CN217966510U

CN217966510U - Chip layer-removing plane grinder

Info

Publication number: CN217966510U
Application number: CN202222255834.XU
Authority: CN
Inventors: 梁婷婷; 黄雅雯; 傅根源; 何光澤
Original assignee: Hongkang Technology Xiamen Co ltd
Current assignee: Hongkang Technology Xiamen Co ltd
Priority date: 2022-08-25
Filing date: 2022-08-25
Publication date: 2022-12-06
Anticipated expiration: 2032-08-25

Abstract

The utility model relates to a semiconductor sample preparation technical field, and disclose chip delaminating plane grinder, include: the main part, the equal fixedly connected with side piece in both sides of main part, the inside of side piece rotates respectively and is connected with two threaded rods and slide bar, the surface threaded connection of two threaded rods has the sliding block. This kind of chip removes layer plane grinder, it is fixed to carry out the centre gripping by effectual chip, can adjust the centre gripping according to the length difference of chip simultaneously, the practicality of the device is improved, simultaneously can adjust the position between chip and the loop type abrasive paper according to the thickness of chip, the loop type abrasive paper that drives the setting of pivot surface rotates, thereby grind the surface to the chip, simultaneously can change the loop type abrasive paper into the loop type cotton flannel according to actual conditions, also can reach the purpose to chip surface grinding, and make each point speed all the same on the gyro wheel for the roller type design to current abrasive disc change, the homogeneity of grinding can reach.

Description

Chip layer-removing plane grinder

Technical Field

The utility model relates to a semiconductor sample preparation technical field specifically is chip delaminating plane grinder.

Background

Present machine of grinding grinds the chip surface through the abrasive disc mostly, the abrasive disc is then rotatory with the central point, and its periphery is higher than the rotational speed of inner circle, consequently, the speed of getting rid of the level in its outside of test block that has the area just is faster than sample central authorities, thereby cause the sample to go the degree of consistency on layer just not good, can't reach the test block every department and all can average the ideal situation on layer, current device does not set up suitable chip fixture simultaneously, can't effectually carry out the centre gripping to the chip of different grade type, thereby its actual limitation is great.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art, the utility model provides a chip removes layer plane and grinds machine possesses and to grind the effect in step, avoids grinding the ideal not good to and the advantage that the chip can effectual centre gripping, solved the problem of proposing among the background art.

The utility model provides a following technical scheme: a chip delaminating plane grinder comprising: the main part, the equal fixedly connected with side piece in both sides of main part, the inside of side piece is rotated respectively and is connected with threaded rod two and slide bar, the surface threaded connection of threaded rod two has the sliding block, the surface sliding connection of sliding bar has the sliding block, the last fixed surface of sliding block is connected with L type carrier block, the inside threaded connection of L type carrier block has threaded rod one, the lower extreme fixedly connected with loading board of threaded rod one, the groove room has been seted up to the inside of loading board, the inside of groove room is rotated and is connected with the dwang, the surface fixedly connected with gear of dwang, the surface both sides of gear mesh respectively and connect pinion rack one and pinion rack two, the piece is supported to the tip fixedly connected with L type of pinion rack two and pinion rack one.

Preferably, the inside of main part rotates and is connected with the pivot, the surface of pivot is provided with annular abrasive paper.

Preferably, the outer surface of the sliding block is attached to the inner wall of the side block, the inner portion of the L-shaped bearing block is movably connected with a limiting rod, and the lower end of the limiting rod is fixedly connected with the upper surface of the bearing plate.

Preferably, the outer surface of the upper end of the first threaded rod is fixedly connected with a first round block, one side of the main body is provided with a control panel, and the upper surface of the main body is provided with a water inlet hole.

Preferably, the outer surfaces of the second toothed plate and the first toothed plate are movably connected with the inner wall of the groove chamber.

Preferably, the outer surface of the rotating rod is fixedly connected with a second round block, and the lower surface of the second round block is attached to the upper surface of the bearing plate.

Compared with the prior art, the utility model discloses possess following beneficial effect:

1. the chip layer removing plane grinding machine is characterized in that a side block, a first threaded rod, a second threaded rod, a sliding block, an L-shaped bearing block, a first round block, a bearing plate, a second round block, a gear, a first toothed plate, a second toothed plate and an L-shaped abutting block are arranged, when a chip to be processed is subjected to surface grinding, the first round block drives the first threaded rod to rotate on the L-shaped bearing block by rotating the first round block, so that the first threaded rod can move up and down on the L-shaped bearing block, the bearing plate connected with the other end of the first threaded rod can move simultaneously, at the moment, a required chip is placed inside the L-shaped abutting block, four corners of the chip are placed inside the L-shaped abutting block, the second round block is rotated, and the second round block drives a rotating shaft to rotate the rotating rod, the gear that the dwang surface set up carries out synchronous rotation, and the direction of rotation through rotating the disk two, steerable gear carries out just reversal, but tooth plate one and tooth plate two with gear engagement are close or keep away from, thereby fix the chip, and can make the lower surface of chip grind with the inside loop type abrasive paper surface laminating that sets up of main part, the setting of this structure, can effectually carry out the centre gripping to the chip and fix, avoid the condition that the chip takes place to rock when grinding, can adjust the centre gripping according to the length difference of chip simultaneously, improve the device's practicality, can adjust the position between chip and the loop type abrasive paper according to the thickness of chip simultaneously, thereby it is fixed to conveniently carry out the centre gripping to the chip.

