CN110405622A - A Novel Circular Swing Plane Grinding Device - Google Patents

A Novel Circular Swing Plane Grinding Device Download PDF

Info

Publication number
CN110405622A
CN110405622A CN201910608597.0A CN201910608597A CN110405622A CN 110405622 A CN110405622 A CN 110405622A CN 201910608597 A CN201910608597 A CN 201910608597A CN 110405622 A CN110405622 A CN 110405622A
Authority
CN
China
Prior art keywords
shaft
motor
gear
bevel gear
cylindrical gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910608597.0A
Other languages
Chinese (zh)
Other versions
CN110405622B (en
Inventor
文东辉
肖燏婷
王辉
许鑫祺
邹磊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang University of Technology ZJUT
Original Assignee
Zhejiang University of Technology ZJUT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang University of Technology ZJUT filed Critical Zhejiang University of Technology ZJUT
Priority to CN201910608597.0A priority Critical patent/CN110405622B/en
Publication of CN110405622A publication Critical patent/CN110405622A/en
Application granted granted Critical
Publication of CN110405622B publication Critical patent/CN110405622B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/30Work carriers for single side lapping of plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

一种新型圆弧摆动平面研磨装置,包括电机支架、电机Ⅰ、刚性联轴器、下弧形导轨、圆柱齿轮Ⅰ、圆柱齿轮Ⅱ、牛眼轮、轴Ⅰ、齿轮固定架、下摆臂,上摆臂、上弧形导轨、固定竖板、电机板、弯轴,锥齿轮Ⅱ、电机Ⅱ、梅花联轴器、轴Ⅱ、圆柱齿轮Ⅲ、圆柱齿轮Ⅳ、轴Ⅲ、轴Ⅳ、锥齿轮Ⅰ、万向节、固定横板、轴Ⅴ、卡盘、插杆和工件盘,通过机械机构,通过一个电机带动工件盘的形成无理数的自转,同时另一个电机带动工件盘做可变摆角的摆动运动,使得工件盘在研磨过程中实现自转和摆动两个运动,实现研磨轨迹线的不闭合,增加轨迹线在研磨盘的分布范围。本发明提高平面研磨的精度和效率。

A new type of circular arc swing plane grinding device, including motor bracket, motor I, rigid coupling, lower arc guide rail, cylindrical gear I, cylindrical gear II, bull's eye wheel, shaft I, gear holder, lower swing arm, upper Swing arm, upper arc guide rail, fixed vertical plate, motor plate, bent shaft, bevel gear II, motor II, plum coupling, shaft II, cylindrical gear III, cylindrical gear IV, shaft III, shaft IV, bevel gear I , universal joint, fixed horizontal plate, shaft V, chuck, insert rod and workpiece disk, through the mechanical mechanism, a motor drives the workpiece disk to form an irrational number of rotation, while another motor drives the workpiece disk to make a variable swing angle. The swing motion makes the workpiece disk realize two motions of rotation and swing during the grinding process, realizes the non-closure of the grinding track line, and increases the distribution range of the track line in the grinding disk. The invention improves the precision and efficiency of plane grinding.

Description

一种新型圆弧摆动平面研磨装置A Novel Circular Swing Plane Grinding Device

技术领域technical field

本发明涉及一种平面研磨机构,具体地说是应用两个电机、四个圆柱齿轮、两个锥齿轮、两组圆弧弧形导轨等构成的一种新型研磨设备,属于平面研磨加工技术领域。The invention relates to a plane grinding mechanism, in particular to a new type of grinding equipment composed of two motors, four cylindrical gears, two bevel gears, two sets of arc-shaped guide rails, etc., and belongs to the technical field of plane grinding processing .

背景技术Background technique

平面研磨加工运动学是高精度控形的重要理论基础。随着晶体衬底尺寸的增大,研磨均匀性的控制变得越来越困难,研磨轨迹的均匀性已经成为研究热点。研磨盘与工件之间的运动学原理是制约平面研磨加工精度的主要因素之一,亦即研磨加工表面的平面形成机理,主要包括驱动方式的设计、加工工艺参数和研磨盘的平面度修整方法。The kinematics of plane grinding is an important theoretical basis for high-precision shape control. With the increase of crystal substrate size, the control of grinding uniformity becomes more and more difficult, and the uniformity of grinding trajectory has become a research hotspot. The kinematics principle between the grinding disc and the workpiece is one of the main factors that restrict the precision of the plane grinding process, that is, the plane formation mechanism of the grinding surface, which mainly includes the design of the driving mode, the processing parameters and the flatness dressing method of the grinding disc. .

平面研磨加工过程中,一方面要保证工件加工表面材料均匀去除,以获得良好的平面度;另一方面要保证研具的均匀磨损。目的是减少研磨盘修整时间,提高整个加工流程的效率,更重要的是为了减小研磨盘面形精度在加工过程中的波动,保证高精度加工表面的获得。In the process of plane grinding, on the one hand, it is necessary to ensure that the material on the machined surface of the workpiece is uniformly removed to obtain a good flatness; on the other hand, it is necessary to ensure the uniform wear of the grinding tool. The purpose is to reduce the dressing time of the grinding disc, improve the efficiency of the entire processing process, and more importantly, to reduce the fluctuation of the surface accuracy of the grinding disc during the processing, and ensure the acquisition of high-precision machined surfaces.

