CN217579053U - Clamp for depositing dielectric film on device - Google Patents
Clamp for depositing dielectric film on device Download PDFInfo
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- CN217579053U CN217579053U CN202221323014.3U CN202221323014U CN217579053U CN 217579053 U CN217579053 U CN 217579053U CN 202221323014 U CN202221323014 U CN 202221323014U CN 217579053 U CN217579053 U CN 217579053U
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Abstract
The utility model relates to a clamp for depositing a medium film on a device, which comprises an upper clamp layer, a middle clamp layer and a lower clamp layer, wherein the middle clamp layer is detachably arranged on the lower clamp layer; an assembly groove for placing a device is formed in one side face, away from the lower clamp layer, of the middle clamp layer, a first through hole for a device pin to pass through is formed in the middle of the assembly groove, and a space for accommodating the device pin is reserved between the middle clamp layer and the lower clamp layer; and a second through hole for the body of the device to pass through is formed in the upper layer of the clamp, and the size of the second through hole is smaller than that of the assembling groove. The utility model discloses can place the device in the assembly groove to make the device participate in and pass from first through-hole and place in between anchor clamps middle level and the anchor clamps lower floor, then cover on the anchor clamps middle level through anchor clamps upper strata again, shelter from the position that does not need the deposit medium film with device week side border, usable vacuum coating equipment realizes single or a plurality of centre gripping and the film deposition that have the device of participating in.
Description
Technical Field
The utility model relates to a surface acoustic wave technical field, concretely relates to anchor clamps for device deposit medium film.
Background
Because the surface of the surface acoustic wave filter chip is an oxidizable metal layer, the deposition of a dielectric film on the surface of a device is often required to enhance the protection effect of the device. Because the surface acoustic wave filter is a frequency device, a medium film with a certain thickness can play a role in adjusting frequency. Therefore, the dielectric film deposition is often required to be carried out on the surface acoustic wave device after bonding and testing are finished.
The existing vacuum coating equipment can realize the deposition of a dielectric film, but the mechanical arm for upper and lower wafer transmission in the factory configuration of the equipment is two ceramic rods, and the worktable can only support a plane with the size of 8 inches of wafers, so that the equipment can only carry out the transmission and deposition of 8 inches of wafers.
Surface acoustic wave filter products are usually surface-mounted or metal-packaged, a tool clamp needs to be designed to realize transmission and deposition of devices, and meanwhile, it is required to ensure that a dielectric film cannot be deposited at the edge of a packaging shell.
Surface mount or metal package is basically composed of a socket and a cap. Most of the tube seat bottoms of the metal-packaged surface acoustic wave filter products have device pins for grounding or signal transmission, and the surface acoustic wave filter products are not easy to stably place on a plane.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a solve one kind or several kinds that prior art has technical problem, provide a anchor clamps that is used for device deposit medium film.
The utility model provides an above-mentioned technical problem's technical scheme as follows: a clamp for depositing a medium film on a device comprises an upper clamp layer, a middle clamp layer and a lower clamp layer, wherein the middle clamp layer is detachably arranged on the lower clamp layer; an assembly groove for placing a device is formed in one side face, away from the lower clamp layer, of the middle clamp layer, a first through hole for a device pin to pass through is formed in the middle of the assembly groove, and a space for accommodating the device pin is reserved between the middle clamp layer and the lower clamp layer; and a second through hole for the body of the device to pass through is formed in the upper layer of the clamp, and the size of the second through hole is smaller than that of the assembling groove.
The utility model has the advantages that: the utility model discloses an anchor clamps can place the device in the assembly groove to make the device participate in from first through-hole pass and place in the interval between anchor clamps middle level and the anchor clamps lower floor in, then cover on the anchor clamps middle level through the anchor clamps upper strata again, shelter from the position that does not need the deposit medium film with device week side border, not only can utilize vacuum coating equipment to realize the film deposition of wafer, can also realize single or a plurality of centre gripping and the film deposition that have the device of participating in.
