CN219359888U - Manual wafer split clamp - Google Patents

Abstract

The utility model discloses a manual wafer splitting clamp which comprises a left splitting clamp and a right splitting clamp, wherein the left splitting clamp comprises a lower cover plate L, an upper cover plate L, knurling screws L and a fastening device L, the lower end face of the upper cover plate L is provided with an upper nylon pad L, the upper end face of the lower cover plate L is provided with a lower nylon pad L, the knurling screws L are in threaded connection with the upper cover plate L, the lower end of the knurling screws L are in rotary connection with the upper nylon pad L, the right splitting clamp comprises a lower cover plate R, an upper cover plate R, a first knurling screw R and a fastening device R, the lower end face of the upper cover plate R is provided with an upper nylon pad R, the first knurling screw R is in threaded connection with the upper cover plate R, the left splitting clamp and the right splitting clamp are mutually independent, the structure is reasonable, the nylon plate is driven to press a quartz wafer by screwing the knurling screws, and then the right splitting clamp can achieve the purpose of splitting through bending.

Description

Manual wafer split clamp

Technical Field

The utility model relates to the field of wafer breaking clamps, in particular to a manual wafer breaking clamp.

Background

The quartz wafer is processed by laser equipment, laser beams are focused inside the quartz wafer through the surface of the quartz wafer, the energy density of a focusing area is high, a series of criss-cross damage layers are formed inside the quartz wafer, the quartz wafer is high in hardness, the wafer cannot be cracked in a film expansion mode, and the quartz wafer needs to be suitable for equipment to crack along a wafer cutting path one by one. Firstly, the wafer is split into strips, and then the quartz wafer splitting equipment is used for splitting the wafer into tiny particles.

In the prior art, the wafer is split into strips usually by using a hand-breaking mode, but the hand-breaking is extremely easy to cause the conditions of edge breakage, edge breakage and the like, and the thicker the quartz wafer is, the poorer the hand-breaking effect is. Wafer holders in the market are mainly used for placing, transferring or fixing wafers, and the number of holders specially used for splitting wafers into strips is relatively small. To this end, the present application provides a manual wafer fragment fixture.

Disclosure of Invention

The utility model aims to provide a manual wafer splitting clamp which has the advantages of being capable of splitting quartz wafers into strips and avoiding edge breakage and edge breakage.

The technical aim of the utility model is realized by the following technical scheme:

the utility model provides a manual formula wafer lobe of a leaf anchor clamps, includes left lobe of a leaf anchor clamps and right lobe of a leaf anchor clamps, left lobe of a leaf anchor clamps include apron L, upper cover plate L, knurl screw L and fastener L down, upper cover plate L and lower apron L pass through fastener L and fix, upper cover plate L's lower terminal surface is equipped with nylon cushion L, lower apron L's up end is equipped with nylon cushion L down, knurl screw L and upper cover plate L threaded connection, knurl screw L's lower extreme and last nylon cushion L rotate to be connected, knurl screw L is used for driving nylon cushion L and removes to make upper nylon cushion L realize the fixed to the quartz wafer, right lobe of a leaf anchor clamps include apron R, upper cover plate R, first knurl screw R and fastener R down, upper cover plate R passes through fastener R fixed, upper cover plate R's lower terminal surface is equipped with nylon cushion R down, first knurl screw R and upper cover plate R threaded connection, first knurl screw R's lower end and upper cover plate R's the rotation of clamp are used for realizing the displacement to the quartz wafer to the wafer, left side lobe of a leaf anchor clamps and the wafer is realized to be broken.

Preferably, the lower cover plate L and the upper cover plate L are respectively provided with a long groove, and the positions of the upper nylon pad L and the lower nylon pad L corresponding to each other are provided with grooves, and the long grooves are used for adjusting the positions of the quartz wafers so that one side of the quartz wafers can be gradually moved out to the outer side of the left split clamp.

Preferably, two knurled screws L are provided, the two knurled screws L are distributed on two sides of the long groove, and the two knurled screws L are used for improving stability of the nylon pad L on quartz wafer fixation.

Preferably, the fastening device L comprises a nut L, a support post L and a countersunk head screw L, an upper hole L is formed in the upper cover plate L, a lower hole L is formed in the lower cover plate L, the support post L is located between the upper cover plate L and the lower cover plate L, the centers of the upper hole L, the lower hole L and the support post L are on the same straight line, one end of the countersunk head screw L sequentially penetrates through the upper hole L, the support post L and the lower hole L and is locked through the nut L, multiple groups of fastening devices L are arranged, and the multiple groups of fastening devices L are sequentially distributed along the edge of the upper cover plate L.

