CN215628259U - Integrated vacuum coating equipment - Google Patents

Abstract

The application provides integrated vacuum coating equipment which comprises a process chamber, wherein a chamber door is arranged on the side wall of the process chamber, a turnover door plate is arranged at the position of the chamber door through a hinge, the door plate is provided with an inner side facing the process chamber and an outer side facing away from the process chamber, and a cathode module for implementing magnetron sputtering is arranged on the inner side of the door plate; the door plate is provided with a gas passing port, the outer side of the door plate is provided with a flange connecting seat which is arranged on the periphery of the gas passing port, the flange connecting seat is provided with a molecular pump, and the gas suction end of the molecular pump is communicated with the gas passing port. The utility model provides an integral type vacuum coating equipment has reasonable spatial layout, effectively increases the installation position of negative pole module and guarantees the coating film homogeneity.

Description

Integrated vacuum coating equipment

Technical Field

The application relates to the technical field of vacuum coating, in particular to integrated vacuum coating equipment.

Background

When the vacuum coating equipment is in a sealed state, the vacuum coating equipment is pumped out through a pumping-out system of the molecular pump, and the vacuum degree in the cavity can reach 1.0E-5 Pa. At the moment, the process gas is controlled to enter the vacuum cavity through equipment such as a gas mass flow controller and the like, and the vacuum pressure is adjusted, so that the vacuum degree is in a good coating vacuum degree interval of 1.0E-1Pa to 1 Pa.

The molecular pump and the sputtering cathode are key equipment for meeting the vacuum sputtering coating process conditions of vacuum coating equipment. The layout of the existing vacuum coating equipment: the cathode module is independently arranged on the cathode mounting flange, the process gas circuit assembly is arranged near the cathode, and other equipment cannot be arranged on the process gas circuit assembly; the molecular pumps are arranged on the mounting flanges of the molecular pumps on the left side and the right side of the cathode, so that the atmosphere led out from the process gas circuit is pumped away by the molecular pumps beside the cathode target surface after passing through the cathode target surface. However, the molecular pump occupies the installation position of the cathode module, the installation position of the molecular pump needs to be considered when the cavity is designed, and the design and processing cost of the whole vacuum coating equipment is very high.

SUMMERY OF THE UTILITY MODEL

Aiming at the problems in the prior art, the integrated vacuum coating equipment provided by the application has the advantages that the molecular-integrated pump and the cathode are installed on the same door plate in a back-to-back manner, so that the installation position of the cathode module is effectively increased or the length of the coating equipment is effectively reduced; and the air path with reasonable layout ensures the uniformity of the coating film and improves the space utilization rate of the whole equipment.

The integrated vacuum coating equipment comprises a process chamber, wherein a chamber door is arranged on the side wall of the process chamber, a turnover door plate is arranged at the position of the chamber door through a hinge, the door plate is provided with an inner side facing the process chamber and an outer side facing away from the process chamber, and a cathode module for implementing magnetron sputtering is arranged on the inner side of the door plate;

the door plate is provided with a gas passing port, the outer side of the door plate is provided with a flange connecting seat which is arranged on the periphery of the gas passing port, the flange connecting seat is provided with a molecular pump, and the gas suction end of the molecular pump is communicated with the gas passing port.

Several alternatives are provided below, but not as an additional limitation to the above general solution, but merely as a further addition or preference, each alternative being combinable individually for the above general solution or among several alternatives without technical or logical contradictions.

Optionally, the door plate includes a main plate and a side edge located at the periphery of the main plate, the main plate protrudes outward relative to the sidewall of the process chamber, an expansion area is formed at the inner side of the door plate, the cathode module is located in the expansion area, and the flange connection base is fixed to the outer side of the main plate.

Optionally, the outer side of the main plate is divided into three areas, namely an upper area, a middle area and a lower area in the height direction, and the molecular pump is mounted in the middle area of the outer side of the main plate.

Optionally, the chamber doors are arranged side by side, and at least two molecular pumps are installed on the door plate of each chamber door.

Optionally, the air outlet ends of the molecular pumps on the same plate are connected in parallel to a vacuum manifold.

Optionally, the molecular pumps on the same door panel are sequentially arranged along the height direction of the door panel.

Optionally, the target in the cathode module is a vertically-arranged cylindrical target and is rotatably mounted relative to the door panel, and a driving motor linked with the target is mounted on the outer side of the main board.

Optionally, the driving motor is mounted at a lower region outside the main board.

Optionally, the driving motors on the same door panel are sequentially arranged along the width direction of the door panel.

