CN217621503U - Crystal bar bearing device - Google Patents

Crystal bar bearing device Download PDF

Info

Publication number
CN217621503U
CN217621503U CN202221040897.7U CN202221040897U CN217621503U CN 217621503 U CN217621503 U CN 217621503U CN 202221040897 U CN202221040897 U CN 202221040897U CN 217621503 U CN217621503 U CN 217621503U
Authority
CN
China
Prior art keywords
bearing
groove
rod
crystal bar
clamping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202221040897.7U
Other languages
Chinese (zh)
Inventor
曾贵州
周铁军
唐勇
卿德武
陈章水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Vital Micro Electronics Technology Co Ltd
Original Assignee
Guangdong Vital Micro Electronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Vital Micro Electronics Technology Co Ltd filed Critical Guangdong Vital Micro Electronics Technology Co Ltd
Priority to CN202221040897.7U priority Critical patent/CN217621503U/en
Application granted granted Critical
Publication of CN217621503U publication Critical patent/CN217621503U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model discloses a crystal bar bears device replaces artifical bearing crystal bar, reduces intensity of labour, guarantees the normal clear of wafer production, its technical scheme: the device comprises a bearing plate, wherein a placing groove is arranged on the bearing plate, a bearing seat is placed in the placing groove, a bearing groove is arranged on the bearing seat, and the bearing groove is matched with the shape of an external crystal bar; the bearing plate is driven by a first driving assembly to be close to or far away from an external cutting device, and belongs to the field of crystal bar processing.