Preferably, the fastening device R comprises a nut R, a support column R and a countersunk head screw R, an upper hole R is formed in the upper cover plate R, a lower hole R is formed in the lower cover plate R, the support column R is located between the upper cover plate R and the lower cover plate R, the centers of the upper hole R, the lower hole R and the support column R are on the same straight line, one end of the countersunk head screw R sequentially penetrates through the upper hole R, the support column R and the lower hole R and is locked by the nut R, multiple groups of fastening devices R are arranged, and the multiple groups of fastening devices R are sequentially distributed along the edge of the upper cover plate R.

Preferably, two first knurling screws R are provided, the two first knurling screws R are distributed on two sides of the long groove, and the two first knurling screws R are used for improving stability of the nylon cushion R on quartz wafer fixation.

Preferably, the upper end face of the lower nylon cushion R is provided with a baffle plate, the baffle plate is in sliding connection with the lower nylon cushion R, two adjusting grooves are formed in the upper cover plate R and the upper nylon cushion R, the positions of the adjusting grooves in the upper cover plate R and the upper nylon cushion R correspond to each other, a second knurled screw R is inserted into the adjusting grooves, penetrates through the adjusting grooves and is in sliding fit with the adjusting grooves, a connecting hole is formed in the upper end face of the baffle plate, the lower end of the second knurled screw R is located in the connecting hole, and the second knurled screw R is used for adjusting the position of the baffle plate.

The beneficial effects of the utility model are as follows:

1. the material of the product can be acrylic or nylon, and the product has low cost and simple manufacture.

2. The product has good splitting effect, and greatly reduces the phenomena of breakage, broken edges and the like during wafer splitting.

3. The product has simple operation, easy understanding and quick operation.

Drawings

FIG. 1 is a schematic diagram of an embodiment;

FIG. 2 is a schematic diagram showing the structure of a left split clamp according to an embodiment;

FIG. 3 is an enlarged view of area A of FIG. 2;

FIG. 4 is a schematic diagram showing the structure of a right lobe clamp according to an embodiment;

fig. 5 is an enlarged view of region B of fig. 4.

Reference numerals: 1. left split clamp; 2. a right split clamp; 3. a lower cover plate L; 4. an upper cover plate L; 5. knurled screw L; 6. a nylon pad L is arranged on the upper surface of the upper surface; 7. a lower nylon pad L; 8. a lower cover plate R; 9. an upper cover plate R; 10. a first knurled screw R; 11. a nylon pad R is arranged; 12. a lower nylon mat R; 13. a long groove; 14. a nut L; 15. a pillar L; 16. countersunk head screw L; 17. an upper hole L; 18. a lower hole L; 19. a nut R; 20. a pillar R; 21. countersunk head screws R; 22. an upper hole R; 23. a lower hole R; 24. a baffle; 25. an adjustment tank; 26. a second knurled screw R; 27. quartz wafer.

Detailed Description

The following description is only of the preferred embodiments of the present utility model, and the scope of the present utility model should not be limited to the examples, but should be construed as falling within the scope of the present utility model. Wherein like parts are designated by like reference numerals. It should be noted that the words "front", "back", "left", "right", "upper" and "lower" used in the following description refer to directions in the drawings, and the words "bottom" and "top", "inner" and "outer" refer to directions toward or away from, respectively, the geometric center of a particular component.

As shown in fig. 1 to 5, a manual wafer fragment fixture includes a left fragment fixture 1 and a right fragment fixture 2. The left split clamp 1 clamps the body of the quartz wafer 27 to be split, and the part of the quartz wafer 27 to be broken is exposed out of the left split clamp 1 and clamped and fixed by the right split clamp 2. Then, only the left split clamp 1 is pressed, downward pressure is applied to the right split clamp 2, the part of the quartz wafer 27 can be split into strips, and after multiple operations, the whole quartz wafer 27 can be split into strips.

