CN217738499U - Embedded capacitive sensitive chip - Google Patents
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- CN217738499U CN217738499U CN202221052599.XU CN202221052599U CN217738499U CN 217738499 U CN217738499 U CN 217738499U CN 202221052599 U CN202221052599 U CN 202221052599U CN 217738499 U CN217738499 U CN 217738499U
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Abstract
An embedded capacitive pressure sensitive chip belongs to the technical field of Micro Electro Mechanical Systems (MEMS), and particularly relates to a polar plate embedded capacitive pressure sensitive chip. The utility model provides a sensitive chip structure of embedded electric capacity. The utility model comprises a first polar plate (1), a second polar plate (2), a cavity (3) and a pressure sensing film (4), and is characterized in that the first polar plate (1) is connected with the pressure sensing film (4), and the cavity (3) is arranged between the first polar plate (1) and the second polar plate (2); in the process that the first polar plate (1) moves along with the pressure sensing film (4), the distance between the first polar plate (1) and the second polar plate (2) is unchanged, and the relative effective area is changed.
Description
Technical Field
The utility model belongs to the technical field of micro-electro-mechanical systems (MEMS), especially, relate to a polar plate embedding type capacitanc pressure sensitive chip.
Background
MEMS, a micro electro mechanical system, belongs to the advanced field of multidisciplinary intersection and is listed as one of five subversive technologies affecting future manufacturing industry. With the development of the micro-electro-mechanical system technology, the MEMS pressure sensor has become an indispensable key device in various industries, and is widely applied to the fields of consumer electronics, automotive electronics, aerospace, petrochemical industry, biomedicine, national defense war industry, and the like. The key core in the MEMS pressure sensor is a pressure sensitive chip, most of the current mainstream technologies are piezoresistive type and capacitive type, and compared with the piezoresistive type, the capacitive type pressure sensitive chip has the advantages of high sensitivity, low power consumption, good temperature characteristic and the like, is more suitable for developing a high-precision pressure sensor, and is in a research hotspot position in the MEMS field for a long time.
At present, the existing capacitive MEMS pressure-sensitive chip generally adopts a parallel plate capacitor structure, and mainly comprises a movable plate and a fixed plate, when pressure acts on the movable plate, the distance between the two plates changes, so that the capacitance changes, and the measurement of the pressure is realized by detecting the capacitance. The parallel plate capacitance calculation formula is:C=(ε 0 ε r A)/din the formula, epsilon 0 Is a fixed value for the vacuum dielectric constant;ε r is the relative dielectric constant of the dielectric between the electrode plates;Ais the opposite area between the electrode plates;dthe pitch of the electrode plates. The output capacitance can be known from the capacitance calculation formulaCDistance from polar platedIn an inverse proportional relation, the movable polar plate deforms under pressure to change the distance between the two polar plates, the point distance with the maximum deformation of the polar plates is minimum, the closer to the edge, the larger the distance is, the distance between the two polar plates is not distributed at equal intervals, and the nonlinearity between input and output is serious. Besides the capacitive pressure sensor chip, the capacitive pressure sensor also has a contact type capacitive pressure sensitive structure which also adopts a parallel plate capacitor structure, when the device is under the action of external pressure, the pressure sensitive upper polar plate can contact the dielectric layer on the lower polar plate, and at the moment, the output capacitance value can present an approximate linear relation with the pressure change, thereby improving the linearity of the common capacitive pressure sensor to a certain extent, but the essence of the working mode is the polar plate distancedAnd area directly opposite toASimultaneously change, so that the linear response region has smaller range and linearityFurther improvements are still needed.
To above problem, the utility model provides a novel capacitive pressure sensitive chip, this structure can keep electric capacity polar plate interval unchangeable, only just to the area through changing the plate electrodeAThe capacitance is changed, so that pressure measurement is realized, the working principle is completely different from non-contact and contact pressure sensor chips, and the input and output characteristic curve is greatly improved.
SUMMERY OF THE UTILITY MODEL
The utility model discloses just to above-mentioned problem, a sensitive chip structure of embedded electric capacity is provided.
In order to achieve the above purpose, the utility model adopts the following technical scheme, the utility model discloses a:
the pressure sensing device comprises a first polar plate (1), a second polar plate (2), a cavity (3) and a pressure sensing film (4), and is characterized in that the first polar plate (1) is connected with the pressure sensing film (4), and the cavity (3) is arranged between the first polar plate (1) and the second polar plate (2); in the process that the first polar plate (1) moves along with the pressure sensing film (4), the distance between the first polar plate (1) and the second polar plate (2) is unchanged, and the relative effective area is changed. (as shown in FIG. 1 and FIG. 2)
As a preferred scheme, the cavity (3) of the utility model is a sealed cavity. When the cavity (3) is not sealed, the pressure sensor can be used as an accelerometer for differential pressure measurement.
As another preferred scheme, the periphery of cavity (3) sets up substrate (6), the utility model film (4) set up in the upper end or the lower extreme of first polar plate (1).
As another preferred scheme, the utility model discloses film (4) set up the top in cavity (3).
As another preferred solution, the second plate (2) of the present invention is disposed on the upper side wall or the lower side wall of the cavity (3) (as shown in fig. 1 to 3).
As another preferred scheme, second polar plate (2) set up the lateral wall in one side of cavity (3), the lateral wall of cavity (3) relative with second polar plate (2) sets up third polar plate (5), pressure sensing film (4) set up the top at cavity (3), first polar plate (1) are connected and set up the lower extreme at pressure sensing film (4) with pressure sensing film (4), first polar plate (1) set up between second polar plate (2) and third polar plate (5), first polar plate (1) set up the upper portion at cavity (3), second polar plate (2), third polar plate (5) set up the lower part lateral wall or the upper portion lateral wall at cavity (3). In the process that the first polar plate (1) moves along with the pressure sensing film (4), the distance between the first polar plate (1) and the second polar plate (2) and the distance between the first polar plate (1) and the third polar plate (5) are not changed, and the relative effective area is changed. The first polar plate (1) and the second polar plate (2) form a variable capacitor C1, the first polar plate (1) and the third polar plate (5) form a variable capacitor C2, and the capacitors C1 and C2 are connected in parallel, so that the capacitance variation is increased, the sensitivity is improved, and the precision is improved. (as shown in figures 4, 5, 6).