目前研磨加工轨迹的共同特点是:随着加工时间的推移,研磨加工轨迹线是闭合型的,这意味着磨粒在一定的时间内将周而复始地重复其运动轨迹。同时,考虑到研磨的过程中,由于研磨盘的内外线速度不同,磨损不一致,会造成研磨盘的平面度会下降,产生凹误差或者凸误差。研磨加工时“复制”误差,即在加工过程中,研磨盘的误差会影响工件表面研磨质量。The common feature of the current grinding trajectories is that with the passage of processing time, the grinding trajectories are closed, which means that the abrasive grains will repeat their motion trajectories over and over again within a certain period of time. At the same time, considering that during the grinding process, due to the different internal and external linear speeds of the grinding disc, the wear is inconsistent, which will cause the flatness of the grinding disc to decrease, resulting in concave or convex errors. The "copy" error during grinding, that is, during the processing, the error of the grinding disc will affect the grinding quality of the workpiece surface.

平面研磨中研磨盘与工件盘之间的转速比对于工件加工有重要意义,数值模拟研究发现转速比为无理数时,能得到不闭合的加工曲线。调整工件相对于研磨盘瞬时位置,使得工件的运动尽量均匀遍布研磨盘表面,进而有效改善研磨盘的磨损均匀性。但现有平面研磨机构的转速比调节都为单一的有理数,且对于研磨盘的均匀磨损关注较少。The rotational speed ratio between the grinding disc and the workpiece disc in plane grinding is of great significance to the machining of the workpiece. Numerical simulation studies have found that when the rotational speed ratio is an irrational number, an unclosed machining curve can be obtained. Adjust the instantaneous position of the workpiece relative to the grinding disc, so that the movement of the work piece can spread over the surface of the grinding disc as evenly as possible, thereby effectively improving the wear uniformity of the grinding disc. However, the speed ratio adjustment of the existing plane grinding mechanism is a single rational number, and less attention is paid to the uniform wear of the grinding disc.

发明内容SUMMARY OF THE INVENTION

为了克服现有平面研磨机构的精度较低、效率较低的不足,本发明提供了一种提高平面研磨的精度和效率的新型圆弧摆动平面研磨装置。In order to overcome the shortcomings of low precision and low efficiency of the existing plane grinding mechanism, the present invention provides a novel circular arc swing plane grinding device which improves the precision and efficiency of plane grinding.

本发明是通过以下技术方案实现的:The present invention is achieved through the following technical solutions:

一种新型圆弧摆动平面研磨装置,所述装置包括电机支架、电机Ⅰ、刚性联轴器、下弧形导轨、圆柱齿轮Ⅰ、圆柱齿轮Ⅱ、牛眼轮、轴Ⅰ、齿轮固定架、下摆臂,上摆臂、上弧形导轨、固定竖板、电机板、弯轴,锥齿轮Ⅱ、电机Ⅱ、梅花联轴器、轴Ⅱ、圆柱齿轮Ⅲ、圆柱齿轮Ⅳ、轴Ⅲ、轴Ⅳ、锥齿轮Ⅰ、万向节、固定横板、轴Ⅴ、卡盘、插杆和工件盘;A new type of circular arc swing plane grinding device, the device includes a motor bracket, a motor I, a rigid coupling, a lower arc guide rail, a cylindrical gear I, a cylindrical gear II, a bull's eye wheel, a shaft I, a gear fixing frame, and a hem Arm, upper swing arm, upper arc guide rail, fixed vertical plate, motor plate, bent shaft, bevel gear II, motor II, plum coupling, shaft II, cylindrical gear III, cylindrical gear IV, shaft III, shaft IV, Bevel gear I, universal joint, fixed horizontal plate, shaft V, chuck, plunger and workpiece plate;

所述电机Ⅰ固定安装在电机支架上,电机轴通过刚性联轴器和圆柱齿轮Ⅰ直接连接,所述圆柱齿轮Ⅰ固定安装在电机轴的上端;所述圆柱齿轮Ⅱ固定安装在轴Ⅰ上,且和圆柱齿轮Ⅰ啮合;所述圆柱固定轴Ⅰ通过上下两对深沟球轴承安装在齿轮固定架上;所述上摆臂和下摆臂通过轴端挡圈和螺栓固定安装在轴Ⅰ上,并固定安装在固定竖板上;所述牛眼轮与下摆臂固定连接,并与下弧形导轨相切接触;The motor I is fixedly installed on the motor bracket, the motor shaft is directly connected with the cylindrical gear I through a rigid coupling, the cylindrical gear I is fixedly installed on the upper end of the motor shaft; the cylindrical gear II is fixedly installed on the shaft I, And it meshes with the cylindrical gear I; the cylindrical fixed shaft I is installed on the gear fixing frame through the upper and lower pairs of deep groove ball bearings; the upper swing arm and the lower swing arm are fixed on the shaft I through the shaft end retaining ring and bolts, and fixedly installed on the fixed vertical plate; the bull's eye wheel is fixedly connected with the lower swing arm, and is in tangential contact with the lower arc guide rail;