Description

Crystal bar bearing device
Technical Field
The utility model belongs to crystal bar processing field more specifically relates to a crystal bar bears device.
Background
In the prior art, the preparation of the wafer is realized by cutting the crystal bar, and in practical application, the process of cutting the crystal bar to form the wafer is as follows: firstly, adhering a crystal bar on a resin substrate, and adhering the resin substrate on a crystal support; fixing the crystal support on a cutting machine, and cutting the crystal bar into a plurality of wafers in a wire cutting mode;
the cut crystal bars are still adhered to the resin substrate, the resin substrate needs to be further cut, so that the wafers are separated one by one, a part of the resin substrate is adhered to the separated single wafer, and finally the single wafer is separated from the resin substrate through a degumming process.
In the prior art, a resin substrate is cut by wire sawing to separate a plurality of wafers one by one, and during the cutting process, the cut wafer is generally supported by a hand, and the specific process is as follows: padding a sponge at the bottom of the crystal bar, and supporting the crystal bar in a manner of supporting the sponge by hands so as to bear the cut wafer;
the prior art has the defects that the cut wafers are received in a manual operation mode, the labor intensity is high, and the wafers fall off due to volatile errors.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a crystal bar bears device replaces artifical bearing crystal bar, reduces intensity of labour, guarantees the normal clear of wafer production.
According to a first aspect of the utility model, a crystal bar bearing device is provided, which comprises a bearing plate, wherein a placing groove is arranged on the bearing plate, a bearing seat is arranged in the placing groove, a bearing groove is arranged on the bearing seat, and the bearing groove is matched with the shape of an external crystal bar; the bearing plate can be close to or far away from the external cutting device through the driving of a first driving assembly.
The utility model discloses a specific embodiment still includes the holding rod, the holding rod is rotated through a second drive assembly drive in order to with peripheral hardware crystal bar centre gripping on the bearing groove.
In a specific embodiment of the present invention, both ends of the bearing groove in the length direction are open ends; the device also comprises 2 clamping plates for limiting the external crystal bars in the bearing grooves; the clamping plates are arranged on the bearing seat through an adjusting structure, so that the distance between every two clamping plates is adjustable.
In a specific embodiment of the present invention, the adjusting structure includes a mounting hole disposed on the carrying seat, the mounting hole extends along a length direction of the carrying groove; the clamping device also comprises a mounting rod arranged on the clamping plate, and the mounting rod is connected in the mounting hole in a sliding manner and can be locked by a locking piece;
the clamping plate is connected with the mounting rod through a connecting rod, and the mounting hole is communicated with the bearing groove so that the connecting rod can penetrate through the mounting hole.
In a specific embodiment of the present invention, the number of the mounting holes is 2, which are respectively disposed on both sides of the length direction of the carrying groove, and one of the mounting holes is used for mounting one of the clamping plates.
In a specific embodiment of the present invention, a soft cushion layer is disposed on the bearing groove.
In a specific embodiment of the present invention, the carrying seat is further provided with a carrying handle.
In a specific embodiment of the present invention, the cutting device further comprises a connecting plate, wherein the connecting plate is fixedly connected with the external cutting device; the first driving assembly is arranged on the connecting plate, and the output end of the first driving assembly is fixedly connected with the bearing plate.
The utility model discloses a technical scheme has following advantage or one of beneficial effect at least among the above-mentioned technical scheme:
in practical application, the peripheral crystal bar is fixed on the peripheral cutting device, and the peripheral cutting device cuts the peripheral resin substrate connected with the peripheral crystal bar so as to divide the peripheral crystal bar into a plurality of independent wafers; before the peripheral resin substrate is cut, the first driving assembly drives the bearing plate to be close to the peripheral cutting device, so that the bearing groove is attached to the peripheral crystal bar; after the external resin substrate is cut, a plurality of independent wafers are received by the bearing groove, so that the manual supporting of the crystal bar is replaced, the labor intensity is reduced, and the normal operation of wafer production is ensured; after the peripheral resin substrate is cut, the first driving assembly drives the bearing plate to be away from the peripheral cutting device, and the wafer can be transferred to the next procedure by taking down the bearing seat.
Drawings
The present invention will be further described with reference to the accompanying drawings and examples;
fig. 1 is a front view of embodiment 1 of the present invention;
fig. 2 is a side view of embodiment 1 of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present invention, and should not be construed as limiting the present invention.
Example 1
Referring to fig. 1 to 2, a crystal bar bearing device includes a bearing plate 1, a placing groove is disposed on the bearing plate 1, a bearing seat 2 is disposed in the placing groove, a bearing groove 21 is disposed on the bearing seat 2, and the bearing groove 21 is adapted to the shape of an external crystal bar; the carrying plate 1 is driven by a first drive assembly 3 to move closer to or away from the peripheral cutting device.
In practical application, the peripheral crystal bar is fixed on the peripheral cutting device, and the peripheral cutting device cuts the peripheral resin substrate connected with the peripheral crystal bar so as to divide the peripheral crystal bar into a plurality of independent wafers; before cutting the peripheral resin substrate, the first driving assembly 3 drives the bearing plate 1 to be close to the peripheral cutting device, so that the bearing groove 21 is attached to the peripheral crystal bar; after the external resin substrate is cut, a plurality of independent wafers are received by the bearing groove 21, so that the manual bearing of the crystal bar is replaced, the labor intensity is reduced, and the normal operation of wafer production is ensured; after the peripheral resin substrate is cut, the first driving assembly 3 drives the bearing plate 1 to be away from the peripheral cutting device, and the wafer can be transferred to the next procedure by taking off the bearing seat 2.
In order to ensure the stability of the peripheral crystal bar on the bearing seat 2, the device also comprises a clamping rod 4, wherein the clamping rod 4 is driven to rotate by a second driving component 5 so as to clamp the peripheral crystal bar on the bearing groove 21;
specifically, the clamping rods 4 extend along the length direction of the bearing groove 21, the number of the clamping rods 4 is 2, the clamping rods 4 are respectively arranged on two sides of the length direction of the bearing groove 21, the second driving assembly 5 comprises a telescopic cylinder, the telescopic cylinder is used for driving the clamping rods 4 to rotate towards the bearing groove 21, and the output end of the telescopic cylinder is connected with the clamping rods 4 through a transmission mechanism; the telescopic cylinder is arranged on the bearing plate 1, the transmission mechanism comprises a rotating block connected with the clamping rod 4, a toothed structure is arranged on the rotating block, the transmission mechanism also comprises a rack structure connected with the output end of the telescopic cylinder, the rack structure is matched with the toothed structure, and the telescopic cylinder drives the rotating block to rotate by driving the rack structure to stretch so as to drive the clamping rod 4 to rotate and clamp an external crystal bar in the bearing groove 21;
the second driving assembly 5 may also be a motor, a rotary cylinder, etc., which is not limited in this embodiment; the clamping rod 4 can also clamp an external crystal rod in the bearing groove 21 in a translational motion mode, which is not limited in this embodiment.
In this embodiment, both ends of the bearing groove 21 in the length direction are open ends; the device also comprises 2 clamping plates 6 used for limiting the external crystal bars in the bearing groove 21; the clamping plates 6 are arranged on the bearing seat 2 through an adjusting structure 7, so that the distance between the 2 clamping plates 6 is adjustable, and the crystal bar bearing device can be suitable for bearing external crystal bars with different lengths;
specifically, the adjusting structure 7 includes a mounting hole 71 disposed on the bearing seat 2, and the mounting hole 71 extends along the length direction of the bearing slot 21; the clamping device further comprises a mounting rod 72 arranged on the clamping plate 6, wherein the mounting rod 72 is slidably connected in the mounting hole 71 and can be locked by a locking piece 8; the clamping plate 6 and the mounting rod 72 are connected through a connecting rod 73, and the mounting hole 71 is communicated with the bearing groove 21 so that the connecting rod 73 can pass through;
the locking piece 8 is a bolt, a threaded hole is formed in the bearing seat 2 and communicated with the mounting hole 71, and after the clamping plate 6 is moved to a proper position, the mounting rod 72 is locked in the mounting hole 71 through the bolt; the locking member 8 may also be a latch, etc., which is not limited in this embodiment;
the adjusting structure 7 may also be a screw rod structure, wherein the screw rod mechanism includes a screw rod rotatably connected to the bearing seat 2, a screw rod nut is disposed on the screw rod, the screw rod nut is connected to the clamping plate 6, and the clamping plate 6 is moved by driving the screw rod to rotate, so as to adjust the distance between the 2 clamping plates 6, which is not limited in this embodiment.
As a specific implementation of this embodiment, the number of the mounting holes 71 is 2, the mounting holes 71 are respectively disposed on two sides of the length direction of the bearing groove 21, and one mounting hole 71 is used for mounting one clamping plate 6, so that the structure is simple, and the position of the clamping plate 6 is convenient to adjust.
In this embodiment, the soft cushion layer 22 is disposed on the bearing groove 21, and the soft cushion layer 22 is in contact with an external crystal bar, so as to protect the external crystal bar; the bearing seat 2 is also provided with 2 support handles 23, and the support handles 23 are respectively arranged at two ends of the bearing seat 2 in the length direction, so that the bearing seat 2 can be conveniently taken and placed.
In the embodiment, the cutting device further comprises a connecting plate 9, and the connecting plate 9 is fixedly connected with an external cutting device; first drive assembly 3 sets up on connecting plate 9, first drive assembly 3's output with loading board 1 fixed connection, promptly, the crystal bar bearing device of this application installs on peripheral hardware cutting device through connecting plate 9, and simple structure is compact, reduces occuping of production space.
The first drive assembly 3 comprises a telescopic cylinder.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (8)

