CN217895736U - Small-size desk-top vacuum multitarget coating machine - Google Patents
Small-size desk-top vacuum multitarget coating machine Download PDFInfo
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- CN217895736U CN217895736U CN202222109401.3U CN202222109401U CN217895736U CN 217895736 U CN217895736 U CN 217895736U CN 202222109401 U CN202222109401 U CN 202222109401U CN 217895736 U CN217895736 U CN 217895736U
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Abstract
The utility model discloses a small-sized desk-top vacuum multi-target coating machine, which comprises an underframe, a vacuum chamber, an upper cover and a magnetic control target, wherein the underframe, the vacuum chamber and the magnetic control target are uniformly distributed on the magnetic control target, the upper cover is connected with two air pressure supporting rods, the upper cover is provided with a door lock and a hinge, the vacuum chamber is provided with a molecular pump, the molecular pump is connected to an air suction port of the vacuum chamber through a pneumatic gate valve, and a rotary heating sample table is arranged in the vacuum chamber; the utility model discloses to laboratory conditions research and development manufacturing, the complete machine is very small and exquisite, only need outer water receiving, electricity, gas just possesses operating condition, local electrical system adopts PLC + touch-sensitive screen control, there is the operation procedure of working out in advance, the user only needs to set up a plurality of parameters, for example the coating film time, and lofting, the sample, just can full-automatic operation, the local has perfect self-checking system, detect like the lack of water, vacuum pressure is not up to standard detection etc. and in time remind the user with the warning sound, with protective apparatus safety.
Description
Technical Field
The utility model relates to the technical field of vacuum coating equipment, in particular to a small-sized table type vacuum multi-target coating machine.
Background
The magnetron sputtering coating equipment can prepare single-layer and multi-layer functional films with nanometer scale such as various hard films, metal films, semiconductor films, dielectric films, ferromagnetic films, magnetic films and the like. However, the existing instrument is simple in electrical control, manual operation is mostly adopted, and an operator can master complex operation skills only through professional training. Therefore, a small-sized automatic multi-target magnetron sputtering coating device is developed and used for solving the problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a small-size desk-top vacuum multitarget coating machine.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a small-size desk-top vacuum multitarget coating machine, includes chassis, real empty room, upper cover, magnetic control target, chassis, real empty room, equipartition in magnetic control target, two atmospheric pressure bracing pieces are connected to the upper cover, the upper cover is provided with the lock and folds paper, be provided with the molecular pump on the real empty room, just the molecular pump passes through pneumatic push-pull valve and connects on real empty room's extraction opening, real empty room's inside has the rotatory sample platform that heats.
Preferably, the magnetron targets are arranged in a plurality, the magnetron targets are arranged on the upper cover, the upper cover of the magnetron targets is arranged in an annular shape, each magnetron target is provided with an independent baffle mechanism, the sputtering target baffle is opened, sputtering is formally started, and the system is automatically closed after the sputtering reaches a set time.
Preferably, a glass observation window is arranged in front of the vacuum chamber, and the glass observation window is arranged in the middle of the vacuum chamber.
Preferably, an armored heating plate is installed inside the rotary heating sample table.
Preferably, the bottom of the vacuum chamber is provided with a bottom frame, anti-skid particles are arranged on the bottom frame, and the anti-skid particles are provided with the anti-skid particles.
Preferably, an exhaust tube is arranged behind the vacuum chamber, and the rear end of the exhaust tube is connected with the molecular pump through a pneumatic gate valve.
Preferably, the door lock is movably connected with the hinge.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses to laboratory conditions research and development manufacturing, the complete machine is very small and exquisite, only need outer water receiving, electricity, gas just possesses operating condition, local electrical system adopts PLC + touch-sensitive screen control, there is the operation procedure of working out in advance, the user only needs to set up a plurality of parameters, for example the coating film time, and lofting, the sample, just can full-automatic operation, the local has perfect self-checking system, detect like the lack of water, vacuum pressure is not up to standard detection etc. and in time remind the user with the warning sound, with protective apparatus safety.
Drawings
FIG. 1 is a front view of the present invention;
fig. 2 is a top view of the present invention;
fig. 3 is a left side view of the present invention.
Reference numbers in the figures: 1. rotating and heating the sample table; 2. a vacuum chamber; 3. an upper cover; 4. magnetically controlling a target; 5. folding; 6. a door lock; 7. a chassis.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a small-size desk-top vacuum multitarget coating machine, including chassis 7, real empty room 2, upper cover 3, magnetic control target 4, chassis 7, real empty room 2, the equipartition is in magnetic control target 4, upper cover 3 connects two atmospheric pressure bracing pieces, be provided with lock 6 on the upper cover 3 and fold paper 5, swing joint between lock 6 and the 5 of folding paper, be provided with the molecular pump on real empty room 2, and the molecular pump passes through pneumatic push-pull valve and connects on real empty room 2's extraction opening, real empty room 2 bottom is provided with chassis 7, and the installation is equipped with anti-skidding granule on the chassis 7, and the anti-skidding granule has been seted up on the anti-skidding granule, real empty room 2 is equipped with the exhaust tube at the back, the rear end of exhaust tube meets with the molecular pump through pneumatic push-pull valve, real empty room 2's inside has rotation heating sample platform 1, the internally mounted armor heating plate of rotation heating sample platform 1.