2. This kind of chip removes layer plane grinder, through setting up pivot and loop type abrasive paper, the pivot is passed through the outside driving source and is connected, the loop type abrasive paper that drives the setting of pivot surface rotates, thereby grind the surface of chip, simultaneously can change loop type abrasive paper into loop type cotton flannel according to actual conditions, also can reach the purpose to chip surface grinding, and change current abrasive disc into roller type design and make every point speed all the same on the gyro wheel, the homogeneity of grinding can be reached, the homogeneity of removing the layer reaches, then the area of observing can be enlarged, also can be relatively good in the efficiency of grinding, need not adjust power way and angle when grinding always, the efficiency of the device grinding is improved and the accuracy of grinding.

Drawings

FIG. 1 is a schematic view of the overall structure of the device of the present invention;

FIG. 2 is a schematic top view of the structure of FIG. 1 according to the present invention;

FIG. 3 is a schematic side view of the present invention shown in FIG. 1;

fig. 4 is a schematic diagram of the internal structure of fig. 1 according to the present invention.

In the figure: 1. a main body; 2. a control panel; 3. a water inlet hole; 4. annular sand paper; 5. a side block; 6. an L-shaped bearing block; 7. a limiting rod; 8. a first round block; 9. a first threaded rod; 10. a carrier plate; 11. a second threaded rod; 12. a slide bar; 13. a slider; 14. a second round block; 15. a toothed plate I; 16. a toothed plate II; 17. an L-shaped resisting block; 18. rotating the rod; 19. a gear; 20. a tank chamber; 21. a rotating shaft.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Referring to fig. 1-4, a chip delamination plane grinder includes: the main body 1, both sides of the main body 1 are fixedly connected with side blocks 5, the inner parts of the side blocks 5 are respectively and rotatably connected with a second threaded rod 11 and a sliding rod 12, the outer surface of the second threaded rod 11 is in threaded connection with a sliding block 13, the outer surface of the sliding rod 12 is in sliding connection with a sliding block 13, the upper surface of the sliding block 13 is fixedly connected with a first L-shaped bearing block 6,L-shaped bearing block 6, the inner thread of the first threaded rod 9 is connected with a first threaded rod 9, the lower end of the first threaded rod 9 is fixedly connected with a bearing plate 10, a groove chamber 20 is formed in the bearing plate 10, the inner part of the groove chamber 20 is rotatably connected with a rotating rod 18, the outer surface of the rotating rod 18 is fixedly connected with a gear 19, both sides of the outer surface of the gear 19 are respectively and meshingly connected with a first toothed plate 15 and a second toothed plate 16, the end parts of the second toothed plate 16 and the first toothed plate 15 are fixedly connected with an L-shaped abutting block 17, the outer surface of the sliding block 13 is attached to the inner wall of the side blocks 5, the inner part of the L-shaped bearing block 6 is movably connected with a limiting rod 7, the lower end of the limiting rod 7 is fixedly connected with the upper surface of the bearing plate 10, the outer surface of the upper end of the threaded rod I9 is fixedly connected with a round block I8, one side of the main body 1 is provided with a control panel 2, the upper surface of the main body 1 is provided with a water inlet hole 3, the outer surfaces of the toothed plate II 16 and the toothed plate I15 are movably connected with the inner wall of the groove chamber 20, the outer surface of the rotating rod 18 is fixedly connected with a round block II 14, the lower surface of the round block II 14 is attached to the upper surface of the bearing plate 10, when the surface grinding is carried out on a chip to be processed, the round block I8 is rotated to drive the threaded rod I9 to rotate on the L-shaped bearing block 6, so that the threaded rod I9 can move up and down on the L-shaped bearing block 6, the bearing plate 10 connected with the other end of the threaded rod I9 can move simultaneously, at the moment, the required chip is placed inside the L-shaped abutting block 17, and the four corners of the chip are arranged in the L-shaped abutting block 17, the second round block 14 is rotated, so that the second round block 14 drives the rotating shaft 21 to rotate the rotating rod 18, the gear 19 arranged on the outer surface of the rotating rod 18 rotates synchronously, the gear 19 can be controlled to rotate forwards and backwards through the rotation direction of the second round block 14, the first toothed plate 15 and the second toothed plate 16 meshed with the gear 19 can be close to or far away from each other, and the chip is fixed.

