CN217313324U

CN217313324U - Automatic gallium source supplying and recovering device

Info

Publication number: CN217313324U
Application number: CN202123296415.2U
Authority: CN
Inventors: 谈逊; 谈谦; 刘宁波; 刘才; 吴曦; 王占玲
Original assignee: Huaxia Semiconductor Shenzhen Co ltd
Current assignee: Huaxia Semiconductor Shenzhen Co ltd
Priority date: 2021-12-24
Filing date: 2021-12-24
Publication date: 2022-08-30
Anticipated expiration: 2031-12-24

Abstract

The utility model relates to the technical field of semiconductor materials and equipment, and discloses an automatic gallium source supply and recovery device, which comprises a gallium boat, wherein the gallium boat is communicated with a tank body I through a communicating pipe; the tank body I is communicated with a tank body II through the extraction mechanism; an electromagnetic valve is fixedly arranged on the communicating pipe; the gallium boat is communicated with a gas supply mechanism; the inside of jar body one and jar body two all is equipped with heating plate, level sensor and temperature sensor, the temperature sensor communication is connected with the PLC controller, the PLC controller is connected with heating plate, level sensor, air feed mechanism, solenoid valve and extraction mechanism communication respectively. The utility model provides a gallium source automatic supply and recovery unit, the utility model discloses a be equipped with PLC control and carry out automatic supply and recovery to stabilize growth rate, retrieve when maintaining simultaneously.

Description

Automatic gallium source supplying and recovering device

Technical Field

The utility model relates to a semiconductor material and equipment technical field especially relate to a gallium source automatic supply and recovery unit.

Background

Gallium nitride (GaN), as a typical representative of the third generation semiconductor material, has excellent properties such as high thermal conductivity, high electron mobility, high breakdown voltage, and radiation resistance, and has a great application prospect in the manufacture of high-frequency, high-temperature, and high-power optoelectronic devices. At present, there are various main methods for producing GaN single crystals. HVPE is a more classical normal pressure hot wall chemical vapor deposition technology, has the obvious advantages of higher growth rate, simpler growth process, capability of growing thicker GaN layers and the like, and is very suitable for preparing self-supporting nitride substrate materials. The main principle of HVPE nitride growth is metal gallium as III-group gallium source, ammonia (NH) ₃ ) As a group V nitrogen source, hydrogen chloride (HCl) is used as a reaction gas and reacts with metal gallium in a carrier gas (hydrogen or nitrogen) carried by a gallium boat to generate gallium chloride (GaCl) which is arranged above a substrate and reacts with NH ₃ The reaction produces GaN and deposits on the substrate.

However, in the process of growing nitride semiconductor material by using HVPE technology, gallium is continuously consumed, the liquid level of gallium source is continuously decreased, resulting in that the concentration of generated GaCl is gradually reduced under the same process conditions, which seriously affects the uniform stability of source material supply in the growth system of nitride material, the growth rate is also decreased, and finally the thickness and crystal quality of the growth film layer cannot be accurately controlled, so that the process repeatability of HVPE epitaxial growth thick film is poor, the yield and reliability of nitride products are difficult to control, which greatly limits the wide application of HVPE technology in the growth of nitride thick film, and meanwhile, when HVPE equipment is maintained, if gallium boat contains unused gallium source, the gallium boat needs to be additionally purified due to the oxidation of gallium source after maintenance, which increases the production cost.

In order to solve the problems, the application provides an automatic gallium source supplying and recovering device.

SUMMERY OF THE UTILITY MODEL

Objects of the first utility model

For solving the technical problem that exists among the background art, the utility model provides a gallium source automatic supply and recovery unit, the utility model discloses a be equipped with PLC control and carry out automatic supply and retrieve to stabilize growth rate, retrieve when maintaining simultaneously.