On the basis of the technical scheme, the utility model discloses can also do following improvement.
Further, the size of the first through hole is smaller than the size of the fitting groove.
The beneficial effect of adopting the further scheme is that: the body of the device can be placed in the assembling groove, and the device pins of the device can penetrate out of the first through holes and are placed in the interval, so that the clamping and assembling of the device are facilitated.
Furthermore, a third through hole used for tool operation is further formed in the middle layer of the clamp, and the third through hole is communicated with the first through hole.
The beneficial effect of adopting the above further scheme is: through setting up the third through-hole to reserve out operating space, can make things convenient for the instrument operation, for example can make things convenient for the tweezers operation.
Further, first through-hole is rectangular shape structure, the third through-hole is located one side of first through-hole length direction, the third through-hole extends to the outside of assembly groove circumference.
The beneficial effect of adopting the above further scheme is: the third through hole is formed in one side of the first through hole in the length direction, so that the clamping operation from one side of the device in the length direction is facilitated, and the device is convenient to take and place.
Furthermore, the third through hole is of a long strip-shaped structure and is perpendicular to the first through hole.
The beneficial effect of adopting the further scheme is that: is beneficial to the operation of tweezers.
Further, a plurality of first support legs are arranged on one side face, close to the middle layer of the fixture, of the lower layer of the fixture, the first support legs are arranged close to the peripheral side edge of the lower layer of the fixture, a plurality of fifth through holes are formed in the middle layer of the fixture, and the first support legs are inserted into the corresponding fifth through holes in a one-to-one correspondence mode.
The beneficial effect of adopting the further scheme is that: through setting up first stabilizer blade, make things convenient for dismantling between anchor clamps middle level and the anchor clamps lower floor to be connected.
Furthermore, the free end of the first support leg on the lower layer of the clamp is provided with a circle of annular limiting steps, and the fifth through hole on the middle layer of the clamp is sleeved on the annular limiting steps of the first support leg.
The beneficial effect of adopting the further scheme is that: through setting up the spacing step of annular, the middle level assembly of anchor clamps of being convenient for also is convenient for make and forms the interval that holds the device and participate in between anchor clamps middle level and the anchor clamps lower floor.
Furthermore, one side of the middle layer of the fixture, which is far away from the lower layer of the fixture, is provided with a plurality of second support legs, the second support legs are arranged close to the edges of the periphery of the middle layer of the fixture, the upper layer of the fixture is provided with a plurality of fourth through holes, and the second support legs are correspondingly inserted into the corresponding fourth through holes one by one.
The beneficial effect of adopting the further scheme is that: through setting up second stabilizer blade and fourth through hole, make things convenient for the activity between anchor clamps upper strata and the anchor clamps middle level spacing.
Further, the first through hole and the second through hole are both of long-strip-shaped structures.
The beneficial effect of adopting the further scheme is that: the shape of the device is matched, which is beneficial to the assembly of the device.
Further, the clamp upper layer, the clamp middle layer and the clamp lower layer are of flat plate-shaped structures.
Furthermore, a plurality of assembling grooves are formed in the middle layer of the clamp, the assembling grooves are arranged in multiple rows, and a first through hole is formed in each assembling groove; the fixture upper layer is provided with a plurality of second through holes, and the plurality of second through holes and the plurality of first through holes are arranged in a one-to-one correspondence manner.
The beneficial effect of adopting the further scheme is that: multiple devices with pins may be clamped and thin film deposited.
Drawings
FIG. 1 is a schematic view of a lower layer of a clamp of the present invention;
FIG. 2 is a schematic view of the lower layer of the clamp of the present invention;
FIG. 3 is a schematic perspective view of a middle layer of the clamp of the present invention;
FIG. 4 is a schematic structural view of a middle layer of the clamp of the present invention;
FIG. 5 is an enlarged view of the portion B in FIG. 4;
FIG. 6 is a schematic top view of another structure of the middle layer of the clamp of the present invention;
FIG. 7 is an enlarged view of portion A of FIG. 6;
fig. 8 is a schematic perspective view of the upper layer of the clamp of the present invention;
fig. 9 is a schematic top view of the upper layer of the clamp of the present invention;
fig. 10 is a schematic perspective view of the clamp of the present invention;
fig. 11 is a schematic front view of the clamp of the present invention;
fig. 12 is a schematic view of a three-dimensional structure of the clamp and the device according to the present invention;
fig. 13 is a schematic view of a part of the enlarged structure in fig. 12.