As another preferred scheme, the pressure sensing film (4) of the present invention is disposed in the middle of the cavity (3), the cavity (3) is divided into an upper portion and a lower portion, the upper portion and the lower portion of the cavity (3) are conveniently distinguished, the pressure sensing film (4) is used as a boundary, the portion of the cavity (3) below the pressure sensing film (4) is referred to as a lower cavity (31), the portion of the cavity (3) above the pressure sensing film (4) is referred to as an upper cavity (71), the first plate (1) is disposed on the upper portion of the pressure sensing film (4) and connected to the pressure sensing film (4), the second plate (2) is disposed on the sidewall of the lower cavity (31), the lower cavity (31) is sealed, the upper cavity (71) is not sealed, when the pressure sensing film (4) deforms downward under pressure, the first plate (1) deforms downward, and the capacitance C1 formed by the first plate (1) and the second plate (2) increases, so as to measure the pressure; or a fourth polar plate (13) is arranged on the side wall of the upper cavity (71) and forms a capacitor C2 with the first polar plate (1), when the pressure-sensitive film (4) is pressed to deform downwards, the relative effective area of the polar plates is reduced by the capacitor C2, the value of the capacitor C2 is reduced, the relative effective area of the polar plates is increased by the capacitor C1 at the moment, the value of the capacitor C2 is increased, the capacitor C1 and the capacitor C2 can form a differential capacitor, the capacitance variation is increased, and common-mode signal interference is shielded (as shown in FIGS. 8, 9 and 11).
As another preferred scheme, the utility model discloses second polar plate (2) sets up in one side lateral wall lower part of cavity (3), the lateral wall lower part of cavity (3) relative with second polar plate (2) sets up third polar plate (5), the lateral wall upper portion of cavity (3) of second polar plate (2) place side sets up fourth polar plate (13), the lateral wall upper portion of cavity (3) of third polar plate (5) place side sets up fifth polar plate (15), set up insulating first dielectric layer (14) between second polar plate (2) and fourth polar plate (13), set up insulating first dielectric layer (14) between third polar plate (5) and fifth polar plate (15), pressure sensing film (4) sets up the top at cavity (3), first polar plate (1) is connected and sets up the lower extreme at pressure sensing film (4) with pressure sensing film (4), first polar plate (1) sets up between second polar plate (2) and third polar plate (5), first polar plate (1) sets up in the upper portion of cavity (3), first polar plate (1) and fourth polar plate (4) do not change the effective area, third polar plate (15) and third polar plate (1) do not change, the relative effective area varies. The first polar plate (1) and the fourth polar plate (13) form a variable capacitor C1, the first polar plate (1) and the fifth polar plate (15) form a variable capacitor C2, and the capacitors C1 and C2 are connected in parallel to form a capacitor C3; the first pole plate (1) and the second pole plate (2) form a variable capacitor C4, the first pole plate (1) and the third pole plate (5) form a variable capacitor C5, the capacitors C4 and C5 are connected in parallel to form a capacitor C6, the capacitors C3 and C6 form a differential capacitor, the capacitance variation is increased, and common-mode signal interference is shielded. Or the variable capacitor C1 and the variable capacitor C4 form a differential capacitor, the variable capacitor C2 and the variable capacitor C5 form a differential capacitor, and the capacitor C1, the capacitor C4 branch and the capacitor C2, the capacitor C5 branch form a full-bridge capacitor circuit, so that the capacitance variation is increased, and the common-mode signal interference is shielded. (as shown in fig. 12).
As another preferred scheme, pressure sensing film (4) set up the middle part at cavity (3), divide into two parts from top to bottom with cavity (3), for two parts about convenient differentiation cavity (3), use pressure sensing film (4) as the limit, the part of cavity (3) below pressure sensing film (4) is called lower part cavity (31), the part of cavity (3) above pressure sensing film (4) is called upper portion cavity (71), first polar plate (1) sets up the upper portion at pressure sensing film (4), and be connected with pressure sensing film (4), when the lateral wall face of cavity (3) is greater than 2 faces (such as cuboid cavity etc.), second polar plate (2) set up a lateral wall at cavity (3), the lateral wall of cavity (3) relative with the second polar plate sets up to third polar plate (5), or second polar plate (2) set up a lateral wall at upper portion cavity (71), the lateral wall of upper portion cavity (71) relative with second polar plate (2) sets up to third polar plate (5), lower part cavity (31) do not seal up to third polar plate (5), the sealed upper portion cavity (31) does not change the process cavity (1), the effective area of first polar plate (1) and the sealed area (5), third polar plate (1) does not change. When the pressure sensing film (4) is pressed to deform downwards, the second pole plate (2) and the third pole plate (5) are arranged on the side wall of the cavity (3), the first pole plate (1) and the second pole plate (2) form a variable capacitor C1 to be increased, the first pole plate (1) and the third pole plate (5) form a variable capacitor C2 to be increased, the capacitors C1 and C2 are connected in parallel, the capacitance variation is increased, the sensitivity is improved, and the precision is improved; when the pressure sensing film (4) is pressed to deform downwards, the second pole plate (2) and the third pole plate (5) are arranged on the side wall of the upper cavity (71), the first pole plate (1) and the second pole plate (2) form a variable capacitor C1 to be reduced, the first pole plate (1) and the third pole plate (5) form a variable capacitor C2 to be reduced, the capacitors C1 and C2 are connected in parallel, the capacitance variation is increased, the sensitivity is improved, and the precision is improved (as shown in figure 10).