所述电机Ⅱ固定安装在电机板上,所述轴Ⅱ的上端通过梅花联轴器和所述电机Ⅱ的输出轴连接;所述圆柱齿轮Ⅲ通过键和轴Ⅱ连接,其下面通过轴端挡圈和螺栓固定安装在轴Ⅱ上。所述圆柱齿轮Ⅳ通过内部的深沟球轴承套装在轴Ⅲ上,并且和圆柱齿轮Ⅳ啮合,所述弯轴的上端通过焊接与圆柱齿轮Ⅳ的轮毂固定连接,所述锥齿轮Ⅰ通过内部的深沟球轴承和轴Ⅲ连接,其下部通过轴承挡圈和螺栓固定;所述锥齿轮Ⅱ通过深沟球轴承套装在弯轴的下部,且与锥齿轮Ⅰ啮合;所述的锥齿轮Ⅰ、锥齿轮Ⅱ和弯轴形成行星轮系,锥齿轮Ⅱ通过与锥齿轮Ⅰ的啮合在弯轴的带动下作行星运动;所述轴Ⅳ的上端通过法兰与锥齿轮Ⅱ固定连接,其下端与万向节的上端相连接;所述的轴Ⅴ上端和万向节的下部固定连接,两块固定横板通过深沟球轴承安装在所述轴Ⅴ上,并固定连接在固定竖板上;所述的固定竖板同时和电机板固定连接;所述的卡盘通过键连接固定连接轴Ⅴ上,并通过轴端挡圈和螺栓固定轴Ⅴ的下部;所述插杆通过其螺纹固定连接在卡盘上,其下部套在工件盘对应的孔中,工件盘和研磨盘接触The motor II is fixedly installed on the motor board, and the upper end of the shaft II is connected with the output shaft of the motor II through a plum-blossom coupling; the cylindrical gear III is connected with the shaft II through a key, and the lower part is connected by a shaft end stopper. The ring and bolt are fixedly installed on the shaft II. The cylindrical gear IV is sleeved on the shaft III through the inner deep groove ball bearing, and meshes with the cylindrical gear IV. The upper end of the curved shaft is fixedly connected to the hub of the cylindrical gear IV by welding, and the bevel gear I passes through the internal shaft. The deep groove ball bearing is connected with the shaft III, and its lower part is fixed by the bearing retaining ring and bolts; the bevel gear II is sleeved on the lower part of the curved shaft through the deep groove ball bearing, and meshes with the bevel gear I; the bevel gears I, The bevel gear II and the bent shaft form a planetary gear train, and the bevel gear II is engaged with the bevel gear I to make planetary motion under the drive of the bent shaft; the upper end of the shaft IV is fixedly connected with the bevel gear II through the flange, and the lower end is connected to the bevel gear II. The upper end of the universal joint is connected; the upper end of the shaft V is fixedly connected with the lower part of the universal joint, and two fixed horizontal plates are installed on the shaft V through deep groove ball bearings, and are fixedly connected to the fixed vertical plate; The fixed vertical plate is fixedly connected with the motor plate at the same time; the chuck is fixedly connected to the shaft V through the key connection, and the lower part of the shaft V is fixed by the shaft end retaining ring and the bolt; the insertion rod is fixedly connected by its thread On the chuck, its lower part is sleeved in the corresponding hole of the workpiece disk, and the workpiece disk and the grinding disk are in contact with each other.

进一步,所述电机板上装有六个牛眼轮,并与上弧形导轨相切接触安装。Further, six bull's-eye wheels are installed on the motor board, and are installed in tangential contact with the upper arc guide rail.

再进一步的,所述的锥齿轮Ⅰ和锥齿轮Ⅱ斜交啮合的轴角Σ=60°,锥齿轮Ⅱ、万向节下部、轴Ⅴ,轴线在同一直线。Still further, the shaft angle Σ=60° of the oblique meshing of the bevel gear I and the bevel gear II, and the axes of the bevel gear II, the lower part of the universal joint, and the shaft V are on the same straight line.

再进一步的,所述的圆柱齿轮Ⅱ轴线中心,距离研磨盘中心445mm,且轴心在研磨机的中线上。Still further, the center of the axis of the cylindrical gear II is 445 mm away from the center of the grinding disc, and the axis is on the center line of the grinding machine.

再进一步的,所述的固定竖板和上摆臂、下摆臂、固定横板、电机板都通过螺钉固定连接,确保了轴Ⅴ相对于轴Ⅲ的相对位置不变,自转结构的整体保持稳定,确保工件盘的转速输出。Further, the fixed vertical plate, the upper swing arm, the lower swing arm, the fixed horizontal plate, and the motor plate are all fixedly connected by screws, which ensures that the relative position of the axis V relative to the axis III remains unchanged, and the overall rotation structure remains stable. , to ensure the speed output of the workpiece disc.

再进一步的,所述万向节在安装时,确保其上下两端的轴角大小相等。Still further, when the universal joint is installed, it is ensured that the shaft angles at the upper and lower ends of the universal joint are equal in size.

再进一步的,所述下弧形导轨、上弧形导和铝型材固定连接,铝型材和研磨机固定连接,形成一个整体。Still further, the lower arc guide, the upper arc guide and the aluminum profile are fixedly connected, and the aluminum profile and the grinding machine are fixedly connected to form a whole.

本发明通过合理的机械机构,通过一个电机带动工件盘的形成无理数的自转,同时另一个电机带动工件盘做可变摆角的摆动运动,使得工件盘在研磨过程中实现自转和摆动两个运动,实现研磨轨迹线的不闭合,增加轨迹线在研磨盘的分布范围。In the present invention, through a reasonable mechanical mechanism, one motor drives the workpiece disk to form an irrational number of rotations, and at the same time, another motor drives the workpiece disk to perform a swinging motion with a variable swing angle, so that the workpiece disk can realize two movements of rotation and swing during the grinding process. , to realize the non-closure of the grinding track line, and increase the distribution range of the track line in the grinding disc.

