CN217349797U - Get blowing execution terminal and chip production facility - Google Patents

Get blowing execution terminal and chip production facility Download PDF

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Publication number
CN217349797U
CN217349797U CN202221047603.3U CN202221047603U CN217349797U CN 217349797 U CN217349797 U CN 217349797U CN 202221047603 U CN202221047603 U CN 202221047603U CN 217349797 U CN217349797 U CN 217349797U
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China
Prior art keywords
adaptive
seat plate
plate
self
execution terminal
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Active
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CN202221047603.3U
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Inventor
林宜龙
刘飞
水清
吴海裕
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Shenzhen Gexin Integrated Circuit Equipment Co ltd
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Shenzhen Gexin Integrated Circuit Equipment Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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Abstract

The embodiment of the utility model discloses get and expect to carry out terminal and chip production facility gets and puts material and carry out terminal and be used for carrying out getting of putting the operation to whole set of chip on the tray, and it includes: a fixed seat; the self-adaptive seat plate is arranged below the fixed seat; the rotary floating assembly is connected between the fixed seat and the self-adaptive seat plate so that the self-adaptive seat plate can adapt to the shape of the tray to realize self-adaptive rotation and telescopic floating; and the taking and placing plate is arranged on one side of the self-adaptive seat plate, which deviates from the fixing seat, a vacuum cavity is formed between the taking and placing plate and the self-adaptive seat plate in a matching manner, the vacuum cavity is communicated with external vacuum equipment, and a plurality of material sucking holes are formed in the taking and placing plate. Therefore, the material taking and placing plate can be guaranteed to be attached to the flat tray all the time, all the material sucking holes can be guaranteed to be effectively attracted with the corresponding chips, the material taking reliability is improved, and the phenomenon that the production beat and the production efficiency of equipment are influenced due to the fact that the chips are taken and placed to be invalid is prevented.