1. The crystal bar bearing device is characterized by comprising a bearing plate (1), wherein a placing groove is arranged on the bearing plate (1), a bearing seat (2) is placed in the placing groove, a bearing groove (21) is arranged on the bearing seat (2), and the bearing groove (21) is matched with the shape of an external crystal bar; the bearing plate (1) is driven by a first driving component (3) to be close to or far away from an external cutting device.
2. The crystal rod carrying device according to claim 1, further comprising a clamping rod (4), wherein the clamping rod (4) is driven to rotate by a second driving assembly (5) to clamp the peripheral crystal rod on the carrying groove (21).
3. The ingot carrier according to claim 1, wherein both ends of the carrier groove (21) in the length direction are open ends; the device also comprises 2 clamping plates (6) for limiting the external crystal bars in the bearing grooves (21); the clamping plates (6) are arranged on the bearing seat (2) through an adjusting structure (7), so that the distance between the 2 clamping plates (6) is adjustable.
4. The ingot carrier according to claim 3, wherein the adjusting structure (7) comprises a mounting hole (71) arranged on the carrier base (2), and the mounting hole (71) extends along the length direction of the carrier groove (21); the clamping device further comprises a mounting rod (72) arranged on the clamping plate (6), wherein the mounting rod (72) is connected in the mounting hole (71) in a sliding mode and can be locked through a locking piece (8);
the clamping plate (6) is connected with the mounting rod (72) through a connecting rod (73), and the mounting hole (71) is communicated with the bearing groove (21) so that the connecting rod (73) can pass through the mounting hole.
5. The ingot carrier according to claim 4, wherein the number of the mounting holes (71) is 2, and the mounting holes are respectively arranged at two sides of the length direction of the carrier trough (21), and one mounting hole (71) is used for mounting one clamping plate (6).
6. The apparatus according to claim 1, wherein a soft cushion layer (22) is disposed on the supporting groove (21).
7. The crystal rod carrying device according to claim 1, wherein a support handle (23) is further arranged on the carrying seat (2).
8. The crystal bar bearing device according to claim 1, further comprising a connecting plate (9), wherein the connecting plate (9) is fixedly connected with an external cutting device; the first driving assembly (3) is arranged on the connecting plate (9), and the output end of the first driving assembly (3) is fixedly connected with the bearing plate (1).
CN202221040897.7U 2022-04-28 2022-04-28 Crystal bar bearing device Active CN217621503U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221040897.7U CN217621503U (en) 2022-04-28 2022-04-28 Crystal bar bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221040897.7U CN217621503U (en) 2022-04-28 2022-04-28 Crystal bar bearing device