该发明的有益之处有益效果表现在:1.本发明的对于工件盘的传动使用插杆连接工件盘,有效调节工件的高度,实现了传动的有效性,保证了工件盘无理自转速度的实现。2.本发明的上下两组圆弧形轨道对于摆动运动起到引导作用和一定的固定作用,通过牛眼轮保证了摆动的平稳性和精确性。3.本发明的摆动和自转结构的固定通过摇臂、固定竖板和固定横板,实现了机构的整体固定和摆动,有效实现了两种运动的结合。3.本发明的工件盘自转结构传动准确、无噪声、生产成本较低,研磨精度和效率更高,从研磨加工运动原理上解决了轨迹线闭合的问题。4.本发明的圆弧摆动结构简单、传动平稳,实现了研磨盘的均匀磨损,对于改善工件研磨精度有重要意义。The beneficial effects of the invention are as follows: 1. For the transmission of the workpiece disk of the present invention, a plunger is used to connect the workpiece disk, which can effectively adjust the height of the workpiece, realize the effectiveness of the transmission, and ensure the realization of the unreasonable rotation speed of the workpiece disk. . 2. The upper and lower sets of circular arc-shaped rails of the present invention play a guiding role and a certain fixing role for the swing motion, and the stability and accuracy of the swing are ensured by the bull's eye wheel. 3. The rocker arm, the fixed vertical plate and the fixed horizontal plate are used for the fixation of the swing and rotation structure of the present invention, which realizes the overall fixation and swing of the mechanism, and effectively realizes the combination of the two movements. 3. The workpiece disc rotation structure of the present invention has the advantages of accurate transmission, no noise, lower production cost, higher grinding precision and efficiency, and solves the problem of track line closure from the principle of grinding motion. 4. The arc swinging structure of the present invention is simple, the transmission is stable, and the uniform wear of the grinding disc is realized, which is of great significance for improving the grinding precision of the workpiece.

附图说明Description of drawings

图1是本发明的整体结构图。FIG. 1 is an overall configuration diagram of the present invention.

图2是本发明的主要部件结构图。FIG. 2 is a structural diagram of the main components of the present invention.

图3是本发明的部分结构的剖视图,其中,(a)为牛眼轮,(b)为轴II,(c)为轴IV。3 is a cross-sectional view of a part of the structure of the present invention, wherein (a) is a bull's eye wheel, (b) is an axis II, and (c) is an axis IV.

图2中,1、电机支架,2、电机Ⅰ,3、刚性联轴器,4、下弧形导轨,5、圆柱齿轮Ⅰ,6、圆柱齿轮Ⅱ,7、牛眼轮,8、轴Ⅰ,9、下摆臂,10、齿轮固定架,11、上摆臂,12、上弧形导轨,13、固定竖板,14、电机板,15、弯轴,16、锥齿轮Ⅱ,17、电机Ⅱ,18、梅花联轴器,19、轴Ⅱ,20、圆柱齿轮Ⅲ,21、圆柱齿轮Ⅳ,22、轴Ⅲ,23、轴Ⅳ,24、锥齿轮Ⅰ,25、万向节,26、固定横板,27、轴Ⅴ,28、卡盘,29、插杆,30、工件盘,31、研磨盘。In Figure 2, 1. Motor bracket, 2. Motor I, 3. Rigid coupling, 4. Lower arc guide rail, 5. Cylindrical gear I, 6. Cylindrical gear II, 7. Bull's eye wheel, 8. Shaft I , 9, lower swing arm, 10, gear holder, 11, upper swing arm, 12, upper arc guide rail, 13, fixed vertical plate, 14, motor plate, 15, bent shaft, 16, bevel gear II, 17, motor II, 18, Plum coupling, 19, Shaft II, 20, Spur gear III, 21, Spur gear IV, 22, Shaft III, 23, Shaft IV, 24, Bevel gear I, 25, Universal joint, 26, Fixed horizontal plate, 27, shaft V, 28, chuck, 29, plunger, 30, workpiece disc, 31, grinding disc.

各个齿轮的齿数分别为圆柱齿轮Ⅰz1=20,圆柱齿轮Ⅱz2=40,圆柱齿轮Ⅲz3=20,圆柱齿轮Ⅳz4=40,锥齿轮Ⅰ和锥齿轮Ⅱz1=z2=30。The number of teeth of each gear is cylindrical gear Iz1=20, cylindrical gear IIz2=40, cylindrical gear IIIz3=20, cylindrical gear IVz4=40, bevel gear I and bevel gear IIz1=z2=30.

具体实施方式Detailed ways

下面结合附图对本发明作进一步描述。The present invention will be further described below in conjunction with the accompanying drawings.

参照图1~图3,一种新型圆弧摆动平面研磨装置,包括包括电机支架、电机Ⅰ、刚性联轴器、下弧形导轨、圆柱齿轮Ⅰ、圆柱齿轮Ⅱ、牛眼轮、轴Ⅰ、齿轮固定架、下摆臂,上摆臂、上弧形导轨、固定竖板、电机板、弯轴,锥齿轮Ⅱ、电机Ⅱ、梅花联轴器、轴Ⅱ、圆柱齿轮Ⅲ、圆柱齿轮Ⅳ、轴Ⅲ、轴Ⅳ、锥齿轮Ⅰ、万向节、固定横板、轴Ⅴ、卡盘、插杆和工件盘。Referring to Figures 1 to 3, a new type of circular arc swing plane grinding device includes a motor bracket, a motor I, a rigid coupling, a lower arc guide rail, a cylindrical gear I, a cylindrical gear II, a bull's eye wheel, a shaft I, Gear holder, lower swing arm, upper swing arm, upper arc guide rail, fixed vertical plate, motor plate, bent shaft, bevel gear II, motor II, plum coupling, shaft II, cylindrical gear III, cylindrical gear IV, shaft Ⅲ, shaft Ⅳ, bevel gear Ⅰ, universal joint, fixed horizontal plate, shaft Ⅴ, chuck, insert rod and workpiece disc.