(II) technical scheme

In order to solve the problems, the utility model provides an automatic gallium source supply and recovery device, which comprises a gallium boat, wherein the gallium boat is communicated with a tank body I through a communicating pipe;

the tank body I is communicated with a tank body II through the extraction mechanism;

an electromagnetic valve is fixedly arranged on the communicating pipe;

the gallium boat is communicated with a gas supply mechanism;

jar body one all is equipped with heating plate, level sensor and temperature sensor with jar inside of body two, the temperature sensor communication is connected with the PLC controller, the PLC controller is connected with heating plate, level sensor, air feed mechanism, solenoid valve and extraction mechanism communication respectively.

Preferably, the extraction mechanism includes the extraction pump, the inlet of extraction pump passes through pipeline and jar interior bottom intercommunication of body two, the liquid outlet of extraction pump passes through pipeline and jar body one intercommunication, the extraction pump is connected with the communication of PLC controller.

Preferably, the air feed mechanism includes air feed pump and air supply pipe, the gas vent of air feed pump passes through air supply pipe and gallium boat intercommunication, the air feed pump is connected with the communication of PLC controller.

Preferably, the PLC controller is in communication connection with a mobile terminal through a wireless communication module.

Preferably, the number of the mobile terminals is multiple, and the mobile terminals are mobile phone terminals.

The above technical scheme of the utility model following profitable technological effect has:

gallium is put into the inside of the second tank body, the heating sheet inside the second tank body is started, the heating sheet heats the gallium, the heated liquid gallium is pumped into the inside of the first tank body through the extracting pump, the gallium boat and the first tank body form a communicating device under the action of the communicating pipe, so that the liquid gallium entering the inside of the first tank body enters the gallium boat, when the liquid level inside the first tank body exceeds a preset value, the extracting pump stops, along with continuous consumption of the liquid gallium inside the gallium boat, the liquid gallium inside the first tank body enters the gallium boat to be supplemented timely, the reaction rate is stabilized, real-time detection is carried out through a liquid level sensor inside the second tank body, the liquid level in the second tank body is detected, when the liquid level is lower than a normal set value, a worker is informed through a PLC (programmable logic controller), and the automatic reminding effect is achieved.

Drawings

Fig. 1 is the utility model provides an automatic supply of gallium source and recovery unit's schematic structure diagram.

Fig. 2 is a system diagram of the gallium source automatic supply and recovery device provided by the present invention.

Reference numerals: 1. a gallium boat; 2. a communicating pipe; 3. a first tank body; 4. a drawing mechanism; 41. a suction pump; 5. a second tank body; 6. an electromagnetic valve; 7. an air supply mechanism; 71. an air supply pump; 72. a gas supply pipe; 8. a heating plate; 9. a liquid level sensor; 10. a temperature sensor; 11. a PLC controller.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings. It should be understood that the description is intended to be illustrative only and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.

As shown in fig. 1-2, the utility model provides an automatic gallium source supplying and recovering device, which comprises a gallium boat 1, wherein the gallium boat 1 is communicated with a tank body 1 through a communicating pipe 2;

the tank body I3 is communicated with a tank body II 5 through a drawing mechanism 4;

an electromagnetic valve 6 is fixedly arranged on the communicating pipe 2;

the gallium boat 1 is communicated with a gas supply mechanism 7;

jar body one 3 all is equipped with heating plate 8 with jar body two 5 inside, level sensor 9 and temperature sensor 10, temperature sensor 10 communication connection has PLC controller 11, PLC controller 11 respectively with heating plate 8, level sensor 9, air feed mechanism 7, solenoid valve 6 and extraction mechanism 4 communication connection, jar body one 3 respectively responds to its inside liquid gallium's temperature with the temperature sensor 10 in jar body two 5, and with data information transmission to PLC controller 11 in, PLC controller 11 starts or closes heating plate 8, heat or stop heating gallium, make gallium keep in liquid, the use of dynamic adjustment in order to reduce the energy (avoid heating plate 8 to be in opening the heating state always and consume the phenomenon of energy).

In an optional embodiment, the extracting mechanism 4 includes an extracting pump 41, a liquid inlet of the extracting pump 41 is communicated with the bottom inside the tank body two 5 through a pipeline, a liquid outlet of the extracting pump 41 is communicated with the tank body one 3 through a pipeline, the extracting pump 41 is in communication connection with the PLC controller 11, and the extracting pump 41 is used for extracting the liquid gallium inside the tank body two 5 into the tank body one 3.