Publications (1)

Publication Number Publication Date
CN217621503U true CN217621503U (en) 2022-10-21

Family

ID=83649839

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221040897.7U Active CN217621503U (en) 2022-04-28 2022-04-28 Crystal bar bearing device

Country Status (1)

Country Link
CN (1) CN217621503U (en)

Similar Documents

Publication Publication Date Title
CN217621503U (en) Crystal bar bearing device
CN116714117A (en) Double-cutter grooving mechanism for quartz boat
CN212578764U (en) Adjustable workpiece clamping device for cutting
CN212122443U (en) Bar clamping tool and cutting and grinding integrated machine
CN115972418B (en) Silicon carbide ceramic wafer boat tooth-forming equipment for wafer diffusion
CN114932636B (en) Automatic sheet taking machine
CN213459657U (en) Wafer edge processing device
CN216068126U (en) Crystal bar slicing machine for semiconductor processing
CN217618013U (en) Cutting device is used in mount pad processing
CN217493062U (en) Laser cutting equipment is used in medical instrument production
CN218748146U (en) Adjustable side cut device of CTP version material
CN221111287U (en) Wafer thinning processing fixing device
CN220806355U (en) Tool with adjustable machining
CN218139107U (en) Adjustable clamp of wafer cutting machine
CN220880951U (en) Laser cutting device for wafer
CN221089387U (en) Timber peeling device
CN212735737U (en) Synchronous rotating mechanism of workpiece fixture
CN218018085U (en) Mechanical clamp
CN219227987U (en) Adjustable positioning mechanism for processing PCB
CN213106223U (en) Full-automatic high-efficient monocrystalline silicon double-sided polishing machine
JP4526150B2 (en) Multi-blade cutting device
CN219882948U (en) Efficient carborundum chip cutting device
CN116587451B (en) Semiconductor wafer material processing device and method
CN219359888U (en) Manual wafer split clamp
CN220261083U (en) Cutting device is used in processing of waste film

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant