CN213106223U

CN213106223U - Full-automatic high-efficient monocrystalline silicon double-sided polishing machine

Info

Publication number: CN213106223U
Application number: CN202021749222.0U
Authority: CN
Inventors: 陈�峰
Original assignee: Zhejiang Zhongjing Electronic Co ltd
Current assignee: Zhejiang Zhongjing Electronic Co ltd
Priority date: 2020-08-20
Filing date: 2020-08-20
Publication date: 2021-05-04
Anticipated expiration: 2030-08-20

Abstract

The utility model discloses a two-sided burnishing machine of full-automatic high-efficient monocrystalline silicon relates to the monocrystalline silicon processing field, the on-line screen storage device comprises a base, the centre at base top is provided with the cushion cap, the four corners difference fixedly connected with elastic stretching guide arm of cushion cap bottom, the bilateral symmetry fixedly connected with brace table at base top, the middle part symmetry of two relative one sides of brace table is provided with claw shape centre gripping anchor clamps, and the centre swing joint that brace table one side was kept away from to claw shape centre gripping anchor clamps has the extension axle, and the one end fixedly connected with of claw shape centre gripping anchor clamps is polished to the extension axle, the centre fixedly connected with axis of rotation of claw shape. A two-sided burnishing machine of full-automatic high-efficient monocrystalline silicon, make the clamp plate be close to the cushion cap and carry out the centre gripping to monocrystalline silicon, set up buffer area through the bottom at the cushion cap, slowly increase the pressure to special-shaped monocrystalline silicon strong point in the centre gripping process, the convenience is fixed monocrystalline silicon, and then facilitates for processing.

Description

Full-automatic high-efficient monocrystalline silicon double-sided polishing machine

Technical Field

The utility model relates to a monocrystalline silicon processing field, in particular to full-automatic high-efficient monocrystalline silicon double-sided polishing machine.

Background

Silicon wafers and compound semiconductor wafers such as GaAs wafers are known as semiconductor wafers. Generally, a semiconductor wafer is obtained by sequentially performing the following steps: a slicing step of slicing the single crystal ingot into a thin disc-shaped wafer by a wire saw; a grinding step of flattening the front and back surfaces of the sliced wafer to a predetermined thickness; and a polishing step of removing irregularities on the surface of the wafer after grinding and applying a mirror finish having a high flatness. Further, an epitaxial layer may be formed on the surface of the polished semiconductor wafer by using MOCVD or the like depending on the application.

In the polishing step of the semiconductor wafer, after the double-side polishing method is performed by using either one or both of a double-side polishing method of polishing both sides of the semiconductor wafer and a single-side polishing method of polishing only one side, multi-stage polishing in which the single-side polishing method is sequentially performed is further performed.

Although the target shape after polishing is determined and the double-side polishing of the semiconductor wafer is performed, it is difficult to obtain a completely accurate shape like the target shape, and an error is generated. In addition, in the double-side polishing method, it is difficult to fix a special-shaped material, and it is difficult to perform polishing treatment, which causes inconvenience in processing.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a full-automatic high-efficient monocrystalline silicon double side polishing machine can effectively solve the problem in the background art.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a full-automatic high-efficiency monocrystalline silicon double-sided polishing machine comprises a base, wherein a bearing platform is arranged in the center of the top of the base, elastic telescopic guide rods are fixedly connected to four corners of the bottom of the bearing platform respectively, supporting platforms are fixedly connected to bilateral symmetry of the top of the base, claw-shaped clamping fixtures are symmetrically arranged in the middle of one opposite side of the two supporting platforms, a central movable connection of one side, away from the supporting platforms, of each claw-shaped clamping fixture is provided with an extension shaft, one end, away from each claw-shaped clamping fixture, of each extension shaft is fixedly connected with a polishing head, a central fixed connection of the other side of each claw-shaped clamping fixture is provided with a rotating shaft, the middle of an inner cavity of each supporting platform is provided with a driving motor, the middle of each driving motor is sleeved with a mounting frame, a supporting beam is arranged at the, the bilateral symmetry fixedly connected with guide arm at clamp plate top, the centre of connecting the bench top is provided with the screw rod, the top fixedly connected with rotary drive subassembly of screw rod, the centre at a supporting beam top is provided with the limiting plate.

Preferably, the bottom end of the elastic telescopic guide rod is fixedly connected to the outer wall of the top of the base, the bearing platform is arranged at the bottom between the two supporting platforms, and the two polishing heads are symmetrically arranged on two sides of the top of the bearing platform.

Preferably, driving motor and the wall body of mounting bracket closely laminate and fixed connection, the one end fixed mounting of mounting bracket is on the inner wall of brace table opposite side, driving motor's one end extends there is the output shaft.

Preferably, one end of the rotating shaft, which is far away from the claw-shaped clamping fixture, penetrates through the outer wall of one side of the supporting table and extends into the supporting table, the rotating shaft is rotatably connected with the wall body of the supporting table through a first bearing, and one end of the rotating shaft is connected with an output shaft of the driving motor.

Preferably, a supporting beam's both ends are fixed connection respectively on the outer wall at two brace table side tops, the clamp plate sets up the top between two grinding heads, the top of guide arm runs through a supporting beam's wall body and extends to the outside at a supporting beam top, a supporting beam's wall body is laminated to the guide arm, the top fixed connection of guide arm is on the outer wall of limiting plate bottom.

Preferably, the bottom of screw rod runs through the outer wall of connecting bench top and extends to the inside of connecting the bench wall body, and the screw rod rotates through the second bearing with the wall body of being connected the platform to be connected, the top of screw rod runs through supporting beam, limiting plate in proper order and extends to the outside at limiting plate top, and the screw rod passes through threaded connection with a supporting beam's wall body, the screw rod passes through the third bearing rotation with the wall body of limiting plate to be connected, the both ends difference fixed mounting of rotary drive subassembly is on the outer wall of limiting plate top both sides.

Compared with the prior art, the utility model discloses following beneficial effect has:

the utility model discloses in, it is rotatory through rotary drive subassembly drive screw, the screw rod is crisscross with a supporting beam's wall body screw thread, the clamp plate uses the guide arm of both sides as the support, realize the screw rod transmission, it carries out the centre gripping to monocrystalline silicon to make the clamp plate be close to the cushion cap, through setting up buffer area in the bottom of cushion cap, slowly increase the pressure to special-shaped monocrystalline silicon strong point in the clamping process, the convenience is fixed monocrystalline silicon, and then facilitate for processing, it is rotatory to drive the axis of rotation through the driving motor who sets up, make the synchronization of both sides polish monocrystalline silicon, and then improved machining efficiency, claw shape centre gripping anchor clamps simultaneously, the connection of extension axle is detachable construction, conveniently change the extension axle of different length and the head of polishing of different fineness, multiple type processing provides strong support.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

FIG. 2 is an enlarged view of the present invention at A in FIG. 1;

fig. 3 is an enlarged view of the present invention at B in fig. 1.

In the figure: 1. a base; 2. a bearing platform; 3. an elastic telescopic guide rod; 4. a support table; 5. a claw-shaped clamping fixture; 6. an extension shaft; 7. polishing head; 8. a rotating shaft; 9. a drive motor; 10. a mounting frame; 11. a support beam; 12. pressing a plate; 13. a guide bar; 14. a connecting table; 15. a screw; 16. a rotary drive assembly; 17. and a limiting plate.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in figures 1-3, a full-automatic high-efficiency monocrystalline silicon double-sided polishing machine comprises a base 1, a bearing platform 2 is arranged in the center of the top of the base 1, four corners of the bottom of the bearing platform 2 are respectively and fixedly connected with elastic telescopic guide rods 3, supporting platforms 4 are symmetrically and fixedly connected with two sides of the top of the base 1, claw-shaped clamping fixtures 5 are symmetrically arranged in the middle of one side of the two supporting platforms 4 opposite to each other, an extension shaft 6 is movably connected in the center of one side of the claw-shaped clamping fixture 5 away from the claw-shaped clamping fixture 5, polishing heads 7 are fixedly connected with one end of the extension shaft 6 away from the claw-shaped clamping fixture 5, the bottom end of the elastic telescopic guide rods 3 is fixedly connected to the outer wall of the top of the base 1, the bearing platform 2 is arranged at the bottom between the two supporting platforms 4, the two polishing heads 7 are symmetrically arranged at two sides of the top of, driving motor 9 and mounting bracket 10's wall body close fitting and fixed connection, the one end fixed mounting of mounting bracket 10 is on the inner wall of brace table 4 opposite side, driving motor 9's one end is extended there is the output shaft, the one end that claw shape centre gripping anchor clamps 5 were kept away from to axis of rotation 8 runs through the outer wall of brace table 4 one side and extends to the inside of brace table 4, axis of rotation 8 is connected through first bearing rotation with the wall body of brace table 4, the one end of axis of rotation 8 is connected with driving motor 9's output shaft.

The middle of the driving motor 9 is sleeved with an installation frame 10, a supporting beam 11 is arranged at the top between the two supporting tables 4, a pressing plate 12 is arranged in the center of the bottom of the supporting beam 11, a connecting table 14 is fixedly connected to the center of the top of the pressing plate 12, guide rods 13 are fixedly connected to two sides of the top of the pressing plate 12 symmetrically, two ends of the supporting beam 11 are fixedly connected to the outer wall of the top of one side of the two supporting tables 4 respectively, the pressing plate 12 is arranged at the top between the two polishing heads 7, the top end of each guide rod 13 penetrates through the wall body of the supporting beam 11 and extends to the outer side of the top of the supporting beam 11, each guide rod 13 is attached to the wall body of the supporting beam 11, the top end of each guide rod 13 is fixedly connected to the outer wall of the bottom of the limiting plate 17, a screw rod 15 is arranged in the center of the top of the connecting table 14, a, the screw rod 15 is connected through second bearing rotation with the wall body of being connected platform 14, and a supporting beam 11, limiting plate 17 and the outside that extends to limiting plate 17 top are run through in proper order to the top of screw rod 15, and screw rod 15 passes through threaded connection with a supporting beam 11's wall body, and screw rod 15 passes through the third bearing rotation with limiting plate 17's wall body to be connected, and the both ends of rotary drive subassembly 16 are fixed mounting respectively on the outer wall of limiting plate 17 top both sides.