Description

Material taking and placing execution terminal and chip production equipment
Technical Field
The utility model relates to a chip production and processing technology field especially relates to a get and expect execution terminal and chip production facility.
Background
In recent years, with the continuous improvement of the consumption level and the quality of life of people, the demand of products such as consumer electronics products, intelligent interactive devices and the like is increased explosively, and chips play a role in controlling brains, so that the chip plays a vital role in the products and the demand of the chips is increased more and more.
At present, chips are prepared by chip production equipment. In the material preparation stage, the chips are placed in a special tray and enter the processing flow. During production, the single-sucker transfer manipulator sucks the chip from the tray and transfers the chip to a subsequent processing station. In consideration of improving the efficiency of picking, placing and transferring chips, a plurality of chips are generally placed on a tray, so that a transfer manipulator is required to be simultaneously provided with a plurality of suckers. However, due to the structural arrangement and size limitation, the arrangement number of the suckers is greatly limited, so that the number of chips which can be sucked at one time is very limited; moreover, if the tray has the defects of unevenness or deformation, warping and the like, the chip cannot be sucked by all the suckers at one time, the chip is inefficiently taken and put, and the normal production rhythm and the production efficiency are influenced.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a get and put material execution terminal and chip production facility for there is great limitation in the quantity of getting the chip of solving prior art, and the chip is got and is put the inefficacy and influence production efficiency and the problem of beat.
For reaching above-mentioned one or part or whole purpose or other purposes, the utility model provides a get and put material execution terminal for the operation of getting of the whole dish chip on the execution tray, get and put material execution terminal and include:
a fixed seat;
the self-adaptive seat plate is arranged below the fixed seat;
the rotary floating assembly is connected between the fixed seat and the adaptive seat plate so that the adaptive seat plate can adapt to the shape of the tray to realize adaptive rotation and telescopic floating; and
get and put the flitch, get put the flitch set up in the self-adaptation bedplate deviates from one side of fixing base, just get put the flitch with the cooperation is formed with the vacuum chamber between the self-adaptation bedplate, the vacuum chamber is used for communicating with outside vacuum apparatus, get to put the flitch and seted up a plurality of material holes of inhaling.
In one embodiment, the rotary floating component comprises a spherical body movably arranged between the fixed seat and the adaptive seat plate.
In one embodiment, a first spherical groove is concavely arranged on one side of the fixed seat facing the adaptive seat plate, and part of the spherical body is arranged in the first spherical groove in a rolling manner; and/or one side of the adaptive seat plate facing the fixed seat is concavely provided with a second spherical groove, and part of the spherical body is arranged in the second spherical groove in a rolling manner.
In one embodiment, the rotary floating assembly further comprises an elastic telescopic part, and the elastic telescopic part is connected between the fixed seat and the adaptive seat plate.
In one embodiment, a mounting column is convexly arranged on one side of the adaptive seat plate facing the fixed seat, the fixed seat is provided with a matching plate, the mounting column is penetrated through by the matching plate, a limiting end cap is arranged at one end of the mounting column far away from the adaptive seat plate, the elastic expansion piece is arranged on the mounting column, one end of the elastic expansion piece is abutted against the matching plate, and the other end of the elastic expansion piece is abutted against the limiting end cap.
In one embodiment, the mounting column, the matching plate, the limiting end cap and the elastic expansion piece are arranged in two and are assembled and connected in a one-to-one correspondence manner and are respectively arranged on two opposite sides of the fixing seat.
In one embodiment, the material taking and placing execution terminal further comprises a vacuum joint, the adaptive seat plate is provided with a mounting through hole, and the vacuum joint is inserted into the mounting through hole and communicated with the vacuum chamber.
In one embodiment, the two mounting through holes are arranged on two opposite sides of the fixing seat in parallel, and the two vacuum connectors are correspondingly inserted into the mounting through holes one by one.
In one embodiment, the material taking and placing execution terminal further comprises a sealing ring, and the sealing ring is arranged between the adaptive seat plate and the material taking and placing plate in a sealing manner.
A chip production apparatus comprising the above-described pick-and-place execution terminal.
Implement the embodiment of the utility model provides a, will have following beneficial effect:
the material taking and placing execution terminal is applied to the chip production and processing flow and is specifically used for taking out the whole disc of chips placed on the tray at one time and transferring the whole disc of chips to a subsequent processing station. When the material taking and placing execution terminal is used, the fixed seat is connected with the peripheral motion module (such as a transfer manipulator), and the peripheral motion module can provide power required by the space movement of the material taking and placing execution terminal. When the material taking and placing execution terminal moves to the position above the tray and close to the height position of the chip, the external vacuum equipment is started, the vacuum cavity is vacuumized, negative pressure suction force can be generated at the material sucking hole, and the chip can be sucked and fixed so as to be taken out of the tray. Compared with the mode of arranging a plurality of suckers in the prior art, the material sucking holes are limited by small structural and spatial constraints, namely more material sucking holes can be theoretically processed on the material taking and placing plate, and each material sucking hole can respectively adsorb one chip, so that the whole disc of chips placed on the tray can be completely taken out by the material taking and placing execution terminal at one time, and the material taking capability is greatly improved; in addition, because install rotatory subassembly that floats between fixing base and the self-adaptation bedplate, when the tray has shape defects such as unevenness or deformation warpage, rotatory subassembly that floats can make the shape change of self-adaptation bedplate adaptation tray and self-adaptation rotatory and flexible the floating to guarantee to get to put the flitch and can paste the flat tray all the time, guarantee that all inhale the material hole and can both keep effective actuation with the chip that corresponds, promote and get the material reliability, prevent that the chip is got and is put the inefficacy and influence equipment production beat and production efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Wherein:
fig. 1 is a schematic structural view of a material taking and placing execution terminal according to an embodiment of the present invention;
FIG. 2 is a top view of the structure of FIG. 1;
fig. 3 is a cross-sectional view taken at a-a in fig. 2.
Description of reference numerals:
100. taking and placing an executing terminal; 10. a fixed seat; 11. a first spherical groove; 20. a self-adaptive seat plate; 21. a second spherical groove; 22. mounting a column; 23. a limiting end cap; 24. mounting a through hole; 30. a rotary floating assembly; 31. a spherical body; 32. an elastic extensible member; 40. taking and placing the material plate; 41. a suction hole; 50. a vacuum chamber; 60. a vacuum joint; 70. and (5) sealing rings.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be interconnected within two elements or in a relationship where two elements interact with each other unless otherwise specifically limited. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
As shown in fig. 1 to fig. 3, a pick-and-place execution terminal 100 according to an embodiment of the present disclosure is used for performing pick-and-place operations on a whole tray of chips on a tray, for example, after the whole tray(s) of chips placed on the tray is taken out, the whole tray is transferred to a tray in a detection station. Illustratively, the pick and place material execution terminal 100 includes: the device comprises a fixed seat 10, an adaptive seat plate 20, a rotary floating assembly 30 and a material taking and placing plate 40.
The adaptive seat plate 20 is arranged below the fixed seat 10; the rotary floating assembly 30 is connected between the fixed seat 10 and the adaptive seat plate 20, so that the adaptive seat plate 20 can adapt to the shape of the tray to be adaptive to rotary and telescopic floating; get and put flitch 40 set up in the self-adaptation bedplate 20 deviates from one side of fixing base 10, just get flitch 40 with the cooperation is formed with vacuum chamber 50 between the self-adaptation bedplate 20, vacuum chamber 50 is used for communicating with outside vacuum apparatus, get flitch 40 and seted up a plurality of material holes 41 that inhale.
In summary, the implementation of the technical solution of the present embodiment has the following beneficial effects: the material taking and placing execution terminal 100 of the above scheme is applied to a chip production and processing flow, and is specifically used for taking out a whole disk of chips placed on a tray at one time and transferring the whole disk of chips to a subsequent processing station. In use, the mounting base 10 is connected to a peripheral motion module (e.g., a transfer robot), and the peripheral motion module can provide power for moving the material pick-and-place execution terminal 100 in a space. When the pick-and-place performing terminal 100 moves above the tray and approaches the height position of the chip, the external vacuum device is turned on, and the vacuum chamber 50 is evacuated, so that a negative pressure suction force is generated at the suction hole 41, and the chip can be sucked and fixed to be taken out from the tray. Compared with the mode of arranging a plurality of suckers in the prior art, the material sucking holes 41 are limited by small structural and spatial constraints, that is, more material sucking holes 41 can be theoretically processed on the material taking and placing plate 40, each material sucking hole 41 can respectively adsorb one chip (or when the number of chips is less than that of the material sucking holes 41, part of the material sucking holes 41 do not suck the chips), so that the material taking and placing execution terminal 100 can take out all the chips placed on the tray once, and the material taking capability is greatly improved.
In addition, because the rotary floating component 30 is installed between the fixed seat 10 and the adaptive seat plate 20, when the tray has shape defects such as unevenness or deformation, warping and the like, the rotary floating component 30 can make the adaptive seat plate 20 adapt to the shape change of the tray and realize adaptive rotation and telescopic floating, so that the material taking and placing plate 40 can be always flatly attached to the tray, all the material sucking holes 41 can be ensured to be effectively attracted with corresponding chips, the material taking reliability is improved, and the phenomenon that the chip taking and placing are invalid to influence the production rhythm and the production efficiency of equipment is prevented.
With continued reference to fig. 1 and 3, in some embodiments, the rotary floating component 30 includes a spherical body 31, and the spherical body 31 is movably disposed between the fixed seat 10 and the adaptive seat plate 20. The spherical body 31 has all degrees of freedom in space, for example, all degrees of freedom in rotation in the X-axis direction, the Y-axis direction and the Z-axis direction, so that the adaptive seat plate 20 can have the capability of rotational movement in the X-axis direction, the Y-axis direction and the Z-axis direction even supported by the spherical body 31 after being connected with the fixed seat 10 through the spherical body 31, and the material taking and placing plate 40 can adapt to the shape of the tray to ensure that the tray is always flush with the tray.
For example, in the present embodiment, the spherical body 31 is a steel ball. The steel ball has high strength, small deformation amount generated by compression and good durability, and can ensure good rotary supporting capability to the self-adaptive seat plate 20 after long-time use. Of course, the spherical body 31 in other embodiments may also be made of other materials, which are not described herein.