As another preferred scheme, the pressure sensing film (4) of the present invention is disposed in the middle of the cavity (3), the cavity (3) is divided into an upper portion and a lower portion, the upper portion and the lower portion of the cavity (3) are conveniently distinguished, the pressure sensing film (4) is used as a boundary, the portion of the cavity (3) below the pressure sensing film (4) is referred to as a lower cavity (31), the portion of the cavity (3) above the pressure sensing film (4) is referred to as an upper cavity (71), the first electrode plate (1) is disposed on the upper portion of the pressure sensing film (4) and is connected to the pressure sensing film (4), when the side wall surface of the cavity (3) is greater than 2 surfaces (such as a rectangular cavity, etc.), the second electrode plate (2) is disposed on one side wall of the cavity (3), the side wall of the cavity (3) opposite to the second electrode plate is disposed as a third electrode plate (5), the side wall of the upper cavity (71) on the same side as the second electrode plate (2) is disposed with a fourth electrode plate (13), the side wall of the cavity (71) on the same side as the third electrode plate (5) is disposed with a fifth electrode plate (15), the fourth electrode plate (13) is disposed on the same side as the side, the lower electrode plate (1), the upper cavity (1), the lower electrode plate (13) is sealed with the first electrode plate (1), the first electrode plate (13), the fourth electrode plate (13), the third electrode plate (1), the upper electrode plate (15) and the third electrode plate (1), the upper electrode plate (15) is sealed with the same side, the upper electrode plate (15) and the same side, the upper electrode plate (1), the lower electrode plate (15) and the upper electrode plate (1), the first polar plate (1) and the fifth polar plate (15) form a variable capacitor C2 to be reduced, and the capacitors C1 and C2 are connected in parallel to form a capacitor C3; the distance between the first polar plate (1) and the second polar plate (2) and the distance between the third polar plate (5) are not changed, the relative effective area is increased, the first polar plate (1) and the second polar plate (2) form a variable capacitor C4 to be increased, the first polar plate (1) and the third polar plate (5) form a variable capacitor C5 to be increased, the capacitors C4 and C5 are connected in parallel to form a capacitor C6, the capacitors C3 and C6 form a differential capacitor, the capacitance variation is increased, and common-mode signal interference is shielded. Or the capacitor C1 and the capacitor C4 form a differential capacitor, the capacitor C2 and the capacitor C5 form a differential capacitor, and the capacitor C1, the capacitor C4 branch and the capacitor C2, the capacitor C5 branch form a full-bridge capacitor circuit, so that the capacitance variation is increased, and the common-mode signal interference is shielded. (as shown in fig. 13).
As a preferred scheme, set up thick dielectric layer (12) on second polar plate (2), third polar plate (5), fourth polar plate (13), fifth polar plate (15), can increase the electric capacity variation, improve sensitivity, improve the precision (as shown in fig. 14). A thick dielectric layer (12) is provided for increasing the capacitance value and increasing the capacitance variation. The thickness of dielectric layer is confirmed according to actual structure size range parameter, the utility model discloses each kind of structure all can improve the capacitance value with this method, improves the electric capacity variable quantity. The existing mainstream pole plate flat structure has the defect that the thickness of a dielectric layer cannot be too thick, otherwise, a capacitance pressure sensing pole plate has no deformation space. The utility model discloses the electric capacity polar plate of structure does not deform, and is unrestricted, as long as the polar plate contactless just can, what the structure deformed is the pressure sensing film.
In addition, the first polar plate (1) of the utility model is a cylinder or a cylinder with a closed lower end (namely, the lower end of the cylinder is provided with a polar plate (10) which increases the area of a capacitor polar plate and forms a capacitor with the bottom of the cavity (3), or a polyhedron with an open upper end and a closed lower end; the second polar plate (2) is a cylinder of the cavity (3) or a polyhedron with an upper end and a lower end opened in the hollow or a polyhedron with an upper end opened, the bottom of the cavity (3) is a polar plate (11), the polar plate (10) and the polar plate (11) form a capacitor C, and when the polar plate (1) is pressed to be lowered, the capacitor C is increased. (see fig. 1 and 7).
As another preferred scheme, the utility model discloses upper portion cavity (71) upper end is provided with apron (9), is provided with through-hole (8) on apron (9).
In addition, first polar plate (1), second polar plate (2), third polar plate (5), fourth polar plate (13), fifth polar plate (15) are connected with external circuit through pressure welding point and metal lead wire or pressure welding point respectively, all have insulating medium layer between pressure sensing film (4) and second polar plate (2), third polar plate (5), fourth polar plate (13), fifth polar plate (15), substrate (6), all have insulating medium layer between second polar plate (2), third polar plate (5), fourth polar plate (13), fifth polar plate (15) and substrate (6).
The utility model has the advantages of.
The utility model provides a capacitanc chip structure of brand-new type, in pressure sensing film (4) motion process was followed in first polar plate (1), the interval of first polar plate (1) and second polar plate (2) was unchangeable, and effective area changes relatively. The distance between the first polar plate (1) and the second polar plate (2) is unchanged, the dielectric constant between the first polar plate (1) and the second polar plate (2) is fixed, and the capacitance C is only in direct proportion to the relative effective areas of the first polar plate (1) and the second polar plate (2). Therefore, the utility model discloses a capacitance output characteristic curve is very good, requires simply to the conditioning circuit, does not need logic circuit to revise, and the precision is high moreover, and overload capacity is strong, sensitivity is high, more is fit for the pressure measurement of high accuracy.
Drawings
The present invention will be further described with reference to the accompanying drawings and the following detailed description. The scope of protection of the present invention is not limited to the following description.
Fig. 1 is a schematic structural diagram of embodiment 1 of the present invention.
Fig. 2 is a schematic structural section view of embodiment 1 of the present invention.
In fig. 1 and 2, the cylinder JCKD is the first electrode plate 1, the cylinder EA 'B' F is the second electrode plate 2, and the circle OAB is the thin film 4.
Fig. 3 is a schematic cross-sectional view of the structure of embodiment 1 of the present invention in which the second plate is disposed at the upper portion.
Fig. 4 is a schematic structural view of embodiment 2 of the present invention.
In fig. 4, the a 'B' C 'D' plane is the first electrode plate 1, the kehl plane is the second electrode plate 2, the mfgn plane is the third electrode plate 5, and the abcd plane is the film 4.
Fig. 5 is a schematic structural sectional view of embodiment 2 of the present invention. .
Fig. 6 is a schematic cross-sectional view of the structure of the second electrode plate and the third electrode plate disposed on the upper portion in the structure of embodiment 2 of the present invention.
