CN217990226U - Seed crystal pickling device - Google Patents

Seed crystal pickling device Download PDF

Info

Publication number
CN217990226U
CN217990226U CN202221674910.4U CN202221674910U CN217990226U CN 217990226 U CN217990226 U CN 217990226U CN 202221674910 U CN202221674910 U CN 202221674910U CN 217990226 U CN217990226 U CN 217990226U
Authority
CN
China
Prior art keywords
seed crystal
seed
fixing plate
pickling
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202221674910.4U
Other languages
Chinese (zh)
Inventor
李光存
黄其荣
于金凤
冯曙光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
First Semiconductor Materials Co ltd
Original Assignee
Anhui Guangzhi Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui Guangzhi Technology Co Ltd filed Critical Anhui Guangzhi Technology Co Ltd
Priority to CN202221674910.4U priority Critical patent/CN217990226U/en
Application granted granted Critical
Publication of CN217990226U publication Critical patent/CN217990226U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The utility model belongs to single crystal diamond preparation field discloses a seed crystal pickling plant. The seed crystal fixing device comprises a fixing plate, wherein a plurality of accommodating grooves for accommodating seed crystals are formed in the upper surface of the fixing plate, connecting through holes are formed between every two adjacent accommodating grooves and are communicated with each other, and the connecting through holes penetrate through the upper surface and the lower surface of the fixing plate; wherein: the width of holding tank > the width of seed crystal > the width of connect the through hole, and the degree of depth of holding tank > the height of seed crystal. The utility model discloses a seed crystal pickling device can realize the batchization and the directional washing to the seed crystal, can ensure the directionality of seed crystal when the pickling, realizes the used repeatedly of seed crystal.