The left lobe clamp 1 includes a lower cover plate L3, an upper cover plate L4, knurled screws L5, and a fastening device L. The fastening device L comprises a nut L14, a support post L15 and a countersunk head screw L16, wherein the support post L15 is a hollow cylinder, and the support post L15 is positioned between the upper cover plate L4 and the lower cover plate L3. An upper hole L17 is formed in the upper cover plate L4, a lower hole L18 is formed in the lower cover plate L3, and the circle centers of the upper hole L17, the lower hole L18 and the support post L15 are on the same straight line. One end of the countersunk head screw L16 is sequentially inserted through the upper hole L17, the support post L15 and the lower hole L18, so that one end of the countersunk head screw L16 is positioned below the lower cover plate L3. The nut L14 is screwed to the lower end of the countersunk head screw L16, so that the upper cover plate L4 and the lower cover plate L3 can be fixed. The height of the support post L15 is the distance between the upper cover plate L4 and the lower cover plate L3, which is convenient for placing and adjusting the quartz wafer 27. The fastening devices L are provided with a plurality of groups, and the groups of fastening devices L are distributed along the edge of the upper cover plate L4 in sequence, so that the upper cover plate L4 and the lower cover plate L3 can be stably connected.

The lower terminal surface of upper cover plate L4 is equipped with nylon pad L6, and lower cover plate L3's up end is equipped with nylon pad L7 down, knurl screw L5 and upper cover plate L4 threaded connection, and knurl screw L5's lower extreme and last nylon pad L6 rotate and are connected. By rotating the knurled screw L5, the height of the lower end of the knurled screw L5 can be adjusted. After the quartz wafer 27 is placed between the upper cover plate L4 and the lower cover plate L3, the knurled screw L5 is adjusted downwards, the knurled screw L5 can drive the upper nylon pad L6 to move downwards until the upper nylon pad L6 abuts against the quartz wafer 27, and clamping and fixing of the quartz wafer 27 are achieved. In order to increase the reliability of fixing the upper nylon pad L6 to the quartz wafer 27, two knurled screws L5 are arranged, a certain distance is kept between the two knurled screws L5, and when the adjustment is performed, the stress of the upper nylon pad L6 can be uniform, so that the upper nylon pad L6 can better fix the quartz wafer 27.

Long grooves 13 are formed in the lower cover plate L3 and the upper cover plate L4, and grooves are formed in positions corresponding to the upper nylon cushion L6 and the lower nylon cushion L7. The quartz wafer 27 fixed in the left split jig 1 is exposed at the long groove 13, and the quartz wafer 27 can be directly contacted through the long groove 13. After the quartz wafer 27 is split into strips, the two knurled screws L5 are rotated, so that the two knurled screws L5 drive the upper nylon cushion L6 to move upwards, and then the position of the quartz wafer 27 in the left split clamp 1 can be moved through the long groove 13. The part needing to be split is moved out of the left split clamp 1 and then fixed by the right split clamp 2, so that the quartz wafer 27 can be split again.

The right lobe clamp 2 comprises a lower cover plate R8, an upper cover plate R9, a first knurled screw R10 and a fastening device R. The fastening device R comprises a nut R19, a support column R20 and a countersunk head screw R21, wherein the support column R20 is a hollow cylinder, and the support column R20 is positioned between the upper cover plate R9 and the lower cover plate R8. An upper hole R22 is formed in the upper cover plate R9, a lower hole R23 is formed in the lower cover plate R8, and the circle centers of the upper hole R22, the lower hole R23 and the support column R20 are on the same straight line. One end of the countersunk head screw R21 is sequentially passed through the upper hole R22, the support post R20 and the lower hole R23, so that one end of the countersunk head screw R21 is positioned below the lower cover plate R8. The nut R19 is connected to the lower end of the countersunk head screw R21 in a threaded manner, so that the upper cover plate R9 and the lower cover plate R8 can be fixed. The height of the support column R20 is the distance between the upper cover plate R9 and the lower cover plate R8, which is convenient for placing and adjusting the quartz wafer 27. The fastening devices R are provided with a plurality of groups, and the groups of fastening devices R are distributed along the edge of the upper cover plate R9 in sequence, so that the upper cover plate R9 and the lower cover plate R8 can be stably connected.