Fig. 7 is a schematic structural view of embodiment 3 of the present invention.
Fig. 8 is a schematic structural view of embodiment 4 of the present invention.
Fig. 9 is a schematic sectional structure diagram according to embodiment 4 of the present invention.
Fig. 10 is a schematic sectional structure diagram according to embodiment 5 of the present invention.
Fig. 11 is a schematic cross-sectional view of embodiment 6 of the present invention.
Fig. 12 is a schematic sectional view of embodiment 7 of the present invention.
Fig. 13 is a schematic cross-sectional view of embodiment 8 of the present invention.
Fig. 14 is a schematic structural diagram of the cross section of the thick dielectric layer provided on the electrode plate of the present invention.
Fig. 15 is a graph of simulation output characteristics according to embodiment 2 of the present invention.
Description of the reference numerals:
1. the structure comprises a first polar plate, 2, a second polar plate, 3, a cavity, 4, a film, 5, a third polar plate, 6, a substrate, 8, a through hole, 9, a cover plate, 10, a sixth polar plate, 11, a seventh polar plate, 12, a dielectric layer, 13, a fourth polar plate, 14, a dielectric layer, 15, a fifth polar plate, 31, a lower cavity and 71, an upper cavity.
Detailed Description
As shown in the figure, the utility model discloses a first polar plate (1) and second polar plate (2), first polar plate (1) are connected with film (4), are cavity (3) between first polar plate (1) and second polar plate (2).
As shown in fig. 1 and 3, a cylindrical groove (groove side wall is the second polar plate (2)) is arranged on a substrate (6), a film (4) is arranged at the top of the groove, the film (4) and the groove form a cavity (3), a cylinder is connected below the film (4), the side wall of the cylinder is the first polar plate (1), the side wall of the lower half part of the cavity (3) is the second polar plate (2) (aiming at the structure of fig. 1 and 2), the cavity (3) is sealed, when the film (4) is pressed to be increased, the film (4) can be deformed downwards, at the moment, the cylinder connected below the film (4) (namely the first polar plate (1)) moves downwards, and the relative effective areas of the first polar plate (1) and the second polar plate (2) are increased. According to the capacitance calculation principle, the capacitance value is in direct proportion to the area of the polar plates, namely the capacitance value C formed by the first polar plate (1) and the second polar plate (2) is in direct proportion to the relative effective areas of the first polar plate (1) and the second polar plate (2), when the film (4) is pressed to be increased, the capacitance C is increased, and when the film (4) is pressed to be reduced, the capacitance C is reduced. The utility model discloses can keep the interval between first polar plate (1) and second polar plate (2) unchangeable, dielectric constant between first polar plate (1) and second polar plate (2) is fixed, and electric capacity C only is directly proportional with the relative effective area of first polar plate (1) and second polar plate (2), the utility model discloses an electric capacity output characteristic curve is very good, and is simple to the conditioning circuit requirement, does not need logic circuit to revise, and the precision is high moreover, and sensitivity is high, more is fit for the ressure measurement of high accuracy.
As shown in fig. 2, the second plate (2) is in the lower half of the cavity (3).
As shown in fig. 3, the second plate (2) is located in the upper half of the cavity (3), when the film (4) is pressed and increased, the film (4) is deformed downwards when the film (4) is pressed and increased, and at this time, the first plate (1) connected below the film (4) moves downwards, and the relative effective area of the first plate (1) and the second plate (2) is reduced. According to the capacitance calculation principle, the capacitance value is in direct proportion to the area of the polar plates, namely the capacitance value C formed by the first polar plate (1) and the second polar plate (2) is in direct proportion to the relative effective areas of the first polar plate (1) and the second polar plate (2), when the film (4) is pressed to be increased, the capacitance C is reduced, and when the film (4) is pressed to be reduced, the capacitance C is increased. The utility model discloses can keep the interval between first polar plate (1) and second polar plate (2) unchangeable, dielectric constant between first polar plate (1) and second polar plate (2) is fixed, and electric capacity C only is directly proportional with the relative effective area of first polar plate (1) and second polar plate (2), the utility model discloses an electric capacity output characteristic curve is very good, and is simple to the conditioning circuit requirement, does not need logic circuit to revise, and the precision is high moreover, and sensitivity is high, more is fit for the ressure measurement of high accuracy.
As shown in fig. 4, a rectangular groove is formed in a substrate (6), a thin film (4) is arranged at the top of the groove, the thin film (4) and the groove form a cavity (3), the cavity (3) is sealed, the lower half portions of two opposite side walls of the cavity (3) are respectively a second polar plate (2) and a third polar plate (5), a rectangular vertical first polar plate (1) is connected with the lower portion of the thin film (4), the upper end of the first polar plate (1) is connected with the thin film (4), the first polar plate (1) is arranged between the second polar plate (2) and the third polar plate (5), the first polar plate (1) is connected with an electric signal with a first polarity, the second polar plate (2) and the third polar plate (5) are connected with an electric signal with a first polarity, the first polar plate (1) and the second polar plate (2) form a capacitor C1, the first polar plate (1) and the third polar plate (5) form a capacitor C2, and the capacitor C1 and the capacitor C2 are equivalently connected in parallel to form a capacitor C2. When the film (4) is pressed and increased, the film (4) deforms downwards, the first pole plate (1) connected with the lower portion of the film (4) moves downwards at the moment, the relative effective areas of the first pole plate (1) and the second pole plate (2) are increased, meanwhile, the relative effective areas of the first pole plate (1) and the third pole plate (5) are also increased, and according to the capacitance calculation principle, the capacitance value is in direct proportion to the pole plate area, namely the capacitance value C1 formed by the first pole plate (1) and the second pole plate (2) is in direct proportion to the relative effective areas of the first pole plate (1) and the second pole plate (2), the capacitance value C2 formed by the first pole plate (1) and the third pole plate (5) is in direct proportion to the relative effective areas of the first pole plate (1) and the third pole plate (5), when the film (4) is pressed and increased, the capacitances C1 and C2 are increased, the capacitance C is increased, when the film (4) is pressed and decreased, the capacitances C1 and C2 are both decreased, and the capacitance C is decreased. The utility model discloses can keep the interval between first polar plate (1) and second polar plate (2) unchangeable, keep the interval between first polar plate (1) and third polar plate (5) also unchangeable simultaneously, dielectric constant between first polar plate (1) and second polar plate (2), third polar plate (5) is fixed, electric capacity C1, C2 only with the relative effective area of first polar plate (1) and second polar plate (2) directly proportional, the utility model discloses an electric capacity output characteristic curve is very good, and the precision is high, and sensitivity is high, and the overload capacity is strong, more is fit for the ressure measurement of high accuracy. According to the structure, the design range is 5-15 Mpa, and the specific parameters are as follows: first polar plate (1) length 550um, height 100um, pressure sensing film (4) length 1200 meshes, wide 22um, thick 1um, polar plate interval 1um, the output characteristic simulation curve who reachs. As shown in fig. 15, it can be seen that the output characteristic curve is a straight line, which is very advantageous in that it is simple for the requirement of the regulator circuit, and it does not need to modify the logic circuit.