Description

Seed crystal pickling device
Technical Field
The utility model belongs to single crystal diamond preparation field relates to a seed crystal pickling device, and is more specific relates to a directional pickling basket of flowers device of diamond seed crystal.
Background
The microwave chemical vapor deposition (MPCVD) is the preferred scheme for preparing the diamond with large size and high quality by virtue of the advantages of large plasma density, no electrode pollution and the like, but because of the influence of the edge effect, the thickness of the single-grown single-crystal diamond is limited, and the Clara-grade diamond is prepared by adopting a method of multiple growth.
The microwave chemical vapor deposition technology belongs to the homoepitaxial growth of diamond, and the substrate used in the growth process is single crystal diamond, often called diamond seed crystal. The diamond seed crystal can be reused usually, in order to ensure that the seed crystal is not clamped by the growth surface for a plurality of times, the second or third growth is required to grow on the first or second growth surface, which requires that the directionality of the diamond seed crystal is ensured during acid cleaning, and the reuse of the diamond seed crystal can be realized.
SUMMERY OF THE UTILITY MODEL
To the above-mentioned problem that exists among the prior art, the utility model aims to provide a but seed crystal pickling device of batchization, directional pickling seed crystal.
In order to achieve the above purpose, the utility model adopts the technical scheme that:
a seed crystal pickling device comprises a fixed plate, wherein a plurality of accommodating grooves for accommodating seed crystals are formed in the upper surface of the fixed plate, connecting through holes are formed between adjacent accommodating grooves and communicated with each other, and the connecting through holes penetrate through the upper surface and the lower surface of the fixed plate;
wherein: the width of holding tank > the width of seed crystal > the width of connect the through-hole, and the degree of depth of holding tank > the height of seed crystal.
Preferably, the holding tank evenly distributed is at the upper surface of fixed plate, the holding tank divide into the multiunit, and the holding tank in the same group passes through connect the via hole and communicates in proper order.
Further preferably, the plurality of sets of receiving grooves are parallel to each other and have the same interval therebetween.
Further preferably, the outer sides of the two accommodating grooves at the outermost ends of each group are respectively provided with a connecting through hole, the arrangement is favorable for clamping and placing seed crystals in the outermost end accommodating grooves, and more uniform outflow and discharge of acid liquor in the outermost end accommodating grooves can be realized.
Preferably, the seed crystal is square column structure, the holding tank is square column hollow structure for holding the seed crystal.
Preferably, the depth of the accommodating groove is 1 to 9mm larger than the height of the seed crystal, and the width of the accommodating groove is 0.1 to 1mm larger than the width of the seed crystal.
Preferably, the connecting through hole has a square cylindrical hollow structure.
Preferably, the fixing plate is of a polygonal columnar structure or a circular columnar structure.
Preferably, the seed crystal pickling device further comprises a supporting column for supporting the fixing plate; further preferably, the supporting column is of a stepped columnar structure, the supporting column comprises a thin end and a thick end, a positioning through hole for the thin end of the supporting column to pass through is formed in the edge of the fixing plate, and the thick end cannot pass through the positioning through hole.
The square column (hollow) structure mentioned in the utility model is a cuboid (hollow) structure with the same length and width.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) The seed crystal pickling device of the utility model can realize the batch and directional cleaning of the seed crystal, ensure the directionality of the seed crystal during pickling and realize the repeated use of the seed crystal;
(2) The seed crystal pickling device can improve the pickling speed and quality, saves the production cost, has simple structure, simple operation, easy production and manufacture and good industrial application prospect;
(3) The seed crystal pickling device of the utility model is creatively provided with the connecting through hole, so that the seed crystal can be conveniently placed and clamped in the holding tank, when the seed crystal is cleaned, the cleaning device is slowly placed in the pickling container, the acid liquor can enter the holding tank through the connecting through hole, and the acid liquor can slowly immerse the pickling seed crystal due to the fact that the density of the diamond seed crystal is greater than the density of the acid liquor, so that the seed crystal in the holding tank can not be turned over due to the density or the width size of the holding tank is further limited, and the growth surface is ensured to be upward all the time; after the cleaning is finished, the cleaning device is taken out of the pickling container, and acid liquor in the holding tank flows out through the connecting through hole, so that no large amount of acid liquor is left in the holding tank.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of the three-dimensional structure of the seed pickling device of the present invention;
FIG. 2 is a schematic view of the top view of the seed pickling apparatus of the present invention;
FIG. 3 is a schematic view of the sectional structure of the seed pickling apparatus of the present invention.
Detailed Description
To facilitate understanding of the present invention, the present invention will be described more fully and specifically with reference to the accompanying drawings and preferred embodiments, but the scope of the present invention is not limited to the specific embodiments described below.
Unless otherwise defined, all terms of art used hereinafter have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the present invention.
Unless otherwise specifically stated, various raw materials, reagents, instruments, equipment and the like used in the present invention are commercially available or can be prepared by an existing method.
Example 1
Referring to fig. 1 to 3, the embodiment discloses a seed crystal pickling device, which includes a fixing plate 1 with a square columnar structure and a supporting column 2 for supporting the fixing plate 1. The fixed plate 1 has a side length of 100mm and a thickness of 10mm.
Evenly set up 45 square column form hollow structure's holding tank 3 on fixed plate 1, 45 holding tank 3 fall into 9 groups, be the mutual parallel arrangement of row (line) form between every group, and all with fixed plate 1 go up parallel or perpendicular in relative both sides, with holding tank 3 in the group through connect the via hole 4 intercommunication in proper order, connect via hole 4 in this embodiment runs through 1 upper surface of fixed plate and lower surface.
In this embodiment, the outside that is located two holding tanks 3 of every group outermost end additionally sets up connect the via hole 4 respectively, can be used to tweezers to pass through, is convenient for take out or deposit, can be used to the entering and the discharge of acidizing fluid.
In this embodiment, the seed crystal is square column structure, and holding tank 3, connect the via hole 4 and be square column hollow structure. The depth of the accommodating grooves 3 is 9mm, the width of the accommodating grooves is 7.5mm, the interval between adjacent accommodating grooves in the same group is 15mm, the width of the connecting through holes 4 is 5mm, the length of the connecting through holes is 15mm, and the distance between adjacent accommodating groove groups is 8mm.
In this embodiment, the support pillars 2 are provided with 4 pillars, which are of a stepped cylindrical structure, the support pillars 2 include a thin end and a thick end, the diameter of the thin end is 7.9mm, the length of the thin end is 40mm, the diameter of the thick end is 10mm, and the length of the thick end is 10mm. The edge of fixed plate 1 sets up 4 locating hole 5 that supply the tip of support column 2 to pass, and the 5 internal diameters of locating hole are 8mm.
The use method of the seed acid washing device of the embodiment is as follows:
and (3) sequentially numbering 7mm multiplied by 0.3mm seed crystals by using tweezers, putting the seed crystals into the accommodating tank 3 with the growth surfaces facing upwards, slowly putting the seed crystal pickling device into a pickling container after the seed crystals are placed, pickling the seed crystals, and taking out the seed crystal pickling device after the pickling is finished. Then, the seed crystal pickling device is placed into a container containing deionized water, and the cleaning is repeated for 5 times.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (10)

