CN217270827U - Integrated nitrogen purging module and dry vacuum pump - Google Patents
Integrated nitrogen purging module and dry vacuum pump Download PDFInfo
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- CN217270827U CN217270827U CN202221278805.9U CN202221278805U CN217270827U CN 217270827 U CN217270827 U CN 217270827U CN 202221278805 U CN202221278805 U CN 202221278805U CN 217270827 U CN217270827 U CN 217270827U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
The embodiment of the utility model provides an integral type nitrogen gas sweeps module and dry vacuum pump relates to semiconductor technical field. Integral type nitrogen gas sweeps module includes the module main part and installs the check valve that admits air, relief pressure valve and main way solenoid valve in the module main part, and the module main part is inside to have seted up the air flue, still sets up a plurality of gas outlets with the air flue intercommunication, installs the current-limiting screw in every gas outlet, and the check valve that admits air is used for connecting the nitrogen gas source, and through the air flue, the check valve that admits air, relief pressure valve, main way solenoid valve and gas outlet communicate in proper order. The integrated nitrogen purging module can perform nitrogen purging on a plurality of positions on the pump body, the nitrogen flow at each position can be flexibly adjusted, and the nitrogen line arrangement integration level is high and the occupied space is small.
Description
Technical Field
The utility model relates to the field of semiconductor technology, particularly, relate to an integral type nitrogen gas sweeps module and dry vacuum pump.
Background
With the development of economy, the progress of society and the rise of the photovoltaic semiconductor industry, the domestic demand for dry vacuum pumps is increasing day by day; in order to deal with corrosive gas and dust which often occur in photovoltaic and semiconductor production processes, a certain amount of nitrogen is generally introduced into an exhaust cavity of a dry vacuum pump for diluting and purging the corrosive gas and dust, so that the cavity and a rotor are prevented from being corroded.
However, in the prior art, a certain amount of nitrogen is simply introduced into the vacuum pump, the flow rate of the nitrogen is rated, and the position of the nitrogen is fixed, so that the purging and diluting functions of the nitrogen cannot meet the use requirements of various working conditions on a customer site, and the nitrogen introducing line is complex in arrangement, large in occupied space and high in cost.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an integral type nitrogen gas sweeps module and dry vacuum pump, it can carry out nitrogen gas to a plurality of positions on the pump body and sweep, and the nitrogen gas flow of every position can be adjusted in a flexible way moreover, and the circuit arrangement integrated level of nitrogen gas is high, occupation space is little.
The embodiment of the utility model discloses a can realize like this:
in a first aspect, the utility model provides an integral type nitrogen gas sweeps module, integral type nitrogen gas sweep module include the module main part and install the check valve that admits air, relief pressure valve and main way solenoid valve in the module main part, and the air flue has been seted up to module main part inside, still sets up a plurality of gas outlets with the air flue intercommunication, installs the current-limiting screw in every gas outlet, and the check valve that admits air is used for connecting the nitrogen gas source, through the air flue, and the check valve that admits air, relief pressure valve, main way solenoid valve and gas outlet communicate in proper order.
In an alternative embodiment, the number of air outlets is six and opens on the same side surface of the module body.
In an optional embodiment, the integrated nitrogen purging module further includes an air intake purging pipeline, an LV cavity purging pipeline, a shaft seal purging pipeline, a third-fourth-stage cavity purging pipeline, a fourth-fifth-stage cavity purging pipeline and an exhaust cavity purging pipeline, and the integrated nitrogen purging module is connected to six air outlets respectively, the air intake purging pipeline is used for being connected to an air inlet of the pump body, the LV cavity purging pipeline is used for being connected to the LV cavity of the pump body, the shaft seal purging pipeline is used for being connected to the shaft seal cavity of the pump body, the third-fourth-stage cavity purging pipeline is used for being connected to the third-fourth-stage cavity of the pump body, the fourth-fifth-stage cavity purging pipeline is used for being connected to the fourth-fifth-stage cavity of the pump body, and the exhaust cavity purging pipeline is used for being connected to the exhaust cavity of the pump body.
In an optional embodiment, the integrated nitrogen purging module further comprises a pressure sensor installed on the module body, the pressure sensor is communicated with the air outlet of the purging pipeline connected with the exhaust cavity, and the pressure sensor is used for monitoring the pressure of the exhaust port of the exhaust cavity of the pump body.
In an optional embodiment, the integrated nitrogen purging module further comprises a manual opening and closing valve mounted on the module body, and the manual opening and closing valve is used for controlling the opening and closing of the two air outlets connecting the three-fourth-stage chamber purging pipeline and the four-fifth-stage chamber purging pipeline.
In an alternative embodiment, the integrated nitrogen purge module further comprises a flow meter mounted on the module body and communicating between the pressure reducing valve and the main circuit solenoid valve through an air passage.
In an optional embodiment, the integrated nitrogen purging module further includes a plurality of branch solenoid valves, the branch solenoid valves are installed on the module main body and communicated between the main path solenoid valve and the plurality of gas outlets through gas passages, and the branch solenoid valves are respectively used for controlling the conduction or the disconnection of each gas outlet and the main path solenoid valve.
In a second aspect, the present invention provides a dry vacuum pump comprising a pump body and an integrated nitrogen purge module connected to the pump body according to the previous embodiment.
In an optional embodiment, the number of the gas outlets of the integrated nitrogen purging module is six, the integrated nitrogen purging module further comprises a gas inlet purging pipeline, a LV cavity purging pipeline, a shaft seal purging pipeline, a three-fourth-order cavity purging pipeline, a four-fifth-order cavity purging pipeline and a gas exhaust cavity purging pipeline, the gas inlet purging pipeline is connected to the six gas outlets respectively, the LV cavity purging pipeline is connected to a gas inlet of the pump body, the shaft seal purging pipeline is connected to the LV cavity of the pump body, the shaft seal purging pipeline is connected to the shaft seal cavity of the pump body, the three-fourth-order cavity purging pipeline is connected to the three-fourth-order cavity of the pump body, the four-fifth-order cavity purging pipeline is connected to the four-fifth-order cavity of the pump body, and the gas exhaust cavity purging pipeline is connected to the gas exhaust cavity of the pump body.
In an optional embodiment, the integrated nitrogen purging module further comprises a pressure sensor installed on the module body, the pressure sensor is communicated with the gas outlet of the purging pipeline connected with the exhaust cavity, and the pressure sensor is used for monitoring the pressure of the exhaust port of the exhaust cavity of the pump body.
The embodiment of the utility model provides an integral type nitrogen gas sweeps module and dry vacuum pump's beneficial effect includes:
1. the module main body is integrated with the air inlet one-way valve, the pressure reducing valve and the main path electromagnetic valve, and is provided with a plurality of air outlets, so that the module main body can be connected to a plurality of positions on a pump body for nitrogen purging, the module is highly integrated, the occupied space is reduced, the number of components is reduced, and the cost is reduced;
2. install the current-limiting screw in every gas outlet, the nitrogen gas flow in every position can be adjusted in a flexible way, only needs to change the current-limiting screw can adjust the flow of each gas outlet, satisfies the nitrogen gas of different models pump and sweeps the demand, and application scope is wide.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a first view angle of an integrated nitrogen purging module according to a first embodiment of the present invention;
fig. 2 is a schematic structural diagram of a second view angle of the integrated nitrogen purging module according to the first embodiment of the present invention;
fig. 3 is a schematic structural diagram of a first view angle of an integrated nitrogen purging module according to a second embodiment of the present invention;
fig. 4 is a schematic structural diagram of a second view angle of the integrated nitrogen purging module according to the second embodiment of the present invention;
fig. 5 is a schematic structural diagram of a dry vacuum pump according to a third embodiment of the present invention at a first viewing angle;
fig. 6 is a schematic structural diagram of a dry vacuum pump according to a second view angle according to a third embodiment of the present invention.
Icon: 100-an integrated nitrogen purge module; 110-a module body; 111-gas outlet; 120-air inlet check valve; 130-a pressure relief valve; 140-a flow meter; 150-main path solenoid valve; 160-a pressure sensor; 170-manual open and close valve; 180-purging the pipeline; 181-an inlet purge line; 182-LV cavity purge line; 183-shaft seal purge line; 184-a tertiary-quaternary chamber purge conduit; 185-a forty-five chamber purge line; 186-exhaust chamber purge line; 190-branch electromagnetic valve; 200-a dry vacuum pump; 210-pump body.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that, if the terms "upper", "lower", "inner", "outer", etc. indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the products of the present invention are used, the description is only for convenience of description and simplification, but the indication or suggestion that the indicated device or element must have a specific position, be constructed and operated in a specific orientation, and thus, should not be interpreted as a limitation of the present invention.
Furthermore, the appearances of the terms "first," "second," and the like, if any, are only used to distinguish one description from another and are not to be construed as indicating or implying relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
First embodiment
Referring to fig. 1 and 2, the present embodiment provides an integrated nitrogen purging module 100, and the integrated nitrogen purging module 100 includes a module body 110, and an intake check valve 120, a pressure reducing valve 130, a flow meter 140, a main circuit solenoid valve 150, a pressure sensor 160, and a manual on-off valve 170 mounted on the module body 110.
An air passage (not shown in the figure) is formed inside the module main body 110, six air outlets 111 are formed in the same side surface of the module main body 110, and the module main body 110 is designed to be of a cuboid structure, so that the air passage and the air outlets 111 are formed in the module main body 110 and are convenient to process. In this embodiment, the number of the air outlets 111 is six, and in other embodiments, the number of the air outlets 111 may be flexibly designed according to the number of the positions of the pump body 210 requiring nitrogen purging.
The inlet check valve 120 is used for connecting a nitrogen source, and the inlet check valve 120, the pressure reducing valve 130, the flow meter 140, the main solenoid valve 150 and the air outlet 111 are sequentially communicated through an air passage.
The pressure sensor 160 is installed on the module body 110 and is communicated with one of the air outlets 111, and the pressure sensor 160 can monitor the pressure in the air outlet 111, that is, the pressure in the position connected to the air outlet 111 in the pump body 210, for example, the air outlet 111 can be connected to the exhaust cavity of the pump body 210 to monitor the pressure of the exhaust port of the exhaust cavity, so as to avoid abnormal exhaust of the pump body 210 and damage to the equipment.
The manual on-off valve 170 is installed on the module body 110, and the manual on-off valve 170 can independently control the opening and closing of one or two air outlets 111, so that some air outlets 111 can be closed when the number of positions of the pump body 210 requiring nitrogen purging is less than six.
Preferably, a plurality of branch solenoid valves 190 may be further provided, and are installed on the module main body 110 and communicated between the main solenoid valve 150 and the plurality of air outlets 111 through air passages, and the plurality of branch solenoid valves 190 are respectively used for controlling the on/off of each air outlet 111 and the main solenoid valve 150, so as to flexibly control the on/off of each air outlet 111 and meet the requirements of different working conditions of customers.
The embodiment of the utility model provides an integral type nitrogen gas sweeps module 100's beneficial effect includes:
1. the air inlet check valve 120, the pressure reducing valve 130 and the main path electromagnetic valve 150 are integrated on the module main body 110, and the air outlets 111 are arranged, so that the module can be connected to a plurality of positions on the pump body 210 for nitrogen purging, the module is highly integrated, the occupied space is reduced, the number of components is reduced, and the cost is reduced;
2. and a flow limiting screw is arranged in each air outlet 111, the nitrogen flow at each position can be flexibly adjusted, the flow of each air outlet 111 can be adjusted only by replacing the flow limiting screw, the nitrogen purging requirements of pumps of different models can be met, and the application range is wide.
Second embodiment
Referring to fig. 3 and 4, the present embodiment provides an integrated nitrogen purging module 100, which adds a plurality of purging pipelines 180 on the basis of the structure provided by the first embodiment.
Specifically, the integrated nitrogen purging module 100 further includes an air intake purging pipeline 181 (see fig. 5 and 6), an LV cavity purging pipeline 182, a shaft seal purging pipeline 183, a triple-four-stage cavity purging pipeline 184, a quadruple-five-stage cavity purging pipeline 185, and an exhaust cavity purging pipeline 186, and the air intake purging pipeline 181 is connected to the air inlet of the pump body 210, the LV cavity purging pipeline 182 is connected to the LV cavity of the pump body 210, the shaft seal purging pipeline 183 is connected to the shaft seal cavity of the pump body 210, the triple-four-stage cavity purging pipeline 184 is connected to the triple-four-stage cavity of the pump body 210, the quadruple-five-stage cavity purging pipeline 185 is connected to the quadruple-five-stage cavity of the pump body 210, and the exhaust cavity purging pipeline 186 is connected to the exhaust cavity of the pump body 210.
The manual on-off valve 170 is installed on the module body 110, and the manual on-off valve 170 can independently control the opening and closing of the two air outlets 111 connected to the three-fourth-stage chamber purge line 184 and the four-fifth-stage chamber purge line 185. The pressure sensor 160 is in communication with the outlet port 111 of the vent chamber purge line 186, and the pressure sensor 160 is used to monitor the vent chamber vent pressure of the pump body 210.
Preferably, each purge line 180 may be designed with multiple branches, and a switch is separately provided on each branch, so as to meet the requirement of nitrogen purging at more positions of the pump body 210.
The embodiment of the utility model provides an integral type nitrogen gas sweeps module 100 is through addding a plurality of pipelines 180 that sweep, and the module highly integrates, avoids the circuit of nitrogen gas mixed and disorderly, reduces occupation space. Meanwhile, six common purging pipelines 180 are arranged, and the nitrogen purging requirement of most types of vacuum pumps can be met.
Third embodiment
Referring to fig. 5 and 6, the present embodiment provides a dry vacuum pump 200, and the dry vacuum pump 200 includes a pump body 210 and the second embodiment integrated nitrogen purging module 100 connected to the pump body 210.
Specifically, the number of the air outlets 111 of the integrated nitrogen purging module 100 is six, the integrated nitrogen purging module 100 further includes an air inlet purging pipeline 181, an LV cavity purging pipeline 182, a shaft seal purging pipeline 183, a triple-four-stage cavity purging pipeline 184, a quadruple-five-stage cavity purging pipeline 185 and an air exhaust cavity purging pipeline 186, which are respectively connected to the six air outlets 111, the air inlet purging pipeline 181 is connected to an air inlet of the pump body 210, the LV cavity purging pipeline 182 is connected to the LV cavity of the pump body 210, the shaft seal purging pipeline 183 is connected to the shaft seal cavity of the pump body 210, the triple-four-stage cavity purging pipeline 184 is connected to the triple-four-stage cavity of the pump body 210, the quadruple-five-stage cavity purging pipeline 185 is connected to the quadruple-five-stage cavity of the pump body 210, and the air exhaust cavity purging pipeline 186 is connected to the air exhaust cavity of the pump body 210.
The manual on-off valve 170 is installed on the module body 110, and the manual on-off valve 170 can independently control the opening and closing of the two air outlets 111 connected to the three-fourth-stage chamber purge line 184 and the four-fifth-stage chamber purge line 185. The pressure sensor 160 is communicated with the air outlet 111 of the purging pipeline 186 connected with the exhaust cavity, and the pressure sensor 160 is used for monitoring the pressure of the exhaust cavity of the pump body 210, so that abnormal exhaust of the pump body 210 and equipment damage caused by abnormal exhaust are avoided.
The embodiment of the utility model provides an integral type nitrogen gas sweeps module 100 and dry vacuum pump 200's beneficial effect includes:
1. the module main body 110 is integrated with the air inlet one-way valve 120, the pressure reducing valve 130 and the main path electromagnetic valve 150, and is provided with the plurality of air outlets 111, so that the module can be connected to a plurality of positions on the pump body 210 for nitrogen purging, the module is highly integrated, the occupied space is reduced, the number of components is reduced, and the cost is reduced;
2. a flow limiting screw is arranged in each air outlet 111, the nitrogen flow at each position can be flexibly adjusted, the flow of each air outlet 111 can be adjusted only by replacing the flow limiting screw, the nitrogen purging requirements of pumps of different models can be met, and the application range is wide;
3. the integrated nitrogen purging module 100 is integrated with a function of monitoring the exhaust pressure of the pump body 210, so that the dry vacuum pump 200 is prevented from being abnormally exhausted and equipment damage is avoided;
4. the branch electromagnetic valve 190 can be used for independently controlling the opening and closing of each purging pipeline 180, and the requirements of customers on different working conditions are met.
The above embodiments are only specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (9)
1. The utility model provides an integral type nitrogen gas sweeps module, its characterized in that, integral type nitrogen gas sweeps the module include module main part (110) and install admit air check valve (120), relief pressure valve (130) and main road solenoid valve (150) on module main part (110), module main part (110) inside seted up the air flue, still seted up with a plurality of gas outlets (111) of air flue intercommunication, every install the current-limiting screw in gas outlet (111), admit air check valve (120) are used for connecting the nitrogen gas source, through the air flue, admit air check valve (120) relief pressure valve (130) main road solenoid valve (150) and gas outlet (111) communicate in proper order.
2. The integrated nitrogen purge module of claim 1, wherein the gas outlets (111) are six in number and open on the same side surface of the module body (110).
3. The integrated nitrogen purging module according to claim 2, further comprising a gas inlet purging pipeline (181), a LV cavity purging pipeline (182), a shaft seal purging pipeline (183), a triple quaternary chamber purging pipeline (184), a quadruple quinary chamber purging pipeline (185) and a gas exhaust chamber purging pipeline (186), which are respectively connected to the six gas outlets (111), wherein the gas inlet purging pipeline (181) is used for being connected to a gas inlet of the pump body (210), the LV cavity purging pipeline (182) is used for being connected to the LV cavity of the pump body (210), the shaft seal purging pipeline (183) is used for being connected to the shaft seal cavity of the pump body (210), the triple quaternary chamber purging pipeline (184) is used for being connected to the triple quaternary chamber of the pump body (210), and the quadruple quinary chamber purging pipeline (185) is used for being connected to the quadruple quinary chamber of the pump body (210), the exhaust cavity purge conduit (186) is for connection to an exhaust cavity of a pump body (210).
4. The integrated nitrogen purge module according to claim 3, further comprising a manual on-off valve (170) mounted on the module body (110), the manual on-off valve (170) being used to control the opening and closing of the two gas outlets (111) connecting the three-four stage chamber purge conduit (184) and the four-five stage chamber purge conduit (185).
5. The integrated nitrogen purge module of claim 1, further comprising a flow meter (140) mounted on the module body (110) and communicating between the pressure reducing valve (130) and the main line solenoid valve (150) through the gas passage.
6. The integrated nitrogen purge module according to claim 1, further comprising a plurality of branch solenoid valves (190) mounted on the module body (110) and communicating between the main path solenoid valve (150) and the plurality of gas outlets (111) through the gas passage, the plurality of branch solenoid valves (190) being respectively used for controlling the respective gas outlets (111) to be turned on or off with the main path solenoid valve (150).
7. A dry vacuum pump, characterized in that it comprises a pump body (210) and an integrated nitrogen purge module according to claim 1 connected to the pump body (210).
8. The dry vacuum pump according to claim 7, wherein the number of the gas outlets (111) of the integrated nitrogen purge module is six, the integrated nitrogen purge module further comprises a gas inlet purge line (181), a LV cavity purge line (182), a shaft seal purge line (183), a triple quaternary cavity purge line (184), a quadruple quinary cavity purge line (185), and a gas outlet cavity purge line (186) connected to the six gas outlets (111), respectively, the gas inlet purge line (181) is connected to a gas inlet of the pump body (210), the LV cavity purge line (182) is connected to the LV cavity of the pump body (210), the shaft seal purge line (183) is connected to the shaft seal cavity of the pump body (210), the triple quaternary cavity purge line (184) is connected to the triple quaternary cavity of the pump body (210), and the quadruple quinary cavity purge line (185) is connected to the quadruple quinary cavity of the pump body (210), the exhaust cavity purge conduit (186) is connected to an exhaust cavity of the pump body (210).
9. A dry vacuum pump as claimed in claim 8, wherein the integrated nitrogen purge module further comprises a pressure sensor (160) mounted on the module body (110), the pressure sensor (160) being in communication with the gas outlet (111) connected to the exhaust cavity purge conduit (186), the pressure sensor (160) being for monitoring an exhaust port pressure of the exhaust cavity of the pump body (210).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202221278805.9U CN217270827U (en) | 2022-05-25 | 2022-05-25 | Integrated nitrogen purging module and dry vacuum pump |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202221278805.9U CN217270827U (en) | 2022-05-25 | 2022-05-25 | Integrated nitrogen purging module and dry vacuum pump |
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| CN217270827U true CN217270827U (en) | 2022-08-23 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114837944A (en) * | 2022-05-25 | 2022-08-02 | 四川莱斯特真空科技有限公司 | Integral nitrogen purging device and dry vacuum pump |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114837944A (en) * | 2022-05-25 | 2022-08-02 | 四川莱斯特真空科技有限公司 | Integral nitrogen purging device and dry vacuum pump |
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