With continued reference to fig. 3, in order to ensure that the spherical body 31 can be stably installed between the fixing base 10 and the adaptive seat plate 20, in some embodiments, a first spherical groove 11 is concavely provided on a side of the fixing base 10 facing the adaptive seat plate 20, and a portion of the spherical body 31 is rolling-installed in the first spherical groove 11; and/or a second spherical groove 21 is concavely arranged on one side of the adaptive seat plate 20 facing the fixed seat 10, and part of the spherical body 31 is arranged in the second spherical groove 21 in a rolling manner. The shape adaptation of first spherical groove 11 and/or second spherical groove 21 and spheroid 31 not only can guarantee that spheroid 31 rotates smoothly in any direction, plays the limiting displacement to spheroid 31 simultaneously, prevents spheroid 31 from slipping from between fixing base 10 and the self-adaptation bedplate 20.
With reference to fig. 3, further, the rotary floating assembly 30 further includes an elastic expansion element 32, and the elastic expansion element 32 is connected between the fixing base 10 and the adaptive seat plate 20. When facing the tray with the shape fluctuating change, the elastic expansion piece 32 can provide the expansion floating capability of the adaptive seat plate 20, so that the material taking and placing plate 40 can be adaptive to the shape change of the tray to keep flat with the tray, and the reliability of chip suction is improved. Optionally, in this embodiment, the elastic expansion member 32 is a spring. In other embodiments, the elastic expansion element 32 may be a member or device having elastic elasticity, such as an elastic column or an elastic sheet.
With reference to fig. 1 and fig. 3, in addition, on the basis of the above embodiment, an installation column 22 is convexly disposed on one side of the adaptive seat plate 20 facing the fixed seat 10, the fixed seat 10 is provided with a matching plate, the installation column 22 passes through the matching plate, one end of the installation column 22 away from the adaptive seat plate 20 is provided with a limit end cap 23, the elastic expansion piece 32 is disposed on the installation column 22, and one end of the elastic expansion piece 32 abuts against the matching plate, and the other end abuts against the limit end cap 23. Install elastic expansion piece 32 on erection column 22, can guarantee that elastic expansion piece 32 installs more firmly, and cooperation board and spacing end cap 23 have retrained elastic expansion piece 32's the degree of freedom that extends, have realized that the self-adaptation of self-adaptation bedplate 20 adaptation tray shape change floats.
Preferably, the mounting post 22, the mating plate, the limiting end cap 23 and the elastic expansion element 32 are disposed in two and assembled together in one-to-one correspondence and arranged on two opposite sides of the fixing base 10. So, can guarantee that self-adaptation bedplate 20 and get that to put flitch 40 atress balanced, flexible gesture is stable to guarantee to get the state of laying flat of putting flitch 40 and tray, promote the chip and absorb the reliability.
With reference to fig. 1 to fig. 3, in addition to any of the above embodiments, the material taking and placing execution terminal 100 further includes a vacuum joint 60, the adaptive seat plate 20 is provided with an installation through hole 24, and the vacuum joint 60 is inserted into the installation through hole 24 and is communicated with the vacuum chamber 50. The vacuum connector 60 is convenient to connect with a vacuum tube of an external vacuum device, and is convenient to assemble and disassemble, so that the convenience of the material taking and placing execution terminal 100 is improved.
Preferably, the two installation through holes 24 are arranged on two opposite sides of the fixing base 10, and the two vacuum connectors 60 are arranged and correspondingly inserted into the installation through holes 24 one by one. Because a plurality of material sucking holes 41 are arranged on the material taking and placing plate 40, and the material sucking holes 41 are distributed in a plane with a large area, through the arrangement of the two vacuum connectors 60, all the material sucking holes 41 can be ensured to be capable of quickly and nearly synchronously generating vacuum suction force, so that the synchronism and the reliability of sucking all chips on the tray are ensured.
It should be noted that, when the area of the material taking and placing plate 40 is larger, which results in a larger distribution area of all the material sucking holes 41, the distribution uniformity of the number of the mounting through holes 24 and the vacuum connectors 60 can be increased appropriately.
Further, in order to prevent the vacuum leakage problem from affecting the suction effectiveness of the chip, the material taking and placing execution terminal 100 further includes a sealing ring 70, and the sealing ring 70 is sealingly disposed between the adaptive seat plate 20 and the material taking and placing plate 40. The provision of the sealing ring 70 can ensure the vacuum degree of the vacuum chamber 50 and prevent the occurrence of a vacuum leakage problem.
Preferably, in order to ensure that the sealing ring 70 is stably and reliably mounted, the adaptive seat plate 20 and/or the pick-and-place plate 40 are/is provided with a sealing groove, the sealing ring 70 is embedded in the sealing groove, and the sealing groove has a clamping effect on the sealing ring 70, so that the mounting firmness is ensured. Alternatively, the sealing ring 70 may be, but is not limited to, a rubber ring.
It can be understood that, after the pick-and-place execution terminal 100 sucks the whole disk of chips and transfers the whole disk of chips to the upper side of the subsequent station, the external vacuum equipment is stopped, the vacuum condition in the vacuum chamber 50 disappears, the vacuum is broken in the pick-and-place hole 41, and the chips lose the vacuum suction force and can fall off by themselves under the self-weight. The chip placement method is simple and reliable.
When the work object is a large chip, the weight of the large chip is large enough to satisfy the above-mentioned dead weight drop scheme. However, when the work object is a small chip, the external vacuum equipment needs to change the suction to slight blowing to assist the small chip to fall off to prevent adhesion due to insufficient weight of the small chip.
In addition, the present application also provides a chip production apparatus, which includes the material taking and placing execution terminal 100 according to any of the above embodiments.
All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims (10)