1. The seed crystal pickling device is characterized by comprising a fixing plate, wherein a plurality of accommodating grooves for accommodating seed crystals are formed in the upper surface of the fixing plate, connecting through holes are formed between every two adjacent accommodating grooves and are communicated with each other, and the connecting through holes penetrate through the upper surface and the lower surface of the fixing plate;
wherein: the width of holding tank > the width of seed crystal > the width of connect the through-hole, and the degree of depth of holding tank > the height of seed crystal.
2. The seed pickling apparatus as set forth in claim 1, wherein the holding grooves are uniformly distributed on the upper surface of the fixing plate, the holding grooves are divided into a plurality of groups, and the holding grooves in the same group are sequentially communicated through the connecting through-holes.
3. The seed pickling apparatus as set forth in claim 2, wherein the plurality of sets of the holding tanks are arranged in parallel rows, and the intervals between the adjacent holding tanks in the same set are the same.
4. The seed pickling apparatus as set forth in claim 2 wherein the two holding tanks located at the outermost ends of each set are respectively provided at the outer sides thereof with connecting through holes.
5. The seed pickling apparatus as set forth in claim 1, wherein said seed crystal has a square columnar structure, and said holding tank has a square columnar hollow structure for accommodating said seed crystal.
6. A seed crystal pickling device as defined in claim 1 or 5, wherein the depth of the accommodating groove is 1 to 9mm larger than the height of the seed crystal, and the width of the accommodating groove is 0.1 to 1mm larger than the width of the seed crystal.
7. The seed pickling apparatus as set forth in claim 1 wherein the connecting through-hole has a square cylindrical hollow structure.
8. The seed pickling apparatus as set forth in claim 1, wherein the fixing plate has a polygonal columnar structure or a circular columnar structure.
9. The seed pickling apparatus according to any one of claims 1 to 5, 7 and 8, further comprising a supporting column for supporting the fixing plate.
10. The seed pickling apparatus as set forth in claim 9 wherein the supporting column has a stepped columnar structure, the supporting column includes a thin end and a thick end, and a positioning hole for the thin end of the supporting column to pass through is provided at the edge of the fixing plate, and the thick end cannot pass through the positioning hole.
CN202221674910.4U 2022-07-01 2022-07-01 Seed crystal pickling device Active CN217990226U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221674910.4U CN217990226U (en) 2022-07-01 2022-07-01 Seed crystal pickling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221674910.4U CN217990226U (en) 2022-07-01 2022-07-01 Seed crystal pickling device

Publications (1)

Publication Number Publication Date
CN217990226U true CN217990226U (en) 2022-12-09

Family

ID=84312402

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221674910.4U Active CN217990226U (en) 2022-07-01 2022-07-01 Seed crystal pickling device

Country Status (1)

Country Link
CN (1) CN217990226U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115110148A (en) * 2022-07-01 2022-09-27 安徽光智科技有限公司 Preparation method of single crystal diamond

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115110148A (en) * 2022-07-01 2022-09-27 安徽光智科技有限公司 Preparation method of single crystal diamond
CN115110148B (en) * 2022-07-01 2023-12-05 安徽光智科技有限公司 Preparation method of monocrystalline diamond

Similar Documents

Publication Publication Date Title
CN217990226U (en) Seed crystal pickling device
CN217628727U (en) Substrate table for growing single crystal diamond
CN217869189U (en) Substrate table for growth of single crystal diamond
CN213073915U (en) Water culture device for identifying salt tolerance from rice sprout stage to seedling stage
CN215517746U (en) Deposition table for preparing monocrystalline diamond by microwave chemical vapor deposition method
CN115110148B (en) Preparation method of monocrystalline diamond
CN111945130A (en) Arrangement method of filaments of hot filament CVD diamond equipment
CN112397425A (en) Quartz boat for processing silicon wafers
CN219052259U (en) Seed crystal pickling support
CN103773683A (en) Layered-type cell culture plate
CN210183843U (en) Identification device for saline-alkali resistance of rice in bud stage
CN108040878A (en) Tissue culture flasks and the operating method for carrying out tissue cultures
CN210528939U (en) Indexing equipment is used in culture dish production
CN213026071U (en) Small-diameter wafer cleaning box
CN205868939U (en) Belt cleaning device for silicon chip
CN219059207U (en) Substrate table for single crystal diamond growth
CN218951562U (en) Seed crystal placing die
CN214736104U (en) Seed crystal cleaning is with putting structure and being applied to seed crystal belt cleaning device of germanium single crystal growth
CN216808765U (en) Batch bacteria shaking plate
CN213327647U (en) Liquid feeding auxiliary device for cell culture plate
CN213694983U (en) A device of growing seedlings for forest is cultivated
CN219660487U (en) Flower seedling raising plug tray
CN215074199U (en) Seedling raising plug tray convenient to mark and discern
CN215163114U (en) Storage tank and coating film support plate
CN217012178U (en) Multi-plant flower cultivating rack

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20240515

Address after: 511517 area B, no.27-9 Baijia Industrial Park, Qingyuan high tech Zone, Guangdong Province

Patentee after: FIRST SEMICONDUCTOR MATERIALS Co.,Ltd.

Country or region after: China

Address before: 239064 No.100 Nanjing Road, Langya Economic Development Zone, Chuzhou City, Anhui Province

Patentee before: Anhui Guangzhi Technology Co.,Ltd.

Country or region before: China