In the drawings, the components represented by the respective reference numerals are listed below:
1. a clamp upper layer; 11. a second through hole; 12. a fourth via hole;
2. a middle layer of the clamp; 21. assembling a groove; 22. a first through hole; 23. a third through hole; 24. a second leg; 25. a fifth through hole; 26. a sixth via hole;
3. a lower layer of the clamp; 31. a first leg; 4. a device; 41. and (6) a device pin.
Detailed Description
The principles and features of the present invention are described below in conjunction with the following drawings, the examples given are only intended to illustrate the present invention and are not intended to limit the scope of the present invention.
As shown in fig. 1 to 13, a fixture for depositing a dielectric film on a device according to the present embodiment includes an upper fixture layer 1, a middle fixture layer 2, and a lower fixture layer 3, where the middle fixture layer 2 is detachably mounted on the lower fixture layer 3; an assembly groove 21 for placing a device 4 is formed in one side surface of the clamp middle layer 2, which is far away from the clamp lower layer 3, a first through hole 22 for allowing a device pin 41 to pass through is formed in the middle of the assembly groove 21, and a space for accommodating the device pin 41 is reserved between the clamp middle layer 2 and the clamp lower layer 3; the fixture upper layer 1 is provided with a second through hole 11 for a device body to pass through, and the size of the second through hole 11 is smaller than that of the assembling groove 21.
Fig. 12 and 13 show a schematic configuration of the device 4 fitted in the fitting groove 21.
As shown in fig. 10 and 11, the two side surfaces of the upper jig layer 1, the middle jig layer 2, and the lower jig layer 3 of the present embodiment are planar structures.
As shown in fig. 4 to 7, the first through hole 22 of the present embodiment has a size smaller than that of the fitting groove 21. The body of the device can be placed in the assembling groove, and the device pins of the device can penetrate out of the first through holes and are placed in the interval, so that the clamping and assembling of the device are facilitated.
As shown in fig. 4 to 7, the middle layer 2 of the clamp of this embodiment is further provided with a third through hole 23 for tool operation, and the third through hole 23 is communicated with the first through hole 22. Through setting up the third through-hole to reserve out operating space, can make things convenient for the instrument operation, for example can make things convenient for the tweezers operation.
As shown in fig. 4 to 7, the first through hole 22 of the present embodiment has a long strip shape, the third through hole 23 is located at one side of the first through hole 22 in the length direction, and the third through hole 23 extends to the outer side of the assembly groove 21 in the circumferential direction. The third through hole is formed in one side of the first through hole in the length direction, so that the clamping operation from one side of the device in the length direction is facilitated, and the device is convenient to take and place.
In particular, as shown in fig. 4, one option of this embodiment is that one side of the elongated structure of the first through hole 22 may be further provided with a sixth through hole 26 for accommodating different types of devices 4 in cooperation with the first through hole 22. The sixth through hole 26 may be a circular hole or a hole structure of other shapes.
As shown in fig. 7, another alternative of this embodiment is that the first through hole 22 only adopts a long strip structure for accommodating different types of devices 4.
As shown in fig. 4 to 7, the third through hole 23 of the present embodiment is a strip-shaped structure, and the third through hole 23 is perpendicular to the first through hole 22, so as to facilitate the operation of the forceps.