所述电机Ⅰ2固定安装在电机支架1上,电机轴通过刚性联轴器3和圆柱齿轮Ⅰ5直接连接,所述圆柱齿轮Ⅰ5固定安装在电机轴的上端;所述圆柱齿轮Ⅱ6固定安装在轴Ⅰ8上,且和圆柱齿轮Ⅰ5啮合;所述圆柱固定轴Ⅰ8通过上下两对深沟球轴承安装在齿轮固定架10上;所述上摆臂11和下摆臂9通过轴端挡圈和螺栓固定安装在轴Ⅰ8上,并通过螺钉固定安装在固定竖板13上;所述牛眼轮7与下摆臂9固定连接,并与下弧形导轨4相切接触。The motor I2 is fixedly installed on the motor bracket 1, the motor shaft is directly connected with the cylindrical gear I5 through the rigid coupling 3, the cylindrical gear I5 is fixedly installed on the upper end of the motor shaft; the cylindrical gear II6 is fixedly installed on the shaft I8. and meshes with the cylindrical gear I5; the cylindrical fixed shaft I8 is installed on the gear fixing frame 10 through the upper and lower pairs of deep groove ball bearings; the upper swing arm 11 and the lower swing arm 9 are fixed and installed by shaft end retaining rings and bolts On the shaft I8, it is fixedly installed on the fixed vertical plate 13 by screws; the bullseye wheel 7 is fixedly connected with the lower swing arm 9, and is in tangential contact with the lower arc guide rail 4.

所述电机Ⅱ17固定安装在电机板上,所述轴Ⅱ19的上端通过梅花联轴器18和所述电机Ⅱ17的输出轴连接;所述圆柱齿轮Ⅲ20通过键和轴Ⅱ19连接,其下面通过轴端挡圈和螺栓固定安装在轴Ⅱ19上。所述圆柱齿轮Ⅳ21通过内部的深沟球轴承套装在轴Ⅲ22上,并且和圆柱齿轮Ⅳ21啮合,所述弯轴15的上端通过焊接与圆柱齿轮Ⅳ21的轮毂固定连接,所述锥齿轮Ⅰ24通过内部的深沟球轴承和轴Ⅲ22连接,其下部通过轴承挡圈和螺栓固定;所述锥齿轮Ⅱ16通过深沟球轴承套装在弯轴15的下部,且与锥齿轮Ⅰ24啮合;所述的锥齿轮Ⅰ24、锥齿轮Ⅱ16和弯轴形成行星轮系,锥齿轮Ⅱ16通过与锥齿轮Ⅰ24的啮合在弯轴15的带动下作行星运动;所述轴Ⅳ23的上端通过法兰与锥齿轮Ⅱ16固定连接,其下端与万向节25的上端相连接;所述的轴Ⅴ27上端和万向节25的下部固定连接,所述两块固定横板26通过深沟球轴承安装在所述轴Ⅴ27上,并通过螺钉固定连接在固定竖板13上;所述的固定竖板13同时和电机板14通过螺钉固定连接;所述的卡盘28通过键连接固定连接轴Ⅴ27上,并通过轴端挡圈和螺栓固定轴Ⅴ27的下部;所述插杆29通过其螺纹固定连接在卡盘28上,其下部套在工件盘30对应的孔中,工件盘30和研磨盘31接触。The motor II17 is fixedly installed on the motor board, the upper end of the shaft II19 is connected with the output shaft of the motor II17 through the plum coupling 18; the cylindrical gear III20 is connected with the shaft II19 through a key, and the lower part is connected by the shaft end The retaining ring and bolts are fixed on the shaft II19. The cylindrical gear IV21 is sleeved on the shaft III22 through the inner deep groove ball bearing, and meshes with the cylindrical gear IV21. The upper end of the curved shaft 15 is fixedly connected to the hub of the cylindrical gear IV21 by welding, and the bevel gear I24 passes through the internal The deep groove ball bearing is connected with the shaft III22, and its lower part is fixed by the bearing retaining ring and bolts; the bevel gear II16 is sleeved on the lower part of the bent shaft 15 through the deep groove ball bearing, and meshes with the bevel gear I24; the bevel gear II16 is I24. Bevel gear II16 and the curved shaft form a planetary gear train. The bevel gear II16 is engaged with bevel gear I24 to make planetary motion driven by the curved shaft 15; the upper end of the shaft IV23 is fixedly connected to bevel gear II16 through a flange. Its lower end is connected with the upper end of the universal joint 25; the upper end of the shaft V27 is fixedly connected with the lower part of the universal joint 25, and the two fixed transverse plates 26 are installed on the shaft V27 through deep groove ball bearings, and It is fixedly connected to the fixed vertical plate 13 by screws; the fixed vertical plate 13 and the motor plate 14 are fixedly connected to the motor plate 14 by screws; the chuck 28 is fixedly connected to the shaft V27 through a key connection, and is connected to the shaft end retaining ring and The lower part of the shaft V27 is fixed by bolts; the insert rod 29 is fixedly connected to the chuck 28 through its thread, and the lower part is sleeved in the corresponding hole of the workpiece disk 30, and the workpiece disk 30 and the grinding disk 31 are in contact.

进一步,所述电机板17上装有六个牛眼轮7,并与上弧形导轨12相切接触。Further, six bulls-eye wheels 7 are mounted on the motor plate 17 and are in tangential contact with the upper arc guide rail 12 .

再进一步,所述的锥齿轮Ⅰ24和锥齿轮Ⅱ16斜交啮合的轴角Σ=60°,锥齿轮Ⅱ16、万向节25下部、轴Ⅴ27,轴线在同一直线。Still further, the shaft angle Σ=60° of the oblique meshing of the bevel gear I24 and the bevel gear II16, the bevel gear II16, the lower part of the universal joint 25, and the shaft V27, the axes are on the same straight line.

再进一步,所述的圆柱齿轮Ⅱ6轴线中心,距离研磨盘31中心445mm,且轴心在研磨机的中线上。Still further, the center of the axis of the cylindrical gear II6 is 445 mm away from the center of the grinding disc 31, and the axis is on the center line of the grinding machine.