A glass observation window is arranged in front of the vacuum chamber 2, and the glass observation window 2 is arranged in the middle of the vacuum chamber 2; facilitating observation of the internal conditions.
A plurality of magnetic control targets 4 are arranged, the magnetic control targets 4 are arranged on the upper cover 3, the covers above the magnetic control targets 4 are arranged in an annular shape, and each magnetic control target 4 is provided with an independent baffle mechanism;
the working principle is as follows: firstly, the preparation work of cleaning the vacuum chamber 2, cleaning the substrate, installing the target material, setting parameters, placing the substrate and the like is done in advance, then the vacuum chamber 2 is closed, the automatic sputtering is pressed, the system firstly opens the mechanical pump, the air exhaust timing is started, after ten minutes, the vacuum degree of the vacuum chamber 2 reaches 3Pa, at the moment, the molecular pump is started, the background vacuum pumping is started, and after 30 minutes, the vacuum degree of the vacuum chamber 2 reaches 6 multiplied by 10 －4 Pa, namely the completion of background vacuum; if the vacuum degree of the vacuum chamber 2 fails to reach 6X 10 after 30 minutes － 4 Pa, the system considers that a leakage point exists in the vacuum chamber, stops the operation and gives a buzzing alarm to remind a user of removing faults, next, the system controls the throttle valve to adjust to a proper angle, controls the mass flow meter to be filled with a certain amount of process gas, stabilizes the vacuum degree of the vacuum chamber 2 at a set value, starts the armored heating plate according to the process setting, starts the power supply to carry out pre-sputtering when the temperature reaches the set value and meets the sputtering condition, starts the power supply to carry out pre-sputtering for a period of time, the time can be set, the sample table 1 of the rotary heating table rotates, a target baffle plate for current sputtering is opened, the sputtering is formally started, the system is automatically closed after the sputtering reaches the set time, and the whole sputtering process is finished.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a small-size desk-top vacuum multitarget coating machine, includes chassis (7), vacuum chamber (2), upper cover (3), magnetic control target (4), its characterized in that: the vacuum heating device is characterized in that the bottom frame (7), the vacuum chamber (2) and the uniform distribution are arranged on the magnetic control target (4), the upper cover (3) is connected with two air pressure supporting rods, a door lock (6) and a hinge (5) are arranged on the upper cover (3), a molecular pump is arranged on the vacuum chamber (2), the molecular pump is connected to an air suction opening of the vacuum chamber (2) through a pneumatic gate valve, and the inside of the vacuum chamber (2) is provided with a rotary heating sample table (1).
2. A small table type vacuum multi-target coating machine according to claim 1, characterized in that: the magnetic control targets (4) are arranged in a plurality, the magnetic control targets (4) are arranged on the upper cover (3), the upper covers of the magnetic control targets (4) are arranged in an annular mode, and each magnetic control target (4) is provided with an independent baffle mechanism.
3. The small table type vacuum multi-target coating machine of claim 1, wherein: the front of the vacuum chamber (2) is provided with a glass observation window, and the glass observation window is arranged in the middle of the vacuum chamber (2).
4. The small table type vacuum multi-target coating machine of claim 1, wherein: an armored heating plate is arranged inside the rotary heating sample table (1).
5. The small table type vacuum multi-target coating machine of claim 1, wherein: the vacuum chamber is characterized in that the bottom of the vacuum chamber (2) is provided with a bottom frame (7), anti-skid particles are arranged on the bottom frame (7) in an installing mode, and the anti-skid particles are arranged on the anti-skid particles.
6. The small table type vacuum multi-target coating machine of claim 1, wherein: an exhaust tube is arranged behind the vacuum chamber (2), and the rear end of the exhaust tube is connected with the molecular pump through a pneumatic gate valve.
7. A small table type vacuum multi-target coating machine according to claim 1, characterized in that: the door lock (6) is movably connected with the hinge (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222109401.3U CN217895736U (en) | 2022-08-11 | 2022-08-11 | Small-size desk-top vacuum multitarget coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222109401.3U CN217895736U (en) | 2022-08-11 | 2022-08-11 | Small-size desk-top vacuum multitarget coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217895736U true CN217895736U (en) | 2022-11-25 |
Family
ID=84142139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222109401.3U Active CN217895736U (en) | 2022-08-11 | 2022-08-11 | Small-size desk-top vacuum multitarget coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217895736U (en) |
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2022
- 2022-08-11 CN CN202222109401.3U patent/CN217895736U/en active Active
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