1. The utility model provides a get and put material execution terminal for carry out get put the operation to whole dish chip on the tray, its characterized in that, get the blowing execution terminal and include:
a fixed seat;
the self-adaptive seat plate is arranged below the fixed seat;
the rotary floating assembly is connected between the fixed seat and the adaptive seat plate so that the adaptive seat plate can adapt to the shape of the tray to realize adaptive rotation and telescopic floating; and
get and put the flitch, get put the flitch set up in the self-adaptation bedplate deviates from one side of fixing base, just get put the flitch with the cooperation is formed with the vacuum chamber between the self-adaptation bedplate, the vacuum chamber is used for communicating with external vacuum equipment, get the flitch and seted up a plurality of material holes of inhaling.
2. The pick-and-place execution terminal as in claim 1, wherein the rotary floating assembly comprises a spherical body movably disposed between the fixed seat and the adaptive seat plate.
3. The material picking and placing execution terminal as claimed in claim 2, wherein a first spherical groove is concavely provided on one side of the fixed seat facing the adaptive seat plate, and a part of the spherical body is arranged in the first spherical groove in a rolling manner; and/or one side of the self-adaptive seat plate facing the fixed seat is concavely provided with a second spherical groove, and part of the spherical body is arranged in the second spherical groove in a rolling manner.
4. The pick-and-place execution terminal of claim 1, wherein the rotary floating assembly further comprises an elastic expansion member connected between the fixed base and the adaptive seat plate.
5. The terminal according to claim 4, wherein a mounting post is protruded from a side of the adaptive seat plate facing the fixing base, the fixing base has a matching plate, the mounting post is penetrated by the matching plate, a limiting end cap is disposed at an end of the mounting post away from the adaptive seat plate, the elastic expansion member is disposed on the mounting post, and one end of the elastic expansion member abuts against the matching plate and the other end abuts against the limiting end cap.
6. The pick-and-place execution terminal as claimed in claim 5, wherein the mounting posts, the mating plate, the limiting end cap and the elastic expansion member are arranged in two and assembled in a one-to-one correspondence and arranged on opposite sides of the fixing base.
7. The terminal of claim 1, further comprising a vacuum connector, wherein the adaptive seat plate defines a mounting hole, and the vacuum connector is inserted into the mounting hole and communicates with the vacuum chamber.
8. The pick-and-place execution terminal as claimed in claim 7, wherein the two mounting through holes are arranged in parallel and respectively arranged at two opposite sides of the fixing base, and the two vacuum connectors are arranged in a one-to-one corresponding plugging connection with the mounting through holes.
9. The pick-and-place handling execution terminal of claim 1, further comprising a sealing ring, the sealing ring being sealingly disposed between the adaptive seat plate and the pick-and-place plate.
10. Chip production equipment, characterized in that it comprises a pick-and-place execution terminal according to any one of claims 1 to 9.
CN202221047603.3U 2022-04-29 2022-04-29 Get blowing execution terminal and chip production facility Active CN217349797U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221047603.3U CN217349797U (en) 2022-04-29 2022-04-29 Get blowing execution terminal and chip production facility

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221047603.3U CN217349797U (en) 2022-04-29 2022-04-29 Get blowing execution terminal and chip production facility

Publications (1)

Publication Number Publication Date
CN217349797U true CN217349797U (en) 2022-09-02

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ID=83011627

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221047603.3U Active CN217349797U (en) 2022-04-29 2022-04-29 Get blowing execution terminal and chip production facility

Country Status (1)

Country Link
CN (1) CN217349797U (en)

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