As shown in fig. 1, fig. 2, fig. 10 and fig. 11, a plurality of first supporting legs 31 are disposed on a side surface of the lower fixture layer 3 close to the middle fixture layer 2, the first supporting legs 31 are disposed adjacent to a peripheral side edge of the lower fixture layer 3, the middle fixture layer 2 is provided with a plurality of fifth through holes 25, and the plurality of first supporting legs 31 are inserted into the corresponding fifth through holes 25 in a one-to-one correspondence manner. Through setting up first stabilizer blade, make things convenient for dismantling between anchor clamps middle level and the anchor clamps lower floor to be connected.
In a preferred embodiment of the present invention, a plurality of the first supporting legs 31 are uniformly distributed at the position adjacent to the circumferential side edge of the lower fixture layer 3. A plurality of the fifth through holes 25 are uniformly distributed in the fixture at the position of the middle layer 2 adjacent to the peripheral side edge. The number of the first legs 31 may be set arbitrarily, for example, 3, 4, 5, 6, etc. may be set. The number of the fifth through holes 25 may be set arbitrarily, and for example, 3, 4, 5, 6, or the like may be set.
As shown in fig. 1 and fig. 2, a ring of annular limiting step is disposed at a free end of a first leg 31 on the lower layer 3 of the clamp of this embodiment, and a fifth through hole 25 of the middle layer 2 of the clamp is sleeved on the annular limiting step of the first leg 31. Through setting up the spacing step of annular, the middle level assembly of anchor clamps of being convenient for also is convenient for make and forms the interval that holds the device and participate in between anchor clamps middle level and the anchor clamps lower floor.
As shown in fig. 3, fig. 5 and fig. 6, a plurality of second supporting legs 24 are disposed on one side of the fixture middle layer 2 away from the fixture lower layer 3, the second supporting legs 24 are disposed adjacent to the peripheral side edge of the fixture middle layer 2, a plurality of fourth through holes 12 are disposed on the fixture upper layer 1, and the plurality of second supporting legs 24 are inserted into the corresponding fourth through holes 12 in a one-to-one correspondence manner. Through setting up second stabilizer blade and fourth through hole, make things convenient for the activity between anchor clamps upper strata and the anchor clamps middle level spacing.
As shown in fig. 3, the plurality of second legs 24 of the present embodiment are uniformly distributed in the jig at positions adjacent to the circumferential side edge of the layer 2, and the plurality of fourth through holes 12 are uniformly distributed in the jig at positions adjacent to the circumferential side edge of the layer 2. The second legs 24 and the fifth through holes 25 are arranged one by one in a crossing manner. The number of the second legs 24 can be set arbitrarily, for example, 3, 4, 5, 6, etc. can be set. The number of the fourth through holes 12 may be set arbitrarily, for example, 3, 4, 5, 6, etc. may be set.
As shown in fig. 4 and 7 to 9, the first through hole 22 and the second through hole 11 of the present embodiment are both in a strip shape. The shape of the device is matched, which is beneficial to the assembly of the device.
As shown in fig. 1 to 11, the upper jig layer 1, the middle jig layer 2, and the lower jig layer 3 of the present embodiment are each of a flat plate-like structure. Specifically, the upper jig layer 1, the middle jig layer 2, and the lower jig layer 3 may be flat plate-shaped structures having any shape, for example, any shape such as a circle, an ellipse, a square, a triangle, or an irregular shape.
As shown in fig. 3 and fig. 6, the middle layer 2 of the clamp of the present embodiment is provided with a plurality of assembling grooves 21, the assembling grooves 21 are arranged in a plurality of rows, and each assembling groove 21 is provided with a first through hole 22 therein; the fixture upper layer 1 is provided with a plurality of second through holes 11, and the plurality of second through holes 11 and the plurality of first through holes 22 are arranged in a one-to-one correspondence manner. Multiple devices with pins may be clamped and thin film deposited.
The clamp of the embodiment can place the device in the assembly groove, the device pins penetrate through the first through holes and are placed in the interval between the clamp middle layer and the clamp lower layer, then the clamp upper layer covers the clamp middle layer, and the part of the peripheral side edge of the device, which does not need to deposit a medium film, is shielded, so that the film deposition of a wafer can be realized by using vacuum coating equipment, and the clamping and the film deposition of a single or a plurality of devices with pins can also be realized.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present application, unless expressly stated or limited otherwise, a first feature "on" or "under" a second feature may be directly contacting the second feature or the first and second features may be indirectly contacting the second feature through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description of the present specification, reference to the description of "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Moreover, various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without being mutually inconsistent.