As shown in fig. 5, the second polar plate (2) and the third polar plate (5) are in the lower half of the cavity (3). Fig. 5 is a cross-sectional view of fig. 4.
As shown in fig. 6, a rectangular groove is formed in a substrate (6), a thin film (4) is arranged on the top of the groove, the thin film (4) and the groove form a cavity (3), the cavity (3) is sealed, the upper half parts of two opposite side walls of the cavity (3) are respectively a second polar plate (2) and a third polar plate (5), a rectangular first polar plate (1) is connected below the thin film (4), and the upper end of the first polar plate (1) is connected with the thin film (4); first polar plate (1) is erect and is put between second polar plate (2) and third polar plate (5), and first polar plate (1) leads to the first polarity signal of telecommunication, and second polar plate (2) and third polar plate (5) lead to the signal of telecommunication opposite with first polarity, and first polar plate (1) and second polar plate (2) form electric capacity C1, and first polar plate (1) and third polar plate (5) form electric capacity C2, are parallelly connected electric capacity C1 and electric capacity C2 and are equivalent to electric capacity C. When the film (4) is pressed to be increased, the film deforms downwards, the first pole plate (1) connected below the film moves downwards, the relative effective areas of the first pole plate (1) and the second pole plate (2) are reduced, meanwhile, the relative effective areas of the first pole plate (1) and the third pole plate (5) are also reduced, according to the capacitance calculation principle, the capacitance value is in direct proportion to the pole plate areas, namely the capacitance value C1 formed by the first pole plate (1) and the second pole plate (2) is in direct proportion to the relative effective areas of the first pole plate (1) and the second pole plate (2), the capacitance value C2 formed by the first pole plate (1) and the third pole plate (5) is in direct proportion to the relative effective areas of the first pole plate (1) and the third pole plate (5), when the film (4) is pressed to be increased, the capacitances C1 and C2 are both reduced, the capacitance C is reduced, and when the film (4) is pressed to be reduced, the capacitances C1 and C2 are both increased. The utility model discloses can keep the interval between first polar plate (1) and second polar plate (2) unchangeable, keep the interval between first polar plate (1) and third polar plate (5) also unchangeable simultaneously, dielectric constant between first polar plate (1) and second polar plate (2), third polar plate (5) is fixed, electric capacity C1, C2 only with the relative effective area of first polar plate (1) and second polar plate (2) directly proportional, the utility model discloses an electric capacity output characteristic curve is very good, and the precision is high moreover, and sensitivity is high, more is fit for the pressure measurement of high accuracy small-scale.
As shown in fig. 7, a hexahedral groove is formed in a substrate (6), a film (4) is arranged at the top of the groove, the film (4) and the groove form a cavity (3), a square cylinder is connected below the film (4), the side walls of the square cylinder are first polar plates (1) (4 side walls can be polar plates (1)), the side walls of the lower half part of the cavity (3) are second polar plates (2) (4 side wall lower parts can be polar plates (2)), the cavity (3) is sealed, when the film (4) is pressed to be increased, the film deforms downwards, at the moment, the square cylinder connected below the film, namely the first polar plate (1), moves downwards, and the relative effective areas of the first polar plate (1) and the second polar plate (2) are increased. According to the capacitance calculation principle, the capacitance value is in direct proportion to the area of the polar plates, namely the capacitance value C formed by the first polar plate (1) and the second polar plate (2) is in direct proportion to the relative effective areas of the first polar plate (1) and the second polar plate (2), when the film (4) is pressed to be increased, the capacitance C is increased, and when the film (4) is pressed to be reduced, the capacitance C is reduced. The utility model discloses can keep the interval between first polar plate (1) and second polar plate (2) unchangeable, dielectric constant between first polar plate (1) and second polar plate (2) is fixed, and electric capacity C only is directly proportional with the relative effective area of first polar plate (1) and second polar plate (2), the utility model discloses an electric capacity output characteristic curve is very good, and it is simple to require the conditioning circuit, does not need logic circuit to revise, and the precision is high moreover, and sensitivity is high, more is fit for the pressure measurement of high accuracy.
As shown in fig. 8, a cylindrical recess, i.e., a cavity (3), is formed in a substrate (6), a pressure-sensitive film (4) is disposed in the middle of the recess cavity (3), the cavity (3) is divided into an upper portion and a lower portion, the upper portion and the lower portion of the cavity (3) are distinguished conveniently by using the pressure-sensitive film (4) as a boundary, the portion of the cavity (3) below the pressure-sensitive film (4) is called a lower cavity (31), the portion of the cavity (3) above the pressure-sensitive film (4) is called an upper cavity (71), the upper end of the upper cavity (71) is open, a hollow cylinder is connected above the film (4), and the lower end of the cylinder is connected with the film (4); the side wall of the cylinder is a first polar plate (1), the side wall of the cavity (31) is a second polar plate (2), and the cavity (3) is sealed. When the film (4) is pressed and increased, the film deforms downwards, at the moment, the cylinder connected above the film, namely the first polar plate (1), moves downwards, and the relative effective area of the first polar plate (1) and the second polar plate (2) is increased. According to the capacitance calculation principle, the capacitance value is in direct proportion to the area of the polar plates, namely the capacitance value C formed by the first polar plate (1) and the second polar plate (2) is in direct proportion to the relative effective areas of the first polar plate (1) and the second polar plate (2), when the film (4) is pressed to be increased, the capacitance C is increased, and when the film (4) is pressed to be reduced, the capacitance C is reduced. The utility model discloses can keep the interval between first polar plate (1) and second polar plate (2) unchangeable, dielectric constant between first polar plate (1) and second polar plate (2) is fixed, and electric capacity C only is directly proportional with the relative effective area of first polar plate (1) and second polar plate (2), the utility model discloses an electric capacity output characteristic curve is very good, and it is simple to require the conditioning circuit, does not need logic circuit to revise, and the precision is high moreover, and sensitivity is high, more is fit for the pressure measurement of high accuracy.