Wherein; the internal rotation of main part 1 is connected with pivot 21, the surface of pivot 21 is provided with loop type abrasive paper 4, through rotating a fritter 8, make a threaded rod 9 downstream on L type carrier block 6, thereby make the lower surface laminating loop type abrasive paper 4 or the loop type cotton flannel of chip, work through pivot 21 can drive loop type abrasive paper 4 or loop type cotton flannel and rotate this moment, grind the lower surface of chip, and drive two 11 rotations of threaded rod through external drive source, make two 11 drive sliding block 13 of threaded rod move in the inside of side piece 5, and sliding block 13 synchronous sliding of the 12 outer surface settings of slide bar, thereby the position of adjustment chip at loop type abrasive paper 4 or loop type cotton flannel, can carry out the accurate grinding to it.

In use, the required annular sand paper 4 or annular flannelette is arranged on the outer surface of the rotating shaft 21.

When the surface grinding is carried out on the chip needing to be processed, the first round block 8 is rotated, the first round block 8 drives the first threaded rod 9 to rotate on the L-shaped bearing block 6, the first threaded rod 9 can move up and down on the L-shaped bearing block 6, the bearing plate 10 connected with the other end of the first threaded rod 9 can move simultaneously, at the moment, the required chip is placed inside the L-shaped abutting block 17, four corners of the chip are placed inside the L-shaped abutting block 17, the second round block 14 is rotated, the second round block 14 drives the rotating shaft 21 to rotate the rotating rod 18, the gear 19 arranged on the outer surface of the rotating rod 18 rotates synchronously, the rotating direction of the second round block 14 is rotated, the gear 19 can be controlled to rotate forwards and backwards, the first toothed plate 15 and the second toothed plate 16 meshed with the gear 19 can be close to or far away from each other, and the chip can be fixed.

Through rotating round block 8, make a threaded rod 9 downstream on L type carrier block 6, thereby make the lower surface laminating loop type abrasive paper 4 or the loop type cotton flannel of chip, work through pivot 21 can drive loop type abrasive paper 4 or loop type cotton flannel and rotate this moment, grind the lower surface of chip, and drive two 11 rotations of threaded rod through external drive source, make two 11 drive sliding blocks of threaded rod 13 move in the inside of side piece 5, and the sliding block 13 synchronous sliding of the 12 surface settings of slide bar, thereby adjust the position of chip at loop type abrasive paper 4 or loop type cotton flannel, can carry out the accuracy to it and grind.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. Chip delaminating plane grinder, its characterized in that includes: main part (1), the equal fixedly connected with side piece (5) in both sides of main part (1), the inside of side piece (5) rotates respectively and is connected with two (11) threaded rods and slide bar (12), the surface threaded connection of two (11) threaded rods has slide block (13), the surface sliding connection of slide bar (12) has slide block (13), the last fixed surface of slide block (13) is connected with L type carrier block (6), the internal threaded connection of L type carrier block (6) has threaded rod one (9), the lower extreme fixedly connected with loading board (10) of threaded rod one (9), frid (20) have been seted up to the inside of loading board (10), the internal rotation of frid (20) is connected with dwang (18), the surface fixed connection of dwang (18) has gear (19), the surface both sides of gear (19) mesh respectively and connect pinion rack one (15) and pinion rack two (16), the tip fixedly connected with L type of pinion rack two (16) and pinion rack one (15) supports piece (17).

2. The chip delamination face grinder of claim 1, wherein: the inside of main part (1) rotates and is connected with pivot (21), the surface of pivot (21) is provided with loop type abrasive paper (4).

3. The chip delamination face grinder of claim 1, wherein: the outer surface of the sliding block (13) is attached to the inner wall of the side block (5), the inner portion of the L-shaped bearing block (6) is movably connected with a limiting rod (7), and the lower end of the limiting rod (7) is fixedly connected with the upper surface of the bearing plate (10).

4. The chip delamination face grinder of claim 1, wherein: the outer fixed surface of the upper end of the first threaded rod (9) is fixedly connected with a first round block (8), one side of the main body (1) is provided with a control panel (2), and the upper surface of the main body (1) is provided with a water inlet hole (3).

5. The chip delamination face grinder of claim 1, wherein: the outer surfaces of the second toothed plate (16) and the first toothed plate (15) are movably connected with the inner wall of the groove chamber (20).

6. The chip delamination face grinder of claim 1, wherein: the outer fixed surface of dwang (18) is connected with the second disk (14), the lower surface of second disk (14) and the upper surface laminating of loading board (10).