Although embodiments of the present invention have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art without departing from the scope of the present invention.
Claims (10)
1. The clamp for depositing the medium film on the device is characterized by comprising an upper clamp layer, a middle clamp layer and a lower clamp layer, wherein the middle clamp layer is detachably arranged on the lower clamp layer; an assembly groove for placing a device is formed in one side face, away from the lower clamp layer, of the middle clamp layer, a first through hole for a device pin to pass through is formed in the middle of the assembly groove, and a space for accommodating the device pin is reserved between the middle clamp layer and the lower clamp layer; and a second through hole for the body of the device to pass through is formed in the upper layer of the clamp, and the size of the second through hole is smaller than that of the assembling groove.
2. The fixture for device deposition of dielectric films as recited in claim 1, wherein the first through hole has a size smaller than that of the fitting groove.
3. The fixture of claim 1, wherein a third through hole is further defined in the fixture for tool operation, the third through hole communicating with the first through hole.
4. The fixture for depositing a dielectric film on a device according to claim 3, wherein the first through hole has an elongated structure, the third through hole is located at one side of the first through hole in the length direction, and the third through hole extends to the outer side of the circumferential direction of the assembling groove.
5. The fixture for depositing a dielectric film on a device according to claim 4, wherein the third through hole has an elongated structure, and the third through hole is disposed perpendicular to the first through hole.
6. The fixture for depositing a dielectric film on a device as claimed in claim 1, wherein a plurality of first supporting legs are disposed on a side of the fixture lower layer adjacent to the fixture middle layer, the first supporting legs are disposed adjacent to a peripheral edge of the fixture lower layer, the fixture middle layer is formed with a plurality of fifth through holes, and the plurality of first supporting legs are correspondingly inserted into the corresponding fifth through holes.
7. The fixture for depositing dielectric film on device as claimed in claim 6, wherein the free end of the first leg on the lower layer of the fixture is provided with a ring-shaped limiting step, and the fifth through hole on the middle layer of the fixture is sleeved on the ring-shaped limiting step of the first leg.
8. The fixture for depositing a dielectric film on a device as claimed in claim 1, wherein a plurality of second legs are disposed on a side of the middle layer of the fixture facing away from the lower layer of the fixture, the second legs are disposed adjacent to a peripheral side edge of the middle layer of the fixture, a plurality of fourth through holes are disposed on the upper layer of the fixture, and a plurality of the second legs are correspondingly inserted into the corresponding fourth through holes.
9. The fixture for depositing the dielectric film for the device as claimed in claim 1, wherein the first through hole and the second through hole are both in a strip shape; the clamp upper layer, the clamp middle layer and the clamp lower layer are all of flat-plate structures.
10. The fixture for depositing a dielectric film on a device as claimed in claim 1, wherein a plurality of assembling slots are formed in the middle layer of the fixture, the assembling slots are arranged in a plurality of rows, and each assembling slot is formed with a first through hole; the fixture upper layer is provided with a plurality of second through holes, and the plurality of second through holes and the plurality of first through holes are arranged in a one-to-one correspondence mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221323014.3U CN217579053U (en) | 2022-05-30 | 2022-05-30 | Clamp for depositing dielectric film on device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221323014.3U CN217579053U (en) | 2022-05-30 | 2022-05-30 | Clamp for depositing dielectric film on device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217579053U true CN217579053U (en) | 2022-10-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221323014.3U Active CN217579053U (en) | 2022-05-30 | 2022-05-30 | Clamp for depositing dielectric film on device |
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| Country | Link |
|---|---|
| CN (1) | CN217579053U (en) |
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2022
- 2022-05-30 CN CN202221323014.3U patent/CN217579053U/en active Active
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