 is a partial structural sectional view of the cover plate of the present invention.
In the figure: 1. an annular jig; 2. mounting holes; 3. a cover plate; 4. sealing the silica gel; 5. and (6) a groove.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 1 and 2, the spin dryer for improving strip-shaped particles through the annular jig comprises a spin dryer main body, wherein the spin dryer main body comprises a spin dryer cavity and a cover plate 3, the annular jig 1 is arranged above the spin dryer cavity and fixed above the spin dryer cavity through screws, a circle of sealing silica gel 4 is arranged on the lower surface of the cover plate, and the outer diameter of the sealing silica gel is consistent with that of the annular jig; the sealing silica gel is provided with a plurality of grooves 5 which are distributed in the circumferential direction, the openings of the grooves face to the central axis of the cover plate, and the grooves are clamped with the outer edge of the annular jig; the annular jig is made of stainless steel, the outer diameter of the annular jig is 650.6mm, the inner diameter of the annular jig is 580mm, and the thickness of the annular jig is 3mm; the upper surface of annular tool is equipped with eight mounting holes 2 that equidistant arrange, and the aperture of mounting hole is 5.5mm.
The annular jig is stably embedded on the plane of the spin dryer, when the manipulator brings water into the wafer box from the cleaning machine tank body, the manipulator is blocked at the periphery by the annular jig, the sealing silica gel is used for being embedded around the circular cover in a sealing mode, the groove is just pressed under the annular jig when the cover descends, the sealing performance is improved, through production experiments, silicon wafers are added after the annular jig is used for spin drying, strip-shaped particles disappear, and the method for adding the annular jig of the spin dryer is proved to be effective and feasible.
Preferably, the upper surface of the ring-shaped jig is inclined outward from the center of the ring-shaped jig. The utility model discloses an optimized the structure of loop type tool, thereby made the loop type tool produce the difference in height and can make the lid descend the back compress tightly the effect better when not changing loop type tool thickness.
Further preferably, a flat head bolt is fixed on the mounting hole, and the top of the flat head bolt is not higher than the opening of the mounting hole. The utility model discloses a counter bore can ensure that loop type tool surface is smooth.
Preferably, the upper surface of the annular jig is a mirror structure.
Further preferably, the ring width of the ring-shaped jig is between 35 and 40 mm. Different compressing effects can be provided according to different ring widths, and the ring widths are limited so as to prevent the cover plate from being closed.
Further preferably, the mounting holes are axially symmetrically arranged along the central axis of the annular jig. The utility model discloses a fixed effect of playing that eight mounting holes can be better.
Further preferably, the central authorities of apron are equipped with one and are arched transparent window, and the lower surface of transparent window is equipped with a circular spacing groove, and sealing silica gel fixes the inner wall at circular spacing groove. The utility model discloses an it can observe the working effect of ring type tool when using to have increased transparent window on the apron.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (7)
1. A spin dryer for improving strip-shaped particles through an annular jig comprises a spin dryer main body and is characterized in that the spin dryer main body comprises a spin dryer cavity and a cover plate, the annular jig is arranged above the spin dryer cavity and fixed above the spin dryer cavity through screws, a circle of sealing silica gel is arranged on the lower surface of the cover plate, and the outer diameter of the sealing silica gel is consistent with that of the annular jig;
the sealing silica gel is provided with a plurality of grooves which are distributed in the circumferential direction, the openings of the grooves face the central axis of the cover plate, and the grooves are clamped with the outer edge of the annular jig;
the annular jig is made of stainless steel, the outer diameter of the annular jig is 650.6mm, the inner diameter of the annular jig is 580mm, and the thickness of the annular jig is 3mm;
the upper surface of the annular jig is provided with eight mounting holes which are distributed at equal intervals, and the aperture of each mounting hole is 5.5mm.
2. The spin dryer for improving the strip-shaped particles through the annular jig as claimed in claim 1, wherein: the upper surface of the annular jig inclines outwards from the center of the annular jig.
3. The spin dryer for improving the strip-shaped particles through the annular jig as claimed in claim 1, wherein: the mounting hole is fixedly provided with a flat head bolt, and the top of the flat head bolt is not higher than the opening of the mounting hole.
4. The dryer of claim 1, wherein said dryer is adapted to dry the strip of pellets by means of a ring-type jig, said dryer comprising: the upper surface of the annular jig is of a mirror surface structure.
5. The dryer of claim 1, wherein said dryer is adapted to dry the strip of pellets by means of a ring-type jig, said dryer comprising: the ring width of the ring-shaped jig is 35-40 mm.
6. The dryer of claim 1, wherein said dryer is adapted to dry the strip of pellets by means of a ring-type jig, said dryer comprising: the mounting holes are axially symmetrically arranged along the central axis of the annular jig.
7. The spin dryer for improving the strip-shaped particles through the annular jig as claimed in claim 1, wherein: the central authorities of apron are equipped with one and are arched transparent window, the lower surface of transparent window is equipped with a circular spacing groove, sealing silica gel fixes the inner wall in circular spacing groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221639083.5U CN218120384U (en) | 2022-06-28 | 2022-06-28 | Spin dryer for improving strip-shaped particles through annular jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221639083.5U CN218120384U (en) | 2022-06-28 | 2022-06-28 | Spin dryer for improving strip-shaped particles through annular jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218120384U true CN218120384U (en) | 2022-12-23 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221639083.5U Active CN218120384U (en) | 2022-06-28 | 2022-06-28 | Spin dryer for improving strip-shaped particles through annular jig |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218120384U (en) |
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2022
- 2022-06-28 CN CN202221639083.5U patent/CN218120384U/en active Active
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