As shown in fig. 9, the second plate (2) is on the sidewall of the cavity (3) and the first plate (1) is on top of the membrane (4).
As shown in fig. 10, a cuboid-shaped groove, namely a cavity (3), is arranged on a substrate (6), a pressure-sensitive film (4) is arranged in the middle of the groove cavity (3), the cavity (3) is divided into an upper part and a lower part, in order to conveniently distinguish the upper part and the lower part of the cavity (3), the pressure-sensitive film (4) is taken as a boundary, the part of the cavity (3) below the pressure-sensitive film (4) is called a lower cavity (31), the part of the cavity (3) above the pressure-sensitive film (4) is called an upper cavity (71), the cavity (31) is sealed, the film (4) and the upper part of the groove form an upper cavity (71), two opposite side walls of the cavity (31) are respectively a second plate (2) and a third plate (5), a rectangular first plate (1) is connected with the upper part of the film (4), the first plate (1) is arranged between the second plate (2) and the third plate (5), the first plate (1) is connected with an electric signal, the second plate (2) and the third plate (5), the third plate (2) are connected with a rectangular first plate (1), the first plate (1) and the third plate (5), the third plate (2) are connected with an electric signal, the first plate (2) and a capacitor (C2) in parallel, the third plate (2) are connected with a capacitor (C1), and a capacitor (C2) to form an equivalent capacitor, and a capacitor (C2) are connected with the third plate (C2) in parallel, and C2). When the film (4) is pressed to be increased, the film deforms downwards, the first pole plate (1) connected with the upper portion of the film moves downwards, the relative effective areas of the first pole plate (1) and the second pole plate (2) are increased, meanwhile, the relative effective areas of the first pole plate (1) and the third pole plate (5) are also increased, and according to the principle of capacitance calculation, the capacitance value is in direct proportion to the pole plate area, namely the capacitance value C1 formed by the first pole plate (1) and the second pole plate (2) is in direct proportion to the relative effective areas of the first pole plate (1) and the second pole plate (2), the capacitance value C2 formed by the first pole plate (1) and the third pole plate (5) is in direct proportion to the relative effective areas of the first pole plate (1) and the third pole plate (5), when the film (4) is pressed to be increased, the capacitances C1 and C2 are increased, the capacitance C is increased, when the film (4) is pressed to be decreased, the capacitances C1 and C2 are both decreased, and the capacitance C is decreased. The utility model discloses can keep the interval between first polar plate (1) and second polar plate (2) unchangeable, keep the interval between first polar plate (1) and third polar plate (5) also unchangeable simultaneously, dielectric constant between first polar plate (1) and second polar plate (2), third polar plate (5) is fixed, electric capacity C1, C2 only with the relative effective area proportional of first polar plate (1) and second polar plate (2), the utility model discloses an electric capacity output characteristic curve is very good, requires simply to the conditioning circuit, does not need logic circuit to revise, and the precision is high moreover, and sensitivity is high, more is fit for the pressure measurement of the little range of high accuracy. A cover plate (9) can be arranged at the upper end of the upper cavity (71) (the cover plate (9) can be arranged at the upper end of the upper cavity (71) by adopting a bonding process), and a through hole (8) is arranged on the cover plate (9) (the hole can be punched by adopting an etching process).
As shown in fig. 11, the pressure-sensitive film (4) is disposed in the middle of the cavity (3), the cavity (3) is divided into an upper portion and a lower portion, in order to distinguish the upper portion and the lower portion of the cavity (3), the pressure-sensitive film (4) is used as a boundary, the portion of the cavity (3) below the pressure-sensitive film (4) is referred to as a lower cavity (31), the portion of the cavity (3) above the pressure-sensitive film (4) is referred to as an upper cavity (71), the first electrode plate (1) is disposed on the upper portion of the pressure-sensitive film (4) and connected to the pressure-sensitive film (4), the second electrode plate (2) is disposed on the sidewall of the lower cavity (31), the lower cavity (31) is sealed, the upper cavity (71) is not sealed, the sidewall of the upper cavity (71) is provided with the fourth electrode plate (13), the capacitor C2 is formed with the first electrode plate (1), when the pressure-sensitive film (4) deforms downward, the capacitor C2 decreases the relative effective area, the value of the capacitor C2 decreases, the capacitor C2 value decreases, the capacitor C1 increases the relative effective area, the capacitor C2 value increases, the differential capacitance and the common mode signal interference can be shielded, and the common mode signal interference can be increased.
