CN217869058U

CN217869058U - Modular vacuum evaporation machine

Info

Publication number: CN217869058U
Application number: CN202221897289.8U
Authority: CN
Inventors: 钱文朔
Original assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Current assignee: Suzhou Youlun Vacuum Equipment Technology Co ltd
Priority date: 2022-07-22
Filing date: 2022-07-22
Publication date: 2022-11-22
Anticipated expiration: 2032-07-22

Abstract

The application provides a modular vacuum evaporation machine, including the main cavity body that is used for carrying out the coating film to the substrate, set up and join in marriage the cabinet at main cavity body one side electricity, the electricity joins in marriage the front panel of cabinet and maintains an equal level with the door panel of the main cavity body, and door panel and wall body keep an equal level, the opposite side of the main cavity body is provided with power and compressor backward in the past, the power setting is in the rear of door panel, the rear portion of the main cavity body is fixed with the communicating being connected of main valve, the lower extreme and the cold pump of main valve are fixed, the main valve passes through the pipeline and is connected with rough pump, rough pump is used for carrying out preliminary evacuation to the main cavity body and main valve inside, is provided with the vacuum pump in the main valve, the vacuum pump is used for carrying out the smart evacuation to the main cavity body and main valve inside, the compressor passes through the wire and is connected with the cold pump, compressor and cold pump are used for carrying out the control by temperature in the main cavity body, rough pump setting is at the rear of main valve and cold pump.

Description

Modular vacuum evaporation machine

Technical Field

The utility model relates to a vacuum evaporation machine technical field, more specifically relates to a modular vacuum evaporation machine.

Background

The vacuum evaporation machine is characterized in that an evaporation source arranged on a bottom plate of a main cavity body is utilized under a vacuum condition, the evaporation source is used for gasifying film materials in the evaporation source through modes of current heating, electron beam bombardment heating, ion source bombardment and the like, the gasified film material particles are upwards evaporated in a cone shape, and the film materials are condensed on the surface of a substrate fixed on a plating pot at the upper part of the main cavity body to form a film.

The vacuum evaporation machine has many parts, and besides the main cavity, the vacuum evaporation machine also comprises a main valve, a cold pump connected with the main valve, a primary pump, a power supply and the like, so that the vacuum evaporation machine has large floor area and is messy. Prior art, like chinese patent 202122875805.9, all set up the major part in the inside of pallet, the pallet is the metal crate of square or cuboid, and the main cavity is at the front end, and main valve and cold pump are at the middle part, and automatically controlled cabinet, power, compressor and oil pump are in the rear end of pallet, and the structure is more regular integration. On one hand, the vacuum evaporator, such as an electric control cabinet, a power supply and the like, used by each model cannot be used universally, and the components used by the vacuum evaporator of different models are different. In the second aspect, although the frame is used, many parts, pipes, and the like are required, and the visual perception is not good.

In view of this, the utility model provides a modular vacuum evaporation plating machine can carry out the modular equipment, and some parts can be general to the visual sensation is very good.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a modular vacuum evaporation plating machine can carry out the modular equipment, and partial part can be general to the visual sensation is very good.

The utility model provides a modular vacuum evaporation machine divide into 3 modular parts, and the middle part is the main cavity body, and the cabinet is joined in marriage for the electricity to one side of the main cavity body, and the opposite side is power and compressor, and the vacuum evaporation machine that cabinet, power and compressor are applicable to any model is joined in marriage to the electricity, and the equipment of module is carried out to the whole part, and is very convenient. And the door panel of the main cavity body and the front panel of the electric distribution cabinet are flush with the wall body, so that only the cavity door of the main cavity body and the front panel of the electric distribution cabinet can be seen, and other parts of the vacuum evaporation machine are hidden behind the cavity, so that the visual effect is good. The main valve and the cold pump are fixed together and are fixed behind the main cavity, and the cold pump and the main valve are fixed with the bottom plate with the roller skate, so that the cold pump and the main valve are convenient to mount, dismount and transport, and modular assembly is also realized. The present applicant has completed the present application on this basis.

A modularized vacuum evaporation machine comprises a main cavity 1 used for coating a substrate, an electric distribution cabinet 2 arranged on one side of the main cavity 1, a front panel of the electric distribution cabinet 2 is flush with a door panel 11 of the main cavity 1, the door panel 11 is flush with a wall, a power supply 3 and a compressor 4 are arranged on the other side of the main cavity 1 from front to back, the power supply 3 is arranged behind the door panel 11, the rear portion of the main cavity 1 is fixedly connected with a main valve 5 in a communication mode, the lower end of the main valve 5 is fixed with a cold pump 6, the main valve 5 is connected with a roughing pump 7 through a pipeline, the roughing pump 7 is used for primarily vacuumizing the interiors of the main cavity 1 and the main valve 5, a vacuum pump is arranged in the main valve 5 and used for finely vacuumizing the interiors of the main cavity 1 and the main valve 5, the compressor 4 is connected with the cold pump 6 through a lead, the compressor 4 and the cold pump 6 are used for controlling the temperature in the main cavity 1, and the roughing pump 7 is arranged behind the main valve 5 and the cold pump 6.

In some embodiments, the door panel 11 of the main cavity 1 is fixedly connected with the front panel of the electrical distribution cabinet 2, and the cavity door of the main cavity 1 protrudes from the door panel 11.

Further, the main cavity 1 is one of a hollow cylinder, a hollow cube, a hollow cuboid or a hollow sphere.

Further, the cavity door of the main cavity 1 is provided with one or more observation windows 12, and the observation windows 12 are used for observing the condition in the main cavity 1 during the coating process.

Further, a plating pot 14, a plating pot rotating structure 15, a heating lamp 16, a crucible 17 and an ion source 18 are arranged inside the main cavity 1, the plating pot 14 and the plating pot rotating structure 15 are arranged at the upper part inside the main cavity 1, the plating pot 14 is used for fixing a substrate, the heating lamp 16, the crucible 17 and the ion source 18 are arranged at the lower part inside the main cavity 1 and fixed on the bottom plate of the main cavity 1, and the heating lamp 16 is used for accelerating evaporation of moisture.

Furthermore, one or more than one plating pot 14 is provided, the plating pot rotating structure 15 is connected with the plating pot 14, the plating pot rotating structure 15 provides rotating kinetic energy for the plating pot 14 and controls the rotating track of the plating pot 14, and a workpiece to be plated is fixed on the plating pot 14.

Further, the crucible 17 is arranged in the middle of the bottom plate of the main cavity 1, the evaporated coating material is gasified by current heating and electron beam bombardment heating, and the gasified particles fly to the surface of the workpiece to be coated on the coating pot 14 to form a coating.

Furthermore, one ion source 18 is arranged at the corner position of the bottom plate of the main cavity 1 and is positioned at the left side or the right side of the crucible 17, and the ion source 18 performs physical bombardment on the surface of a workpiece to be coated through argon ions generated after argon molecules are ionized, so that the effects of cleaning and increasing the surface roughness are achieved, and the adhesion of subsequent coating is increased.

In some embodiments, the electrical cabinet 2 has a rectangular parallelepiped shape, the control panels of the electrical cabinet 2 are all disposed on the front panel, and the electrical cabinet 2 is suitable for various vacuum evaporation machines.

In some embodiments, the main chamber 1 is spaced from the power source 3 and the compressors 4, the power source 3 is spaced from the compressors 4, and the number of compressors 4 is the same as the number of cold pumps 6.

In some embodiments, the main valves 5 are hollow structures, one main chamber 1 is connected to one or two main valves 5, a vent 13 is provided at the connection between the main chamber 1 and the main valves 5, and air in the main chamber 1 enters the main valves 5 through the vent 13.

Further, the main valve 5 includes a connection portion 52 and a main valve portion 53, the connection portion 52 and the main valve portion 53 are both hollow structures, the connection portion 52 communicates with the main valve portion 53, the left side surface of the connection portion 52 is integrally connected to a position corresponding to the vent 13 of the main chamber 1, the right side surface of the connection portion 52 is connected to the main valve portion 53, the cross section of the connection portion 52 is trapezoidal, the height of the left side surface of the connection portion 52 is greater than that of the right side surface, and the pipe of the rough pump 7 is connected to the upper surface of the main valve portion 53.

In some embodiments, the number of the cold pumps 6 is the same as the number of the main valves 5, and the cold pumps 6 are fixed to a bottom plate with a pulley, so that the main valves 5 and the cold pumps 6 can be conveniently installed and disassembled.

In some embodiments, there are two roughing pumps 7, two roughing pumps 7 are disposed above and below, and the roughing pumps 7 are a main pump and a roots pump.

Drawings

Fig. 1 is a first structural schematic diagram of a modular vacuum evaporator according to the present application.

Fig. 2 is a second structural schematic diagram of the modular vacuum evaporator of the present application.

Fig. 3 is a third structural schematic diagram of the modular vacuum evaporator of the present application.

Fig. 4 is a schematic structural view of a main chamber of the modular vacuum evaporator of the present application.

Description of the main element symbols:

the main chamber 1, the electrical cabinet 2, the power supply 3, the compressor 4, the main valve 5, the cold pump 6, the rough pump 7, the door panel 11, the observation window 12, the vent 13, the plating pot 14, the plating pot rotating structure 15, the heating lamp 16, the crucible 17, the ion source 18, the connecting part 52, and the main valve part 53.

Detailed Description

The following examples are described to aid in the understanding of the present application and are not, and should not be construed to, limit the scope of the present application in any way.

In the following description, those skilled in the art will recognize that components may be described throughout this discussion as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including being integrated within a single system or component).

Also, connections between components or systems are not intended to be limited to direct connections. Rather, data between these components may be modified, reformatted, or otherwise changed by the intermediate components. Additionally, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" and "fixed" should be understood to encompass direct connections, indirect connections, or fixed through one or more intermediaries. In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "side", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships commonly recognized in the product of the application, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application.

Example 1:

referring to fig. 1-3, the three-angle perspective view of the modularized vacuum evaporation machine of the present application includes a main cavity 1 for coating a substrate, an electrical distribution cabinet 2 disposed at one side of the main cavity 1, a front panel of the electrical distribution cabinet 2 being flush with a door panel 11 of the main cavity 1, the door panel 11 being flush with a wall, a power supply 3 and a compressor 4 disposed from front to back on the other side of the main cavity 1, the power supply 3 being disposed behind the door panel 11, a rear portion of the main cavity 1 being connected and fixed with a main valve 5, a lower end of the main valve 5 being fixed with a cold pump 6, the main valve 5 being connected with a roughing pump 7 through a pipe, the roughing pump 7 being used for primarily evacuating the interiors of the main cavity 1 and the main valve 5, the main valve 5 being provided with a vacuum pump for finely evacuating the interiors of the main cavity 1 and the main valve 5, the compressor 4 being connected with the cold pump 6 through a wire, the compressor 4 and the cold pump 6 being used for controlling the temperature in the main cavity 1, the roughing pump 7 being disposed behind the main valve 5 and the cold pump 6. Door panel 11 of the main cavity body 1 is connected with the front panel of the electric distribution cabinet 2 and fixed, the cavity door of the main cavity body 1 protrudes out of the door panel 11, and the main cavity body 1 is a hollow cylinder.

The electric distribution cabinet 2 is cuboid, control panels of the electric distribution cabinet 2 are arranged on the front panel, and the electric distribution cabinet 2 is suitable for vacuum evaporation machines of various models. The main cavity 1 is spaced from the power source 3 and the compressors 4, the power source 3 is spaced from the compressors 4, and the number of the compressors 4 is the same as that of the cold pumps 6. The main valve 5 is hollow structure, and a main cavity 1 is connected with a main valve 5, and the junction of main cavity 1 and main valve 5 is provided with a blow vent 13, and the air in the main cavity 1 passes through blow vent 13 and gets into main valve 5. The main valve 5 includes a connection portion 52 and a main valve portion 53, the connection portion 52 and the main valve portion 53 are both hollow structures, the connection portion 52 communicates with the main valve portion 53, the left side surface of the connection portion 52 is integrally connected with the position corresponding to the vent 13 of the main cavity 1, the right side surface of the connection portion 52 is connected with the main valve portion 53, the cross section of the connection portion 52 is trapezoidal, the height of the left side surface of the connection portion 52 is greater than that of the right side surface, and the pipe of the roughing pump 7 is connected with the upper surface of the main valve portion 53. The number of the cold pumps 6 is the same as that of the main valves 5, the cold pumps 6 are fixed with a bottom plate with pulleys, and the main valves 5 and the cold pumps 6 are convenient to install and detach. The number of the rough pumping pumps 7 is two, the two rough pumping pumps 7 are arranged up and down, and the rough pumping pumps 7 are main pumps and roots pumps.

Referring to fig. 4, the chamber door of the main chamber 1 is provided with an observation window 12, and one observation window 12 is provided, and the observation window 12 is used for observing the condition in the main chamber 1 during the coating process. The inside of main cavity body 1 is provided with plate pot 14, plate pot revolution mechanic 15, heating lamp 16, crucible 17 and ion source 18, and plate pot 14 and plate pot revolution mechanic 15 set up the upper portion in main cavity body 1 is inside, and plate pot 14 is used for the fixed substrate, and heating lamp 16, crucible 17 and ion source 18 set up the lower part in main cavity body 1 and fix on the bottom plate of main cavity body 1, and heating lamp 16 is used for accelerating the evaporation of moisture. The number of the plating pots 14 is 3, the plating pot rotating structure 15 is connected with the plating pot 14, the plating pot rotating structure 15 provides rotating kinetic energy for the plating pot 14 and controls the rotating track of the plating pot 14, and a plated workpiece is fixed on the plating pot 14. The crucible 17 is arranged in the middle of the bottom plate of the main cavity 1, the evaporated coating material is gasified by current heating and electron beam bombardment heating, and the gasified particles fly to the surface of the coated workpiece on the coating pot 14 to form a coating. The ion source 18 is arranged at the corner position of the bottom plate of the main cavity 1 and is positioned at the left side of the crucible 17, and the ion source 18 performs physical bombardment on the surface of a workpiece to be coated through argon ions generated after argon molecules are ionized, so that the effects of cleaning and increasing the surface roughness are achieved, and the adhesion of subsequent coating is increased.

While various aspects and embodiments have been disclosed herein, it will be apparent to those skilled in the art that other aspects and embodiments may be made without departing from the spirit of the disclosure, and that several modifications and improvements may be made without departing from the scope of the disclosure. The various aspects and embodiments disclosed herein are for purposes of illustration only and are not intended to be limiting, with the true scope of the disclosure being indicated by the following claims.

Claims

1. The modular vacuum evaporation machine is characterized by comprising a main cavity body (1) for coating a substrate, an electric distribution cabinet (2) arranged on one side of the main cavity body (1), a front panel of the electric distribution cabinet (2) is level with a door panel (11) of the main cavity body (1), the door panel (11) is level with a wall body, a power supply (3) and a compressor (4) are arranged on the other side of the main cavity body (1) from front to back, the power supply (3) is arranged behind the door panel (11), the rear part of the main cavity body (1) is fixedly connected with a main valve (5) in a communicating mode, the lower end of the main valve (5) is fixed with a cold pump (6), the main valve (5) is connected with a rough pump (7) through a pipeline, the rough pump (7) is used for primarily vacuumizing the interiors of the main cavity body (1) and the main valve (5), a vacuum pump is arranged in the main valve (5) and is used for finely vacuumizing the interiors of the main cavity body (1) and the main valve (5), the compressor (4) is connected with the rough pump (6) through a lead, the rough pump (6) and the main valve (5) are used for primarily vacuumizing, and the cold pump (6) and the temperature control of the cold pump (6).

2. The modular vacuum evaporator according to claim 1, characterized in that the door panel (11) of the main chamber (1) is fixedly connected to the front panel of the electrical cabinet (2), and the chamber door of the main chamber (1) protrudes from the door panel (11).

3. The modular vacuum evaporator according to claim 2, characterized in that the main chamber (1) is one of a hollow cylinder, a hollow cube, a hollow cuboid or a hollow sphere.

4. The modular vacuum evaporator according to claim 3, characterized in that the chamber door of the main chamber (1) has one or more observation windows (12), and the observation windows (12) are used for observing the conditions in the main chamber (1) during the coating process.

5. The modular vacuum evaporator according to claim 3, characterized in that a plating pot (14), a plating pot rotating structure (15), a heating lamp (16), a crucible (17) and an ion source (18) are arranged inside the main cavity body (1), the plating pot (14) and the plating pot rotating structure (15) are arranged at the upper part inside the main cavity body (1), the plating pot (14) is used for fixing the substrate, the heating lamp (16), the crucible (17) and the ion source (18) are arranged at the lower part inside the main cavity body (1) and fixed on the bottom plate of the main cavity body (1), and the heating lamp (16) is used for accelerating the evaporation of moisture.

6. The modular vacuum evaporator according to claim 1, characterized in that said electrical cabinet (2) is rectangular parallelepiped, the control panels of said electrical cabinet (2) are all arranged on said front panel, said electrical cabinet (2) being suitable for vacuum evaporators of various models.

7. Modular vacuum evaporation machine according to claim 1, characterised in that said main chamber (1) is distanced from the power source (3) and from the compressors (4), and from the power source (3) to the compressors (4), the number of compressors (4) being equal to the number of cold pumps (6).

8. Modular vacuum evaporator according to claim 1, characterised in that the main valves (5) are hollow, one main chamber (1) is connected to one or two main valves (5), a vent (13) is provided at the connection between the main chamber (1) and the main valves (5), and the air in the main chamber (1) enters the main valves (5) through the vent (13).

9. The modular vacuum evaporator according to claim 8, wherein the main valve (5) comprises a connecting portion (52) and a main valve portion (53), the connecting portion (52) and the main valve portion (53) are both hollow structures, the connecting portion (52) communicates with the main valve portion (53), a left side surface of the connecting portion (52) is integrally connected to a position corresponding to the vent hole (13) of the main chamber (1), a right side surface of the connecting portion (52) is connected to the main valve portion (53), a cross section of the connecting portion (52) is trapezoidal, a height of the left side surface of the connecting portion (52) is greater than a height of the right side surface, and a pipe of the roughing pump (7) is connected to an upper surface of the main valve portion (53).

10. Modular vacuum evaporator according to claim 1, characterised in that the number of cold pumps (6) is the same as the number of main valves (5), said cold pumps (6) being fixed to a bottom plate with pulley runners, facilitating the mounting and dismounting of the main valves (5) and cold pumps (6); the number of the rough pumping pumps (7) is two, the two rough pumping pumps (7) are arranged up and down, and the rough pumping pumps (7) are main pumps and roots pumps.