再进一步,所述的固定竖板13,和上摆臂11,下摆臂9,固定横板26,电机板14都通过螺钉固定连接,确保了轴Ⅴ27相对于轴Ⅲ22的相对位置不变,自转结构的整体保持稳定,确保工件盘的转速输出。Further, the fixed vertical plate 13, the upper swing arm 11, the lower swing arm 9, the fixed horizontal plate 26, and the motor plate 14 are all fixedly connected by screws to ensure that the relative position of the axis V27 relative to the axis III22 is unchanged, and the rotation The overall structure remains stable to ensure the rotational speed output of the workpiece disc.

再进一步,所述万向节25在安装时,确保其上下两端的轴角大小相等。Further, when the universal joint 25 is installed, it is ensured that the shaft angles at the upper and lower ends of the universal joint 25 are equal in size.

再进一步,所述下弧形导轨4、上弧形导轨12和铝型材固定连接,铝型材和研磨机固定连接,形成一个整体。Still further, the lower curved guide rail 4 and the upper curved guide rail 12 are fixedly connected to the aluminum profile, and the aluminum profile is fixedly connected to the grinder to form a whole.

本发明的工作过程为:The working process of the present invention is:

第一部分,电机Ⅰ2输入信号,通过刚性联轴器3将动力传递给圆柱齿轮Ⅰ5,由于圆柱齿轮Ⅰ5和圆柱齿轮Ⅱ6的啮合作用,带动圆柱齿轮Ⅱ6转动,圆柱齿轮Ⅱ6将动力传递给轴Ⅰ8,固定在轴Ⅰ8上的上摇臂11和下摇臂9带动固定竖板13摆动,从而带动电机板14上的牛眼轮沿着上弧形导轨12摆动,下摇臂9上的牛眼轮7沿着下弧形导轨4摆动,从而带动工件盘的摆动。The first part, the motor I2 inputs the signal, and transmits the power to the spur gear I5 through the rigid coupling 3. Due to the meshing effect of the spur gear I5 and the spur gear II6, the spur gear II6 is driven to rotate, and the spur gear II6 transmits the power to the shaft I8. The upper rocker arm 11 and the lower rocker arm 9 fixed on the shaft I8 drive the fixed vertical plate 13 to swing, thereby driving the bull's eye wheel on the motor plate 14 to swing along the upper arc guide 12, and the bull's eye wheel on the lower rocker arm 9 swings. 7 Swing along the lower arc guide rail 4, thereby driving the swing of the workpiece disk.

第二部分,电机Ⅱ17输入信号,通过梅花联轴器18将动力传递给圆柱齿轮Ⅲ20,由于圆柱齿轮Ⅲ20和圆柱齿轮Ⅳ21的啮合作用,从而带动曲轴绕轴Ⅲ22的轴线旋转运动,锥齿轮Ⅱ16通过与锥齿轮Ⅰ24的啮合在弯轴的带动下作行星运动,并通过万向节25将转速等速传递给轴Ⅴ27,从而带动卡盘28的旋转运动,再通过在插杆29将运动传递给工件盘30,完成对工件的自转运动。The second part, the input signal of motor II17 transmits the power to the spur gear III20 through the plum coupling 18. Due to the meshing effect of the spur gear III20 and the spur gear IV21, the crankshaft is driven to rotate around the axis of the shaft III22, and the bevel gear II16 passes through The meshing with the bevel gear I24 makes a planetary motion driven by the curved shaft, and the rotational speed is transmitted to the shaft V27 at the same speed through the universal joint 25, thereby driving the rotary motion of the chuck 28, and then through the insertion rod 29 The motion is transmitted to the shaft V27. The workpiece disc 30 completes the self-rotating motion of the workpiece.

两个电机一起工作,使得工件盘30在实现自转的同时,进行平稳的摆动运动,该模式提高了单面平面研磨的加工精度和加工效率。The two motors work together, so that the workpiece disc 30 performs a smooth swing motion while realizing the self-rotation, and this mode improves the machining accuracy and machining efficiency of the single-sided plane grinding.

上述实施例只是本发明的较佳实施例,并不是对本发明技术方案的限制,只要是不经过创造性劳动即可在上述实施例的基础上实现的技术方案,均应视为落入本发明专利的权利保护范围内。The above-described embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention. As long as the technical solutions that can be realized on the basis of the above-described embodiments without creative work, all should be regarded as falling into the patent of the present invention. within the scope of protection of rights.

Claims (7)