As shown in fig. 12, the cavity (3) is a cuboid, the second plate (2) is disposed on the lower portion of one side wall of the cavity (3), the lower portion of the side wall of the cavity (3) opposite to the second plate is disposed as the third plate (5), the upper portion of the side wall of the cavity (3) where the second plate (2) is disposed as the fourth plate (13), the upper portion of the side wall of the cavity (3) where the third plate (5) is disposed as the fifth plate (15), an insulating first dielectric layer (14) is disposed between the third plate (5) and the fifth plate (15), the pressure sensing film (4) is disposed on the top of the cavity (3), the first plate (1) is connected with the pressure sensing film (4) and disposed on the lower end of the pressure sensing film (4), the first plate (1) is disposed between the second plate (2) and the third plate (5), the first plate (1) is disposed on the upper portion of the cavity (3), the first plate (1) does not change the area when the first plate (1) moves relative to the fourth plate (1), the third plate (13) does not change the effective area when the third plate (1) moves relative to the third plate (15), the relative effective area varies. The first polar plate (1) and the fourth polar plate (13) form a variable capacitor C1, the first polar plate (1) and the fifth polar plate (15) form a variable capacitor C2, and the capacitors C1 and C2 are connected in parallel to form a capacitor C3; the first pole plate (1) and the second pole plate (2) form a variable capacitor C4, the first pole plate (1) and the third pole plate (5) form a variable capacitor C5, the capacitors C4 and C5 are connected in parallel to form a capacitor C6, the capacitors C3 and C6 form a differential capacitor, the capacitance variation is increased, and common-mode signal interference is shielded. Or the variable capacitor C1 and the variable capacitor C4 form a differential capacitor, the variable capacitor C2 and the variable capacitor C5 form a differential capacitor, and the capacitor C1, the capacitor C4 branch and the capacitor C2, the capacitor C5 branch form a full-bridge capacitor circuit, so that the capacitance variation is increased, and the common-mode signal interference is shielded.
As shown in fig. 13, the pressure sensing film (4) is disposed in the middle of the cavity (3), the cavity (3) is divided into an upper portion and a lower portion, for conveniently distinguishing the upper portion and the lower portion of the cavity (3), the pressure sensing film (4) is used as a boundary, the portion of the cavity (3) below the pressure sensing film (4) is referred to as a lower cavity (31), the portion of the cavity (3) above the pressure sensing film (4) is referred to as an upper cavity (71), the first electrode plate (1) is disposed on the upper portion of the pressure sensing film (4) and connected to the pressure sensing film (4), the cavity (3) is rectangular, the second electrode plate (2) is disposed on one side wall of the cavity (3), the side wall of the cavity (3) opposite to the second electrode plate is set as a third electrode plate (5), the side wall of the upper cavity (71) on the same side as the second electrode plate (2) is provided with a fourth electrode plate (13), the side wall of the upper cavity (71) on the same side as the third electrode plate (5) is provided with a fifth electrode plate (15), the lower cavity (31) is not sealed, the upper cavity (71), when the pressure sensing film (1) is not deformed, the first electrode plate (1), the effective area of the fourth electrode plate (13) is reduced, and the effective area of the first electrode plate (1) is reduced, the first polar plate (1) and the fifth polar plate (15) form a variable capacitor C2 to be reduced, and the capacitors C1 and C2 are connected in parallel to form a capacitor C3; the distance between the first pole plate (1) and the second pole plate (2) and the distance between the third pole plate (5) are unchanged, the relative effective area is increased, the variable capacitor C4 is formed by the first pole plate (1) and the second pole plate (2) to be increased, the variable capacitor C5 is formed by the first pole plate (1) and the third pole plate (5) to be increased, the capacitors C4 and C5 are connected in parallel to form a capacitor C6, the capacitors C3 and the capacitors C6 form a differential capacitor, the capacitance variation is increased, and common-mode signal interference is shielded. Or the capacitor C1 and the capacitor C4 form a differential capacitor, the capacitor C2 and the capacitor C5 form a differential capacitor, and the capacitor C1, the capacitor C4 branch and the capacitor C2, the capacitor C5 branch form a full-bridge capacitor circuit, so that the capacitance variation is increased, and the common-mode signal interference is shielded. (as shown in fig. 13).
The utility model discloses the chip uses vertically to give first place to, and chip area can reach the utmost optimization, under the condition of equal capacitance variation volume, saves chip area by a wide margin.
The utility model discloses can adopt following process steps:
a. and cleaning the silicon substrate.
b. A cavity (3) is etched in the substrate silicon.
c. A layer of silicon dioxide is oxidized.
d. And depositing polysilicon in the cavity (3).
e. And etching off the polysilicon at the bottom of the cavity (3).
f. A layer of silicon dioxide is oxidized.
g. And cleaning the second silicon wafer.
h. And etching the polar plate (1) on the second silicon wafer.
i. And (3) the etched surface of the second silicon wafer faces downwards, and the second silicon wafer is bonded with the silicon substrate, and the first polar plate (1) is aligned to the cavity (3).
j. And thinning the second silicon wafer to the thickness required by the pressure sensing film (4).
k. The shape of the pressure-sensitive film is etched.
l, etching the lead hole.
Depositing aluminum wire.
The utility model provides an embedded capacitive sensitive chip can be arranged in consumer electronics, automotive electronics, industry to observe and control, medical electronics, aerospace and national defense military project etc. a plurality of fields absolute pressure and the measurement of differential pressure. The utility model discloses pressure sensitive chip has advantages such as sensitivity height, linearity are good, linear range scope is big, temperature drift is little, the overload capacity is strong, manufacturing process and integrated circuit technology are compatible, requires simply the conditioning circuit, does not need logic circuit to revise, is particularly suitable for developing high accuracy pressure sensor.
The utility model discloses can be applied to pressure measurement, silicon microphone, accelerometer, flowmeter etc. And a second dielectric layer (12) is arranged on the second polar plate (2), the third polar plate (5), the fourth polar plate (13) and the fifth polar plate (15).
It should be understood that the above detailed description of the present invention is only used for illustrating the present invention and not limited to the technical solutions described in the embodiments of the present invention, and it should be understood by those skilled in the art that the present invention can be modified or replaced with equivalent ones to achieve the same technical effects; as long as the use requirement is satisfied, the utility model is within the protection scope.
Claims (10)
1. The embedded capacitive sensitive chip comprises a first polar plate (1), a second polar plate (2), a cavity (3) and a pressure sensing film (4), and is characterized in that the first polar plate (1) is connected with the pressure sensing film (4), and the cavity (3) is arranged between the first polar plate (1) and the second polar plate (2); in the process that the first polar plate (1) moves along with the pressure sensing film (4), the distance between the first polar plate (1) and the second polar plate (2) is unchanged, and the relative effective area is changed.