It should be noted that, the utility model relates to a full-automatic high-efficient monocrystalline silicon double-sided polishing machine, when in use, the screw rod 15 is driven to rotate by the rotary driving component 16, the screw rod 15 is staggered with the wall body thread of the supporting beam 11, the pressing plate 12 is supported by the guide rods 13 at both sides, the screw rod transmission is realized, the pressing plate 12 is close to the bearing platform 2 to clamp the monocrystalline silicon, the bottom of the bearing platform 2 is provided with a buffer area, the pressure to the special-shaped monocrystalline silicon supporting point is slowly increased in the clamping process, the monocrystalline silicon is conveniently fixed, and further, the processing is convenient, the rotating shaft 8 is driven to rotate by the arranged driving motor 9, the monocrystalline silicon is polished synchronously at both sides, the processing efficiency is further improved, meanwhile, the claw-shaped clamping fixture 5 and the connection of the extension shaft 6 are of a detachable structure, the extension shafts 6 with different lengths and the polishing, provides powerful support for various kinds of processing.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a full-automatic high-efficient monocrystalline silicon double side polishing machine, includes base (1), its characterized in that: the center at the top of the base (1) is provided with a bearing platform (2), four corners at the bottom of the bearing platform (2) are respectively and fixedly connected with elastic telescopic guide rods (3), two bilateral symmetry fixedly connected with supporting platforms (4) at the top of the base (1), two middle symmetries at one side opposite to the supporting platforms (4) are provided with claw-shaped clamping fixtures (5), the center of one side of the supporting platforms (4) away from the claw-shaped clamping fixtures (5) is connected with an extension shaft (6) in a movable mode, one end of the extension shaft (6) away from the claw-shaped clamping fixtures (5) is fixedly connected with a polishing head (7), the center of the other side of the claw-shaped clamping fixtures (5) is connected with a rotating shaft (8), the middle of the inner cavity of the supporting platforms (4) is provided with a driving motor (9), the middle of the driving motor (9) is sleeved with a mounting frame (10), and, the centre of supporting beam (11) bottom is provided with clamp plate (12), the centre fixedly connected with at clamp plate (12) top is connected platform (14), the bilateral symmetry fixedly connected with guide arm (13) at clamp plate (12) top, the centre at connection platform (14) top is provided with screw rod (15), the top fixedly connected with rotation driving subassembly (16) of screw rod (15), the centre at supporting beam (11) top is provided with limiting plate (17).

2. The full-automatic high-efficiency monocrystalline silicon double-side polishing machine according to claim 1, characterized in that: the bottom end of the elastic telescopic guide rod (3) is fixedly connected to the outer wall of the top of the base (1), the bearing platform (2) is arranged at the bottom between the two supporting platforms (4), and the two polishing heads (7) are symmetrically arranged on two sides of the top of the bearing platform (2).

3. The full-automatic high-efficiency monocrystalline silicon double-side polishing machine according to claim 2, characterized in that: driving motor (9) and the close laminating of the wall body of mounting bracket (10) and fixed connection, the one end fixed mounting of mounting bracket (10) is on the inner wall of brace table (4) opposite side, the one end extension of driving motor (9) has the output shaft.

4. The full-automatic high-efficiency monocrystalline silicon double-side polishing machine according to claim 3, characterized in that: one end of the rotating shaft (8) far away from the claw-shaped clamping fixture (5) penetrates through the outer wall on one side of the supporting table (4) and extends to the inside of the supporting table (4), the rotating shaft (8) is rotatably connected with the wall body of the supporting table (4) through a first bearing, and one end of the rotating shaft (8) is connected with an output shaft of the driving motor (9).

5. The full-automatic high-efficiency monocrystalline silicon double-side polishing machine according to claim 4, characterized in that: the both ends of a supporting beam (11) are fixed connection respectively on the outer wall at two supporting tables (4) side tops, clamp plate (12) set up the top between two grinding heads (7), the top of guide arm (13) runs through the wall body of a supporting beam (11) and extends to the outside at a supporting beam (11) top, and a supporting beam (11)'s wall body is laminated in guide arm (13), the top fixed connection of guide arm (13) is on the outer wall of limiting plate (17) bottom.

6. The full-automatic high-efficiency monocrystalline silicon double-side polishing machine according to claim 5, characterized in that: the outer wall at bottom through connection platform (14) top of screw rod (15) extends to the inside of being connected platform (14) wall body, and screw rod (15) rotate through the second bearing with the wall body of being connected platform (14) and be connected, the top of screw rod (15) runs through supporting beam (11), limiting plate (17) in proper order and extends to the outside at limiting plate (17) top, and screw rod (15) pass through threaded connection with the wall body of supporting beam (11), screw rod (15) pass through the third bearing rotation with the wall body of limiting plate (17) and are connected, the both ends difference fixed mounting of rotary drive subassembly (16) is on the outer wall of limiting plate (17) top both sides.