In an optional embodiment, the gas supply mechanism 7 includes a gas supply pump 71 and a gas supply pipe 72, an exhaust port of the gas supply pump 71 is communicated with the gallium boat 1 through the gas supply pipe 72, the gas supply pump 71 is in communication connection with the PLC controller 11, during maintenance, HCl gas is externally connected through the gas supply pump 71, the electromagnetic valve 6 is opened, as the HCl gas enters the inside of the gallium boat 1, liquid gallium inside the gallium boat 1 enters the inside of the tank body one 3 through the communication pipe 2, as the liquid gallium enters the tank body one 3, the electromagnetic valve 6 is closed, and therefore, during maintenance, a waste phenomenon caused by a reaction between unreacted gallium and outside air does not occur.

In an alternative embodiment, the PLC controller 11 is communicatively connected to a mobile terminal through a wireless communication module, so as to remotely notify the status of the whole device.

In an optional embodiment, the number of the mobile terminals is multiple, and the mobile terminals are mobile terminals, and the mobile terminals are configured to receive the data message sent by the PLC controller 11.

It should be noted that, the gallium boat 1 is communicated with the tank body one 3 through the communicating pipe 2 to convey gallium liquid and recycle the gallium liquid, so that an additional communicating pipeline is not needed, and the occupied space is reduced.

In the utility model, gallium is put into the tank body II 5, the heating plate 8 in the tank body II 5 is started, the gallium is heated by the heating plate 8, the heated liquid gallium is pumped into the tank body I3 by the pump 41, because the gallium boat 1 and the tank body I3 form a communicating vessel under the action of the communicating pipe 2, the liquid gallium entering the tank body I3 enters the gallium boat 1, when the liquid level inside the tank body I3 exceeds a preset value, the pumping pump 41 is stopped, and as the liquid gallium in the gallium boat 1 is continuously consumed, the liquid gallium in the tank body one 3 enters the gallium boat 1 to be supplemented in time so as to stabilize the reaction rate, the liquid level in the second tank body 5 is detected in real time through the liquid level sensor 9 in the second tank body 5, when the value is lower than the normal set value (no), the PLC 11 informs the staff to play the role of automatic reminding.

It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.

Claims

1. The utility model provides an automatic supply of gallium source and recovery unit, includes gallium boat (1), its characterized in that: the gallium boat (1) is communicated with a tank body I (3) through a communicating pipe (2);

the tank body I (3) is communicated with a tank body II (5) through a drawing mechanism (4);

an electromagnetic valve (6) is fixedly arranged on the communicating pipe (2);

the gallium boat (1) is communicated with a gas supply mechanism (7);

jar body (3) all are equipped with heating plate (8), level sensor (9) and temperature sensor (10) with the inside of jar body two (5), temperature sensor (10) communication is connected with PLC controller (11), PLC controller (11) are connected with heating plate (8), level sensor (9), air feed mechanism (7), solenoid valve (6) and extraction mechanism (4) communication respectively.

2. The automatic gallium source supplying and recovering device according to claim 1, wherein the extracting mechanism (4) comprises an extracting pump (41), a liquid inlet of the extracting pump (41) is communicated with the inner bottom of the second tank body (5) through a pipeline, a liquid outlet of the extracting pump (41) is communicated with the first tank body (3) through a pipeline, and the extracting pump (41) is in communication connection with the PLC (11).

3. The automatic supply and recovery device for gallium source according to claim 1, characterized in that the gas supply mechanism (7) comprises a gas supply pump (71) and a gas supply pipe (72), the gas outlet of the gas supply pump (71) is connected to the gallium boat (1) through the gas supply pipe (72), and the gas supply pump (71) is connected to the PLC controller (11) in communication.

4. The automatic supply and recovery device for gallium source according to any one of claims 1 to 3, wherein the PLC controller (11) is connected with a mobile terminal through a wireless communication module.

5. The apparatus according to claim 4, wherein the movable terminals are mobile terminals.