The lower terminal surface of upper cover plate R9 is equipped with nylon pad R11, and the up end of lower apron R8 is equipped with nylon pad R12 down, and first knurled screw R10 and upper cover plate R9 threaded connection, the lower extreme of first knurled screw R10 and last nylon pad R11 rotate to be connected. By turning the first knurled screw R10, the height of the lower end of the first knurled screw R10 can be adjusted. After the quartz wafer 27 is placed between the upper cover plate R9 and the lower cover plate R8, the first knurled screw R10 is adjusted downwards, and the first knurled screw R10 can drive the upper nylon cushion R11 to move downwards until the upper nylon cushion R11 abuts against the quartz wafer 27, so that the quartz wafer 27 is clamped and fixed. In order to increase the reliability of fixing the upper nylon pad R11 to the quartz wafer 27, two first knurled screws R10 are arranged, a certain distance is kept between the two first knurled screws R10, and when the adjustment is performed, the stress of the upper nylon pad R11 can be uniform, so that the upper nylon pad R11 can better fix the quartz wafer 27.

The left split clamp 1 and the right split clamp 2 are mutually independent, when the left split clamp 1 fixes the quartz wafer 27 body, the right split clamp 2 presses the left split clamp 1 after fixing the part of the quartz wafer 27 needing splitting, and downward force is applied to the right split clamp 2, so that splitting operation of the quartz wafer 27 can be completed.

The upper end surface of the lower nylon mat R12 is provided with a baffle 24, and the baffle 24 is used for controlling the width of the quartz wafer 27 entering the right split clamp 2. That is, after the position of the baffle 24 is adjusted, only one side of the quartz wafer 27 needs to be placed into the right split clamp 2 each time, one side of the quartz wafer 27 abuts against the edge of the baffle 24, and at this time, the width of the quartz wafer 27 entering the right split clamp 2 is the width of the strip-shaped wafer which needs to be split each time.

Baffle 24 and lower nylon pad R12 sliding connection have all seted up two adjustment tank 25 on upper cover plate R9 and the last nylon pad R11, and the position of adjustment tank 25 on upper cover plate R9 and the last nylon pad R11 corresponds each other, and adjustment tank 25 interpolation is equipped with second knurled screw R26, and second knurled screw R26 passes adjustment tank 25, and with adjustment tank 25 sliding fit, baffle 24's up end is equipped with the connecting hole, and the lower extreme of second knurled screw R26 is located the connecting hole. The second knurled screws R26 are rotated, so that the pressure of the lower ends of the second knurled screws R26 on the baffle plate 24 can be changed, and after the second knurled screws R26 are used for loosening the fixation of the baffle plate 24, the baffle plate 24 can be driven to move on the lower nylon cushion R12 by moving the two second knurled screws R26, so that the position of the baffle plate 24 can be adjusted.

Working principle: the quartz wafer 27 processed by the laser equipment is placed in the left split clamp 1, and the cutting line to be broken is parallel to the edge of the left split clamp 1, so that the stress uniformity is ensured. After the front-back distance of the quartz wafer 27 is moved through the long groove 13 and the position of the quartz wafer 27 is adjusted, the knurled screw L5 is screwed, and the knurled screw L5 drives the upper nylon pad L6 to move vertically downwards until the quartz wafer 27 is pressed and cannot be moved easily. The right split clamp 2 is also adjusted in the same way.

Since the connecting hole is formed in the baffle 24, the second knurled screw R26 is inserted into the connecting hole, and when the second knurled screw R26 is moved, the baffle 24 also moves, and the main function of the baffle 24 is to fix the distance of the quartz wafer 27 inserted into the right split clamp 2, so that time can be saved and efficiency can be improved.

After the quartz wafer 27 is fixed, the left split clamp 1 can be placed on a table, one hand presses the left split clamp 1, the other hand holds the right split clamp 2 and downwards uses the right split clamp, and the part of the quartz wafer 27 in the right split clamp 2 can be split into strips.

The technical problems, technical solutions and advantageous effects solved by the present utility model have been further described in detail in the above-described embodiments, and it should be understood that the above-described embodiments are only illustrative of the present utility model and are not intended to limit the present utility model, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present utility model should be included in the scope of protection of the present utility model.