Optionally, in the width direction of the door panel, the two sides of the cathode module are both provided with a process gas inlet.

Compared with the prior art, the integrated vacuum coating equipment has the advantages that the installation positions of the molecular pump and the cathode module are reasonably arranged, and the space of a process chamber occupied by the molecular pump is effectively reduced; the process gas circuit is reasonably adjusted to be suitable for new installation layout, and the uniformity of the coating film is ensured.

Drawings

Fig. 1 is a schematic structural diagram of an integrated vacuum coating apparatus in an embodiment of the present application;

FIG. 2 is a schematic view of a partial structure of the integrated vacuum coating apparatus;

FIG. 3 is a schematic view of the structure of FIG. 2 at another angle;

fig. 4 is a partial sectional view of the integrated vacuum plating apparatus.

The reference numerals in the figures are illustrated as follows:

10. a process chamber;

20. a chamber door; 21. a hinge;

30. a door panel; 31. a main board; 311. an upper portion; 312. a middle part; 313. a lower portion; 32. a skirt; 33. an extension area;

40. a flange connecting seat;

50. a cathode module; 51. a target material;

60. a drive motor;

70. a molecular pump; 71. an air outlet end; 72. a vacuum manifold;

80. a process gas input port.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the present application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1, 2 and 4, the integrated vacuum coating apparatus provided in an embodiment of the present application includes a process chamber 10, a chamber door 20 is opened on a sidewall of the process chamber 10, a flip-type door 30 is installed at a position of the chamber door 20 through a hinge 21, the door 30 has an inner side facing the process chamber 10 and an outer side facing away from the process chamber 10, and a cathode module 50 for performing magnetron sputtering is installed on the inner side of the door 30;

the door plate 30 is provided with an air passing port, the outer side of the door plate 30 is provided with a flange connecting seat 40 which is positioned at the periphery of the air passing port, the flange connecting seat 40 is provided with a molecular pump 70, and the air suction end of the molecular pump 70 is communicated with the air passing port.

The integrated vacuum coating equipment is the coating equipment integrating various systems or functional components, and comprises a coating system, a vacuum system, a process gas distribution system and the like; the cathode module 50 belongs to an important component in a coating system, and comprises a cathode body and a target material arranged on the cathode body; the molecular pump 70 is a common air-extracting device, and utilizes a rotor rotating at a high speed to transmit kinetic energy to gas molecules, so that the gas molecules obtain a directional speed, thereby achieving the purpose of air extraction. In the assembled state, the air vent is shielded by the flange connection seat 40.

Before coating, the process chamber 10 needs to be pumped to high vacuum, and then high-purity process gas is filled to adjust the vacuum degree to a certain interval so as to meet different coating requirements; the process gases generate glow power under the action of voltage, and positive ions generated by discharge impact the target material on the cathode module 50 under the action of an electric field, so that sputtering of target atoms is realized.

In the prior art, generally, the molecular pump 70 and the cathode module 50 are respectively installed on different doors, and therefore, an installation station or an evacuation chamber of the molecular pump 70 needs to be reserved on the door panel on one side or both sides of the cathode module 50, which results in reduction of the station for installing the cathode module 50, and the space utilization rate of the whole vacuum coating equipment is low, but in this embodiment, the molecular pump 70 and the cathode module 50 are installed on the same door panel 30 in a back-to-back manner, so that the installation stations of the cathode module 50 are effectively increased, and the structure is compact and the space utilization rate is high.

Referring to fig. 2 to 3, in an embodiment, the door 30 includes a main plate 31 and a side edge 32 located at the periphery of the main plate 31, the main plate 31 protrudes outward relative to the sidewall of the process chamber 10, and an expansion area 33 is formed at the inner side of the door 30, the cathode module 50 is located at the expansion area 33, and the flange connection base 40 is fixed to the outer side of the main plate 31; the embedded integrated layout is beneficial to further improving the utilization rate of space.

In one embodiment, the expansion region 33 is located in a lower region of the door 30 so that the target of the cathode module can be aligned with the substrate.

Referring to fig. 3, in an embodiment, the outer side of the main plate 31 is divided into three regions, i.e., an upper region 311, a middle region 312 and a lower region 313 in the height direction, the molecular pump 70 is installed in the middle region 312 of the outer side of the main plate 31 to avoid interference with cathode installation, and in the process of coating, if the atmosphere or vacuum degree in the process chamber needs to be regulated, the molecular pump 70 can rapidly pump air to achieve the target vacuum degree.

In order to improve the uniformity of the coating film, the process chamber 10 is divided into a plurality of units along the substrate transfer direction, each unit is provided with a station for installing the cathode module 50, and correspondingly, in one embodiment, a plurality of chamber doors 20 are arranged side by side, and at least two molecular pumps 70 are installed on the door panel 30 of each chamber door 20. The arrangement of the plurality of molecular pumps 70 is helpful for increasing the vacuum pumping speed and improving the production efficiency.

Referring to fig. 3, in one embodiment, the molecular pumps 70 on the same door panel 30 are arranged in sequence along the height direction of the door panel 30.

The process gas input from the process gas path is pumped away by the molecular pumps 70 after passing through the cathode target surface, and for convenience of centralized pumping, referring to fig. 2 to 4, in an embodiment, the gas outlet ends 71 of the molecular pumps 70 on the same plate are connected in parallel to each other and connected to a vacuum manifold 72, and the arrows in fig. 4 indicate the flow direction of the process gas.

Referring to fig. 2 to 3, in an embodiment, the target in the cathode module 50 is a vertical cylindrical shape and is rotatably mounted with respect to the door panel 30, and a driving motor 60 linked with the target is mounted on the outer side of the main plate 31.

In one embodiment, the driving motor 60 is installed in the lower portion 313 region outside the main board 31, which facilitates installation and improves space utilization.

According to the actual coating requirement, a plurality of targets may be disposed in the cathode module 50, and each target is individually configured with a driving motor 60, referring to fig. 2, in an embodiment, the driving motors 60 on the same door panel 30 are sequentially arranged along the width direction of the door panel 30, so as to be linked with the targets on the inner side of the door panel 30.

In order to rapidly introduce the process gas into the coating region, in one embodiment, the process gas inlets 80 are disposed on both sides of the cathode module 50 in the width direction of the door 30, as shown in fig. 4.

The integrated vacuum coating equipment integrates the back of the molecular pump and the cathode module into a whole, so that the installation positions of the cathode module are effectively increased, and the space utilization rate of the whole equipment is improved; and the process gas circuit is reasonably adjusted to adapt to the installation layout, so that the uniformity of the coating film is ensured.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features. When technical features in different embodiments are represented in the same drawing, it can be seen that the drawing also discloses a combination of the embodiments concerned.

The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present application shall be subject to the appended claims.

Claims (10)

1. The integrated vacuum coating equipment comprises a process chamber, wherein a chamber door is arranged on the side wall of the process chamber, a turnover door plate is arranged at the position of the chamber door through a hinge, and the door plate is provided with an inner side facing the process chamber and an outer side facing away from the process chamber;

the door plate is provided with a gas passing port, the outer side of the door plate is provided with a flange connecting seat which is arranged on the periphery of the gas passing port, the flange connecting seat is provided with a molecular pump, and the gas suction end of the molecular pump is communicated with the gas passing port.

2. The integrated vacuum deposition apparatus of claim 1, wherein the door plate comprises a main plate and a side edge at the periphery of the main plate, the main plate protrudes outward relative to the sidewall of the process chamber, and an extension area is formed at the inner side of the door plate, the cathode module is located at the extension area, and the flange connection base is fixed to the outer side of the main plate.

3. The integrated vacuum plating apparatus according to claim 1, wherein the outer side of the main plate is divided into three regions of an upper portion, a middle portion and a lower portion in a height direction, and the molecular pump is installed at the middle region of the outer side of the main plate.

4. The integrated vacuum coating apparatus according to claim 1, wherein the chamber doors are arranged in a plurality in parallel, and at least two molecular pumps are mounted on the door panel of each chamber door.

5. The integrated vacuum coating apparatus according to claim 1, wherein the outlet ends of the molecular pumps on the same plate are connected in parallel to each other to a vacuum manifold.

6. The integrated vacuum coating apparatus according to claim 1, wherein the molecular pumps on the same door panel are arranged in sequence along the height direction of the door panel.

7. The integrated vacuum coating equipment according to claim 2, wherein the target in the cathode module is in a vertical cylindrical shape and is rotatably mounted relative to the door panel, and a driving motor linked with the target is mounted on the outer side of the main plate.

8. The integrated vacuum plating apparatus according to claim 7, wherein the driving motor is installed at a lower region outside the main plate.

9. The integrated vacuum coating apparatus according to claim 1, wherein the driving motors on the same door panel are sequentially arranged in a width direction of the door panel.

10. The integrated vacuum coating apparatus according to claim 1, wherein the cathode module is provided with process gas inlets at both sides in the width direction of the door panel.

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