1.一种新型圆弧平面摆动研磨装置,其特征在于:所述装置包括电机支架、电机Ⅰ、刚性联轴器、下弧形导轨、圆柱齿轮Ⅰ、圆柱齿轮Ⅱ、牛眼轮、轴Ⅰ、齿轮固定架、下摆臂,上摆臂、上弧形导轨、固定竖板、电机板、弯轴,锥齿轮Ⅱ、电机Ⅱ、梅花联轴器、轴Ⅱ、圆柱齿轮Ⅲ、圆柱齿轮Ⅳ、轴Ⅲ、轴Ⅳ、锥齿轮Ⅰ、万向节、固定横板、轴Ⅴ、卡盘、插杆和工件盘;1. A novel circular arc plane swing grinding device is characterized in that: the device comprises a motor bracket, a motor I, a rigid coupling, a lower arc guide rail, a cylindrical gear I, a cylindrical gear II, a bull's eye wheel, a shaft I , gear holder, lower swing arm, upper swing arm, upper arc guide rail, fixed vertical plate, motor plate, curved shaft, bevel gear II, motor II, plum coupling, shaft II, cylindrical gear III, cylindrical gear IV, Axis III, axis IV, bevel gear I, universal joint, fixed horizontal plate, axis V, chuck, plunger and workpiece plate; 所述电机Ⅰ固定安装在电机支架上,电机轴通过刚性联轴器和圆柱齿轮Ⅰ直接连接,所述圆柱齿轮Ⅰ固定安装在电机轴的上端;所述圆柱齿轮Ⅱ固定安装在轴Ⅰ上,且和圆柱齿轮Ⅰ啮合;所述圆柱固定轴Ⅰ通过上下两对深沟球轴承安装在齿轮固定架上;所述上摆臂和下摆臂通过轴端挡圈和螺栓固定安装在轴Ⅰ上,并固定安装在固定竖板上;所述牛眼轮与下摆臂固定连接,并与下弧形导轨相切接触;The motor I is fixedly installed on the motor bracket, the motor shaft is directly connected with the cylindrical gear I through a rigid coupling, the cylindrical gear I is fixedly installed on the upper end of the motor shaft; the cylindrical gear II is fixedly installed on the shaft I, And it meshes with the cylindrical gear I; the cylindrical fixed shaft I is installed on the gear fixing frame through the upper and lower pairs of deep groove ball bearings; the upper swing arm and the lower swing arm are fixed on the shaft I through the shaft end retaining ring and bolts, and fixedly installed on the fixed vertical plate; the bull's eye wheel is fixedly connected with the lower swing arm, and is in tangential contact with the lower arc guide rail; 所述电机Ⅱ固定安装在电机板上,所述轴Ⅱ的上端通过梅花联轴器和所述电机Ⅱ的输出轴连接;所述圆柱齿轮Ⅲ通过键和轴Ⅱ连接,其下面通过轴端挡圈和螺栓固定安装在轴Ⅱ上。所述圆柱齿轮Ⅳ通过内部的深沟球轴承套装在轴Ⅲ上,并且和圆柱齿轮Ⅳ啮合,所述弯轴的上端通过焊接与圆柱齿轮Ⅳ的轮毂固定连接,所述锥齿轮Ⅰ通过内部的深沟球轴承和轴Ⅲ连接,其下部通过轴承挡圈和螺栓固定;所述锥齿轮Ⅱ通过深沟球轴承套装在弯轴的下部,且与锥齿轮Ⅰ啮合;所述的锥齿轮Ⅰ、锥齿轮Ⅱ和弯轴形成行星轮系,锥齿轮Ⅱ通过与锥齿轮Ⅰ的啮合在弯轴的带动下作行星运动;所述轴Ⅳ的上端通过法兰与锥齿轮Ⅱ固定连接,其下端与万向节的上端相连接;所述的轴Ⅴ上端和万向节的下部固定连接,两块固定横板通过深沟球轴承安装在所述轴Ⅴ上,并固定连接在固定竖板上;所述的固定竖板同时和电机板固定连接;所述的卡盘通过键连接固定连接轴Ⅴ上,并通过轴端挡圈和螺栓固定轴Ⅴ的下部;所述插杆通过其螺纹固定连接在卡盘上,其下部套在工件盘对应的孔中,工件盘和研磨盘接触。The motor II is fixedly installed on the motor board, and the upper end of the shaft II is connected with the output shaft of the motor II through a plum-blossom coupling; the cylindrical gear III is connected with the shaft II through a key, and the lower part is connected by a shaft end stopper. The ring and bolt are fixedly installed on the shaft II. The cylindrical gear IV is sleeved on the shaft III through the inner deep groove ball bearing, and meshes with the cylindrical gear IV. The upper end of the curved shaft is fixedly connected to the hub of the cylindrical gear IV by welding, and the bevel gear I passes through the internal shaft. The deep groove ball bearing is connected with the shaft III, and its lower part is fixed by the bearing retaining ring and bolts; the bevel gear II is sleeved on the lower part of the curved shaft through the deep groove ball bearing, and meshes with the bevel gear I; the bevel gears I, The bevel gear II and the bent shaft form a planetary gear train, and the bevel gear II is engaged with the bevel gear I to make planetary motion under the drive of the bent shaft; the upper end of the shaft IV is fixedly connected with the bevel gear II through the flange, and the lower end is connected to the bevel gear II. The upper end of the universal joint is connected; the upper end of the shaft V is fixedly connected with the lower part of the universal joint, and two fixed horizontal plates are installed on the shaft V through deep groove ball bearings, and are fixedly connected to the fixed vertical plate; The fixed vertical plate is fixedly connected with the motor plate at the same time; the chuck is fixedly connected to the shaft V through the key connection, and the lower part of the shaft V is fixed by the shaft end retaining ring and the bolt; the insertion rod is fixedly connected by its thread On the chuck, the lower part is sleeved in the corresponding hole of the workpiece disk, and the workpiece disk and the grinding disk are in contact. 2.如权利要求1所述的一种新型圆弧形摆动平面研磨装置,其特征在于:所述电机板上装有六个牛眼轮,并与上弧形导轨相切接触安装。2 . The novel arc-shaped swing plane grinding device according to claim 1 , wherein the motor plate is equipped with six bulls-eye wheels, which are installed in tangential contact with the upper arc-shaped guide rail. 3 . 3.如权利要求1或2所述的一种新型圆弧形摆动平面研磨装置,其特征在于:所述的锥齿轮Ⅰ和锥齿轮Ⅱ斜交啮合的轴角Σ=60°,锥齿轮Ⅱ、万向节下部、轴Ⅴ的轴线在同一直线上。3. A novel arc-shaped swing plane grinding device as claimed in claim 1 or 2, characterized in that: the shaft angle Σ=60° of the helical meshing of the bevel gear I and the bevel gear II, and the bevel gear II , The lower part of the universal joint and the axis of shaft V are on the same straight line. 4.如权利要求1或2所述的一种新型圆弧形摆动平面研磨装置,其特征在于:所述的圆柱齿轮Ⅱ轴线中心,距离研磨盘中心445mm,且轴心在研磨机的中线上。4. A novel arc-shaped swing plane grinding device according to claim 1 or 2, characterized in that: the center of the axis of the cylindrical gear II is 445mm from the center of the grinding disc, and the axis is on the center line of the grinding machine . 5.如权利要求1或2所述的一种新型圆弧形摆动平面研磨装置,其特征在于:所述的固定竖板和上摆臂,下摆臂,固定横板,电机板都通过螺钉固定连接。5. A novel arc-shaped swing plane grinding device according to claim 1 or 2, characterized in that: the fixed vertical plate, the upper swing arm, the lower swing arm, the fixed horizontal plate, and the motor plate are all fixed by screws connect. 6.如权利要求1或2所述的一种新型圆弧形摆动平面研磨装置,其特征在于:所述万向节在安装时,确保其上下两端的轴角大小相等。6 . The novel arc-shaped swinging plane grinding device according to claim 1 or 2 , wherein when the universal joint is installed, it is ensured that the shaft angles at the upper and lower ends of the universal joint are equal in size. 7 . 7.如权利要求1所述的一种新型圆弧形摆动平面研磨装置,其特征在于:所述下弧形导轨和、上弧形导和铝型材固定连接,铝型材和研磨机固定连接。7 . The novel arc-shaped swing plane grinding device according to claim 1 , wherein the lower arc-shaped guide rail and the upper arc-shaped guide rail are fixedly connected to the aluminum profile, and the aluminum profile is fixedly connected to the grinding machine. 8 .
CN201910608597.0A 2019-07-08 2019-07-08 Arc swing plane grinding device Active CN110405622B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910608597.0A CN110405622B (en) 2019-07-08 2019-07-08 Arc swing plane grinding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910608597.0A CN110405622B (en) 2019-07-08 2019-07-08 Arc swing plane grinding device