2. The embedded capacitive sensor chip according to claim 1, wherein the cavity (3) is a sealed cavity;
a substrate (6) is arranged on the periphery of the cavity (3); the film (4) is arranged at the top end of the cavity (3);
the film (4) is arranged at the upper end or the lower end of the first polar plate (1);
the second polar plate (2) is arranged on the upper side wall or the lower side wall of the cavity (3).
3. The embedded capacitive sensor chip of claim 1, wherein the second plate (2) is disposed on a side wall of the cavity (3), the side wall of the cavity (3) opposite to the second plate (2) is disposed with a third plate (5), the pressure sensing film (4) is disposed on the top of the cavity (3), the first plate (1) is connected to the pressure sensing film (4) and disposed at the lower end of the pressure sensing film (4), the first plate (1) is disposed between the second plate (2) and the third plate (5), the first plate (1) is disposed on the upper portion of the cavity (3), and the second plate (2) and the third plate (5) are disposed on the lower side wall or the upper side wall of the cavity (3); in the process that the first polar plate (1) moves along with the pressure sensing film (4), the distance between the first polar plate (1) and the second polar plate (2) and the distance between the first polar plate and the third polar plate (5) are not changed, and the relative effective area is changed.
4. The embedded capacitive sensor chip of claim 1, wherein the pressure sensing film (4) is disposed in the middle of the cavity (3) to divide the cavity (3) into an upper portion and a lower portion; the part of the cavity (3) below the pressure sensing film (4) is a lower cavity (31), the part of the cavity (3) above the pressure sensing film (4) is an upper cavity (71), the first polar plate (1) is arranged on the upper part of the pressure sensing film (4) and is connected with the pressure sensing film (4), the second polar plate (2) is arranged on the side wall of the cavity (3), the lower cavity (31) is sealed, and the upper cavity (71) is not sealed.
5. The embedded capacitive sensor chip of claim 4, wherein a fourth plate (13) is disposed on a sidewall of the upper cavity (71), and the fourth plate (13) and the first plate (1) form a capacitor C2.
6. The embedded capacitive sensor chip of claim 1, wherein the second plate (2) is disposed on a lower portion of a sidewall of one side of the cavity (3), a third plate (5) is disposed on a lower portion of a sidewall of the cavity (3) opposite to the second plate (2), a fourth plate (13) is disposed on an upper portion of a sidewall of the cavity (3) on the side of the second plate (2), a fifth plate (15) is disposed on an upper portion of a sidewall of the cavity (3) on the side of the third plate (5), an insulating first dielectric layer (14) is disposed between the second plate (2) and the fourth plate (13), an insulating first dielectric layer (14) is disposed between the third plate (5) and the fifth plate (15), the pressure sensing film (4) is disposed on the top of the cavity (3), the first plate (1) is connected to the pressure sensing film (4) and disposed on a lower end of the pressure sensing film (4), the first plate (1) is disposed between the second plate (2) and the third plate (5), and the first plate (1) is disposed on an upper portion of the cavity (3); in the process that the first polar plate (1) moves along with the pressure sensing film (4), the distance between the first polar plate (1) and the fourth polar plate (13) and the distance between the first polar plate and the fifth polar plate (15) are not changed, and the relative effective area is changed; the distance between the first polar plate (1) and the second polar plate (2) and the distance between the first polar plate and the third polar plate (5) are not changed, and the relative effective area is changed.
7. The embedded capacitive sensor chip of claim 1, wherein the pressure sensing film (4) is disposed in the middle of the cavity (3), the cavity (3) is divided into an upper portion and a lower portion by the film (4), the portion of the cavity (3) below the pressure sensing film (4) is a lower cavity (31), and the portion of the cavity (3) above the pressure sensing film (4) is an upper cavity (71); the first polar plate (1) is arranged on the upper part of the pressure sensing film (4) and is connected with the pressure sensing film (4);
the second polar plate (2) is arranged on the side wall of one side of the lower cavity (31), and the side wall of the lower cavity (31) opposite to the second polar plate is provided with a third polar plate (5); or the second polar plate (2) is arranged on one side wall of the upper cavity (71), and the side wall of the upper cavity (71) opposite to the second polar plate (2) is provided with the third polar plate (5);
the lower cavity (31) is sealed, the upper cavity (71) is not sealed, and in the process that the first polar plate (1) moves along with the pressure sensing film (4), the distance between the first polar plate (1) and the second polar plate (2) and the distance between the first polar plate (1) and the third polar plate (5) are unchanged, and the relative effective area is changed.
8. The embedded capacitive sensor chip according to claim 1, wherein the pressure sensing film (4) is disposed in the middle of the cavity (3) to divide the cavity (3) into an upper cavity (31) and a lower cavity (3), the portion of the cavity (3) below the pressure sensing film (4) is the lower cavity (31), the portion of the cavity (3) above the pressure sensing film (4) is the upper cavity (71), and the first electrode plate (1) is disposed above the pressure sensing film (4) and connected to the pressure sensing film (4);
the second polar plate (2) is arranged on the side wall of one side of the lower cavity (31), the side wall of the lower cavity (31) opposite to the second polar plate (2) is provided with a third polar plate (5), the side wall of the upper cavity (71) on the same side of the second polar plate (2) is provided with a fourth polar plate (13), the side wall of the upper cavity (71) on the same side of the third polar plate (5) is provided with a fifth polar plate (15), the cavity (3) is sealed, and the upper cavity (71) is not sealed.
9. The embedded capacitive sensor chip according to claim 1, 2, 3, 4, 5, 6, 7, or 8, wherein the second dielectric layer (12) is disposed on the second plate (2), the third plate (5), the fourth plate (13), and the fifth plate (15).
10. The embedded capacitive sensor chip according to claim 1, wherein the first plate (1) and the second plate (2) are cylinders, the bottom of the second plate (2) is a seventh plate (11), the bottom of the first plate (1) is a sixth plate (10), and the sixth plate (10) and the seventh plate (11) form a capacitor C.
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| CN202221052599.XU CN217738499U (en) | 2022-05-05 | 2022-05-05 | Embedded capacitive sensitive chip |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202221052599.XU CN217738499U (en) | 2022-05-05 | 2022-05-05 | Embedded capacitive sensitive chip |
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