Claims (7)

1. The manual wafer split clamp comprises a left split clamp (1) and a right split clamp (2), and is characterized in that the left split clamp (1) comprises a lower cover plate L (3), an upper cover plate L (4), a knurled screw L (5) and a fastening device L, the upper cover plate L (4) and the lower cover plate L (3) are fixed through the fastening device L, an upper nylon cushion L (6) is arranged on the lower end face of the upper cover plate L (4), a lower nylon cushion L (7) is arranged on the upper end face of the lower cover plate L (3), the knurled screw L (5) is in threaded connection with the upper cover plate L (4), the lower end of the knurled screw L (5) is in rotary connection with the upper nylon cushion L (6), the knurled screw L (5) is used for driving the upper nylon cushion L (6) to move so that the upper nylon cushion L (6) can fix a quartz wafer (27), the right split clamp (2) comprises a lower cover plate R (8), an upper cover plate R (9), a first knurled screw R (10) and a fastening device R (10) are arranged on the lower end face of the upper cover plate R (8) and the lower cover plate R (8) through the fastening device R (8), the novel quartz wafer breaking device is characterized in that the first knurled screw R (10) is in threaded connection with the upper cover plate R (9), the lower end of the first knurled screw R (10) is rotationally connected with the upper nylon pad R (11), the first knurled screw R (10) is used for driving the upper nylon pad R (11) to move so that the upper nylon pad R (11) can fix the quartz wafer (27), the left breaking clamp (1) and the right breaking clamp (2) are mutually independent, and the left breaking clamp (1) and the right breaking clamp (2) are displaced to break the quartz wafer (27).

2. The manual wafer splitting fixture according to claim 1, wherein long grooves (13) are formed in the lower cover plate L (3) and the upper cover plate L (4), grooves are formed in positions corresponding to the upper nylon pad L (6) and the lower nylon pad L (7), and the long grooves (13) are used for adjusting the positions of the quartz wafers (27) so that one side of the quartz wafers (27) can be gradually moved out of the left splitting fixture (1).

3. The manual wafer breaking clamp according to claim 2, wherein two knurling screws L (5) are provided, the two knurling screws L (5) are distributed on two sides of the long groove (13), and the two knurling screws L (5) are used for increasing stability of fixing the upper nylon pad L (6) to the quartz wafer (27).

4. The manual wafer crack fixture according to claim 1, wherein the fastening device L comprises a nut L (14), a support column L (15) and a countersunk head screw L (16), an upper hole L (17) is formed in the upper cover plate L (4), a lower hole L (18) is formed in the lower cover plate L (3), the support column L (15) is located between the upper cover plate L (4) and the lower cover plate L (3), the centers of the upper hole L (17), the lower hole L (18) and the support column L (15) are on the same straight line, one end of the countersunk head screw L (16) sequentially penetrates through the upper hole L (17), the support column L (15) and the lower hole L (18) and is locked through the nut L (14), and a plurality of groups of fastening devices L are arranged along the edge of the upper cover plate L (4) in sequence.

5. The manual wafer crack fixture according to claim 1, wherein the fastening device R comprises a nut R (19), a support post R (20) and a countersunk head screw R (21), an upper hole R (22) is formed in the upper cover plate R (9), a lower hole R (23) is formed in the lower cover plate R (8), the support post R (20) is located between the upper cover plate R (9) and the lower cover plate R (8), the centers of the upper hole R (22), the lower hole R (23) and the support post R (20) are on the same straight line, one end of the countersunk head screw R (21) sequentially penetrates through the upper hole R (22), the support post R (20) and the lower hole R (23) and is locked through the nut R (19), and a plurality of groups of fastening devices R are arranged along the edge of the upper cover plate R (9).

6. The manual wafer breaking clamp according to claim 1, wherein two first knurled screws R (10) are provided, the two first knurled screws R (10) are distributed on two sides of the long groove (13), and the two first knurled screws R (10) are used for increasing stability of fixing the upper nylon pad R (11) to the quartz wafer (27).

7. The manual wafer crack fixture according to claim 1, wherein a baffle plate (24) is arranged on the upper end face of the lower nylon pad R (12), the baffle plate (24) is slidably connected with the lower nylon pad R (12), two adjusting grooves (25) are formed in the upper cover plate R (9) and the upper nylon pad R (11), the positions of the adjusting grooves (25) in the upper cover plate R (9) and the upper nylon pad R (11) correspond to each other, a second knurled screw R (26) is inserted into the adjusting grooves (25), the second knurled screw R (26) penetrates through the adjusting grooves (25) and is slidably matched with the adjusting grooves (25), a connecting hole is formed in the upper end face of the baffle plate (24), the lower end of the second knurled screw R (26) is located in the connecting hole, and the second knurled screw R (26) is used for adjusting the positions of the baffle plate (24).