Publications (2)

Publication Number Publication Date
CN110405622A true CN110405622A (en) 2019-11-05
CN110405622B CN110405622B (en) 2024-05-07

Family

ID=68360483

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910608597.0A Active CN110405622B (en) 2019-07-08 2019-07-08 Arc swing plane grinding device

Country Status (1)

Country Link
CN (1) CN110405622B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111451950A (en) * 2020-04-15 2020-07-28 浙江工业大学 Rocker arm feeding type grinding disc manufacturing device
CN113172542A (en) * 2021-05-20 2021-07-27 高桥金属制品(苏州)有限公司 Spherical surface grinding device and grinding method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1736661A (en) * 2004-08-22 2006-02-22 秦朝学 Pipe end burr polisher
CN106737191A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that lower polishing disk irrational number is rotated
CN106737134A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN107097123A (en) * 2017-06-29 2017-08-29 西华大学 A kind of rotating mechanism
CN206614403U (en) * 2016-12-30 2017-11-07 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN108608315A (en) * 2018-05-16 2018-10-02 浙江工业大学 Novel plane grinding drive of high accuracy accuse shape device
CN211163455U (en) * 2019-07-08 2020-08-04 浙江工业大学 Novel circular arc swing plane grinding device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1736661A (en) * 2004-08-22 2006-02-22 秦朝学 Pipe end burr polisher
CN106737191A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that lower polishing disk irrational number is rotated
CN106737134A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN206614403U (en) * 2016-12-30 2017-11-07 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN107097123A (en) * 2017-06-29 2017-08-29 西华大学 A kind of rotating mechanism
CN108608315A (en) * 2018-05-16 2018-10-02 浙江工业大学 Novel plane grinding drive of high accuracy accuse shape device
CN211163455U (en) * 2019-07-08 2020-08-04 浙江工业大学 Novel circular arc swing plane grinding device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111451950A (en) * 2020-04-15 2020-07-28 浙江工业大学 Rocker arm feeding type grinding disc manufacturing device
CN111451950B (en) * 2020-04-15 2021-11-02 浙江工业大学 Rocker feed type grinding disc preparation device
CN113172542A (en) * 2021-05-20 2021-07-27 高桥金属制品(苏州)有限公司 Spherical surface grinding device and grinding method

Also Published As

Publication number Publication date
CN110405622B (en) 2024-05-07

Similar Documents

Publication Publication Date Title
CN211163455U (en) Novel circular arc swing plane grinding device
CN208614487U (en) A kind of linear R RL type three-axis numerical control rubbing down machining tool
CN110405622A (en) A Novel Circular Swing Plane Grinding Device
CN207576540U (en) A kind of planetary ball mill
CN209754883U (en) Driving device for hub grinding equipment
CN210050269U (en) Intermittent rotating mechanism
CN108608315A (en) Novel plane grinding drive of high accuracy accuse shape device
CN211163518U (en) Novel formula plane grinding sways device
CN110497304A (en) A new type of linear motion plane grinding device
CN211277936U (en) Novel linear motion plane grinding device
CN213970556U (en) Polishing machine with workpiece rotation supporting device
CN221048177U (en) A planetary grinding head grinding radius compensation device
CN209998978U (en) planetary polishing device
CN215617147U (en) A kind of grinding device for aluminum slider processing
CN206998581U (en) A kind of mechanical fitting sanding and polishing device
CN110682210B (en) A new type of swing type surface grinding device
CN209681822U (en) a sand blasting device
CN208614546U (en) A grinding disc mechanism of a nonlinear RRL type three-axis CNC polishing machine tool
CN222244296U (en) Flat grinder fixture device
CN111958461A (en) Bent pipe polishing equipment
CN218312475U (en) Sliding bearing chamfering device
CN221640498U (en) Bearing ring polisher for bearing production
CN220660156U (en) A new type of roller cam gapless indexing plate
CN207087585U (en) It is a kind of can batch machining nut production burnishing device
CN218194233U (en) A grinding device capable of uniformly deburring the outer surface of a turbine shaft

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant